US008197172B2
`
`(12) United States Patent
`Doherty et a].
`
`(10) Patent N0.:
`(45) Date of Patent:
`
`US 8,197,172 B2
`*Jun. 12, 2012
`
`(54)
`
`AUTOMATED MATERIAL HANDLING
`SYSTEM FOR SEMICONDUCTOR
`MANUFACTURING BASED ON A
`COMBINATION OF VERTICAL CAROUSELS
`AND OVERHEAD HOISTS
`
`(56)
`
`References Cited
`
`U.S. PATENT DOCUMENTS
`3,700,121 A 10/1972 McManus
`(Continued)
`
`(75)
`
`Inventors: Brian J. Doherty, Weston, MA (US);
`Thomas R. Mariano, Londonderry, NH
`(US); Robert P. Sullivan, Wilmington,
`MA (US)
`
`EP
`
`FOREIGN PATENT DOCUMENTS
`1 202 325
`5/2002
`(Continued)
`
`OTHER PUBLICATIONS
`
`(73)
`
`Assignee: Murata Machinery, Ltd., Kyoto (JP)
`
`(*)
`
`Notice:
`
`Subject to any disclaimer, the term of this
`patent is extended or adjusted under 35
`USC 154(b) by 172 days.
`This patent is subject to a terminal dis
`claimer.
`
`(21)
`
`(22)
`
`(65)
`
`(63)
`
`(60)
`
`(51)
`
`(52)
`(58)
`
`Appl. No.: 12/724,194
`
`Filed:
`
`Mar. 15, 2010
`
`Prior Publication Data
`
`US 2010/0174405 A1
`
`Jul. 8, 2010
`
`Related U.S. Application Data
`
`Continuation of application No. 11/652,707, ?led on
`Jan. 12, 2007, noW Pat. No. 7,771,153, Which is a
`continuation of application No. 10/393,526, ?led on
`Mar. 20, 2003, noW Pat. No. 7,165,927.
`
`Provisional application No. 60/389,993, ?led on Jun.
`19, 2002, provisional application No. 60/417,993,
`?led on Oct. 11, 2002.
`
`Int. Cl.
`(2006.01)
`H01L 21/00
`(2011.01)
`G06F 19/00
`U.S. Cl. ................................................ .. 414/331.02
`
`Field of Classi?cation Search ........... .. 414/331.02,
`414/331.03, 331.14, 318, 935
`See application ?le for complete search history.
`
`B38 ’_\
`
`PROCESS TOOL
`LOAD PORT
`
`Campbell, “Overhead Intrabay Automation and Microstocking fa
`virtual fab case study,” IEEE/SEMI Advance dSemiconductor Manu
`facturing Conference, pp. 368-372 (1997).
`(Continued)
`
`Primary Examiner * Charles A Fox
`(74) Attorney, Agent, or Firm * Fish & Richardson PC.
`
`ABSTRACT
`(57)
`A highly ef?cient Automated Material Handling System
`(AMHS) that alloWs an overhead hoist transport vehicle to
`load and unload Work-In-Process (WIP) parts directly
`to/from one or more WIP storage units included in the system.
`The AMHS includes an overhead hoist transport subsystem
`and at least one vertical carousel stocker having a plurality of
`storage bins. The overhead hoist transport subsystem
`includes an overhead hoist transport vehicle traveling along a
`suspended track de?ning a predetermined route, Which runs
`adjacent to the carousel stocker, thereby alloWing the over
`head hoist transport vehicle to access a WIP part directly from
`one of the storage bins. At least one of the storage bins
`includes a movable shelf operative to move laterally from a
`?rst position along the carousel path to a second position near
`the overhead hoist transport vehicle. The storage unit is at
`least partially open to alloW the movable shelf to move to the
`second position, thereby alloWing the overhead hoist to
`access a material unit directly from the movable shelf for
`subsequent transport along the track between various loca
`tions Within a product manufacturing facility.
`
`20 Claims, 7 Drawing Sheets
`
`80B
`
`831
`
`504 /
`
`833
`
`800
`\
`
`835 /
`
`/~aw
`
`Daifuku Exhibit 1003, Page 1 of 15
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`

`

`US 8,197,172 B2
`Page 2
`
`US. PATENT DOCUMENTS
`3,883,203 A
`5/1975 Lexe
`4,676,560 A
`6/1987 SchmitZ et al.
