EQ-400 LDLS™
`Laser-Driven Light Source
`
`Highest Brightness LDLS™ for OEMs
`
`ENERGETIQ
`
` • 2/2/2015 • 1
`
`Energetiq Ex. 2063, page 1 - IPR2015-01362
`
`
`Laser-Driven Light Source
`
`Highest Brightness LDLS™ for OEMs
`
`ENERGETIQ
`
` • 2/2/2015 • 1
`
`Energetiq Ex. 2063, page 1 - IPR2015-01362
`
`
`
`Laser-Driven Light Sources: LDLS™
`A unique combination of valuable characteristics in a single light source:
`
`• Broadest Spectrum: 170nm – 2100nm
`
`• Highest Brightness/Radiance
`
`• Longest Life with High Stability
`
`ENERGETIQ
`
` • 2/2/2015 • 2
`
`Energetiq Ex. 2063, page 2 - IPR2015-01362
`
`
`
`EQ-400 Features
`• 5th Generation LDLS™ that builds on Energetiq’s experience.
`• Radiance >100mW/mm2.sr.nm depending on wavelength (100µm aperture).
`• Very low noise enables precise & repeatable measurements
` • Compact lamphouse with water-cooling &
`clean construction for long-life, stability
`• Dual-beam output or higher-output Single-
`beam (using integrated Retro-reflector)
`• Reduced lamp-to-lamp variation through
`power leveling
`• Remote laser module for easy integration.
`
`
`ENERGETIQ
`
` • 2/2/2015 • 3
`
`Energetiq Ex. 2063, page 3 - IPR2015-01362
`
`
`
`Laser-Driven Light Source:
`Principle of Operation
`
`Broadband
`Output
`
`CW Laser
`Beam
`
`Laser Focus
`Optics
`
`Proprietary
`Bulb
`
`High Intensity
`Plasma
`
`ENERGETIQ
`
` • 2/2/2015 • 4
`
`Multiple Patents Worldwide
`
`Energetiq Ex. 2063, page 4 - IPR2015-01362
`
`
`
`Brighter Than Traditional Lamps
`
`EQ-400 LDLS
`
`EQ-77 LDLS
`
`EQ-9 LDLS
`
`75W Xenon
`
`30W Deuterium
`
`Tungsten
`
`Typical Data
`
`ENERGETIQ
`
` • 2/2/2015 • 5
`
`Energetiq Ex. 2063, page 5 - IPR2015-01362
`
`
`
`Stable & Long-Life
`
`Deuterium
`
`Xenon
`
`LDLS
`
`0
`
`1,000
`
`2,000
`
`3,000
`
`5,000
`4,000
`Lamp Hours
`
`6,000
`
`7,000
`
`8,000
`
`9,000
`
`10,000
`
`100
`90
`80
`70
`60
`50
`40
`30
`20
`10
`0
`
`% of Initial Output
`
`Light Source
`
`Change in Broadband Output /1000 Hrs
`(Typical)
`
`EQ-99X LDLS
`~ -1%
`30W D2 Lamp
`-50% (depending on model)
`75W Xe Lamp
`-25% to -50% (depending on model)
`• Low cost-of-ownership for critical applications
`
`Life-Test Hours
`to Date
`>10,000
`
`Notes
`
`Test on-going
`Source: Heraeus Data Sheet
`Source: Hamamatsu Data Sheet
`
`ENERGETIQ
`
` • 2/2/2015 • 6
`
`Energetiq Ex. 2063, page 6 - IPR2015-01362
`
`
`
`EQ-400 Spectral Radiance
`
`Spectral Radiance [mW/mm2.sr.nm]
`
`Wavelength [nm]
`
`• Deep Ultraviolet → Visible → Near Infrared
`– Very flat spectrum
`– Highest brightness across spectrum, especially in Deep UV
`
`ENERGETIQ
`
` • 2/2/2015 • 7
`
`Typical Data, EQ-400
`with Retro-Reflector,
`100µm aperture
`
`Energetiq Ex. 2063, page 7 - IPR2015-01362
`
`
`
`Higher flux with larger apertures
`
`EQ-400 LDLS™
`500µm Aperture
`0.5NA
`
`EQ-400 LDLS™
`100µm Aperture
`0.5NA
`
`Spectral Power, mW/nm
`
`Wavelength [nm]
`
`Typical Data, EQ-400,
`with Retro-Reflector,
`100µm & 500µm Apertures
`
`ENERGETIQ
`
` • 2/2/2015 • 8
`
`Energetiq Ex. 2063, page 8 - IPR2015-01362
`
`
`
`EQ-400 Plasma Images:
`
`FWHM: 302µm x 798µm
`
`FWHM: 303µm x 826µm
`
`Without Retro-Reflector
`
`With Retro-Reflector
`
`ENERGETIQ
`
` • 2/2/2015 • 9
`
`EQ-400, Typical
`
`Energetiq Ex. 2063, page 9 - IPR2015-01362
`
`
`
`Excellent Spatial Stability
`
`• 2500 images @ 200
`frames per second
`• Calculated ‘center of
`mass’ for each image.
