United States Patent [19]
`Lin et al.
`
`111111
`
`1111111111111111111111111111111111111111111111111111111111111
`US005661591A
`[11] Patent Number:
`[45] Date of Patent:
`
`5,661,591
`*Aug. 26, 1997
`
`[54] OPTICAL SWITCH HAVING AN ANALOG
`BEAM FOR STEERING LIGHT
`
`[75]
`
`Inventors: Tsen-Hwang Lin; Philip A. Congdon;
`Gregory A. Magel, all of Dallas;
`James M. Florence, Richardson, all of
`Tex.; Robert Mark Boysel, Hopewell
`Jet, N.Y.
`
`[73] Assignee: Texas Instruments Incorporated,
`Dallas, Tex.
`
`[ * ] Notice:
`
`The term of this patent shall not extend
`beyond the expiration date of Pat. No.
`5,629,794.
`
`[21] Appl. No.: 537,179
`
`Sep. 29, 1995
`
`[22] Filed:
`Int. CI.6
`•••.••••••••••••••••••••••••••••••••••...•••••.•...•. G02B 26/00
`[51]
`[52] U.S. CI ............................ 359/290; 359/214; 359/850
`[58] Field of Search ..................................... 359/290, 291,
`359/212, 213, 214, 846, 847, 848, 849,
`850, 851
`
`[56]
`
`References Cited
`
`U.S. PATENT DOCUMENTS
`
`Primary Examiner-Georgia Y. Epps
`Assistant Examiner-Dawn-Marie Bey
`Attorney, Agent, or Finn-Robert C. Klinger; James C.
`Kesterson; Richard L. Donaldson
`
`[57]
`
`ABSTRACT
`
`A spatial light modulator (40,70,80,90,130) operable in the
`analog mode for light beam steering or scanning applica(cid:173)
`tions. A deflectable mirror ( 42, 72) and which may be
`hexagonal (92, 132) is supported by a torsion hinge ( 44,86,
`94) ends along a torsion axis. A plurality of flexure hinges
`(48,82,106) are provided to support the ends of the mirror
`(42,72,92,132) and provide a restoration force. The combi(cid:173)
`nation of the torsion hinges and the flexure hinges realizes
`a deflectable pixel that is operable in the linear range for a
`large range of address voltages. The flexure hinges also
`maintain a flat undeflected state when no address voltage is
`applied, and prevent the pixel from collapsing. The pixel
`may be reinforced, such as about its perimeter (74) to ensure
`mirror flatness and prevent warping, even during extreme
`deflections of the mirror. The pixel is electrostatically
`deflected by applying an address voltage to an underlying
`address electrode (60,96,98). The hexagonal mirrors (92,
`132) allow a tightly packed mirror array, and have a closely
`circular surface area so as to efficiently reflect a light beam
`of circular cross section, such as a light beam from fiber
`optics.
`
`5,489,952
`
`2/1996 Gove et al .............................. 348n71
`
`16 Claims, 9 Drawing Sheets
`
`130
`
`140
`~
`
`Cisco Systems, Inc.
`Exhibit 1010, Page 1
`
`

`

`U.S. Patent
`
`Aug. 26, 1997
`
`Sheet 1 of 9
`
`5,661,591
`
`28
`26
`24
`
`FIG. 1A
`(PRIOR ART)
`
`28
`26
`
`INCIDENT
`LIGHT
`
`FIG. 1B
`(PRIOR ART)
`
`,------,..1 28
`~~~~~~ 26
`I 24
`-
`-
`- - ---
`22
`
`COL!J\PSED
`
`DEFLECTION
`
`FIG. 1C
`(PRIOR ART)
`
`0
`
`VCOLLAPSE
`
`VOLTAGE
`
`Cisco Systems, Inc.
`Exhibit 1010, Page 2
`
`

`

`U.S. Patent
`
`Aug. 26, 1997
`
`Sheet 2 of 9
`
`5,661,591
`
`~v
`DO
`DO
`
`DO
`DO
`
`900 FLAP
`
`FIG. 1D
`
`FIG. 1E
`
`[ I )
`[ I )
`[ I )
`
`I
`I
`I
`
`DIVING
`BOARDS
`FIG. 1F
`
`DO
`DO
`
`DO
`DO
`
`45° EXTENDED
`HINGE
`FIG. 1G
`
`900 EXTENDED
`HINGE
`FIG. 1H
`
`40
`'--..
`
`FIG. 2
`
`Cisco Systems, Inc.
`Exhibit 1010, Page 3
`
`

