throbber
LDLS™
`
`Laser-Driven
`
`Light Source
`
`From The Innovators in Light
`
`ENERGETIQ • 7/8/2011 • 1
`
`Energetiq Ex. 2067, page 1 - IPR2015-01362
`
`

`
`Energetiq Products: Covering the Spectrum of Light
`
`EQ-99FC LDLS™ System
`
`EQ-1500 LDLS™ System
`
`EQ-99 LDLS™ System
`
`EQ-1000 LDLS™ System
`
`2
`
`Energetiq Ex. 2067, page 2 - IPR2015-01362
`
`

`
`Laser-Driven Light Source
`
`(LDLS™) - Principle of Operation
`
`Broad
`Spectral
`Output
`
`ENERGETIQ • 4/8/2010• 3
`
`Beam
`from CW
`Laser
`
`Laser Beam
`Focusing
`Optics
`
`Lamp Enclosure
`Containing
`Gas(es)
`
`High
`Intensity
`Plasma
`
`US Patent # 7,435,982
`
`www.energetiq.com
`
`Energetiq Ex. 2067, page 3 - IPR2015-01362
`
`

`
`Light from Arc Lamp and LDLS
`
`•Typical Arc Lamp
`
`•LDLS
`
`Large plasma
`limits
`brightness
`
`Arc position
`Instability
`
`Note: anode
`glowing red
`
`ENERGETIQ • 4/8/2010• 4
`
`Small plasma
`…high
`brightness
`
`Highly stable
`position
`
`Note: anode
`NOT glowing
`
`High brightness: ~100 um diameter Xenon plasma, for efficient
`
`power coupling into small fibers or spectrometer slits
`
`www.energetiq.com
`
`Energetiq Ex. 2067, page 4 - IPR2015-01362
`
`

`
`Benefits of LDLS Technology
`
`Very high brightness across complete spectrum
`– 170nm through visible and out to 2100 nm
`
`Eliminates need for multiple lamps (replaces D2/Tungsten/Xenon Arc)
`– Simplified optical system
`
`Excellent Spatial stability
`– Repeatable measurements
`
`Superior short and long term power stability
`– Repeatable measurements
`
`ENERGETIQ • 4/8/2010• 5
`
`Electrodeless operation for long life
`– Reduced consumable costs
`– Minimal recalibration of instrument
`
`Broadband
`
`Brightness
`
`Stability
`
`Lifetime
`
`www.energetiq.com
`
`Energetiq Ex. 2067, page 5 - IPR2015-01362
`
`

`
`EQ-99 Spectral Distribution
`
`EQ-99
`
`ENERGETIQ • 4/8/2010• 6
`
`30Watt Deuterium Lamp
`
`•Typical Data
`
`www.energetiq.com
`
`180
`
`280
`
`380
`
`480
`
`580
`
`680
`
`780
`
`Wavelength, nm
`
`100
`
`10
`
`1
`
`0.1
`
`0.01
`
`0.001
`
`Spectral Radiance (mW/mm^2/nm/sr)
`
`Energetiq Ex. 2067, page 6 - IPR2015-01362
`
`

`
`EQ-1500 Spectral Distribution
`
`EQ-1500
`
`ENERGETIQ • 4/8/2010• 7
`
`30Watt Deuterium Lamp
`
`•Typical Data
`
`www.energetiq.com
`
`280
`
`380
`
`480
`
`580
`
`680
`
`780
`
`Wavelength (nm)
`
`100
`
`10
`
`1
`
`0.1
`
`0.01
`
`Spectral Radiance (mW/mm^2/nm/sr)
`
`0.001
`
`180
`
`Energetiq Ex. 2067, page 7 - IPR2015-01362
`
`

`
`Spectral Radiance of 30 Watt Deuterium,
`
`75 Watt Xe, EQ-99, and EQ-1500 Sources
`
`ENERGETIQ • 4/8/2010• 8
`
`Spectral radiance calibrated at 254nm
`
`www.energetiq.com
`
`Energetiq Ex. 2067, page 8 - IPR2015-01362
`
`

`
`EQ-1500
`
`for ASML
`
`September 1, 2011
`
`ENERGETIQ • 7/8/2011 • 9
`
`Energetiq Ex. 2067, page 9 - IPR2015-01362
`
`

