throbber
Model EQ-1500
`LDLS™
`Laser-Driven
` Light Source
`
`
`
`
`
`
`Operation Manual
`Revision 4
` May 2011
`
`Part Number DOC-4958
`
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`Copyright © 2010 Energetiq Technology Inc. All rights reserved.
`
`Energetiq products are covered by US and foreign patents. All technical information, including
`drawings, schematics and specifications contained in this manual are the property of Energetiq
`and shall not be reproduced in whole or in part without the written consent of Energetiq. The
`content of this manual is subject to change without notice.
`
`Energetiq Technology Inc.
`7 Constitution Way, Woburn, MA 01801 USA
`Tel. +1 (781) 939-0763
`Fax +1 (781) 939-0769
`E-mail: support@energetiq.com
`http://www.energetiq.com
`
`Table of Contents
`Chapter 1...............................................................................................................................1
`General Information.................................................................................................................... 1
`Safety........................................................................................................................................ 1
`Chapter 2........................................................................................................................7
`Description.................................................................................................................................... 7
`General.................................................................................................................................... 7
`Specifications.......................................................................................................................... 7
`Identification of Controls.................................................................................................... 9
`Controller Unit ...................................................................................................................... 9
`Lamp House Unit ............................................................................................................... 13
`Chapter 3..................................................................................................................... 16
`Installation ................................................................................................................................... 16
`Unpacking............................................................................................................................. 16
`Facilities Connections.........................................................................................................16
`Installation procedure......................................................................................................... 20
`Fiber Cleaning Process....................................................................................................... 24
`Chapter 4..................................................................................................................... 27
`Operation..................................................................................................................................... 27
`Remote Mode ...................................................................................................................... 28
`Chapter 5..................................................................................................................... 30
`Troubleshooting ......................................................................................................................... 30
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`Chapter 1
`GENERAL INFORMATION
`Safety
`
`
`
`WARNING
`
`This unit emits ultraviolet (UV) radiation that is harmful to humans.
`Avoid exposure to the direct or reflected output beam. Make certain
`that the appropriate output beam shields and optics are in place prior
`to energizing the unit. All interlocks must be satisfied prior to
`operation; failure to do so may lead to hazardous conditions.
`
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`1
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`CAUTION
`
`The EQ-1500 emits dangerous levels of UV radiation. Even short
`exposures to skin or eyes may cause burns. Ensure that only
`authorized personnel are in the vicinity of source during operation.
`Personnel in vicinity of operating source should wear protective
`eyewear, clothing, and gloves. Lighted UV warning lights and signs
`posted on doors to lab areas may help prevent accidental exposure.
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`WARNING
`
`The EQ-1500 utilizes an internal Class 4 IR laser
`capable of causing severe injury to eyes or skin. Do
`not open or attempt to service this unit. Contact
`Energetiq regarding any problems with the unit.
`
`
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`
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`General Precautions
`The output beam from the EQ-1500 should be blocked when not in use with an electronic
`shutter or other appropriate beam blocking device. Due to the absorption of the short
`wavelength light and the possibility of ozone production, the beam should always be either
`directly coupled to a fiber optic cable, or enclosed in an appropriate beam pipe, tube, or
`enclosed space. We suggest purging any beam transport space with dry Nitrogen gas, as this is
`also required for safe operation of the EQ-1500.
`
`The source must be purged with dry nitrogen gas via the nitrogen input connector on the lamp
`head. The unit must be purged for a minimum of 10 minutes prior to operation in order to
`ensure that no ozone is created by residual oxygen inside the unit. It is recommended that any
`beam transport be purged for a similar amount of time.
`
`The EQ-1500 controller must be connected to an appropriate closed-loop water chiller
`system. The water system must be capable of maintaining 0.5gpm at 18°C with a minimum of
`200W cooling capacity
`
`The EQ-1500 source must also be cabled correctly and connected to a socket with a protective
`earth ground prior to operation. Failure to do so may result in an electrical shock hazard.
`
`Refer to the Installation section of this manual (Chapter 3) for details of the facilities
`connections.
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`There are no user-serviceable parts inside the EQ-1500. For any problems encountered during
`operation, please refer to the Troubleshooting section of this user manual. If there is a
`component failure, do not attempt to open the chassis of the EQ-1500.
