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`July 30, 2014
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`Re: 69462/180343/174020
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`To Whom It May Concern:
`
`This is to certify that a professional translator on our staff who is skilled in the Japanese and English languages
`translated JP2000053237A from Japanese into English.
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`We certify that the English translation conforms essentially to the original Japanese language.
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`Susan Andrus
`Marketing Manager
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`Subscribed and sworn to before me on July 30, 2014.
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`Notary Public
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`504 LAVACA ST, SUITE 940, AUSTIN, TEXAS 78701 USA • +1 512.472.6753 • +1 800.531.9977 • FAX +1 512.472.4591
`INFO@TRANSLATEMEDIA.COM • WWW.TRANSLATEMEDIA.COM
`
`Daifuku Exhibit 1012, Page 1 of 18
`
`
`
`
`
`1
`
`(19) JAPANESE PATENT
`OFFICE (JP)
`
`(12) KOKAI TOKOUHYO
`PATENT GAZETTE (A)
`
`(51) Int. Cl.7:
`
`B 65 G 47/52
`
`// B 65 G 49/00
`
`
`Identification Codes: 101
`
`(11) PATENT APPLICATION PUBLICATION
`2000-53237
`(43) Publication Date: February 22, 2000
`
`FI
`B 65 G 47/52
`
`49/00
`
`Theme Code (reference)
`101A
`3F044
`A
`
`Examination Request: Not filed
`
`No. of Claims: 2 (Total of 6 pages; OL)
`
`
`(21) Filing No.: Hei 10[1998]-225046
`
`(22) Filing Date: August 7, 1998
`
`(71) Applicant(s): 000002059
`
`Shinko Electric Co., Ltd.
`
`7-2-14 Toyo, Koto-ku, Tokyo-to
`
`(72) Inventor(s): Hiroshi Nagashima
`
`Ise Business Office, Shinko Electric
`Co., Ltd.
`100 Takenohana-cho, Ise-shi, Mie-ken
`
`
`
`(74) Agent(s):
`
`
`
`100064908
`Masatake Shiga
`patent attorney and 9 others
`
` Terms (reference): 3F044 AA13 AB11 AB13 CE02
`CE12 CE21
`
`
`
` F
`
`
`
`Purpose: To improve the conveyance efficiency.
`
`(54) [Title] CONVEYANCE FACILITY
`(57) Abstract
`
`
`
`Solution means: A cassette housing body 39 for
`
`housing a cassette box 49 is formed on a conveyance
`truck 8, and a transfer device 40 is installed above the
`cassette housing body 39. The transfer device 40 is
`provided with an arm 42 that advances and retreats
`freely in the horizontal direction intersecting with the
`advancing direction of the conveyance truck 8 from
`the conveyance truck 8. A hoist 43, which is formed so
`that it freely holds and separates the cassette box and
`can vertically move the cassette box while holding the
`cassette box, is installed at the tip of the arm 42.
`
`Daifuku Exhibit 1012, Page 2 of 18
`
`
`
`
`
`2
`
`Claims
`
`1. A conveyance facility, wherein a conveyance truck mounted with objects to be
`conveyed runs on a track; said conveyance facility being characterized in that an object housing
`part for housing said objects to be conveyed is formed on said conveyance truck, a transfer
`device is installed above said object housing part, said transfer device is provided with an arm
`part that advances and retreats freely in the horizontal direction intersecting with the advancing
`direction of said conveyance truck from said conveyance truck, and a holding mechanism, which
`is formed so that it freely holds and separates said objects to be conveyed and can vertically
`move said objects to be conveyed while holding the objects, is installed at the tip of said arm part.
`
`2. The conveyance facility as cited in Claim 1, characterized in that a stability-
`maintaining mechanism, which freely advances and retreats in the direction opposite the
`advancing direction of the arm part of said transfer device, is installed in said conveyance truck.
`
`Detailed explanation of the invention
`[0001]
`Technical field of the invention
`
`The present invention relates to a conveyance facility that is employed in factories, and
`conveys objects to be conveyed.