`4,801,236 A
`1/1989 KatZenschWanZ
`5,980,183 A 11/1999 Fosnight
`6,068,437 A
`5/2000 Boje et a1.
`6,092,678 A
`7/2000 Kawano et al.
`6,113,341 A
`9/2000 Fukushima
`6,129,496 A 10/2000 IWasaki et al.
`6,183,184 B1
`2/2001 Shiwaku
`6,453,574 B1
`9/2002 Chen
`6,504,144 B1
`1/2003 Murata
`6,579,052 B1
`6/2003 Bonora et al.
`6,604,624 B2
`8/2003 Hirata et al.
`
`JP
`JP
`JP
`JP
`JP
`JP
`JP
`W0
`W0
`W0
`W0
`
`FOREIGN PATENT DOCUMENTS
`3-225847
`10/1991
`5-77183
`10/1993
`10-45213
`2/1998
`2000-053237
`2/2000
`2000-53237
`2/2000
`2000- 289975
`10/2000
`2001-31216
`2/2001
`WO 98/46503
`3/1998
`WO 00/37338
`6/2000
`WO 01/13408
`2/2001
`WO 01/96884
`12/2001
`
`OTHER PUBLICATIONS
`
`3221:1359
`4/2004 Sackett et a1‘
`6,726,429 B2
`4/2005 Chang et a1.
`6,881,020 B2
`1/2007 Doherty et al. ........ .. 414/331.02
`7,165,927 B2 *
`7,441,999 B2 * 10/2008 Nakao et al.
`. 414/217.1
`7,686,176 B2 *
`3/2010 Murata ....................... .. 212/332
`7,771,153 B2 *
`8/2010 Doherty et a1. ~~~~~~~~ ~~ 414/33102
`2002/0143427 A1 10/2002 ch30
`
`Kaempf , “Automated Wafer Transport in the Wafer Fab,” IEEE/
`SEMI Advanced Semiconductor Manufacturing Conference, pp.
`356-361 (1997).
`Kuo, “Modelling and Performance Evaluation ofan Overhead Hoist
`Trasnport System in a 300 mm Fabrication Plant,”Int. J'. Adv. Manuf
`TechnoL, vol. 20, pp. 153-161 (2002).
`Sikich, “Development and Implementation of an Automated Wafer
`Transport System,” IEEE/SEMI Advanced Semiconductor Manufac
`
`8/2003 Sackett et a1~
`2003/0156928 A1
`2003/0198540 A1 10/2003 Lin et al.
`2004/0109746 A1 *
`6/2004 Suzuki ........................ .. 414/373
`2004/0126208 A1 *
`7/2004 Tawyer et al. ......... .. 414/22202
`
`Of?ce Action from Patent Application No. JP 2004-515615, dated
`Mar‘ 22, 2011‘
`
`* Cited by examiner
`
`Daifuku Exhibit 1003, Page 2 of 15
`
`

`

`US. Patent
`
`Jun. 12, 2012
`
`Sheet 1 017
`
`US 8,197,172 B2
`
`kHZ
`
`ART
`vPRIOR
`
`Daifuku Exhibit 1003, Page 3 of 15
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`US. Patent
`
`Jun. 12, 2012
`
`Sheet 2 017
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`US 8,197,172 B2
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`Daifuku Exhibit 1003, Page 4 of 15
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`

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`US. Patent
`
`Jun. 12, 2012
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`Sheet 3 017
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`US 8,197,172 B2
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`4 .1. 3
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`Daifuku Exhibit 1003, Page 5 of 15
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`US. Patent
`
`Jun. 12, 2012
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`Sheet 4 017
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`US 8,197,172 B2
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`Daifuku Exhibit 1003, Page 6 of 15
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`

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`US. Patent
`
`Jun. 12, 2012
`
`Sheet 5 017
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`US 8,197,172 B2
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`Daifuku Exhibit 1003, Page 7 of 15
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`

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`US. Patent
`
`Jun. 12, 2012
`
`Sheet 6 017
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`US 8,197,172 B2
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`Daifuku Exhibit 1003, Page 8 of 15
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`

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`US. Patent
`
`Jun. 12, 2012
`
`Sheet 7 017
`
`US 8,197,172 B2