`

`U.S. Patent
`
`Aug. 26, 1997
`
`Sheet 3 of 9
`
`5,661,591
`
`INCIDENT
`LIGHT
`
`FIG. 3A
`
`54
`
`DEFLECTION
`
`FIG. 3B
`
`\OPERATING RANGE
`
`ADDRESS VOLTAGE
`
`70
`~
`
`r----------1
`
`r----------,
`I r--------, I
`I r--------1 I
`II
`II
`I
`I I
`II
`II
`I
`II
`I
`I
`I L ______ J
`I I
`t_. ________ _J
`:
`:
`:
`
`I
`
`:
`!
`:
`
`I
`I
`I
`I
`I
`
`l
`
`~:
`I L--------J I
`L __________ J
`
`72
`
`I I
`
`:I
`74
`! ! REINFORCING
`: :
`STRUCTURE
`
`r--------,
`I r------, I
`58 1 I
`: :
`::
`I L--------.J I
`L----------J
`
`I I
`I I
`I I
`I I
`I I
`
`FIG.
`
`Cisco Systems, Inc.
`Exhibit 1010, Page 4
`
`

`

`U.S. Patent
`
`Aug. 26, 1997
`
`Sheet 4 of 9
`
`5,661,591
`
`72
`
`74
`
`FIG. 5
`
`80
`~
`
`74
`REINFORCING
`STRUCTURE
`
`84
`82
`l_
`;
`0
`v--86 J
`r----------,
`r----------,
`I r----,..----, I
`I r--------,
`I I
`I I
`I I
`I I
`L. ______ J
`I
`I
`1...--------J
`
`82
`\
`I
`
`:-h
`-
`
`I I
`I
`I
`I
`I
`I
`I
`I
`I
`I
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`I
`I
`I
`I
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`I
`I
`I
`I
`I
`
`72
`
`-
`
`(
`82
`
`I
`
`82
`
`I
`I
`I
`r--------,
`I
`I r------., I
`I
`1 I
`I I
`I I
`I I
`________ J
`I I
`I I
`I I
`l ________ _J
`L----------J
`I
`I
`I
`L----------J
`I
`~'-86
`0
`\
`84
`FIG. 6
`
`Cisco Systems, Inc.
`Exhibit 1010, Page 5
`
`

`

`U.S. Patent
`
`Aug. 26, 1997
`
`Sheet 5 of 9
`
`5,661,591
`
`~I
`
`\
`
`\
`0
`
`(0
`0')
`
`0
`
`§I
`
`Cisco Systems, Inc.
`Exhibit 1010, Page 6
`
`

`

`U.S. Patent
`
`Aug. 26, 1997
`
`Sheet 6 of 9
`
`5,661,591
`
`Cisco Systems, Inc.
`Exhibit 1010, Page 7
`
`

`

`U.S. Patent
`
`Aug. 26, 1997 ·
`
`Sheet 7 of 9
`
`5,661,591
`
`~I
`
`11111
`
`Cisco Systems, Inc.
`Exhibit 1010, Page 8
`
`

`

`U.S. Patent
`
`Aug. 26, 1997
`
`Sheet 8 of 9
`
`5,661,591
`
`0
`
`~I I
`
`~I
`
`~I
`
`~I
`
`Cisco Systems, Inc.
`Exhibit 1010, Page 9
`
`

`

`U.S. Patent
`
`Aug. 26, 1997
`
`Sheet 9 of 9
`
`5,661,591
`
`~I
`D D
`
`D
`
`D
`
`~I
`
`D
`
`Cisco Systems, Inc.
`Exhibit 1010, Page 10
`
`