`
`[0002]
`Prior art
`
`As a conveyance facility of this type, a conveyance facility as shown in Figure 4 is
`known. A conveyance facility 1 shown in Figure 4 is employed as part of a conveyance system S
`in a clean room of a semiconductor factory, and cassettes in which semiconductor wafers can be
`freely conveyed between stockers 3 are installed for each process 2.
`
`[0003]
`
`Figure 5 shows the appearance of the conveyance facility 1. The conveyance facility 1 is
`provided with a track 5 formed in a loop shape as a whole, and a conveyance truck 8 in which
`cassettes 6 are mounted runs on the track 5. In addition, in the figure, 9 is a self-propelled
`moving robot that is used in the conveyance in the processes 2, and the cassettes 6 delivered to
`the stockers 3 from the track 5 are conveyed to each manufacturing apparatus 10 by the moving
`robot 9.
`
`
`Daifuku Exhibit 1012, Page 3 of 18
`
`
`
`
`
`3
`
`[0004]
`Problems to be solved by the invention
`
`However, in the aforementioned clean room, to raise the production efficiency in a
`limited facility and to lower the manufacture cost of semiconductors, the increase of the amount
`of conveyance per unit time of the conveyance facility has been strongly in demand.
`
`[0005]
`
`However, in the conveyance system S as shown in Figures 4 and 5, the cassette 6
`conveyed on the track 5 are delivered one by one to the stockers 3, and the cassettes 6 are
`delivered to the manufacturing apparatuses 10 from the stockers 3 by the moving robot 9.
`Therefore, the conveyance in the processes 2, such as delivery of the cassettes 6 and conveyance
`by means of the moving robot 9 was restricted, causing a limitation in a realizable amount of
`conveyance.
`
`[0006]
`
`The present invention has been proposed in consideration of the aforementioned situation,
`and its objective is to improve the conveyance efficiency of a conveyance facility by being able
`to directly convey objects to be conveyed to a manufacture facility from a conveyance track.
`
`[0007]
`Means to solve the problems
`
`In order to solve the aforementioned problems, the present invention has adopted the
`following means. In other words, in a conveyance facility in which a conveyance truck mounted
`with objects to be conveyed runs on a track, the conveyance facility of Claim 1 is characterized
`in that an object housing part for housing the aforementioned objects to be conveyed is formed
`on the aforementioned conveyance truck; a transfer device is installed above the aforementioned
`object housing part; the aforementioned transfer device is provided with an arm part that
`advances and retreats freely in the horizontal direction intersecting with the advancing direction
`of the aforementioned conveyance truck from the aforementioned conveyance truck; and a
`holding mechanism, which is formed so that it freely holds and separates the aforementioned
`objects to be conveyed and can vertically move the aforementioned objects to be conveyed while
`holding the objects, is installed at the tip of the aforementioned arm part.
`
`[0008]
`
`With the adoption of this constitution, in this conveyance facility, objects to be conveyed
`can be directly delivered between the conveyance truck and the manufacture facility by the
`
`Daifuku Exhibit 1012, Page 4 of 18
`
`
`
`
`
`4
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`transfer device. Especially in this case, the transfer device can deliver the objects to be conveyed
`in a state in which the transfer device is extended to the side from the truck. In addition, since the
`objects to be conveyed can be vertically freely moved, the delivery work of the objects to be
`conveyed is not limited by the height position of receiving windows of the objects to be
`delivered at the manufacture facility.
`
`[0009]
`
`The conveyance facility of Claim 2 is characterized in that in the conveyance facility of
`Claim 1, a stability-maintaining mechanism, which freely advances and retreats in the direction
`opposite the advancing direction of the arm part of said transfer device, is installed in the
`aforementioned conveyance truck.
`
`[0010]
`
`In this conveyance facility, even when the aforementioned transfer device is extended to
`the side from the conveyance truck, the conveyance truck can be prevented from being tilted by
`the weight of the objects to be conveyed by using the stability-maintaining mechanism.