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`Daifuku Exhibit 1003, Page 9 of 15
`
`

`

`US 8,197,172 B2
`
`1
`AUTOMATED MATERIAL HANDLING
`SYSTEM FOR SEMICONDUCTOR
`MANUFACTURING BASED ON A
`COMBINATION OF VERTICAL CAROUSELS
`AND OVERHEAD HOISTS
`
`CLAIM OF PRIORITY
`
`This application is a continuation of and claims priority
`under 35 USC. §120 to US. Pat. No. 7,771,153 11/652,707,
`?led Jan. 12, 2007 and entitled “AUTOMATED MATERIAL
`HANDLING SYSTEM FOR SEMICONDUCTOR MANU
`FACTURING BASED ON A COMBINATION OF VERTI
`CAL CAROUSELS AND OVERHEAD HOISTS,” Which is
`a continuation of and claims priority under 35 USC. §120 to
`US. Pat. No. 7,165,927 10/393,526, ?led Mar. 20, 2003 and
`entitled “AUTOMATED MATERIAL HANDLING SYS
`TEM FOR SEMICONDUCTOR MANUFACTURING
`BASED ON A COMBINATION OF VERTICAL CAROU
`SELS AND OVERHEAD HOISTS,” Which claims priority
`under 35 USC §1 19(e) to US. Provisional Patent Application
`No. 60/389,993, ?led Jun. 19, 2002 and entitled “AUTO
`MATED MATERIAL HANDLING SYSTEM FOR SEMI
`CONDUCTOR MANUFACTURING BASED ON A COM
`BINATION OF VERTICAL CAROUSELS AND
`25
`OVERHEAD HOISTS,” and US. Provisional Patent Appli
`cation No. 60/417,993, ?led Oct. 11,2002 and entitled “OFF
`SET ZERO FOOTPRINT STORAGE (ZFS) USING MOV
`ING SHELVES OR A TRANSLATING HOIST
`PLATFORM,” the entire contents of each of Which are hereby
`incorporated by reference.
`
`20
`
`30
`
`BACKGROUND OF THE INVENTION
`
`The present invention relates generally to automated mate
`rial handling systems, and more speci?cally to an automated
`material handling system that alloWs an overhead hoist to
`access Work-in-process (WIP) parts directly from a WIP stor
`age unit to increase the ef?ciency of the overall material
`handling system.
`Automated material handling systems are knoWn that
`employ WIP storage units and overhead hoists to store and
`transport WIP parts betWeen various Workstations and/ or pro
`cessing machines in a product manufacturing environment.
`For example, such an Automated Material Handling System
`(AMHS) is commonly employed in the manufacturing of
`Integrated Circuit (IC) chips.A typical process for fabricating
`an IC chip comprises various steps including deposition,
`cleaning, ion implantation, etching, and passivation steps.
`Further, each of these steps in the IC chip fabrication process
`is usually performed by a different processing machine such
`as a chemical vapor deposition chamber, an ion implantation
`chamber, or an etcher. Accordingly, the WIP parts, e. g., semi
`conductor Wafers, are typically transported betWeen the dif
`ferent Workstations and/or processing machines multiple
`times to perform the various process steps required for fabri
`cating the IC chips.
`A conventional AMHS for manufacturing IC chips com
`prises a plurality of WIP storage units (also knoWn as “stock
`ers”) for storing the semiconductor Wafers, and one or more
`overhead hoist transport vehicles for transporting the Wafers
`betWeen the various Workstations and processing machines
`on the IC chip manufacturing ?oor. The semiconductor
`Wafers stored in the WIP stockers are typically loaded into
`cassette pods such as Front Opening Uni?ed Pods (FOUPs),
`Which are subsequently transferred to an overhead transport
`vehicle con?gured to travel on a suspended track. In the
`
`35
`
`40
`
`45
`
`50
`
`55
`
`60
`
`65
`
`2
`conventional AMHS, each stocker is typically provided With
`a plurality of active input/ output ports that Work in conjunc
`tion With an internal robotic arm (Which may provide up to
`three or more axes of movement) for loading and unloading
`the FOUPs to/from the stocker. The FOUPs are picked and
`placed from/to the input/output ports by the overhead hoist
`vehicle.