`

`Ser. No.
`
`1TILE
`
`FILING DAlE
`
`03-31-95
`
`07-27-93
`
`04-18-95
`
`12-21-93
`
`06-07-95
`
`04-18-95
`
`10
`
`15
`
`20
`
`FIELD OF THE INVENTION
`
`The present invention is generally related to spatial light
`modulators for modulating incident light and suitable as an
`optical switch, and more particularly, to a device having a
`selectively deflectable mirror being supported by at least one
`hinge for steering incident light in a direction being a
`function of the degree to which the mirror is deflected.
`
`5,661,591
`
`1
`OPTICAL SWITCH HAVING AN ANALOG
`BEAM FOR STEERING LIGHT
`
`CROSS REFERENCE TO REUITED
`APPLICXITONS
`
`Cross reference is made to the following commonly(cid:173)
`assigned co-pending patent applications, the teachings of
`which are incorporated herein by reference.
`
`2
`of mirrors can be modulated and directed to a projector lens
`and then focused on a display screen or a photoreceptor
`drum to form a light image. When the mirror is in one
`position, known as the "on" position, light is directed into
`5 the projector lens. In the other position, known as the "off"
`mirror position, light is directed to a light absorber. The
`DMD may also be monostable and operated in the analog
`mode, and finds use as a light switch, pixel steerer, optical
`shutter, scanner, and the like.
`For a more detailed discussion of the DMD device and
`systems incorporating the device, cross reference is made to
`U.S. Pat. No. 5,061,049 to Hornbeck, entitled "Spatial Light
`Modulator and Method"; U.S. Pat. No. 5,079,544 to
`08/414,831 Spatial Light Modulator with
`DeMond, et al, entitled "Standard Independent Digitized
`Superstructure Light Shield
`08/097,824 Microminiature, Monolithic,
`Video System"; and U.S. Pat. No. 5,105,369 to Nelson,
`Variable Electrical Device and
`entitled "Printing System Exposure Module Alignment
`Apparatus Including Same
`Method and Apparatus of Manufacture", each patent being
`08/424,021 Active Yoke Hidden Hinge
`assigned to the same assignee of the present invention, and
`Digital Micromirror Device
`08/171,303 Multi-Level Digital Micromirror
`the teachings of each are incorporated herein by reference.
`Device
`Gray scale of the pixels forming the image may be achieved
`08/482,477 Method and Device for Multi(cid:173)
`by pulse width modulation techniques of the mirrors, such as
`Format Television
`that described in U.S. Pat. No. 5,278,652, entitled "DMD
`08/455,475 Spatial Light Modulator Having
`an Analog Beam fur Steering
`Architecture and Timing for Use in a Pulse-Width Modu(cid:173)
`Light
`lated Display System", assigned to the same assignee of the
`08/424,021 Active Yoke Hidden Hinge
`present invention, and the teachings of each are incorporated
`Digital Micromirror Device
`25
`- - - - - - - - - - - - - - - - - - - - - herein by reference.
`Commonly assigned U.S. Pat. No. 4,662,746 to Hornbeck
`entitled "Spatial Light Modulator and Method", U.S. Pat.
`No. 4,710,732 to Hornbeck entitled "Spatial Light Modula-
`30 tor and Method", U.S. Pat. No. 4,956,619 to Hornbeck
`entitled "Spatial Light Modulator", and U.S. Pat. No. 5,172,
`262 to Hornbeck entitled "Spatial Light Modulator and
`Method" disclose various structures and methods of produc(cid:173)
`ing micro mechanical devices, specifically, monostable
`35 DMD SLM's suited for use in the analog mode, the teach(cid:173)
`ings of each incorporated herein by reference.
`Commonly assigned U.S. Pat. No. 5,096,279 to Hornbeck