`
`The EQ-1500 utilizes a quartz lamp containing a high-pressure gas fill. Explosion of the lamp
`and possible injury from flying fragments can occur if the lamp is mishandled. Never attempt
`to remove or replace the lamp. If there is a failure of the lamp, the unit must be shipped
`back to the factory for refurbishment.
`
`Do not open the chassis of either the lamp unit or the power supply unit. Dangerous
`invisible infrared laser beams and hazardous voltages exist inside the units. Opening
`the chassis both voids the warranty and exposes the user to dangerous radiation and hazardous
`voltages.
`
`CAUTION
`
`The EQ-1500 must be operated for its intended use and as
`described in this operating manual. Operation in an un-intended
`manner may result in dangerous conditions.
`
`CAUTION
`
`Use of controls or adjustments or executing procedures other
`than those specified herein may result in hazardous radiation
`exposure.
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`Laser Information
`The EQ-1500 uses a patented (U.S. Patent #7,435,982, others pending) laser drive system to
`excite a plasma that radiates in the UV as well as the visible bands. Since the lamp unit
`contains an embedded laser, the EQ-1500 is defined as a Laser Product. However, the drive
`laser does not exit the system.
`
`The parameters of the non-accessible internal laser are given below in Table 1.
`
`Wavelength
`
`Emission Type
`
`975 nm
`
`CW
`
`Laser Power for classification
`
`<40 mW via 7mm measurement
`aperture
`
`Beam Diameter
`
`~25 mm at aperture
`
`Divergence
`
`>100 mRad
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`Transverse Beam Mode
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`Highly irregular, diffuse
`
`Table 1: Embedded Laser Parameters
`
`No regular service or maintenance is required. Any service to the system must be performed
`only by factory authorized and trained technicians. To avoid eye injury, under no
`circumstances should the user open or modify the lamp unit.
`
`The unit must not be operated if the covers are removed or it is defective in any way. Contact
`Energetiq if any problems with the equipment are suspected.
`
`Labels and Safety Notification
`The following safety labels appear on the product. Figure 1 shows the location of each label
`on the EQ-1500 lamp unit.
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`4
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`UV Hazard warning label – indicates hazardous levels of UV
`light are present.
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`Manufacturer’s identification label – gives the manufacturer’s
`name and address, and the model, serial number, and date of
`manufacture of the equipment.
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`
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`Explanatory label – states the classification of the laser product.
`Class 1 is the lowest hazard level classification.
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`Certification label – states that the equipment has been tested
`and verified to meet the standards indicated.
`
`Interlocked housing label – notifies of a potential hazard when
`covers are removed and interlocks failed or defeated.
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`Protective Ground (Functional Earth) symbol
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`UV Warning
`Label
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`Manufacturer’s ID
`Label
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`Interlocked
`Housing Label
`
`Explanatory
`Label
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`Certification
`Label
`
`Interlocked
`Housing Label
`
`Functional
`Earth Symbol
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`Figure 1: Safety label locations
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`Cover Interlocks
`The EQ-1500 is equipped with cover interlock switches to prevent operation of the source
`without the lamp unit and controller covers in place. Since no user service is permitted, these
`switches are intended for the protection of factory service personnel.
`
`External Interlock
`An external interlock connector is provided for the customer’s use. Any suitable
`normally-open contact can operate the interlock circuit. The unit is shipped with a shorted
`connector which may be used to connect to the user’s interlock circuitry. The interlock circuit
`must not be grounded.
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`The interlock circuit must be connected to enable the operation of the unit. Should the
`interlock connection open during operation or standby, the source is immediately disabled, and
`all light output from the aperture ceases. The source is then latched off and will not restart
`until the interlock is restored and the lamp manually restarted.
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`Chapter 2
`DESCRIPTION
`General
`The EQ-1500 is a DUV lamp system for a wide variety of applications. The lamp features
`high brightness, broad-band light from DUV wavelengths through visible and beyond. The
`output is very stable, and has a long lifetime before any service is required. The interface is
`quite simple, but robust enough for any lab or industrial environment.
`
`The EQ-1500 system consists of a Controller unit, Lamp House unit, interconnecting
`signal/power cable, and interconnecting laser fiber optic cable. Connections to AC power,
`cooling water, and purge gas are required for operation.
`
`The Controller unit contains the IR laser, laser power supply, laser cooling, a permanently
`attached laser fiber optic cable, and control electronics.
`
`The Lamp House unit contains the lamp, igniter, laser focusing optics, and interlocks.