`
`[0011]
`Embodiment of the invention
`
`Next, an embodiment of the present invention will be explained with reference to the
`figures. Here, the embodiment, which is explained here, is the case where the conveyance facility
`of the present invention is applied to the conveyance of cassettes in which semiconductor wafers
`are housed in a clean room of a semiconductor factory.
`
`[0012]
`
`Figure 3 shows the entire outline of a conveyance system S' of cassettes of semiconductor
`wafers in the aforementioned clean room. The conveyance system S', for example, is disposed at
`the ceiling, etc., of the clean room and provided with a conveyance facility 14 having a track 13
`for guiding a conveyance truck. In addition, at the periphery of the track 13, stockers 15 for
`housing cassettes and manufacturing apparatuses 16 for working the aforementioned wafers are
`arranged.
`
`[0013]
`
`The track 13 is provided with a main track 18 installed in a loop shape as a whole, first
`branch tracks 19 installed in accordance with stockers 15, and second branch tracks 20 installed
`so that they are branched from the main track 18 and reach the manufacturing apparatuses 16.
`
`Daifuku Exhibit 1012, Page 5 of 18
`
`
`
`
`
`5
`
`
`[0014]
`
`Figure 1 shows an outlined constitution of a conveyance truck 21 running on the track 13.
`As shown in the figure, the track 13 is formed in a box cross section type, and a truck body 22 of
`the conveyance truck 21 is housed in an internal space 13a of the track 13.
`
`[0015]
`
`The truck body 22 is provided with a wheel 24 running on the bottom face of the track 13
`and a guide roller 25 that comes in contact with the inner wall of the track 13 and guides the
`truck body, and a coil 27 installed at its bottom functions as a linear motor 30 along with a
`magnet 28 installed on the bottom face of the track 13, running in the track 13 by means of the
`linear motor 30 as a propulsion means.
`
`[0016]
`In addition, a strut 31 is installed in the upper part of the truck body 22, and a pickup coil
`
`33 for receiving power from a power feeder 32 installed in the track 15 is supported by the strut
`31. Through the pickup coil 33, power is supplied to the coil 27 or a control device not shown in
`the figure. Moreover, control signal receiving device, communication appliance with a station,
`collision prevention sensor, etc., not shown in the figure are mounted in the truck body 22.
`
`[0017]
`Furthermore, an upper end 31a of the strut 31 extends from a slit 36 installed in the track
`
`15 and supports a goods stand 38 positioning above the track 13. Above the goods stand 38, a
`cassette housing body (object housing part) 39 of a box cross section type is installed, and a
`transfer device 40 is installed in a suspended state at a ceiling part 39a of the cassette housing
`body 39.
`
`[0018]
`
`As shown in the figure, the transfer device 40 is provided with an arm (arm part) 42 fixed
`to the ceiling part 39a of the cassette housing body 39 and a hoist (holding mechanism) 43
`supported by the arm 42. The arm 42, as indicated by an alternate long and two short dashes line
`in the figure, advances and retreats freely in the horizontal direction (A direction in the figure)
`orthogonal to the running direction of the conveyance truck 21.
`
`
`Daifuku Exhibit 1012, Page 6 of 18
`
`
`
`
`
`6
`
`[0019]
`
`On the other hand, the hoist 43 is provided with a winch 46 for freely winding and
`unwinding a wire 45 and a chuck mechanism 47 installed at the tip of the wire 45. The chuck
`mechanism 47, as shown in Figure 2, is freely coupled and separated with and from a grip 50 of
`a cassette box (object to be conveyed) 49 in which semiconductor wafers are housed), thus being
`able to hold the cassette box 49.