`et al. entitled "Spatial Light Modulator and Method", U.S.
`Pat. No. 5,142,405 to Hornbeck entitled ''Bistable DMD
`40 Addressing Circuit and Method", and U.S. Pat. No. 5,212,
`582 to Nelson entitled "Electrostatically Controlled Pixel
`Steering Device and Method" disclose various structures
`and methods for producing the same that are bistable and
`suited for use in the digital mode, the teachings of each
`45 incorporated herein by reference.
`Referring to FIGS. lA-lH, these embodiments being
`disclosed in a commonly assigned U.S. Pat. No. 5,172,262,
`there is shown a monostable DMD spatial light modulator
`that can be operated in the analog mode. One pixel, gener-
`50 ally denoted at 20, is basically a flap covering a shallow well
`and includes a silicon substrate 22, a spacer 24, a hinge layer
`26, a pixel layer 28, a flap 30 formed in layers 26-28, and
`plasma etch access holds 32 in flap 30. The portion 34 of
`hinge layer 26 that in not covered by pixel layer 28 forms a
`55 hinge attaching flap 30 to the portion of layers 26--28
`supported by spacer 24. Pixel 20 is fabricated using a robust
`semiconductor process upon silicon substrate 22. Spacer 24
`may be an insulating positive photoresist or other polymer,
`hinge layer 26 and pixel layer 28 are both an aluminum,
`60 titanium and silicon alloy (fi: Si: Al), although these layers
`could also comprise of titanium tungsten, or other suitable
`materials. The hinge layer 34 may be about 800 Angstroms
`thick, wherein the pixel30 is much thicker to avoid cupping
`and warping, and may have a thickness of about 3,000
`65 Angstroms.
`Pixel 20 is operably deflected by applying a voltage
`between mirror 30 and an underlying address electrode 36
`
`BACKGROUND THE INVENTION
`Spatial light modulators (SLM's) have found numerous
`applications in the areas of optical information processing,
`projection displays, video and graphics monitors,
`televisions, and electrostatic printing. SLM' s have also
`found uses as optical switches, optical shutters, light valves,
`pixel steerers and so forth. SLM's are devices that modulate
`incident light in a spatial pattern to form a light image
`corresponding to an electrical or optical input. The incident
`light may be modulated in its phase, intensity, polarization,
`and/or direction. The light modulation may be achieved by
`a variety of materials exhibiting various electro-optic or
`magneto-optic effects, and by materials that modulate light
`by surface deformation.
`The present invention relates to SLM's of the foregoing
`type which may be used in a variety of devices, including
`light switches, light valves, pixel steerers and optical shut(cid:173)
`ters.
`A recent innovation of Texas Instrument Incorporated of
`Dallas, Tex. is the digital micromirror device or deformable
`mirror device, collectively known as the DMD. The DMD is
`a spatial light modulator comprising a monolithic single(cid:173)
`chip integrated circuit, typically having a high density array
`of 17 micron square deflectable micromirrors but may have
`other dimensions. These mirrors are fabricated over address
`circuitry including an array of memory cells and address
`electrodes. The mirrors may be bistable and be operated in
`the digital mode, the mirror being stable in one of two
`deflected positions. A source of light directed upon the
`mirror is reflected in one of two directions by the mirror.
`When used in the digital mode, incident light from the army
`
`Cisco Systems, Inc.
`Exhibit 1010, Page 11
`
`