`
`Specifications
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`DUV Performance
`
`
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`• Typical output spectrum: see Figure 2.
`o Upper, Blue line: typical EQ-1500 output
`o Lower, Red line: typical D2 lamp output
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`280
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`380
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`480
`Wavelength (nm)
`
`580
`
`680
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`780
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`
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`Figure 2: Typical output spectrum
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`100
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`10
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`1
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`0.1
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`0.01
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`Spectral Radiance (mW/mm^2/nm/sr)
`
`0.001
`180
`
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`Physical Specifications
`System Dimensions (H x W x D), Weight
`• Lamp House 175 x 142 x 218 mm (6.9 x 5.6 x 8.6 in)
`• Controller 142 x 254 x 419 mm (5.6 x 10.0 x 16.5 in)
`
`
`Weight
`• Lamp House 5 kg (11 lbs)
`• Controller 6.5 kg (14.3 lbs)
`
`Utility Requirements
`• Electrical 100–120/200–240 VAC ±10%, 50/60Hz, 300VA max.
`• Fuse: 250VAC, 8A Fast
`• Cooling Water 0.03–0.07 MPa (5–10 psi) differential, 1.9–3.8 lpm (0.5–1 gpm),
`18°C inlet temperature, controlled within ± 1.0°C
`• Purge Gas: Dry nitrogen, grade 6 preferred, 0.14 MPa (20 psig), 1 lpm
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`Environmental Requirements
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`Operating
`• Temperature: 5–40°C
`• Relative Humidity: non-condensing, 80% max. for temperatures up to 31°C,
`decreasing linearly to 50% max. at 40°C
`• Altitude: 2000 m (6562 ft) max.
`• Pollution Degree 2 (normally only non-conductive pollution; occasional,
`temporary condensation possible)
`•
`Installation Category II
`•
`Indoor use only
`Transport
`• Temperature: -5–95°C
`• Relative Humidity: non-condensing, 95% max.
`
`
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`Identification of Controls
`The following sections show the location of controls and other features, and give an overview
`of their functions. Refer to the “Installation” section of this manual (Chapter 3) for more
`detailed information.
`
`Controller Unit
`
`Status Indicator
`LEDs
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`Operation
`Selector Switch
`
`Figure 3: Controller front panel
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`Operation Selector Switch
`Momentary switch used to start or stop UV light output, or to clear a Fault condition.
`
`Green
`
`Green
`Green
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`Green
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`Green
`Red
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`Red
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`Red
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`Red
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`Red
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`Status Indicator LEDs
`LED
`Functional Description
`Color
`
`Green
`AC power is applied and power switch is on
`Green
`All interlocks in the Lamp Controller are
`satisfied
`All interlocks in the Lamp House are
`satisfied
`External interlock is satisfied
`Remote Control has been activated via
`connector J6. Local Control via the front
`panel Operation Selector Switch is disabled.
`Laser current is on (Lamp on command has
`been asserted)
`Plasma has ignited and is operating
`Bulb housing temperature has exceeded 90C
`(cooling failure)
`Safety interlock for cold plate temperature
`has exceeded 70C (cooling failure)
`Unit has shut off due because laser
`temperature has exceeded 40 degC. Cooling
`water flow or temperature for Lamp
`Controller is insufficient.
`Laser current has exceeded 9A (does not
`stop operation)
`Indicates that the laser has been disabled
`due to a fault. The Controller has requested
`laser power, but an IR sensor in Lamp
`House did not detect laser power.
`Prior to Ignition:
`1. The unit has shut down due to a
`separate interlock fault
`2. The plasma has failed to ignite.
`3. A failure has occurred in the laser
`fiber.
`After Ignition:
`1. A failure has occurred in the laser
`fiber or laser delivery optics.