`
`[0020]
`
`Therefore, as indicated by a chain line in Figure 1, in a state in which the arm 42 is
`extended to the side of the conveyance truck 21, the transfer device 40 can unwind the wire 45
`by the winch 46 and lower the chuck mechanism 47. Next, in a state in which the chuck
`mechanism 47 is lowered to the outside of the track 13, if the grip 50 of the cassette box 49
`positioning at the outside of the track 13 is chucked as shown in Figure 2, the cassette box 49
`chucked is hung up, and the arm 42 is pulled back, the cassette box 49 positioned at the outside
`of the track 13, as indicated by a solid line in Figure 1, can be housed in the cassette housing
`body 39 while holding. In addition, in the sequence opposite this sequence, the cassette box 49
`held in the cassette housing body 39 can be transferred to the outside of the track 13.
`
`[0021]
`
`Moreover, as shown in Figure 1, a counterweight (stability-maintaining mechanism) 51 is
`installed at the ceiling part 39a of the cassette housing body 39. The counterweight 51, as
`indicated by the chain line in the figure, advances and retreats freely in the direction opposite the
`extending direction of the arm 42 of the transfer device 40 from the conveyance truck 21.
`
`[0022]
`
`In the conveyance facility 14 with the above constitution, since the conveyance truck 21
`is provided with a transfer mechanism, the cassette box 49 conveyed on the track 13 can be
`transferred to the manufacturing apparatuses 16, thus being able to make some stockers or
`transfer robots, which have been required for the transfer of objects to be conveyed, unnecessary.
`Therefore, the facility cost can be lowered. In addition, since the conveyance between the
`processes and the conveyance in the process can be extended into each other, the conveyance
`efficiency can be markedly improved. Moreover, in the conveyance facility 14, when the cassette
`box 49 is transferred to the stocker 15, since the transfer mechanism 40 mounted at the
`conveyance truck 21 can be utilized, it is unnecessary to install a transfer mechanism (loader) to
`the stocker 15. Therefore, the facility cost of the stockers 15 can be reduced, and the number of
`shelves of the stockers 15 can be increased by utilizing the space where the transfer mechanism
`
`Daifuku Exhibit 1012, Page 7 of 18
`
`
`
`
`
`7
`
`has been installed. Furthermore, in the conveyance facility 14, since the cassette box 49 can be
`disposed on the goods stand 38 while running the conveyance truck 21, the cassette box 49 is not
`likely to drop in the work space while running the conveyance truck 21.
`
`[0023]
`
`In addition, in the conveyance facility 14, since the cassette box 49 can be delivered in a
`state in which the transfer device 40 installed in the conveyance truck 21 is extended to the side
`from the conveyance truck 21, there is no limitation in the height direction in the delivery of the
`cassette box 49. Therefore, the case where the truck 13 is installed in the vicinity of the ceiling
`can also be favorably used. Moreover, since the transfer device 40 can freely vertically move the
`cassette box 49, even if the height position of a delivery window of the cassette box 49 at the
`manufacturing apparatuses 16 is different for each manufacture, the delivery work of the cassette
`box 49 is not limited, and the versatility is high.
`
`[0024]
`
`Furthermore, in the conveyance facility 14, when the cassette box 49 is delivered, the
`counterweight 51 can be advanced to the side opposite the side where the transfer device 40 is
`advanced from the conveyance truck 21. Therefore, even in the case the weight of the cassette
`box 49 is large, the conveyance truck 21 can be prevented from tilting, thus being able to ensure
`safety during delivery of the cassette box 14.
`
`[0025]
`
`Here, in the aforementioned embodiment, other constitutions can also be adopted in the
`range without deviated from the purpose of the present invention. For example, in the
`aforementioned embodiment, an outrigger may be installed instead of the counterweight 51, so
`that when the cassette box 49 is delivered, the outrigger is extended out to secure the balance of
`the conveyance truck 21.
