`Energetiq Technology, Inc.
`7 Constitution Way
`Woburn, MA 01801
`(781) 939-0763 x101
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`EDUCATION
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`B.S. Physics, Davidson College, 1975.
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`M.S. Electrical Engineering, University of Wisconsin, 1976.
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`Ph.D., Electrical Engineering, University of Wisconsin, 1980.
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`PROFESSIONAL EXPERIENCE
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`Research Scientist
`University of Wisconsin
`Fusion energy plasma physics research.
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`1980 to 1981
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`Research Scientist
`MIT Plasma Fusion Center
`Fusion energy plasma physics research.
`Key contributor to the design, management and research of the TARA tandem mirror, a DOE funded linear
`magnetic confinement experiment.
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`1981 to 1987
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`Founder, Director, and Vice President Advanced Technology
`Applied Science and Technology, Inc.
`Developed plasma devices and reactive gas generators for
`Semiconductor processing. Inventions and product development included atomic oxygen, atomic fluorine and
`ozone generators which are used on many etch and most CVD process tools in all major semiconductor
`manufacturing facilities.
`
`1987 to 1999
`
`Founder and President
`Compact Instruments, LLC
`Developed portable helium leak detectors and miniature turbomolecular pumps and ion traps.
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`1999 to 2000
`
`Vice President and Chief Technology Officer
`MKS Instruments, Inc.
`Corporate responsibility for technology development and assessment of the technology of acquisition targets
`as part of MKS’s expansion through many acquisitions over four years.
`
`2000 to 2004
`
`President and Chairman
`Energetiq Technology, Inc.
`
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`PROFESSIONAL SOCIETIES
`
`Member American Physical Society
`
`Member The Optical Society
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`PATENTS
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`2004 to present
`
`More than 40 US Patents, and additional related foreign patents, in the fields of light sources,
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`Energetiq Ex. 2026, page 1 - IPR2015-01300, IPR2015-01303
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`reactive gas sources, plasma devices, instrumentation, and vacuum technology.
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`PUBLICATIONS
`More than ten publications in peer reviewed scientific journals and many conference
`presentations.
`
`Energetiq Ex. 2026, page 2 - IPR2015-01300, IPR2015-01303
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