`

`5,661,591
`
`3
`defined on substrate 22. Flap 30 and the exposed surface of
`electrode 36 form the two plates of an air gap capacitor, and
`the opposite charges induced on the two plates by the
`applied voltage exert electrostatic force attracting flap 30 to
`substrate 22. This attractive force causes flap 30 to bend at 5
`hinge 34 and be deflected toward substrate 22. Depending on
`the opposing surface area of the electrodes, the spacing
`therebetween, the differential voltage applied, and the com(cid:173)
`pliance of hinge 34, the degree of deflection of mirror 30 will
`vary. The deflection of mirror 30 is a function of the 10
`differential voltage, as graphically illustrated in FIG. IC. As
`shown, the greater the differential voltage, that is, the greater
`the voltage applied to mirror 30, the greater the degree of
`deflection.
`As also illustrated in FIG. IC, this deflection is nonlinear,
`and is not proportional to the voltage applied. A linear
`response, which may be the ideal response, is shown by the
`dotted line generally depicted at 38. The nonlinear relation(cid:173)
`ship is due to many reasons. First, the electrostatic force is
`a function of the inverse of the square of the distance
`separating the mirror 30 and address electrode 36. Secondly,
`the geometry and composition of the hinge affects the
`compliance of hinge 34. The thickness of mirror 30 prevents
`significant warping, but the thinness of hinge 34 allows for
`large compliance. The deflection of flap 30 is a highly
`nonlinear function of the applied voltage because the restor(cid:173)
`ing force generated by the bending of hinge 34 is approxi(cid:173)
`mately a linear function of the deflection, but the electro(cid:173)
`static force of attraction increases as the distance between
`the closest comer of flap 30 and electrode 36 decreases.
`Recall that the capacitance increases as the distance
`decreases so the induced charges both increase in quantity
`and get closer together. As shown in FIG. IC, the voltage at
`which mirror 30 becomes unstable and bends all the way to
`touch and short with electrode 36 is called the collapse
`voltage. The analog operating region is that region between
`zero deflection and the collapsed situation.
`FIG. lD-lH illustrate equivalent alternative embodi(cid:173)
`ments of the cantilever or leaf-type mirror 30 shown in FIG.
`1.
`
`40
`
`4
`hinges define the fiat position and provide a restoring force
`to achieve enlarged stable range of tilt angles. Through the
`combination of these hinges, the pixel is nearly monostable
`and will resist collapse. The hexagon pixel structure allows
`the pixels to be tightly arranged in an array, the hexagon
`pixel geometry also being suitable to reflect circular light
`beams such as those from fiber optics.
`The present invention comprises a spatial light modulator
`of the type which includes a generally planar hexagonal
`light-reflecting pixel, i.e. mirror, which is deflectable out of
`a first, normal position into a plurality of second positions.
`Light incident on the pixel is selectively modulated by being
`reflected from the pixel in selected directions, depending on
`the position of the pixel. The position of the pixel is
`15 dependent on a selected characteristic of an electrical signal,
`such as a voltage applied to an underlying address electrode.
`The deflection of the pixel stores potential mechanical
`energy in a pixel-supporting facility, this stored energy
`tending to return the pixel to the first, horizontal normal
`20 position. Preferably, this pixel-supporting facility includes a
`first torsion hinge connected between the pixel and the first
`stationary post and defining a torsion axis. Deflection of the
`pixel effects its rotation about the torsional axis of the first
`hinge. At least one second flexure hinge is connected
`25 between the pixel and a second stationary post Deflection of
`the pixel effects the flexure of the second hinge. By provid(cid:173)
`ing two types of hinges, deflection of the pixel is control(cid:173)
`lable for a large deflection range, and approximately pro(cid:173)
`portional to the electrical signal applied to the underlining
`30 address circuit, preferably being an electrode. The pixel is
`monostable and cannot collapse on the address electrode,
`unless of course, large address voltages are provided. The
`hexagonal geometry of the pixel is suited to reflect circular
`light beams, such as those from fiber optics, while permit-
`35 ting a tightly packed arrangement of pixel mirrors. Excellent
`accuracy of the pixel mirror tilt angle for light steering is
`achieved, with the second hinge providing a well-defined
`undefiected (fiat) position. Both the first hinge and the
`second hinge provide a restoration force.
`The points of connection of the first and second hinges to
`the pixel are separated about the perimeter of the pixel. The
`pixel has a generally orthogonal profile, with the first hinge
`being connected to the pixel at a mid-point of a first side
`thereof. The second hinge may be connected to the first side
`45 of the pixel as well in one embodiment. The second hinge
`may be connected to the pixel proximate the juncture of the
`first side of pixel and a second side of the pixel. The second
`hinge may also be connected to the second side of the pixel
`including the most distal portion of the pixel, from the
`50 torsional axis. The torsional axis of the first hinge is gener(cid:173)
`ally co-planar with the pixel, and the second hinge in its
`unfiexed state is oriented so as to be generally co-planar with
`the pixel and perpendicular to the torsional axis of the first
`hinge. The second hinge in its flexed state may define a
`55 curved or slightly twisted surface at its comer, such that each
`end remains co-planar with the surface to which it is
`attached.
`The characteristic of the first hinge is such that the
`deflection of the pixel out of the first position is predomi(cid:173)
`nantly rotational about the torsion axis. The characteristic of
`the second hinge is such that the first position of the pixel is
`predomin~tly determined by the second hinge. The char(cid:173)
`acteristics of both the hinges are such that the pixel is
`selectively deflectable out of the first position into a plurality
`65 of second positions determined by the selected characteristic
`of the electrical signal. The first and second hinges are
`respectively connected to the separated first and second
`
`When operating a spatial light modulator, such as of the
`type just discussed and referenced in FIG. lA-lH, it may be
`des~ed to operated the deflectable member in the analog
`reg1.0n, whereby the angle of deflection of mirror 30 is
`linearly proportional to the voltage applied. To operate the
`device as a light beam steerer, scanner, or light switch, it is
`desirable to precisely control the degree of deflection as so
`to precisely steer incident light to a receiver, such as a
`sensor. Therefore, in prior art designs, such as that shown in
`FIGS. lA-lH, it is imperative that a repeatable process be
`followed. In the practical world, however. process tolerances
`allow for some deviation form device to device. Thus, for a
`given voltage being applied to address electrode 36, the
`deflection of mirror 30 from device to device will vary
`slightly. Consequently, characterization of the device prior
`to implementation is necessary when the device is used in
`the analog mode.
`It is desired to provide a spatial light modulator suitable
`for use as an optical switch with a deflectable pixel well 60
`suited to be used in the analog mode.
`
`SUMMARY OF THE INVENTION
`
`The present invention achieves technical advantages as a
`spatial light modulator by providing a hexagon-shaped pixel
`supported by both a torsion hinge and at least one flexure
`hinge. The torsion hinges define the tilt axis, and the flexure
`
`Cisco Systems, Inc.
`Exhibit 1010, Page 12
`
`