`
`[0026]
`Effect of the invention
`
`As explained above, in the conveyance facility of Claim 1, objects to be conveyed, which
`are housed in the object housing part, can be directly transferred to manufacturing apparatuses,
`so that facilities such as robots, which have been required for the transfer of objects to be
`conveyed, can be made unnecessary. Therefore, the facility cost for factories can be lowered. In
`addition, according to the conveyance facility, the conveyance between processes and the
`conveyance in processes in a factory can ride into each other, thus being able to markedly
`
`Daifuku Exhibit 1012, Page 8 of 18
`
`
`
`
`
`8
`
`improve conveyance efficiency, compared with the prior art. Moreover, in the conveyance
`facility, since the objects to be conveyed can be housed in the object housing part while holding
`the objects to be conveyed, there is no concern of dropping the objects to be conveyed, and the
`safety is high. Furthermore, since the objects to be conveyed can be delivered in a state in which
`the transfer device is extended to the side from the conveyance truck, there is no limitation in the
`height direction during the delivery of the objects to be conveyed, and the case where a track is
`installed in the vicinity of the ceiling can also be favorably responded. In addition, since the
`transfer device can vertically freely move the objects to be conveyed, even if the height position
`of receiving windows of the objects to be conveyed at the manufacturing apparatuses is different
`for each apparatus, the delivery work of the objects to be conveyed is not limited, and the
`versatility is high.
`
`[0027]
`
`In the conveyance facility of Claim 2, when objects to be conveyed are delivered, a
`stability-maintaining mechanism is used, so that even in the case the weight of the objects to be
`conveyed is large, the conveyance truck can be prevented from tilting, thereby being able to
`ensure safety when the objects to be conveyed are delivered.
`
`Brief description of the figures
`
`Figure 1 is an elevated cross section showing a conveyance truck that is used in the
`conveyance facility as an embodiment of the present invention.
`
`Figure 2 is an enlarged elevated cross section showing the state in which a cassette box is
`held by a transfer mechanism installed in the conveyance truck shown in Figure 1.
`
`Figure 3 is a schematic plan view showing the entire outline of the conveyance shown in
`Figure 1.
`
`Figure 4 is a schematic plan view illustrating the entire outline of a conventional
`conveyance system in a factory, showing a prior art of the present invention.
`
`Figure 5 is an external oblique view showing a conveyance facility that is used in the
`conveyance system shown in Figure 4.
`
`Explanation of symbols
`13
`Track
`14
`Conveyance facility
`21
`Conveyance truck
`39
`Cassette housing body (object housing part)
`40
`Transfer device
`
`Daifuku Exhibit 1012, Page 9 of 18
`
`
`
`
`
`42
`43
`49
`51
`
`
`Arm (arm part)
`Hoist (holding mechanism)
`Cassette box (object to be conveyed)
`Counterweight (stability-maintaining mechanism)
`
`9
`
`
`
`Figure 1
`
`
`
`
`Figure 2
`
`
`Daifuku Exhibit 1012, Page 10 of 18
`
`
`
`
`
`
`
`10
`
`Figure 3
`
`
`
`A
`
`A
`
`A
`
`A
`
`Figure 4
`
`
`
`(Conveyance between processes)
`Conveyance in a process
`Stocker
`Manufacturing apparatus
`
`
`Key: 1
`
`2
`
`3
`
`A
`
`
`Daifuku Exhibit 1012, Page 11 of 18
`
`
`
`
`
`11
`
`
`
`Figure 5
`
`
`
`Daifuku Exhibit 1012, Page 12 of 18
`
`
`
`
`
`
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`Daifuku Exhibit 1012, Page 13 of 18
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`Daifuku Exhibit 1012, Page 14 of 18
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`Daifuku Exhibit 1012, Page 14 of 18
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`Daifuku Exhibit 1012, Page 15 of 18
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`Daifuku Exhibit 1012, Page 15 of 18
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`Daifuku Exhibit 1012, Page 16 of 18
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`Daifuku Exhibit 1012, Page 16 of 18
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`Daifuku Exhibit 1012, Page 17 of 18
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`Daifuku Exhibit 1012, Page 17 of 18
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`Daifuku Exhibit 1012, Page 18of 18
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`Daifuku Exhibit 1012, Page 18 of 18
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