`One drawback of the conventional AMHS is that the e?i
`ciency of the overall system is limited by the time required for
`the robotic arm to access the FOUPs at the WIP stocker’s
`active input/output ports. Because of the generally delicate
`nature of the semiconductor Wafers, strict limits are normally
`imposed on the acceleration rate of the robotic arm. For this
`reason, a minimum amount of time is typically required for
`moving the FOUPs to and from the stocker’s input/output
`ports. This minimum move time generally determines the
`stocker throughput, Which dictates the number of stockers
`needed to support the desired IC chip production level and
`thus the total cost of the AMES. Although the material han
`dling ef?ciency of the AMHS might be improved by increas
`ing the number of active input/output ports on each stocker
`and by alloWing the overhead transport vehicle to access
`multiple input/output ports simultaneously, providing addi
`tional input/ output ports can signi?cantly increase the cost of
`the stocker.
`In addition, the combination of a three or more axis internal
`robot in the stocker With several input/output ports, each
`having 1-3 axes of motion, means that a typical stocker may
`have betWeen 5 and 16 axes of motion. This is a very complex,
`loW reliability, and costly solution for storing material.
`It Would therefore be desirable to have an automated mate
`rial handling system that provides enhanced material han
`dling e?iciency While overcoming the drawbacks of conven
`tional automated material handling systems.
`
`BRIEF SUMMARY OF THE INVENTION
`
`In accordance With the present invention, a highly ef?cient
`Automated Material Handling System (AMHS) is provided
`that alloWs an overhead hoist to load and unload Work-In
`Process (WIP) parts directly to/from one or more WIP storage
`units included in the system.
`In one embodiment, the improved AMHS comprises an
`overhead hoist transport subsystem and at least one vertical
`carousel WIP storage unit (“stocker”) including a plurality of
`storage bins. The overhead hoist transport subsystem
`includes at least one overhead hoist transport vehicle con?g
`ured to travel along a suspended track de?ning at least one
`predetermined route. The predetermined route passes over
`the vertical carousel stocker, Which is con?gured to alloW the
`overhead hoist to access one or more WIP parts directly from
`a selected one of the carousel storage bins. In this ?rst
`embodiment, the selected carousel storage bin containing the
`desired WIP lot(s) is positioned at the top of the vertical
`carousel stocker substantially directly underneath the sus
`pended track. Next, the overhead hoist transport vehicle is
`moved along the suspended track to a position substantially
`directly above the selected carousel storage bin. The overhead
`hoist is then loWered toWard the selected storage bin. Finally,
`the overhead hoist is operated to pick the desired WIP lot
`directly from the carousel storage bin, or to place one or more
`WIP lots in the carousel storage bin.
`In a second embodiment, the predetermined route de?ned
`by the suspended track passes parallel to the vertical carousel
`WIP stocker, Which is con?gured to alloW the overhead hoist
`to access one or more WIP parts directly from one of the
`carousel storage bins. The AMHS further includes an extrac
`
`Daifuku Exhibit 1003, Page 10 of 15
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`

`

`US 8,197,172 B2
`
`3
`tion mechanism, Which Works in conjunction With the vertical
`carousel stocker to suitably position the selected carousel
`storage bin containing the desired WIP lot(s) relative to the
`track. For example, the extraction mechanism may be con
`?gured to move the selected carousel storage bin (e. g., a
`movable shelf) along a single servo-controlled axis from a
`?rst position adjacent the track to a second position substan
`tially directly underneath the track. In the second embodi
`ment, the overhead transport vehicle is moved along the track
`to a position substantially directly above the second position.
`Next, the overhead hoist is loWered toWard the second posi
`tion. In an alternative embodiment, the selected carousel stor
`age bin comprises a shelf positioned alongside the track, and
`the overhead hoist is mounted to a translating stage for pick
`ing and placing one or more WIP lots to the shelf at the side of
`the overhead transport vehicle. Finally, the overhead hoist is
`operated to pick the desired WIP lot directly from the selected
`storage bin, or to place one or more WIP lots in the selected
`storage bin.
`By con?guring the AMHS to alloW the overhead hoist to
`directly load and unload WIP parts to/from the carousel stor
`age bins from a position above the respective storage bin,
`more e?icient AMHS operation can be achieved.
`Other features, functions, and aspects of the invention Will
`be evident from the Detailed Description of the Invention that
`folloWs.