`

`5,661,591
`
`5
`posts. In an alternative embodiment, the first and second
`hinges may be connected to the same post. The pixel may be
`reinforced to maintain flatness when undeflected, and when
`deflected out of the first position. Preferably, the reinforce(cid:173)
`ment may comprise the perimeter of the pixel being corru(cid:173)
`gated or ridged to provided rigidity and minimize interfering
`with incident light being modulated. Alternatively or
`additionally, cupping of the pixel may be minimized by
`providing radial corrugations or ridges.
`
`BRIEF DESCRIPTION OF THE DRAWINGS
`
`FIGS. lA-lH illustrate a prior art cantilever-type spatial
`light modulator, including a deflectable pixel deflectable as
`a function of an address voltage applied to an underlying
`address electrode;
`FIG. 2 is a perspective view of a spatial light modulator
`according to the present invention including a deflectable
`pixel supported both by a torsion hinge, and at least one
`flexure hinge connected proximate the corners thereof;
`FIG. 3A is a side view of the SLM of FIG. 2 with the
`torsion hinge posts removed, illustrating the pixel being
`deflected about the torsion hinge to steer incident light in a
`selected direction, the deflection of the pixel being a func(cid:173)
`tion of the voltage applied to the underlying address elec(cid:173)
`trode;
`FIG. 3B is a graph illustrating the linear deflection of the
`mirror as a function of the addressed voltage.
`FIG. 4 is a top view of an alternative preferred embodi(cid:173)
`ment of the pixel shown in FIG. 2, whereby the perimeter of
`the pixel is reinforced to insure the pixel is flat, rigid, and
`remains unflexed, even when pivoted about the torsional
`axis;
`FIG. 5 is a cross section taken along line 5-5 in FIG. 4,
`illustrating the reinforcing structure of the pixel comprising
`the pixel being corrugated about the perimeter;
`FIG. 6 is a top view of yet another alternative preferred
`embodiment wherein the torsion hinges and flexure hinges
`are supported by a common post;
`FIG. 7 is a perspective view of a spatial light modulator
`according to an alternative preferred embodiment of the
`invention including a hexagon-shaped pixel supported by a
`pair of torsion hinges, and a pair of flexure hinges;
`FIG. 8 is a top view of an array of hexagon shaped pixels
`of FIG. 7 illustrating the tightly packed arrangement of the
`pixels;
`FIG. 9 is a perspective view of a spatial light modulator
`according to another alternative preferred embodiment of
`the invention including an hexagon-shaped pixel elevated
`and overlapping underlying support superstructure;
`FIG. 10 is a partial cross section of the pixel shown in
`FIG. 9, illustrating the hexagon mirror supported by the
`underlying yoke; and
`FIG. 11 is a perspective view of an array of pixels
`comprised of pixels shown in FIG. 9.
`
`DEfAll..ED DESCRIPTION OF THE
`INVENTION
`Referring to FIG. 2, there is generally shown at 40 a
`monostable spatial light modulator according to the pre(cid:173)
`ferred embodiment of the present invention. SLM 40 is well
`suited to operate in the analog mode to selectively steer
`incident light in a direction being a function of an electrical
`input. The deflection of the SLM may be generally linear or
`nonlinear, as a function of the input electrical signal. The
`
`6
`pixel resists collapse on its underlying address electrode due
`to the unique combination of hinges.
`SLM 40 is a micromechanical structure formed using
`robust semiconductor processing. SLM 40 is seen to com-
`5 prise a generally rectangular reflective aluminum pixel 42
`being supported along its mid section by a pair of torsional