`
`EQ-1500 Specifications
`
`Output:
`– Spectral Distribution 170 to 850nm
`– Large collectable view angle - Numerical
`Aperture (NA) = up to 0.50
`– Bulb life > 8,000 hrs anticipated
`– Flexible optical interface for free-space or
`fiber optics
`
`Utilities:
`– AC Power: 100-240VAC, 300VA max
`– N2 gas – for purging
`– Cooling water for power supply
`– Cooling for lamp house – water or air
`
`ENERGETIQ • 4/8/2010• 10
`
`Certifications
`– Class 1 Laser Product
`– CE Mark
`
`www.energetiq.com
`
`Energetiq Ex. 2067, page 10 - IPR2015-01362
`
`

`
`Typical Plasma Size EQ-1500
`
`ENERGETIQ • 4/8/2010• 11
`
`Width (μm)
`
`Length (μm)
`
`120
`
`200
`
`www.energetiq.com
`
`Energetiq Ex. 2067, page 11 - IPR2015-01362
`
`

`
`EQ-1500 Radiant Flux, 200nm – 400nm
`
`ENERGETIQ • 4/8/2010• 12
`
`•The pinhole measurement data shows >80mW radiant flux in the 225nm-400nm band
`for 1mm diameter pinhole or larger
`
`•Collection NA was 0.37 for this data. Available collection NA is 0.5, which would
`provide 1.8X more flux than shown above.
`
`www.energetiq.com
`
`EQ1500 Radiant Flux in Different Wavelength Bands
`
`< 225nm
`
`< 400nm
`
`225nm - 400nm
`
`5
`
`10
`
`15
`
`20
`
`25
`
`30
`
`35
`
`40
`
`Pinhole Area (mm^2)
`
`180
`
`160
`
`140
`
`120
`
`100
`
`80
`
`60
`
`40
`
`20
`
`Radiant Flux (mW)
`
`0
`
`0
`
`Energetiq Ex. 2067, page 12 - IPR2015-01362
`
`

`
`LDLS™: Stable & Long-Life
`
`LDLS
`
`D2
`
`Xe
`
`ENERGETIQ • 4/8/2010• 13
`Light Source
`
`Change in Broadband Output /1000 Hrs
`(Typical)
`
`Life-Test Hours
`to Date
`
`Notes
`
`EQ-1000
`
`EQ-1500
`
`EQ-99
`
`~ -2%
`
`~ -1%
`
`~ -1%
`
`>16,000
`
`>10,000
`
`>6,000
`
`Test on-going
`
`Test on-going
`
`Test on-going
`
`30W D2 Lamp
`
`-50% (depending on model)
`
`Source: Heraeus Data Sheet
`
`75W Xe Lamp
`
`-25% to -50% (depending on model)
`
`Source:Hamamatsu Data Sheet
`
`www.energetiq.com
`
`0
`
`1 0 0 0
`
`2 0 0 0
`
`3 0 0 0
`
`4 0 0 0
`
`5 0 0 0
`
`6 0 0 0
`
`7 0 0 0
`
`8 0 0 0
`
`9 0 0 0
`
`1 0 0 0 0
`
`Op e ra t in g Ho u rs
`
`1 0 0
`
`9 0
`
`8 0
`
`7 0
`
`6 0
`
`5 0
`
`4 0
`
`3 0
`
`2 0
`
`1 0
`
`0
`
`% of Initial Output
`
`Energetiq Ex. 2067, page 13 - IPR2015-01362
`
`

`
`Long-Life
`
`ENERGETIQ • 4/8/2010• 14
`
`•Data from EQ-1000
`
`Test on-going
`
`www.energetiq.com
`
`10
`
`0123456789
`
`as measured by thermopile
`Optical Output Power [Watts]
`
`500
`
`2500
`
`4500
`
`6500
`
`8500
`
`10500
`
`12500
`
`14500
`
`16500
`
`time [hours]
`
`Energetiq Ex. 2067, page 14 - IPR2015-01362
`
`

`
`ENERGETIQ • 4/8/2010• 15
`
`www.energetiq.com
`
`Energetiq Ex. 2067, page 15 - IPR2015-01362

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