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`A projection exposure method capable of keeping a liquid (7) filled between a projection optical system (PL) and a wafer (W) even
`while the wafer (W) is being moved when a liquid immersion method is used to conduct an exposure, wherein a discharge nozzle (21a) and
`inflow nozzles (23a, 23b) are disposed so as to hold a lens (4) at the tip end of the projection optical system (PL) in an X direction. When the
`wafer (W) is moved in a -X direction by an XY stage (10), a liquid (7) controlled to a preset temperature is supplied from a liquid supply
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`and the liquid (7) is recovered from the surface of the wafer (W) by a liquid supply device (6) via a recovery pipe (23) and the inflow nozzles
`(23a, 23b), the supply amount and recovery amount of the liquid (7) being regulated according to a moving Speed of the wafer (W).
`
`Nikon
`
`Exhibit 1011
`
`Page 1
`
`Nikon Exhibit 1011 Page 1
`
`

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`WO 99/49504
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`Exhibit 1011
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`Page 3
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`Nikon Exhibit 1011 Page 3
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`WO 99149504
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`Exhibit 1011
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`Page 4
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`Nikon Exhibit 1011 Page 4
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`

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`WO 99/49504
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`PCT/JP99/01262
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`Exhibit 1011
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`Page 5
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`Nikon Exhibit 1011 Page 5
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`

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`WO 99/49504
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`Nikon
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`Exhibit 1011
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`Page 6
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`Nikon Exhibit 1011 Page 6
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`

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`WO 99/49504
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`PCT/JP99/01262
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`Nikon
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`Exhibit 1011
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`Page 7
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`Nikon Exhibit 1011 Page 7
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`

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`WO 99/49504
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`Exhibit 1011
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`Page 8
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`Nikon Exhibit 1011 Page 8
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`WO 99/49504
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`Nikon Exhibit 1011 Page 9
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`WO 99/49504
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`Nikon Exhibit 1011 Page 10
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`Nikon Exhibit 1011 Page 11
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`Page 12
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`Nikon Exhibit 1011 Page 12
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`Nikon Exhibit 1011 Page 13
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`Nikon Exhibit 1011 Page 14
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`Exhibit 1011
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`Page 15
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`Nikon Exhibit 1011 Page 15
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`

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`WO 99/49504
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`PCT/JP99/01262
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`Exhibit 1011
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`Page 16
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`Nikon Exhibit 1011 Page 16
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`

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`WO 99/49504
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`PCT/JP99/01262
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`15
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`Exhibit 1011
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`Page 17
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`Nikon Exhibit 1011 Page 17
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`

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`WO 99/49504
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`PCT/JP99/01262
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`Exhibit 1011
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`Nikon Exhibit 1011 Page 18
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`Exhibit 1011
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`Page 19
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`Nikon Exhibit 1011 Page 19
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`Exhibit 1011
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`Page 20
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`Nikon Exhibit 1011 Page 20
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`Exhibit 1011
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`Page 21
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`Nikon Exhibit 1011 Page 21
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`WO 99/49504
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`Exhibit 1011
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`Nikon Exhibit 1011 Page 22
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`Exhibit 1011
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`Nikon Exhibit 1011 Page 23
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`Exhibit 1011
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`Nikon Exhibit 1011 Page 24
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`Exhibit 1011
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`Page 25
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`Nikon Exhibit 1011 Page 25
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`WO 99/49504
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`Exhibit 1011
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`Page 26
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`Nikon Exhibit 1011 Page 26
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`Nikon
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`Exhibit 1011
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`Page 27
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`Nikon Exhibit 1011 Page 27
`
`

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`WO 99/49504
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`PCT/JP99/01262
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`Nikon
`
`Exhibit 1011
`
`Page 28
`
`Nikon Exhibit 1011 Page 28
`
`

`

`WO 99/49504
`
`PCT/JP99/01262
`
`27
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