(12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT)
`
`(19) World Intellectual Property
`Organization
`International Bureau
`
`(43) lntemational Publication Date
`21 October 2004 (21.10.2004)
`
` (10) International Publication Number
`
`WO 2004/090577 A3
`
`(51) International Patent Classification7:
`27/42, 27/58
`
`G03B 27/32,
`
`(21) International Application Number:
`PCT/IB2004/001259
`
`(22) International Filing Date:
`
`17 March 2004 (17.03.2004)
`
`(25) Filing Language:
`
`(26) Publication Language:
`
`English
`
`English
`
`(30) Priority Data:
`60/462,499
`
`11 April 2003 (11.04.2003)
`
`US
`
`CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI,
`GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE,
`KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD,
`MG, MK, MN, MW, MX, MZ, NA, NI, NO, NZ, OM, PG,
`PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SY, TJ, TM,
`TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM,
`ZW.
`
`(84) Designated States (unless otherwise indicated, for every
`kind of regional protection available): ARIPO (BW, GH,
`GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZM, ZW),
`Eurasian (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM), Euro—
`pean (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR,
`GB, GR, HU, IE, IT, LU, MC, NL, PL, PT, RO, SE, SI, SK,
`TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW,
`ML, MR, NE, SN, TD, TG).
`
`(71) Applicant (for all designated States except US): NIKON
`CORPORATION [JP/JP];
`2—3, Marunouchi 3—chome,
`Chiyoda—ku, Tokyo 100—8331 (JP).
`
`Declaration under Rule 4.17:
`
`ofinventorship (Rule 4.17(iv))for US only
`
`(72) Inventor; and
`(75) Inventor/Applicant (for US only): BINNARD, lVIichael
`[US/US]; 2444 Coronet Boulevard, Belmont, CA 94000
`(US).
`
`with international search report
`before the expiration of the time limit for amending the
`claims and to be republished in the event of receipt of
`amendments
`
`Published:
`
`(74) Agent: ROEDER, Steven, G.,; The Law Office of Steven
`G. Roeder, 5560 Chelsea Ave., La Jolla, CA 92037 (US).
`
`(88) Date of publication of the international search report:
`21 April 2005
`
`(81) Designated States (unless otherwise indicated, for every
`kind of national protection available): AE, AG, AL, AM,
`AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN,
`
`For two—letter codes and other abbreviations, refer to the ”Guid—
`ance Notes on Codes and Abbreviations ” appearing at the begin—
`ning of each regular issue of the PCT Gazette.
`
`(54) Title: MAINTAINING IMMERSION FLUID UNDER A LITHOGRAPHIC PROJECTION LENS
`
`Nikon
`
`Exhibit1018
`
`Page’l
`
`
`
`04/090577A3|||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
`
`(57) Abstract: An apparatus and method for maintaining immersion fluid (212) in the gap adjacent the projection lens (16) during
`the exchange of a work piece (208) in a lithography machine (10) is disclosed. The apparatus and method includes an optical as—
`sembly (16) configured to project an image onto a work piece (208) and a stage assembly (202) including a work piece table (204)
`c configured to support the work piece (208) adjacent the optical assembly (16). An environmental system (26) is provided to supply
`N and remove an immersion fluid (212) from a gap between the optical assembly (16) and the work piece (208) on the stage assembly
`O (202). After exposure of the work piece (208) is complete, an exchange system (216) removes the work piece (208) and replaces it
`with a second work piece. An immersion fluid containment system (214) is provided to maintain the immersion liquid (212) in the
`gap during removal of the first work piece (208) and replacement with the second work piece.
`
`Nikon Exhibit 1018 Page 1
`
`