`
`BRIEF DESCRIPTION OF THE SEVERAL
`VIEWS OF THE DRAWING
`
`The invention Will be more fully understood With reference
`to the folloWing Detailed Description of the Invention in
`conjunction With the draWings of Which:
`FIG. 1 is a perspective vieW of a conventional automated
`material handling system;
`FIG. 2 is block diagram of a ?rst embodiment of an auto
`mated material handling system according to the present
`invention;
`FIG. 3 is a block diagram of a second embodiment of the
`automated material handling system of FIG. 2;
`FIG. 4 is a block diagram of a third embodiment of the
`automated material handling system of FIG. 2;
`FIGS. Sa-Sb are block diagrams of a translating hoist
`vehicle accessing ?xed storage positions according to the
`present invention;
`FIG. 6 is a block diagram of the translating hoist vehicle of
`FIGS. Sa-Sb accessing material on a conveyer; and
`FIG. 7 is a How diagram of a method of operating the
`automated material handling system of FIG. 2.
`
`DETAILED DESCRIPTION OF THE INVENTION
`
`20
`
`25
`
`30
`
`35
`
`40
`
`45
`
`50
`
`The entire disclosures of US. patent application No. Ser.
`No. 10/393,526 ?led Mar. 20, 2003 entitled AUTOMATED
`55
`MATERIAL HANDLING SYSTEM FOR SEMICONDUC
`TOR MANUFACTURING BASED ON A COMBINATION
`OF VERTICAL CAROUSELSAND OVERHEAD HOISTS,
`US. Provisional PatentApplication No. 60/389,993 ?led Jun.
`19, 2002 entitled AUTOMATED MATERIAL HANDLING
`SYSTEM FOR SEMICONDUCTOR MANUFACTURING
`BASED ON A COMBINATION OF VERTICAL CAROU
`SELS AND OVERHEAD HOISTS, and US. Provisional
`Patent Application No. 60/417,993 ?led Oct. 11, 2002
`entitled OFFSET ZERO FOOTPRINT STORAGE (ZFS)
`USING MOVING SHELVES OR A TRANSLATING
`HOIST PLATFORM, are incorporated herein by reference.
`
`65
`
`60
`
`4
`An Automated Material Handling System (AMHS) is dis
`closed that can load and unload Work-In-Process (WIP) parts
`to/from a WIP storage unit With increased e?iciency. The
`presently disclosed AMHS achieves such increased material
`handling ef?ciency by alloWing top-loading/unloading of
`storage bins in a vertical carousel WIP storage unit by an
`overhead hoist positioned above the respective storage bin.
`FIG. 1 depicts a conventional AMHS 100, Which may be
`employed to automatically store and transport WIP parts
`betWeen various Workstations and/ or processing machines in
`a product manufacturing environment, e. g., a clean environ
`ment for manufacturing Integrated Circuit (IC) chips. As
`shoWn in FIG. 1, the conventional AMHS 100 comprises a
`WIP storage unit (“stocker”) 102 and an overhead hoist trans
`port subsystem 104. The WIP stocker 102 includes input and
`output ports 111-112, and the overhead hoist transport sub
`system 104 includes a suspended track 108 and a plurality of
`overhead hoist transport vehicles 105-106 con?gured to
`travel on the track 108. In a typical mode of operation, the
`WIP parts are transported in a cassette pod 110 such as a Front
`Opening Uni?ed Pod (FOUP). The ?rst overhead transport
`vehicle 105 travels along the track 108 and stops at a position
`suitable for unloading the FOUP 110 into the input port 111 or
`for loading another FOUP from the output port 112 of the
`stocker 102. Further, the second overhead transport vehicle
`106 Waits on the track 108 until the ?rst overhead transport
`vehicle 105 ?nishes unloading/loading the FOUP and moves
`out of the Way.
`In the conventional AMHS 100, FOUPs are unloaded from
`the overhead hoist into the input port 111, loaded from the
`output port 112 into the overhead hoist, or otherWise accessed
`from Within the stocker 102 by a robotic arm 107, Which may
`provide up to three or more axes of movement. Further, the
`minimum amount of time required to access the FOUPs from
`the stocker 102 generally determines the stocker throughput,
`Which dictates the number of stockers needed to support the
`desired production level. Accordingly, complex movements
`of the multi-axis robotic arm 107 for accessing the FOUPs
`may cause the minimum move time to increase, thereby
`increasing both the number of stockers needed in the AMHS
`100 and the overall cost of the material handling system.