`• Standard deviation of the
`plasma light intensity
`‘center of mass’ position
`– Horizontal: 0.145 µm
`– Vertical: 0.094 µm
`• Stable, Repeatable
`Measurements & Images
`
`
`EQ-99, Typical
`
`ENERGETIQ
`
` • 2/2/2015 • 10
`
`Energetiq Ex. 2063, page 10 - IPR2015-01362
`
`
`
`Very Low Noise
`METHOD
`
`40 mm FL aspheric
`
`100 mm FL aspheric
`
`1175um Aperture
`
`Integration
`Sphere
`
`Retro-
`reflector
`
`EQ400
`LDLS
`
`0.45NA Aperture
`
`550/25 nm filter
`
`Photodiode
`
`SRS
`SIM965
`Analog
`Filter
`100Hz
`Highpass
`
`SRS
`SIM918
`Current
`Preamp
`
`SRS
`SIM965
`Analog
`Filter
`10kHz
`Lowpass
`
`Tektronix
`Oscilloscope
`
`Agilent
`Digital
`Multimeter
`
`• The photodiode signal Mean (DC component) was measured on the Agilent Digital
`Multimeter by switch the first Analog Filter also to Lowpass (<100Hz)
`• The noise signal (Pk-Pk) from the photodiode was measured on the Oscilloscope, at a
`frequency range of 100Hz to 10kHz
`
`
`
`Sample Time (s)
`Mean (V)
`Pk-Pk (mV)
`(Pk-Pk)/Mean
`[(Pk-Pk)/2]/Mean
`
`0.2
`6.84
`4.85
`0.00071
`0.00035
`
`1
`6.84
`5.23
`0.00076
`0.00038
`
`10
`6.84
`6.12
`0.00089
`0.00045
`
`<0.02% (1σ)
`~0.05% (3σ)
`~0.1% (p-p/mean)
`
`EQ-400, Typical
`
`ENERGETIQ
`
` • 2/2/2015 • 11
`
`Energetiq Ex. 2063, page 11 - IPR2015-01362
`
`
`
`EQ-400 Schematic
`
`Bulb
`
`Optics
`
`Igniter
`
`Lamphouse
`
`Temperature
`Stabilized Enclosure
`Water-cooled
`
`Barrier
`Between bulb &
`optics/electronics
`
`Control Cable
`
`Laser Fiber
`
`Laser Drive Module
`Power and Control Board
` Water-Cooled
`
`Universal AC
`Input
`
`ENERGETIQ
`
` • 2/2/2015 • 12
`
`Energetiq Ex. 2063, page 12 - IPR2015-01362
`
`
`
`EQ-400 Lamphouse
`
`Temperature
`Stabilized
`Enclosure
`
`Water Cooling
`
`N2 Purge
`
`Laser Input
`
`Dimensions
`~ 170mm(W) x 130mm(H) x 80mm(D)
`
`ENERGETIQ
`
` • 2/2/2015 • 13
`
`Retro-Reflector or
`Monitor Window
`
`Output Window
`
`Energetiq Ex. 2063, page 13 - IPR2015-01362
`
`
`
`EQ-400 Laser-Drive Module
`
`Dimensions
`~ 485mm(W) x 133mm(H) x 540mm(D)
`
`Key Switch
`& Manual
`On/Off
`
`Status
`Indicator
`LEDs
`
`Water
`Cooling
`Connections
`
`Control,
`Interlock & I/O
`Connections
`
`AC
`Power
`Input
`
`ENERGETIQ
`
` • 2/2/2015 • 14
`
`Energetiq Ex. 2063, page 14 - IPR2015-01362
`
`
`
`Highest Brightness,
`LDLS™ for OEMs
`
`
`
`EQ-400
`
`High-Brightness
`Compact LDLS™
`for OEMs
`
`
`
`EQ-77
`
`LDLS™ History of Innovation
`
`Compact
`Low-Power
`LDLS™ for
`OEMs
`
`
`
`EQ-9
`
`
`
`Ultra-Clean
`LDLS™
`
`
`
`•EQ-99X
`Series
`
`Volume Production
`LDLS™
`
`•EQ-99 Series
`
`
`
`
`
`•EQ-1500/1510
`
`
`First
`Commercial
`LDLS™
`
`
`
`EQ-1000
`
`
` 2008
`
` 2010
`
` 2014
`
`
`
`2015
`
`
`
`ENERGETIQ
`
` • 2/2/2015 • 15
`
`Energetiq Ex. 2063, page 15 - IPR2015-01362
`
`
`
`World-Class Operations
`
`Clean Manufacturing &
`Automated Testing
`
`ENERGETIQ
`
` • 2/2/2015 • 16
`
`High Reliability Products
`Supported Worldwide
`
`• More than 1000 LDLS units
`installed around the world
`• LDLS units operating 24/7
`with outstanding reliability
`• Supported globally by
`Energetiq’s Service Team and
`network of Distributors
`
`Energetiq Ex. 2063, page 16 - IPR2015-01362
`
`
`
`EQ-400 Summary
`• 5th Generation LDLS™ that builds on Energetiq’s experience.
`• Radiance >100mW/mm2.sr.nm depending on wavelength (100µm aperture).
`• Very low noise enables precise & repeatable measurements
` • Compact lamphouse with water-cooling &
`clean construction for long-life, stability
`• Dual-beam output or higher-output Single-
`beam (using integrated Retro-reflector)
`• Reduced lamp-to-lamp variation through
`power leveling
`• Remote laser module for easy integration.
`• Beta units available now
`
`
`ENERGETIQ
`
` • 2/2/2015 • 17
`
`Energetiq Ex. 2063, page 17 - IPR2015-01362
`
`
`
`Thank You
`
`ENERGETIQ
`
` • 2/2/2015 • 18
`
`Energetiq Ex. 2063, page 18 - IPR2015-01362
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