`(PATENT)
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`PATENT TRIAL AND APPEALS BOARD
`
`Inter Panes Review of U.S. Patent No. 8,309,943
`biter Par/es Review of U.S. Patent No. 7,435,982
`Inter Par/es Review of U.S. Patent No. 7,786,455
`In/er Par/es Review of U.S. Patent No. 8,525,138
`Inter Panes Review of U.S. Patent No. 8,969,841
`
`Smith c/al.; Issued: Nov. 13, 2012
`Smith; Issued: Oct. 14, 2008
`Smith; Issued: Aug. 31, 2010
`Smith ci aL; Issued: Sep. 3, 2013
`Smith; Issued: Mar. 3,2015
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`P.O. Box 1450
`Alexandria, VA 223 13-1450
`
`Dear Sir/Madam:
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
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`above captioned Inter Panes Reviews and transact all business in the U.S. Patent and Trademark
`
`Office connected herewith:
`
`All practitioners at Customer Number 23483.
`
`Address all communications to:
`
`WILMER CUTLER PICKERING HALE AND DORR LLP
`60 State Street
`Boston, MA 02109
`(617) 526-6000
`
`Address all e-mails and telephone calls to lead and back-up counsel (each associated with
`
`the above Customer Number), listed below:
`
`145466861v.1
`
`
`
`Patent Nos.: 8,309,943; 7,435,982; 7,786,455;
`8,525,138; and 8,969,841
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`Docket No.: 0107945-00235US1-U56
`
`Donald R. Steinberg (Lead Counsel, PTO
`Don.Steinbenz@wilmerhale.com
`Direct: 617-526-6453
`
`Reg. No. 37,241)
`
`WILMER CUTLER PICKERING HALE AND DORR LLP
`60 State Street
`Boston, MA 02109
`
`David L. Cavanaugh (Backup Counsel, PTO Reg. No. 36,476)
`David.CavanaualyWwilmerhale.com
`Direct: 202-663-6025
`
`Michael H. Smith (Backup Counsel, PTO Reg. No. 71,190)
`Michaell-1.Smit[vThwilmerhale.com
`Direct: 202-663-6055
`
`WILMER CUTLER PICKERING HALE
`1875 Pennsylvania Aye, NW
`Washington, DC 20006
`
`AND DORR LLP
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`For: ASML Netherlands B.V.
`
`Name: rr u•n
`Title: Vcc Thc5ccLc 3 ci7i z
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`Dated:
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`27
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`%O1
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`14546686 Iv.!
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`2
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