`FIG. 2 depicts an illustrative embodiment of anAutomated
`Material Handling System (AMHS) 200, in accordance With
`the present invention. In the illustrated embodiment, the
`AMHS 200 comprises an overhead hoist transport subsystem
`204, and at least one vertical carousel WIP storage unit
`(“stocker”) 202 including a plurality of storage bins such as a
`carousel storage bin 203. The vertical carousel WIP stocker
`202 is con?gured to alloW an overhead hoist in the overhead
`hoist transport subsystem 204 to access WIP parts directly
`from a selected one of the carousel storage bins.
`It is noted that like the conventional AMHS 100 (see FIG.
`1), the AMHS 200 of FIG. 2 may be employed in a clean
`environment for manufacturing IC chips such as a 200 mm or
`300 mm FAB plant, or any other suitable product manufac
`turing environment. As shoWn in FIG. 2, the IC chip manu
`facturing environment includes ?rst and second ?oors 220
`and 226, and a ceiling 214. The ?rst ?oor 220 typically
`comprises a Waf?e slab made of reinforced concrete, and the
`second ?oor 226 comprises a raised ?oor located above the
`waffle slab 220. The vertical carousel stocker 202 is posi
`tioned on the waffle slab 220. Further, Workstations and/or
`processing machines (not shoWn) con?gured to perform vari
`ous process steps for fabricating the IC chips are positioned
`on the raised ?oor 226, Which is typically covered With an
`electrically nonconductive material and designed to meet spe
`ci?c loading and seismic requirements. For example, the
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`US 8,197,172 B2
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`5
`raised ?oor 226 may be located a distance 228 (about 0.6 m)
`above the waffle slab 220 and a distance 224 (greater than or
`equal to about 4.15 m) beloW the ceiling 214.
`In the presently disclosed embodiment, the vertical carou
`sel stocker 202 includes a housing 252, and ?rst and second
`pulleys 250-251 and a belt 254 disposed Within the housing
`252. As shoWn in FIG. 2, the carousel storage bins (e.g., the
`storage bin 203) are coupled to the belt 254 at various spaced
`locations along the belt, and the belt 254 is looped betWeen
`the ?rst and second pulleys 250-251 to alloW the storage bins
`to be rotatably positioned along the belt path by driving one of
`the pulleys 250-251. For example, the vertical carousel
`stocker 202 may have a height 218 (about 3.85 m). The top of
`the vertical carousel stocker 202 may therefore be a distance
`216 (about 3.25 m) above the raised ?oor 226.
`As described above, the vertical carousel stocker 202 is
`con?gured to alloW an overhead hoist to access WIP parts,
`e.g., semiconductor Wafers, directly from one of the carousel
`storage bins. In the illustrated embodiment, the portion of the
`stocker housing 252 near the ceiling 214 is at least partially
`open to alloW top-loading/unloading of the selected carousel
`storage bin. Further, each carousel storage bin comprises a
`?xed shelf, and the semiconductor Wafers are loaded into
`cassette pods such as a Front Opening Uni?ed Pod (FOUP)
`210 disposed on the shelf 203. For example, each FOUP 210
`may hold one or more semiconductor Wafer lots, thereby
`alloWing the overhead hoist to access multiple Wafer lots in a
`single carousel storage bin simultaneously.
`The overhead hoist transport subsystem 204 includes a
`suspended track 208 and at least one overhead hoist transport
`vehicle 205 con?gured for traveling on the track 208. The
`suspended track 208 de?nes at least one predetermined route
`passing over the vertical carousel stocker 202, thereby alloW
`ing the overhead transport vehicle 205 to access a FOUP
`directly from one of the carousel storage bins positioned
`approximately at the top of the stocker 202. For example, the
`overhead transport vehicle 205 may extend a distance 222
`(about 0.9 m) from the ceiling 214.
`In an illustrative mode of operation, the selected carousel
`storage bin, e.g., the storage bin 203 containing the FOUP
`210, is positioned approximately at the top of the vertical
`carousel stocker 202 underneath the track 208. The overhead
`transport vehicle 205 is then moved along the track 208 to a
`position substantially directly above the storage bin 203.
`Next, the overhead hoist is loWered from the overhead trans
`port vehicle 205 through the opening in the stocker housing
`252 toWard the storage bin 203. For example, the overhead
`hoist may be loWered in a direction parallel to the longitudinal
`axis L l of the stocker. The overhead hoist is then operated to
`pick the FOUP 210 directly from the storage bin 203 for
`subsequent transport to a Workstation or processing machine
`on the IC chip manufacturing ?oor. It is understood that the
`overhead hoist may alternatively be operated to place a FOUP
`in the carousel storage bin 203.