`hinges 44. Hinges 44 essentially bisect the mirror 42 and
`define a torsional axis therealong. Mirror 42 is also seen to
`be supported proximate each corner thereof by an L-shaped
`10 flexure-type hinge 48. Torsional hinges 44 extend from and
`are supported by a respective electrically conductive post 50,
`with the flexure hinges 48 being supported by a respective
`electrically conductive post 54. Each of posts 50 and 54 are
`supported upon a silicon substrate 56, this substrate 56 also
`15 supporting a pair of electrically conductive address elec(cid:173)
`trodes 60. Each of address electrodes 60 are connected to
`underlining address circuitry fabricated within substrate 56
`(not shown). Hinges 44 connect to mirror 42 in a pair of
`opposed notches 58, notches 58 permitting long and com-
`20 pliant hinges 44. While the hinges, mirror and support posts
`are preferably comprised of electrically conductive material,
`each or all could also be comprised of electrically non(cid:173)
`conductive material with the pixel having a light-reflective
`coating if desired. Hinges 48 could also have a serpentine
`25 shape, or be linear if desired. Hinges 48 could connect to
`pixel mirror 42 or either side proximate the corner of the
`adjoining sides, and limitation to the illustrated shapes of
`hinges 48 is not to be inferred.
`Referring to FIG. 3A the angular deflection of mirror 42
`30 about the torsional axis defined by hinges 44 is seen to be a
`function of the voltage potential applied to one of the
`address electrodes 60. With a bias voltage being applied to
`mirror 42 via posts 54 and hinges 48, and an address
`potential being applied to one of the two address electrodes
`60, this voltage potential induces an electrostatic attraction
`between the mirror 42 and the underlying address electrode
`60, thus creating an angular deflection of mirror 42, as
`shown. Torsional hinges 44 rotate or twist with mirror 42
`and provide restoring force in the form of a mechanical
`40 energy. Each of the four flexure hinges 48 also provide a
`restoring force, and deform or flex, as shown, when mirror
`42 deflects about the torsional axis defined by hinges 44.
`Hinges 48 also provide restoring force in the form of
`mechanical energy, and define a normal flat or undeflected
`45 position when no voltage potential exists.
`By way of illustration but with no limitation to the
`following dimensions or shapes, torsional hinges 44 are
`preferably comprised of a compliant material such as
`aluminum, an aluminum alloy or titanium tungsten, each
`50 having a thickness of about 500 Angstroms. Each of flexure
`hinges 48 are also comprised of a compliant metal, such as
`aluminum, an aluminum alloy, or titanium tungsten, each
`having a thickness of about 500 Angstroms. The length of
`each hinge 48 is approximately 10 microns. Each hinge 48
`55 extends from the respective post 54 a substantial length
`towards a respective torsional hinge 44 and is perpendicular
`therewith. Each flexure hinge 48 has a 90° bend proximate
`mirror 42, and is connected to the corner of pixel 42, at the
`juncture of two adjacent sides, as shown. The short segment
`60 of hinge 48 insures that a majority of the flexure of hinge 48
`is along the major length, with any twisting taking place at
`the corner thereof. With the hinge 48 being about 500
`Angstroms in thickness and having a length of about 10
`microns, the flexure of these hinges permits mirror 42 to
`65 deflect as a function of the voltage potential provided to one
`address electrode 60, as shown in FIG. 3A. The spacing of
`mirror 42 from electrodes 60 is about 1-10 microns. This
`
`35
`
`Cisco Systems, Inc.
`Exhibit 1010, Page 13
`
`

