`BEFORE THE PATENT TRIAL AND APPEAL BOARD‘
`
`§ Petition for Inter Partes Review
`§
`§ Attorney Docket No.: 34789.98 '
`§
`§ Customer No.:
`§
`§ Real Party in Interest:
`Taiwan
`Semiconductor Manufacturing Company,
`Ltd. and TSMC North America Corp.
`
`27683
`
`§ §
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`In re patent of: Chistyakov
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`US. Patent No. 6,896,773
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`Issued: May 24, 2005
`
`Title: High Deposition Rate Sputtering
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`PETITIONER POWER OF ATTORNEY PURSUANT TO 37 CFR 42.10(b)
`FOR PETITION FOR INTER PAR TES REVIEW ;
`
`Petitioners Taiwan Semiconductor Manufacturing Company, Ltd. and TSMC North
`America Corp. hereby appoint the Practitioner(s) associated with Customer Number 27683, as
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`its attorney(s) to prosecute and to transact all business in the Patent Trial & Appeal Board of the
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`United States Patent and Trademark Office connected with Inter Partes Review of the above-
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`identified patent.
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`Please direct all communication regarding this Petition to Customer Number 27683:
`
`David M. O’Dell
`
`HAYNES AND BOONE, LLP
`2323 Victory Ave. Suite 700
`Dallas, TX 75219
`
`David L. McCombs
`
`HAYNES AND BOONE, LLP
`2323 Victory Ave. Suite 700
`Dallas, TX 75219
`
`Phone: (972) 739-8635
`Fax: (214) 200-0853
`david.odell.ipr@haynesboone.com
`
`(214) 651—5533
`Fax: (214) 200—0853
`david.mccombs@haynesboone.com
`
`USPTO Customer No. 27683
`
`USPTO Customer No. 27683
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`USPTO Reg. No. 42,044
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`USPTO Reg. No. 32,271
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`The undersigned is authorized to sign this Power of Attorney on behalf of the Petitioners.
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`Taiwan Semiconductor Manufacturing
`Company, Ltd
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`By: EM%
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`TSMC North America Corp.
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`By:
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`Printed Name:
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