`FIG. 3 depicts an alternative embodiment 300 of the
`AMHS 200 (see FIG. 2). As shoWn in FIG. 3, the AMHS 300
`comprises an overhead hoist transport system 304, and at
`least one vertical carousel WIP stocker 302 including a plu
`rality of storage bins such as a slide-mounted storage bin 332.
`Like the vertical carousel stocker 202, the vertical carousel
`stocker 302 is con?gured to alloW an overhead hoist in the
`overhead hoist transport system 304 to access WIP parts, e.g.,
`semiconductor Wafers, directly from a selected one of the
`carousel storage bins.
`Speci?cally, the AMHS 300 may be employed in an IC
`chip manufacturing environment including a ceiling 314, a
`Waf?e slab 320, and a raised ?oor 326 located above the
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`Waf?e slab 320. As shoWn in FIG. 3, the vertical carousel
`stocker 302 is positioned on the Waf?e slab 320. For example,
`the raised ?oor 326 may be located a distance 328 (about 0.6
`m) above the waffle slab 320 and a distance 324 (greater than
`about 5.4 m) beloW the ceiling 314. Further, the vertical
`carousel stocker 302 includes a housing 352, and ?rst and
`second pulleys 350-351 and a belt 354 disposed Within the
`housing 352. The carousel storage bins (e.g., the slide
`mounted storage bin 332) are coupleable to the belt 354 at
`various spaced locations along the belt, and the belt 354 is
`looped betWeen the ?rst and second pulleys 350-351 to alloW
`the storage bins to be rotatably positioned along the belt path
`by driving one of the pulleys 350-351. For example, the
`vertical carousel stocker 302 may have a height 318 (about 6
`m).
`As described above, the vertical carousel stocker 302 is
`con?gured to alloW an overhead hoist to access the semicon
`ductor Wafers directly from one of the carousel storage bins.
`In the illustrated embodiment, at least one side of the housing
`352 is at least partially open to alloW the selected carousel
`storage bin to be extracted from Within the housing 352, and
`to alloW subsequent top-loading/unloading of the selected
`storage bin by the overhead hoist. Speci?cally, the AMHS
`300 further includes at least one extraction mechanism 330,
`Which Works to extract the semiconductor Wafers from Within
`the stocker 302, and to suitably position the material relative
`to a suspended track 308 included in the overhead hoist trans
`port subsystem 304. It is noted that each storage bin may
`comprise either a movable or ?xed shelf. Further, the semi
`conductor Wafers are loaded into cassette pods such as a
`FOUP 310 disposed on the shelf 332.
`The overhead hoist transport subsystem 304 includes the
`suspended track 308 and at least one overhead hoist transport
`vehicle 305 con?gured to travel on the track 308. The track
`308 de?nes at least one predetermined route passing parallel
`to the vertical carousel stocker 302, thereby alloWing the
`overhead transport vehicle 305 to access a FOUP directly
`from a selected one of the slide-mounted storage bins.
`In an illustrative mode of operation, the selected slide
`mounted storage bin, e. g., the storage bin 332 containing the
`FOUP 310, is positioned to alloW the extraction mechanism
`330 to extract the storage bin 332 from Within the stocker 302
`and to position the storage bin 332 directly underneath the
`track 308. It is noted that the extraction mechanism 330 may
`be incorporated into the stocker 302 and con?gured to move
`the storage bin 332 along a single servo-controlled axis 398.
`The overhead transport vehicle 305 is then moved along the
`track 308 to a position directly above the extracted storage bin
`332. Next, the overhead hoist is loWered from the overhead
`transport vehicle 305 toWard the storage bin 332, e.g., in a
`direction parallel to the longitudinal axis L2 of the stocker.
`The overhead hoist is then operated to pick the FOUP 310
`directly from the storage bin 332 for subsequent transport to
`a Workstation or processing machine on the IC chip manu
`facturing ?oor. It is appreciated that the overhead hoist may
`alternatively be operated to place a FOUP in the carousel
`storage bin 332.
`FIG. 4 depicts a detailed embodiment 400 of the AMHS
`300 (see FIG. 3). In the illustrated embodiment, the AMHS
`400 comprises an overhead hoist transport system 404 and a
`vertical carousel stocker 402. The overhead hoist transport
`system 404 includes a suspended track 408 and an overhead
`hoist transport vehicle 405 con?gured for traveling on the
`track 408. For example, the overhead transport vehicle 405
`may extend a distance 436 (about 0.9 m) from the track 408.
