`LDLS™
`
`ENERGETIQ
`
` • 4/21/2015 • 1
`
`Energetiq Ex. 2064, page 1 - IPR2015-01362
`
`
`
`Laser-Driven Light Sources: LDLS™
`A unique combination of valuable characteristics in a single light source:
`
`• Broadest Spectrum: 170nm – 2100nm
`
`• Highest Brightness/Radiance
`
`• Longest Life with High Stability
`
`ENERGETIQ
`
` • 4/21/2015 • 2
`
`Energetiq Ex. 2064, page 2 - IPR2015-01362
`
`
`
`Laser-Driven Light Source:
`Principle of Operation
`
`Broadband
`Output
`
`CW Laser
`Beam
`
`Laser Focus
`Optics
`
`Proprietary
`Bulb
`
`High Intensity
`Plasma
`
`ENERGETIQ
`
` • 4/21/2015 • 3
`
`Multiple Patents Worldwide
`
`Energetiq Ex. 2064, page 3 - IPR2015-01362
`
`
`
`Highest Brightness
`
`• Small, intense light-emitting region
`– ~100µm in size
`• Allows easy imaging into a small spot
`<<1mm in size
`– Efficient coupling into small fibers
`– Efficient coupling into spectrometers
`• Brightness (radiance) scales with laser
`power
`– Higher laser power → Higher brightness
`
`
`
`ENERGETIQ
`
`• 4/21/2015 • 4
`
`64µm
`
`147µm
`
`•EQ-99, Typical
`
`Energetiq Ex. 2064, page 4 - IPR2015-01362
`
`
`
`Broadband Spectrum: EQ-99X
`
`EQ-99X LDLS
`
`30W Deuterium
`
`•Wavelength [nm]
`
`•Typical Data, EQ-99X,
`•100µm aperture
`
`•Spectral Radiance [mW/mm2.sr.nm]
`
`• Deep Ultraviolet → Visible → Near Infrared
`– Flat spectrum
`– Much brighter across spectrum than traditional lamps, especially in Deep UV (>10X)
`
`ENERGETIQ
`
` • 4/21/2015 • 5
`
`Energetiq Ex. 2064, page 5 - IPR2015-01362
`
`
`
`Brighter Than Traditional Lamps
`
`EQ-400 LDLS
`
`EQ-77 LDLS
`
`EQ-99X LDLS
`
`75W Xenon
`
`30W Deuterium
`
`Tungsten
`
`•Typical Data
`
`ENERGETIQ
`
` • 4/21/2015 • 6
`
`Energetiq Ex. 2064, page 6 - IPR2015-01362
`
`
`
`Stable & Long-Life
`
`Deuterium
`
`Xenon
`
`•LDLS
`
`0
`
`1,000
`
`2,000
`
`3,000
`
`5,000
`4,000
`•Lamp Hours
`
`6,000
`
`7,000
`
`8,000
`
`9,000
`
`10,000
`
`100
`90
`80
`70
`60
`50
`40
`30
`20
`10
`0
`
`•% of Initial Output
`
`Light Source
`
`Change in Broadband Output /1000 Hrs
`(Typical)
`
`EQ-99X LDLS
`~ -1%
`30W D2 Lamp
`-50% (depending on model)
`75W Xe Lamp
`-25% to -50% (depending on model)
`• Low cost-of-ownership for critical applications
`
`Life-Test Hours
`to Date
`>10,000
`
`Notes
`
`Test on-going
`Source: Heraeus Data Sheet
`Source: Hamamatsu Data Sheet
`
`ENERGETIQ
`
`• 4/21/2015 • 7
`
`Energetiq Ex. 2064, page 7 - IPR2015-01362
`
`
`
`Highest Brightness,
`LDLS™ for OEMs
`
`
`
`EQ-400
`
`High-Brightness
`Compact LDLS™
`for OEMs
`
`
`
`EQ-77
`
`LDLS™ History of Innovation
`
`Compact
`Low-Power
`LDLS™ for
`OEMs
`
`
`
`EQ-9
`
`
`
`Ultra-Clean
`LDLS™
`
`
`
`•EQ-99X
`Series
`
`Volume Production
`LDLS™
`
`•EQ-99 Series
`
`
`
`
`
`•EQ-1500/1510
`
`
`First
`Commercial
`LDLS™
`
`
`
`EQ-1000
`
`
` 2008
`
` 2010
`
` 2014
`
`
`
`2015
`
`
`
`ENERGETIQ
`
` • 4/21/2015 • 8
`
`Energetiq Ex. 2064, page 8 - IPR2015-01362
`
`
`
`LDLS™ Products & Applications
`
`
`EQ-99XFC LDLS™ System
`Compact source with fiber output
`
`EQ-99X LDLS™ System
`Compact source
`
`• Semiconductor
`– Metrology, Positioning
`• Life Science
`– Medical Testing, Biological Research
`• Materials Science
`– Analytical Spectroscopy & Imaging
`• Custom OEM Versions available
`
`
`EQ-1500 LDLS™ System
`High brightness source
`
`ENERGETIQ
`
` • 4/21/2015 • 9
`
`Energetiq Ex. 2064, page 9 - IPR2015-01362
`
`
`
`OEM Versions
`
`EQ-77 LDLS™ System
`EQ-9 LDLS™ System
`EQ-400 LDLS™ System
`High-Brightness,
`Bright, Low-Power,
`Highest-Brightness
`Compact Source
`Compact Source
`Source
`• Highest brightness: models from ~10mW/mm2.sr.nm to more than100mW/mm2.sr.nm
`• Ultraclean construction for long life, stability.
`• Compact form-factors with remote electronics for simplified integration
`• Choice of dual-beam output or single-beam (with retroreflector)
`
`
`ENERGETIQ
`
` • 4/21/2015 • 10
`
`Energetiq Ex. 2064, page 10 - IPR2015-01362
`
`
`
`World-Class Operations
`
`Clean Manufacturing &
`Automated Testing
`
`ENERGETIQ
`
`• 4/21/2015 • 11
`
`High Reliability Products
`Supported Worldwide
`
`• More than 1000 LDLS units
`installed around the world
`• LDLS units operating 24/7
`with outstanding reliability
`• Supported globally by
`Energetiq’s Service Team and
`network of Distributors
`
`Energetiq Ex. 2064, page 11 - IPR2015-01362
`
`
`
`Thank You
`
`ENERGETIQ
`
` • 4/21/2015 • 12
`
`Energetiq Ex. 2064, page 12 - IPR2015-01362
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