`

`International application No.
`INTERNATIONAL SEARCH REPORT
`PCT/IBO4/01259
`
`CLASSIFICATION OF SUBJECT MATTER
` A.
`
`
`IPC(7)
`:
`G03B 27/32, 27/42, 27/58
`
`
`US CL
`:
`355/53, 72, 77
`
`
`According to International Patent Classification (IPC) or to both national classification and IPC
`B.
`FIELDS SEARCHED
`
`
`Minimum documentation searched (classification system followed by classification symbOIS)
`U.S.
`: 355/53, 72, 77, 55; 356/399, 400
`
`
`
`Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched
`
` Electronic data base consulted during the international search (name of data base and, where practicable, search terms used)
`
`
`(355/53,55,72,77.ccls. or 356/399,400.ccls.) and immersion
`
` C.
`
`DOCUMENTS CONSIDERED TO BE RELEVANT
`
`Citation of documenIL with indication, where appropriate, ofthe relevant passages
`Relevant to claim No.
`Category *
`
`
`
`
`1P 10-303114 A (USHIDA ET AL) 13 November 1998 (13.11.1998) See figures 1 and 5
`1, 14-17, 20—22, 32
`
`and paragraphs # 15, 17—19, 24, and 41 of translation
`...........
`2-13,18,19,23-31,
`
`
`33—45
`
`1-45
`
`
`
`JP 06-124873 A (KAZUO) 06 May 1994 (06.05.1994) See figures 1 and 11.
`
` JP-10-340846 A (KUDO) 22 December 1998 (22.12.1998) See figures l and 2
`1-45
`
`
`
`US 5,610,683 A (TAKAHASHI)
`11 March 1997 (11.03.1997) Sec figures 1 and 2
`1—45
`
`
`US 5,825,043 A (SUWA) 20 October 1998 (20.10.1998) See figures 9 and 10.
`1-45
`
`
`
`145
`
`
`US 4,509,852 A (TABARELLI ET AL) 09 Aprill 1985 (09.04.1985) See figures 3 and
`4
`
`”A"
`
`"E“
`
`“L"
`
`"0"
`
`‘1’"
`
`docutnent defining the general state of the art which is nor considered to be
`of particular relevance
`
`earlier application or patent published on or after the international filing date
`
`document which may throw doubts on priority claim(s) or whichIs cited to
`establish the publication date of another citation or other special reason (as
`specified)
`
`document referring to an oral disclosure. use, exhibition or other means
`
`document published prior to the international filing date but later than the
`priority date claimed
`
`“X“
`
`“Y"
`
`u& w
`
`document of particular relevance; the claimed invention cannot be
`considered to involve an inventive step when the document is
`combined with one or more other such documents such combination
`
`being obvious to a person skilled in the art
`document member ot the same patent family
`
`
`
`
`D
`
`See patent family annex
`1:] Further documents are listed in the continuation of Box C.
`
`later document published after the international filing date or priority
`“T“
`*
`Special categories of cited documents:
`date and not in conflict with the application but cited to undersrand the
`
`
`principle or theory underlying the invention
`
`
`document of particular relevance; the claitned invention cannot be
`considered novel or cannot be considered to involve an inventive step
`
`
`when the document is taken alone
`
`
`
`
`
`
`
`
`Date of mailing of the international seafih reboots
`
`Date of the actual completion of the international search
`
`
` 22 December 2004 (22.12.2004)
`
`Authorized officer
`Name and mailing address of the ISA/US
`
`
`Mail Stop PCT. Attn: ISA/US
`Alan A. Mathews
`
`
`Commissioner for Patents
`P.O. Box 1450
` Telephone No.
`(571) 27
`
`Alexandria, Virginia 22313-1450
`
`Facsimile N0. (703) 305—3230
`
`Form PCT/ISA/210 (second sheet) (January 2004)
`
`
`
`Nikon
`
`Exhibit1018
`
`PageZ
`
`Nikon Exhibit 1018 Page 2
`
`

`

`International application No.
`
`
`
`Box No. II
`
`
`INTERNATIONAL SEARCH REPORT
`
`PCT/IBO4/01259
`
`Observations where certain claims were found unsearchable (Continuation of item 2 of first sheet)
`
`This international search report has not been established in reSpect of certain claims under Article 17(2)(a) for the following reasons:
`
`I
`
`l.
`
`[:1
`
`Claims Nos.:
`because they relate to subject matter not required to be searched by this Authority, namely:
`
`[\3 El
`
`Claims Nos.:
`because they relate to parts of the international application that do not comply with the prescribed requirements to such
`an extent that no meaningful international search can be carried out, specifically:
`
`3.
`
`[:l
`
`Claims Nos.:
`because they are dependent claims and are not drafted in accordance with the second and third sentences of Rule 6.4(a).
`
`Box No. [II Observations where unity of invention is lacking (Continuation of item 3 of first sheet)
`
`This International Searching Authority found multiple inventions in this international application, as follows:
`
`
`
`EDD
`
`
`
`
`As all required additional search fees were timely paid by the applicant, this international search report covers all
`searchable claims.
`
`As all searchable claims could be searched without effort justifying an additional fee, this Authority did not invite
`payment of any additional fee.
`As only some of the required additional search fees were timely paid by the applicant, this international search report
`covers only those claims for which fees were paid, specifically claims Nos.:
`
`No required additional search fees were timely paid by the applicant. Consequently, this international search report is
`restricted to the invention first mentioned in the claims; it is covered by claims Nos.:
`
`
`
`Remark on Protest
`
` E]
`
`
`1:1
`The additional search fees were accompanied by the applicant’s protest.
`D No protest accompanied the payment of additional search fees.
`
`
`
`
`
`
`Form PCT/ ISA/210 (continuation of first sheet(2)) (January 2004)
`
`Nikon
`
`Exhibit1018
`
`Page3
`
`Nikon Exhibit 1018 Page 3
`
`