`The vertical carousel stocker 402 includes a plurality of car
`ousel storage bins such as a storage bin 432 disposed Within
`
`Daifuku Exhibit 1003, Page 12 of 15
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`

`

`US 8,197,172 B2
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`7
`the stocker housing. For example, the storage bin 432 may be
`a distance 438 (about 2.6 m) above the raised IC chip manu
`facturing ?oor.
`As described above, a FOUP 410 is extracted from Within
`the stocker housing to alloW subsequent top-loading/unload
`ing of the selected storage bin. The overhead transport vehicle
`405 further includes an overhead hoist 431 having a gripper
`con?gured to top-load/unload the FOUP 410 to/from the
`storage bin 432. In the preferred embodiment, the hoist grip
`per 430 is mounted on a translating stage to alloW the over
`head hoist to pick/place a cassette pod to either side of the
`overhead transport vehicle 405.
`FIGS. 5a-5b depict a translating hoist vehicle subsystem
`704 accessing ?xed storage positions. In the illustrated
`embodiment, the translating hoist vehicle subsystem 704
`includes a suspended track 708, and an overhead hoist trans
`port vehicle 705 con?gured to travel on the track. The over
`head transport vehicle 705 is con?gured to pick/place a FOUP
`710 to a ?xed storage position 732. For example, the overhead
`transport vehicle 705 may extend a distance 736 (about 0.9 m)
`beloW the ceiling 714, and the storage position 732 may be
`disposed a distance 738 (about 2.6 m) above the raised IC chip
`manufacturing ?oor. Further, the ceiling 714 may be a dis
`tance 790 (about 3.66 m) above the raised ?oor.
`The overhead transport vehicle 705 is con?gured to pick
`(and place) the FOUP 710 to a position located directly beloW
`the suspended track 708. To that end, the overhead hoist
`vehicle 705 includes a hoist gripper 731 mounted to a trans
`lating stage and con?gured to extend from the vehicle 705,
`pick up the FOUP 710, and retract back to the vehicle 705,
`thereby moving the FOUP 710 Within the overhead transport
`vehicle 705 (see FIG. 5b). In the preferred embodiment, the
`translating stage is con?gured to alloW the overhead hoist to
`pick/place a cassette pod to either side of the overhead trans
`port vehicle 705. Once the FOUP 710 is held by the hoist
`gripper 730, the overhead transport vehicle 705 transports it
`to a Workstation or processing machine on the IC chip manu
`facturing ?oor.
`FIG. 6 depicts a translating hoist vehicle system 800
`accessing material either stored or moving on a conveyer 895.
`Speci?cally, an overhead hoist transport subsystem 804 is
`employed to directly pick or place a FOUP 810 to the over
`head rail-based conveyer 895. In the illustrated embodiment,
`the overhead hoist transport subsystem 804 includes a sus
`pended track 808 and an overhead hoist transport vehicle 805
`con?gured to travel on the track 808. For example, the over
`head transport vehicle 805 may extend a distance 836 (about
`0.9 m) beloW the track 808 and be disposed a distance 892
`(about 0.35 m) above the rail-based conveyer 895. Further,
`the overhead rail 898 may be a distance 838 (about 2.6 m)
`above the raised IC manufacturing ?oor. It should be under
`stood that the rail 898 extends in a direction perpendicular to
`the plane of the draWing. The translating hoist vehicle system
`800 further includes a process tool load port 899.
`The overhead transport vehicle 805 may be employed to
`perform top-loading/unloading of the rail-based conveyer
`895. To that end, the overhead transport vehicle 805 includes
`an overhead hoist 831 having a hoist gripper 835, Which is
`mounted to a translating stage 833 con?gured to alloW both
`horizontal and vertical motion, as indicated by the directional
`arroWs 870 and 871, respectively. In an illustrative mode of
`operation, the rail-based conveyer 895 is moved so that the
`FOUP 810 is positioned directly underneath the overhead
`hoist 831. The hoist gripper 835 is then loWered via the
`translating stage 833 toWard the FOUP 810, and operated to
`pick the FOUP 810 directly from the conveyer 895. Next, the
`hoist gripper 835 carrying the FOUP 810 i