`
`(PATENT)
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`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
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`PATENT TRIAL AND APPEALS BOARD
`
`Inter Partes Review of U.S. Patent No. 8,309,943
`Inter Partes Review of U.S. Patent No. 7,435,982
`Inter Partes Review of U.S. Patent No. 7,786,455
`Inter Partes Review of U.S. Patent No. 8,525,138
`Inter Partes Review of U.S. Patent No. 8,969,841
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`Smith et (11,; Issued: Nov. 13, 2012
`Smith; Issued: Oct. 14, 2008
`Smith; Issued: Aug. 31, 2010
`Smith et aI.; Issued: Sep. 3, 2013
`Smith; Issued: Mar. 3, 2015
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`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`P.O. Box 1450
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`Alexandria, VA 22313-1450
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`Dear Sir/Madam:
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`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
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`above captioned Inter Partes Reviews and transact all business in the U.S. Patent and Trademark
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`Office connected herewith:
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`All practitioners at Customer Number 23483.
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`Address all communications to:
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`WILMER CUTLER PICKERING HALE AND DORR LLP
`60 State Street
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`Boston, MA 02109
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`(617) 526-6000
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`Address all e-mails and telephone calls to lead and back-up counsel (each associated with
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`the above Customer Number), listed below:
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`145466B61v.1
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`
`
`Patent Nos.: 8,309,943; 7,435,982; 7,786,455;
`8,525,138; and 8,969,841
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`Docket No.: 0107945-00235USl-US6
`
`Donald R. Steinberg (Lead Counsel, PTO Reg. No. 37,241)
`Don.Steinber wilmerhalecom
`Direct: 617-526-6453
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`WILMER CUTLER PICKERING HALE AND DORR LLP
`60 State Street
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`Boston, MA 02109
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`David L. Cavanaugh (Backup Counsel, PTO Reg. No. 36,476)
`David.Cavanaugh@wilmerhale.com
`Direct: 202-663-6025
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`Michael H. Smith (Backup Counsel, PTO Reg. No. 71,190)
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`Michael}-I.Smith@wilmerhale.corn
`Direct: 202-663-6055
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`WILMER CUTLER PICKERING HALE AND DORR LLP
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`1875 Pennsylvania Ave, NW
`Washington, DC 20006
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`For: ASMLNetherlandsB.V. %/
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`Dated: 2? ma; .2075’
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