`
`Lamp controller Status
`LEDs
`Power
`Controller Interlock OK
`
`Lamp House Interlock OK
`
`External Interlock OK
`Remote Control
`
`Laser On
`
`Lamp On
`Lamp House Overtemp
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`Lamp Controller Overtemp
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`Laser Overtemp
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`Excess Laser Current
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`Laser Fault
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`Table 2: Front Panel LED functions
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`Interlock
`Connector
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`J4 Remote Sensor
`Connector
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`Laser Connection
`to Lamp House
`
`Armored Laser
`Fiber (coiled for
`storage)
`
`Cooling Water
`Connections
`
`Functional Earth
`Terminal
`
`J6 Remote
`Control Connector
`
`J5 Lamp House
`Connector
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`Cooling Fan
`Exhaust
`
` Fuse Drawer
`
`Power On/Off
`Switch
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`Power Entry
`Connector
`
`
`
`Figure 4: Controller rear panel
`
`
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`Interlock Connector
`Connection point for a user-supplied external interlock contact. Contact must be closed or
`connector jumpered to enable operation. We recommend that any door or enclosure switches
`in the user’s system be wired in series with this interlock connection.
`
`Laser Connection to Lamp House
`Connects to the Lamp House to supply laser energy to the lamp via the fiber cable.
`
`J4 Remote Sensor Connector
`Connection point for a user-supplied photosensor, when using remote control/remote sensing
`mode.
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`Armored Laser Fiber
`Transmits laser energy from the Controller to the Lamp House. Handle the fiber gently and
`avoid creating sharp bends or kinks in the cable. Minimum bend radius for the cable is 30 mm
`(1.2 in). See instructions in Chapter 3 under “Installation Procedure” for details on inspecting,
`cleaning and installing the fiber.
`
`Fuse Drawer
`Two AC line fuses are installed in this fuse holder. The fuse type is 250V, 8A, Fast, 5 x 20mm
`
`Power On/Off Switch
`This switch is used as a main AC power switch. It can also be used as an emergency off
`switch.
`
`Power Entry Connector
`The power input connection to the EQ-1500 is made via a standard IEC 3-pin power entry
`module. A power cable is included with the system, but any standard cable can be used.
`
`Cooling Fan Exhaust
`The internal laser power supply is air cooled. To avoid overheating, do not obstruct this fan
`exhaust.
`
`J5 Lamp House Connector
`Provides power and control signals to the Lamp House. No connector or cable may be used
`with the EQ-1500 other than the one supplied.
`
`J6 Remote Control Connector
`Provides access to control and status signals when operating the EQ-1500 in remote control
`mode.
`
`Cooling water connections
`Standard Swagelok® connectors for cooling water supply and return, providing cooling for the
`internal diode laser.
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`Lamp House Unit
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`Exit Aperture
`
`Mounting Holes
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`Figure 5: Lamp house unit front panel
`
`Mounting Holes
`(on underside)
`
`
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`Exit Aperture
`The exit aperture is a standard 1-inch threaded lens holder. The exit aperture also includes a
`high UV transmission quartz window. Do not attempt to remove or otherwise disturb this
`window. Doing so voids your warranty and may result in unsafe operating conditions
`
`Mounting Holes
`The Lamp House may be free standing or mounted rigidly via threaded holes situated on the
`front and bottom of the unit. The ¼-20 threaded mounting holes are spaced on a 1-inch grid
`pattern.
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`Laser On
`Indicator
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`J1 Controller
`Connector
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`Cooling Water
`Inlet
`
`Nitrogen Purge
`Inlet
`
`Cooling Water
`Outlet
`
`
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`Figure 6: Lamp house unit rear panel
`
`Laser Fiber Entry
`
`
`
`Laser On Indicator
`Indicates that the drive laser is on, and laser power is being transmitted to the Lamp House.
`
`J1 Controller Connector
`Interface for power and control signals from the Controller.
`
`Nitrogen Purge Inlet
`Inlet fitting for nitrogen purge gas, which is required to keep the optics clean, and to purge
`oxygen from the Lamp House to prevent the formation of ozone by UV radiation. There is no
`return fitting for the purge nitrogen. The purge flow normally escapes within the Lamp House
`enclosure, and then to atmosphere. The fitting is for ¼” OD tubing, and is a push-lock style
`connection.
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`Cooling Water Inlet/Outlet
`Push-lock tube fittings for the Lamp House cooling water.
`
`Laser Fiber Entry
`Entry point and strain relief for the laser fiber optic cable. The cable is connected inside the
`Lamp House enclosure using a proprietary SMA-type connector. The EQ-1500 system is
`shipped with this connection already made.
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`Chapter 3
`INSTALLATION
`Installation of the EQ-1500 consists of connecting electrical, water, and gas supplies, and
`connecting the lamp output to the user’s equipment.