`

`5,661,591
`
`15
`
`20
`
`7
`analog operating range is represented as angle e. as shown
`in F1G. 3A. This corresponds to an input voltage of between
`0 and 20 volts. As pixel42 deflects angle 8, incident light is
`steered through a range of 28, as shown in FlG. 3A. As
`expected due to optical light properties, the angular range 5
`that incident light can be reflected is double the angular
`deflection of the pixel 42. In the present invention, pixel 42
`can be deflected with a linear or non-linear response,
`depending on the design, up to angle being about 10°. Thus,
`the range of steering light is 20°. The response curve of 10
`mirror 42 as a function of address voltage is shown in F1G.
`3B.
`With an address voltage being applied to one address
`electrode 60 being from 0 to 20 volts, mirror 42 is deflected
`proportional to the address voltage. When SlM 40 is
`operated as an optical switch or light steerer, incident light
`can be precisely steered to a receiver such as an optical
`sensor or scanner. The mirror tilt angle can be achieved with
`a excellent accuracy for pixel steering. The torsion hinges 44
`define the tilt axis, whereby the flexure hinges ·48 help
`achieve a controlled response and maintain mirror levelness
`when not addressed (undeflected). Both the torsion hinges
`and flexure hinges provide a mechanical restoration force
`and achieve a stable tilt range. With two flexure hinges 48
`being provided each side of the torsion axis, there is little 25
`possibility of a collapsed mirror, unless one of the hinges
`should break, which is not likely given the range of operable
`address voltages provided to address electrode 60. Compli(cid:173)
`ance of each of flexure 48 and torsion hinges 44 is excellent
`Referring now to FlG. 4, a top view of an alternative 30
`preferred embodiment of the present invention is shown as
`SLM 70, with a modified mirror 72 is shown, wherein like
`numerals refer to like elements of the first embodiment. To
`ensure that mirror 72 remains fiat and does not warp, even
`in an extreme deflected state, the perimeter of mirror 72 is 35
`reinforced. This reinforcement preferably is achieved by
`corrugating the perimeter of the mirror, shown as a trench
`shown at 74. Referring to F1G. 5, a cross section of mirror
`42 taken along line 5-5 in FlG. 4 illustrates how mirror 42
`is corrugated about the perimeter thereof. The trench 74 in 40
`the metal is one reliable way to reinforce mirror 72 to
`prevent warping or cupping, even when deflected about the
`torsion axis. Other equivalent methods of reinforcing could
`include increasing the thickness of mirror 72 about the
`perimeter thereof, like a rib or ridge, and grid:
`Referring now to F1G. 6, another alternative embodiment
`of the present invention is shown, as SLM 80, wherein like
`numerals refer to like elements. Each of flexure hinges 82
`are connected to one of posts 84 from which torsion hinges
`86 extend. This embodiment requires only two support posts 50
`as compared to the six support posts shown in FlG. 2. Again,
`each of the flexure hinges 82 extend from the respective
`posts 84 and connect to one corner of mirror 72, proximate
`the juncture of two adjacent sides. All the hinges provide a
`restoration force to return the mirror to a flat. undeflected 55
`state when no address voltage is applied to address electrode
`60. This embodiment permits a higher fraction of optically
`active surfaces since SLM elements can be placed closer
`together.
`Referring now to F1G. 7, there is generally shown at 90 a 60
`pixel according to another alternative preferred embodiment
`of the present invention. Pixel90 is seen to have a hexagonal
`shaped mirror 92 supported by a pair of torsion hinges 94
`over a pair of addressing electrodes 96 and 98. Each of the
`hinges 94 is supported by a support post 100 extending 65
`upward from a substrate 102. Also supporting mirror 98 is
`a pair of arcuately shaped flexure hinges 106. Each of
`
`8
`flexure hinges 106 is connected to the distal end of mirror 92
`at location 108, by a respective member 110. Each member
`110 perpendicularly extends from the distal end of mirror 92
`each side of the torsion axis defined by hinges 94. Each of
`hinges 106 is supported at each end by a support post 114
`also extending upwardly from substrate 102, as shown.
`Pixel 90 is similar to pixels 40 and 70 as shown in F1G.
`2 and F1G. 4, respectively, in that the pixel mirror is
`supported by both the torsion hinges and flexure hinges. The
`torsion hinges 94 define a torsion axis of rotation, whereby
`flexure hinges 106limit the downward flexure of mirror 92
`toward either of the addressed electrodes 96 and 98. The
`geometry of the hexagonal mirror 92 allows the pixels 90 to
`be arranged in a tightly packed arrangement, such as that
`shown in F1G. 8. The length of flexure hinges 106 are
`substantially longer than the length of torsion hinges 94 to
`provide good flexibility in the hinges 106 and facilitate
`rotation of the mirror 92 about the torsion axis. the flexure
`hinges 106 limit the deflection of mirror 92 to prevent
`shorting of the mirror 92 to the underlying address elec(cid:173)
`trodes 96 and 98.
`Referring now to F1G. 8, there is shown a spatial light
`modulator pixel array generally shown at 120. As shown,
`each of the pixels 90 has a hexagon-shaped mirror 92
`oriented to be closely packed with another pixel 90, as
`shown. In addition, the hexagonal geometry of each mirror
`92 closely resembles that of a circle, and is ideally suited to
`reflect an