LDLS™
`Laser-Driven Light Source
`EQ-1000 High Brightness DUV Light Source
`
`Researchers using UV light for a variety of spectroscopy, semi-
`conductor processing, and life science applications need light
`sources capable of providing extremely high brightness across
`a broad wavelength range. Excimer and other DUV lasers carry
`high purchase and operating costs. Other light sources such as
`arc or deuterium lamps can’t achieve the high brightness, power,
`or broad spectral range necessary. A single UV-VIS source com-
`bining superior high brightness and a broad range from visible
`to the deepest UV bands is now available to meet these appli-
`cation challenges.
`
`Building upon its expertise in high brightness EUV and DUV light
`source technology, Energetiq has developed a ground-breaking
`new technology that enables extreme high brightness light
`sources over a broad spectral range, from 170nm through visible
`and beyond. The LDLS™ Laser-Driven Light Source is embodied
`in the Energetiq EQ-1000, a user-friendly, compact DUV source
`that is configured as a broadband source for spectroscopy or
`general research applications. In addition, the user can, through
`using the standard optical output interface, select narrow bands
`of light for specific applications such as photoresist testing in
`the 193 nm or 248 nm bands. Utilizing a proprietary laser-driven
`bulb technology* for superior brightness, the EQ-1000 LDLS
`Laser-Driven Light Source is the world’s first source of truly
`broadband DUV-VIS power.
`
`* Patent Approved
`
` Features & Benefits
`
` • Extreme high brightness across broad
` spectral range
` - 170nm through visible and beyond
`
` • Choice of wavelength output
` - Flexibility allows for one light source
` to cover multiple wavelengths
` - Standard optical output interface
` allows user to customize output to
` desired applications
`
` • Compact package
` - User-friendly design with integrated
` collection optics provides easy
` implementation
`
` • Cost-effective source of 193nm and
` 248nm light, without need for toxic
` excimer gases
`
` Applications
`
` • Photoresist processing
` • Spectroscopy
` • Biological imaging
` • Chemical sensing
` • General scientific research
`
`Energetiq Ex. 2015, page 1 - IPR2015-01375
`
`

`
`Electrodeless Laser-Driven
`Light Source Technology
`
`Energetiq’s innovative Laser-Driven Light Source (LDLS™) technology uses a CW
`laser to directly heat a Xenon plasma to the high temperatures necessary for
`efficient deep ultraviolet production. In traditional approaches such as arc and
`deuterium lamps, the brightness, UV power, and lamp lifetime are limited by
`the use of electrodes to couple power to the plasma. The electrodeless LDLS
`technology creates small, high brightness plasma that allows efficient light col-
`lection, broad spectral range from the deepest UV through visible and beyond,
`and long lamp life.
`
`LDLS™ Laser-Driven Light
`Source, shown with remote
`power supply
`
`Specifications
`
` DUV Performance
`
`• Power Output
`
`Collected through a selectable aperture from 180nm to 800nm into 0.22NA
`
` Physical Specifications EQ-1000
`System Dimensions (H x W x D)
`
`
`
`
`
`• Lamp
`
`169 x 118 x 406 mm (6.65 x 4.65 x 16 in)
`
`• Power Supply
`
`127 x 254 x 318 mm (5” x 10” x 12.5” in)
`
`
`
`
`
`Weight
`9 kg (20 lbs)
`4.5 kg (10 lbs)
`
` Utility Requirements
`
`• Electrical
`
`
`• Cooling Water
`
`• Nitrogen
`
`
`110-240v 50/60Hz (3A)
`40-60 PSID, 0.5 GPM, 20°C inlet temperature controlled within ± 1°C
`20 PSIG, 5 slm
`
`Note: Typical results
`
`About Energetiq...
`Energetiq Technology, Inc. is a developer
`and manufacturer of advanced short-wave-
`length light products that enable nano-scale
`structures and products. The Energetiq team
`combines its deep understanding of the high
`power plasma physics needed for short-
`wavelength light generation with its long
`experience in building rugged industrial and
`scientific products. The result is that users
`can expect the highest levels of performance
`combined with the highest reliability.
`
`Energetiq Technology, Inc.
`7 Constitution Way
`Woburn, MA 01801
`Phone: 781-939-0763
`Fax: 781-939-0769
`www.energetiq.com
`
`Specifications are subject to
`change without notice.
`LDLS EQ1000—8/08
`
`©2008 Energetiq Technology, Inc.
`All rights reserved.
`
`Energetiq Ex. 2015, page 2 - IPR2015-01375