`
`Unpacking
`Upon arrival, start by inspecting all parts of the system for completeness and any damage
`incurred in shipping. The EQ-1500 shipping box should contain: 1) EQ-1500 Controller unit,
`1) EQ-1500 Lamp House, 1) Lamp House Signal/Power Cable, and 1) 2m IEC power cord.
`If any part is missing or appears damaged, contact the manufacturer. Do not attempt to
`substitute any parts. There are no user-serviceable parts inside the EQ-1500 Lamp House or
`Controller unit.
`
`The EQ-1500 system is shipped with the laser fiber optic cable already connected between the
`Controller and Lamp House. Use care during installation and operation to avoid creating
`sharp bends or kinks in the cable. Minimum bend radius for the cable is 60 mm (2.4 in).
`
`Facilities Connections
`
`Electrical Service
`The EQ-1500 can be operated from 100–120/200–240VAC, single-phase, 50-60Hz. Power
`consumption is approximately 200VA during normal operation, 300VA during lamp starting.
`
`The EQ-1500 uses a detachable three-wire standard IEC 60320 C13 cord for connection to
`the power source. The cord also provides the connection to the protective earth circuit.
`Exposed metal parts of the EQ-1500 are connected to the protective earth ground via the cord
`and the outlet ground, providing protection against electrical shock. Never operate the EQ-
`1500 from an outlet without a properly connected protective earth ground.
`
`There is no selection switch for line voltage, it is automatically adjusted internally.
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`Cooling Water
`The EQ-1500 requires 1.9–3.8 lpm (0.5–1 gpm) water at a minimum of 0.14 MPa (20 psi).
`The temperature must be held at 18 ± 1 degrees C. The pressure drop at 3.8 lpm (1 gpm)
`through the cold plate is less than 0.07 MPa (10 psi). There are several thermoelectric and
`direct water-to-water chillers that can satisfy these requirements. Tight temperature regulation
`is required for tight regulation of the lamp’s output. If there are any questions or concerns,
`please contact the manufacturer for recommendations or guidance.
`
`The Lamp House water connection fittings are push-to-connect fittings sized for 3/8” O.D.
`tubing. The Controller water connection fittings are 3/8” Swagelok® tube fittings.
`
`The Lamp House and Controller should be connected in series, with the Controller upstream.
`See Error! Reference source not found. below.
`
`
`
`
`
`Water Supply
`
`Water Return
`
`
`
`Figure 7: Cooling water circuit layout
`
`
`Purge Gas
`The EQ-1500 requires grade 6 or better nitrogen purge gas. The requirement for purge gas is
`a result of the EQ-1500 lamp’s unique performance and operating principles. The EQ-1500
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`produces UV radiation capable of generating ozone gas when exposed to atmospheric oxygen.
`So first and foremost, the nitrogen purge gas is intended to displace any oxygen in the system’s
`optical chamber. The optics assembly is in direct contact with this purge gas. UV optics are
`quite prone to UV photo contamination. Clean and pure nitrogen from either a dewar or
`research-grade N2 bottle is recommended. Do not use any other purge gas. Usage of
`clean dry air (CDA) may cause damage to internal optical components, and is likely to
`produce ozone gas, which is a potential inhalation hazard.
`
`The fitting is a push-to-connect fitting sized for 1/4” O.D. tubing. The suggested hose to
`mate to this fitting is either Nylon: Shore D 50-70, Polyethylene: Shore D 50-196, or Teflon
`1/4” O.D. tubing.
`
`There is no return fitting for the purge nitrogen. The purge flow normally escapes within the
`lamp unit enclosure, and then to atmosphere.
`
`Optical Interface
`The exit aperture consists of a Newport LH-1-5 1.5” lens mount. This incorporates a 1.563-20
`thread. Optionally, to utilize the full 0.5 NA output of the EQ-1500, this lens mount can be
`removed. With the lens mount removed, the machined mounting holes on the front panel can
`be used to interface to the EQ-1500 to external optics. Figure 7 shows the details of the
`optical interface. See Figure 8. below.
`
`Any beam transport space should be purged with dry nitrogen to prevent the formation of
`ozone from atmospheric oxygen.
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`Plasma Location
`
`Figure 7: Optical interface
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`External Interlock
`The connector is a 2-pin circular connector, Hirose part no. RM12BPE-2PH. It can be
`connected to any suitable dry-contact switch, such as a snap switch for a beam line cover or
`other door switch. The contact should be rated for a minimum of 15mA at 15VDC.
