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`LIBRARY
`TUfTS UNIVERSITY
`ACQUISITIONS DEPT
`
`HA 021.5
`
`Energetiq Ex. 2047, page 1 - IPR2015-01300, IPR2015-01303
`
`

`
`FOCAL POINT
`
`COST CONSIDERATIONS FOR INDUSTRIAL
`EXCIMER LASERS
`
`By GARY K. KLAUMINZER
`
`As industrial applications for ex(cid:173)
`cimer lasers are developing, design(cid:173)
`ers are beginning to address the
`issue of cost. This issue is complicat(cid:173)
`ed because there are no "industrial"
`excimer lasers on the market today,
`so no user or manufacturer can ac-
`
`The editors recommend the de(cid:173)
`tailed analysis in this article as
`a model for the discussion of cost
`issues. These issues, however,
`are never cut-and-dry. Readers
`should bear in mind that capital
`and component costs and reliabil(cid:173)
`ity may be difficult to evaluate
`and will change as the technology
`advances. This will in turn affect
`the conclusions to be drawn.
`
`-----·
`IINd:YAG LASERS
`Pulsed and CW
`from Spectron
`· i • Highly stable INVAR resonator.
`I. Pulse energies up to 850mJ
`1 at 1064nm.
`• Repetition rates to 50Hz.
`• Optional pulsed operation at 532, 355
`and266nm.
`• CW power up to 50 watts.
`• Q-switched pulse width -10nSec.
`• Dye laser system with conversion
`efficiency >30% of 532nm pump.
`• Dye laser line width <0.1 cm-1
`available.
`• Innovative ceramic reflectors provide
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`
`!• Unique temperature stabilized,
`
`Brewster-angled Pockels cell.
`• State-of-the-art, switched-mode
`power supplies.
`
`-
`
`108
`
`curately predict the costs for a given
`application. But we can identify the
`major cost elements and give rough
`estimates based on output power
`and level of usage. In doing so we
`find that maintenance costs-labor
`and replacement parts-exceed cap(cid:173)
`ital costs for most excimer lasers,
`and that fuel gas costs are small by
`comparison. The following analysis
`covers lasers from 10- to 200-W av(cid:173)
`erage power, and includes capital,
`maintenance, and fuel gas costs for
`each per kilowatt-hour of operation.
`
`Capital costs
`The most visible cost for any laser is
`the initial cost to purchase. Figure 1
`shows the cost per watt as a func(cid:173)
`tion of output power for a number of
`commercial excimer lasers designed
`for scientific applications. The
`200-W laser does not exist yet, but
`
`GARY K. KLAUMINZER is president of
`Questek, Inc., 44 Manning Road, Bil(cid:173)
`lerica, MA 01821.
`
`-· LASER BEAM
`PROFILE
`MONITOR
`from Delta
`Developments
`
`.........
`
`.-····
`
`·.
`
`··-.............. .
`
`• Pulsed or CW lasers.
`• 60 element pyro-electric array.
`• Element size: 0.375 x 2.7mm
`0.375 x 1mm (optional)
`• Spectral range: 0.2 to 30 microns.
`• NEP (per element): 15 nJoules.
`• Dynamic range: 1.3 x 1CY.'
`• Calibrate'd power density.
`• Complete with display monitor.
`• Internal storage of 4 traces.
`• Computer interface.
`
`·-
`
`CIRCLE NO. 78
`
`the cost is extrapolated from the
`100-W laser. The output power is for
`248 nm (KrF); the same laser gives
`lower power at 193 nm (ArF),
`308 nm (XeCl), and 351 nm (XeF),
`with the weakest about 50% that of
`KrF.
`For the next generation of ex(cid:173)
`cimer lasers designed for industrial
`applications, the capital cost per
`watt should decrease as application(cid:173)
`specific designs are produced in
`higher volume. A rough estimate of
`cost per watt for 1988 is shown by
`the dashed line.
`
`Maintenance cost
`Excimer lasers require routine
`maintenance to change fuel gas,
`clean optics, if necessary, and other(cid:173)
`wise check system performance.
`This analysis ignores such mainte(cid:173)
`nance and focuses on the cost to
`replace major components in the
`laser which have "worn out." Each
`component is analyzed independent(cid:173)
`ly to determine a service interval,
`although in practice a preventive
`maintenance schedule will group
`
`·-
`PHOTON DRAG
`DETECTORS
`from Edinburgh
`Instruments and
`Rofin-Sinar Ltd.
`• Ideal for pulsed C02 lasers.
`• Fast response ( -1 nSec)
`• Responsivity up to 500mV/MW,
`(unamplified.)
`• High damage threshold
`( > 25 MW/cm2)
`• Improved 4-ring electrodes available
`for uniform sensitivity
`• Detectors (absorbing) or monitors
`( > 70% transmission) available
`• Apertures from 2 to 25mm.
`• Selection of amplifiers, x10, x100
`or x1000.
`Distributed exclusively In North America by:
`------ -
`-=-===rM
`- --
`- --
`-
`-
`~-5= -
`----
`
`~===
`
`QUANTUM ELECTRONIC INSTRUMENTS, INC.
`5A1 Damonmill Square, Concord, MA 01742
`(617)3~-~~ --- - - - - -
`
`Energetiq Ex. 2047, page 2 - IPR2015-01300, IPR2015-01303