`
`In order for the EQ-1500 to operate, this circuit must be closed. The system is shipped with a
`jumpered connector installed.
`
`Installation procedure
`1. Mount the Lamp House rigidly to either an optical breadboard plate or another
`suitable mounting structure using the threaded holes on the bottom or front of the
`unit. The holes are sized to accept standard ¼-20 optical bench hardware, and spaced
`to be compatible with a standard 1” grid mounting hole pattern..
`2. Connect the Lamp House output aperture to the user equipment. The light output is
`coupled via a standard optical 1” threaded barrel. The beam should always be either
`directly coupled to a fiber optic cable, or enclosed in an appropriate beam pipe, tube,
`or enclosed space and purged with nitrogen. Operating the source without any output
`target or beam transport is not recommended, and may lead to unsafe operating
`conditions. Consult Energetiq
`for applications
`information and
`suggested
`configurations.
`3. Set up the Lamp House with appropriate ultraviolet safety measures and laser light
`safety measures in place. It is recommended that any enclosure or aperture-blocking
`hardware utilize cover switches wired to the EQ-1500 external interlock circuit.
`4. Place the Controller unit no farther than 6 feet from the lamp unit, as the supplied
`cable is only 2 meters long. Do not block the air vents at the front or rear of the
`Controller.
`5. Connect the supplied Signal/Power Cable to the Lamp House and the Controller.
`The connectors are polarized to prevent errors in setup. Be sure to screw the attached
`flathead connector mounting screws fully with 12 in-lbs torque.
`6. Connect cooling water and nitrogen purge gas to the Lamp House. Refer to “Facilities
`Requirements” above.
`7. Connect cooling water to the Controller unit.
`8. Verify that the main power switch on the back of the Controller is in the “OFF”
`position.
`
`20
`
`
`
`Energetiq Ex. 2055, page 24 - IPR2015-01362
`
`

`
`
`
`
`
`Fiber installation procedure
`
`Step Picture
`8.1.
`
`Description
`Using the supplied 1/16” hex driver, remove the screws
`securing the lamp house cover. Carefully lift the cover
`straight up.
`
`8.2.
`
`8.3
`
`CAUTION: The shielded fiber located on the back of
`the controller has a minimum bend radius of 30mm. Use
`care not to bend the fiber too tightly.
`
`Cut the zip-tie securing the fiber to the back of the
`controller and then unwrap the fiber.
`
`
`
`Remove the SMA cap located inside the lamp house.
`
`EQ-1500 Operation Manual Rev 4
`
`21
`
`Energetiq Ex. 2055, page 25 - IPR2015-01362
`
`

`
`8.4a
`
`8.4b
`
`8.4c
`
`8.5
`
`22
`
`While supporting the end of the fiber, place the strain
`relief against the side of the lamp house. You will see
`two ‘fingers’ that lock the strain relief in place from the
`back side. These will need to slide over the inside surface
`of the panel.
`
`Rotate the strain relief around the corner while keeping
`the locking ‘fingers’ on the inside.
`
`Move the strain relief all the way to the left. You should
`not be able to pull the strain relief straight out.
`
`Carefully remove the cap from the end of the fiber. Use
`care not to touch the end of the fiber. THE FIBER
`END MUST BE KEPT VERY CLEAN.- VERY
`IMPORTANT – See section on “Fiber Cleaning” at
`the end of this section.
`
`
`
`
`
`Energetiq Ex. 2055, page 26 - IPR2015-01362
`
`

`
`8.6
`
`8.7
`
`
`
`Again, use extreme care not to touch the end of the
`fiber. Carefully slide the fiber into the SMA connector
`and tighten finger tight.
`
`Using care not to pinch any wires, slide the lamp house
`cover back into place and install the cover screws.
`
`The fiber installation is now complete.
`
`
`9. Connect the supplied IEC cord from the Controller to the power source.
`10. Purge the EQ-1500 unit for at least 10 minutes prior to operation. Failure to purge
`the system properly may damage the optics and may produce ozone gas.
`11. Verify that cooling water is flowing and the temperature is at maximum 18 degrees C.
`Operation of the EQ-1500 lamp at a higher temperature will result in reduced
`performance and possibly shorter lamp life.
`Note: cooling water should be turned off when the lamp is not operating, to
`avoid condensation on internal and external cooling lines.
`
`
`The system is now ready to operate.
`
`EQ-1500 Operation Manual Rev 4
`
`23
`
`Energetiq Ex. 2055, page 27 - IPR2015-01362
`
`

`
`
`
`
`Fiber Cleaning Process
`Fiber Cleaning Basics:
`• The LDLS laser fibers contain very high power densities, and are susceptible to
`damage if the LDLS is operated when the fiber connector is not clean.
`• Leave Laser Fiber SMA connected whenever possible
`• Minimize the number of fiber connections
`•
`If the SMA fiber must be disconnected, always use a cap on both ends:
`– Store caps open side down when possible
`– Blow out caps with CDA (Clean Dry Air) prior to use
`• Never leave the fiber disconnected without a cap
`• Follow the fiber inspection and cleaning process before making an laser fiber SMA
`connection
`• Operating the LDLS with a contaminated fiber introduces the risk of decreased
`performance or damage to the unit
`• Always remove AC power from the EQ-1500 before performing a fiber inspection or
`cleaning.
`
`
`
`Fiber Inspection and Cleaning Process:
`Note - Fiber Inspection should only be performed with power removed from the EQ-1500
`Power Supply Controller Unit
`
`
`
`Figure 6: Fiber Cleaning Process Flowchart
`
`
`
`Inspect Fiber endInspect Fiber end
`
`
`
`Inspect Fiber endInspect Fiber end
`
`
`
`YesYes
`
`
`Clean Fiber Clean Fiber
`
`end with end with
`
`Clean Dry AirClean Dry Air
`
`
`Is fiber end Is fiber end
`
`contaminated?contaminated?
`
`
`
`YesYes
`
`
`Clean Fiber Clean Fiber
`
`end with end with
`
`CletopCletop
`
`
`Is fiber end Is fiber end
`
`contaminated?contaminated?
`
`
`
`YesYes
`
`
`Clean Fiber Lint Clean Fiber Lint
`
`Free Wipe and Free Wipe and
`
`Isopropyl Isopropyl
`
`AlcoholAlcohol
`
`
`
`NoNo
`
`
`Install Laser SMA Install Laser SMA
`
`ConnectorConnector
`
`
`
`NoNo
`
`
`Install Laser SMA Install Laser SMA
`
`ConnectorConnector
`
`
`
`
`
`StartStart
`
`
`
`Inspect Fiber endInspect Fiber end
`
`
`Is fiber end Is fiber end
`
`contaminated?contaminated?
`
`
`
`NoNo
`
`
`Install Laser SMA Install Laser SMA
`
`ConnectorConnector
`
`24
`
`
`
`Energetiq Ex. 2055, page 28 - IPR2015-01362
`
`

`
`
`
`
`Fiber Inspection Tools:
`
`Figure 7: Thorlabs CL-200 Handheld Fiber
`Inspection Scope
`
`
`
`Figure 8: Westover FVD-2400: Benchtop USB /
`PC Operated fiber viewer
`
`
`
`Examples of Fiber Images:
`
`EQ-1500 Operation Manual Rev 4
`
`25
`
`
`
`Energetiq Ex. 2055, page 29 - IPR2015-01362
`
`

`
`
`
`Figure 9: Contaminated Fiber end Figure 10: Clean Fiber End
`Fiber Cleaning Tools:
`
`
`
`
`1. Clean Dry Air
`2. Dust Off (or similar clean, compressed air)
`3. Cletop
`
`
`www.cletop.com
`
`Cletop Type A SMA cleaner with Blue tape
`
`
`
`14100500
`
`Box of 6 Replacement Blue Tape Reels
`
`4. Lint Free Wipe with Isopropyl Alcohol
`5. A modified adapter for the fiber inspection scopes is available through Energetiq.
`
`14100700
`
`
`
`
`
`26
`
`
`
`Energetiq Ex. 2055, page 30 - IPR2015-01362
`
`

`
`
`
`
`Chapter 4
`OPERATION
`Once the lamp is set up properly, verify that all personnel that will be in contact with the lamp
`system are aware of the potential hazards involved with its operation. It is the responsibility of
`the user to verify that the lamp is being used safely.
`
`To start the lamp:
`
`1. Verify that all safety measures are in place, and that cooling water and purge gas are
`flowing.
`2. Turn on the main power switch on the back of the unit.
`3. The lights on the front panel of the Controller will indicate po

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