Paper No. 40
`Entered: November 3, 2015
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`Trials@uspto.gov
`571-272-7822
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`RECORD OF ORAL HEARING
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`UNITED STATES PATENT AND TRADEMARK OFFICE
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`BEFORE THE PATENT TRIAL AND APPEAL BOARD
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`FUJITSU SEMICONDUCTOR LIMITED, FUJITSU SEMICONDUCTOR
`AMERICA, INC., THE GILLETTE COMPANY, ADVANCED MICRO
`DEVICES, INC., RENESAS ELECTRONICS CORPORATION,
`RENESAS ELECTRONICS AMERICA, INC., GLOBALFOUNDRIES
`U.S. INC., GLOBALFOUNDRIES DRESDEN MOBULE ONE LLC &
`CO., KG, GLOBALFOUNDRIES DRESDEN MODULE TWO LLC & CO.
`KG, TOSHIBA AMERICA ELECTRONIC COMPONENTS, INC.,
`TOSHIBA AMERICA INC., TOSHIBA AMERICA INFORMATION
`SYSTEMS, INC., and TOSHIBA CORPORATION,
`Petitioners
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`v.
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`ZOND, LLC
`Patent Owner
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`- - - - - -
`Cases IPR2014-00861; IPR2014-01088; and IPR2014-01089
`Patent 6,806,652 B1
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`Oral Hearing Held: August 13, 2015
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`Before: KEVIN F. TURNER (via video), DEBRA K. STEPHENS
`(via video), JONI Y. CHANG, SUSAN L.C. MITCHELL, JENNIFER
`CHAGNON, Administrative Patent Judges.
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`

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`Cases IPR2014-00861, IPR2014-01088, and IPR2014-01089
`Patent 6,806,652 B1
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`The above-entitled matter came on for hearing on Thursday,
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`August 13, 2015 at the U.S. Patent and Trademark Office, 600 Dulany
`Street, Alexandria, Virginia in Hearingroom A, at 1:00 p.m.
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`APPEARANCES:
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`ON BEHALF OF THE PETITIONERS:
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`GLOBAL FOUNDRIES:
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`FUJITSU:
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`RENESAS:
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`DAVID M. TENNANT, ESQ.
`White & Case LLP
`701 Thirteenth Street, N.W.
`Washington, D.C. 20005
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`BRETT C. RISMILLER, ESQ.
`White & Case LLP
`3000 El Camino Real
`5 Palo Alto Square 9th Floor
`Palo Alto, CA 94306
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`DAVID L. McCOMBS, ESQ.
`Haynes and Boone, LLP
`2323 Victory Avenue, Suite 700
`Dallas, TX 75219
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`JOHN J. FELDHAUS, ESQ.
`Foley & Lardner LLP
`3000 K Street, N.W., Suite 600
`Washington, D.C. 20036
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`ADVANCED MICRO DEVICES, INC.:
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`XIN-YI (VINCENT) ZHOU, ESQ.
`O'Melveny & Myers LLP
`400 South Hope Road
`Los Angeles, CA 90071
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`2
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`

`
`Cases IPR2014-00861, IPR2014-01088, and IPR2014-01089
`Patent 6,806,652 B1
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`ON BEHALF OF THE PATENT OWNER:
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`TAREK N. FAHMI, ESQ.
`Ascenda Law Group
`333 W. San Carlos Street, Suite 200
`San Jose, CA 95110
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`BRUCE BARKER, ESQ.
`Chao Hadidi Stark & Barker LLP
`176 East Main Street, Suite 6
`Westborough, MA 01581
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`GREGORY GONSALVES, ESQ.
`Law Office of Gregory Gonsalves
`1629 K Street, N.W., Suite 300
`Washington, D.C. 20006
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`Cases IPR2014-00861, IPR2014-01088, and IPR2014-01089
`Patent 6,806,652 B1
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`P R O C E E D I N G S
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`J UDGE M I TC HELL: We l co me e ve r yo ne . I s hould
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`( 1:00 p . m. )
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`s a y we l co me b a ck .
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`I a m J u dge Mit che ll . An d to my r i gh t is J udge
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`C ha ng . To my l e f t is Judg e C hag non . And a ppe a ring
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`r e mo t el y a r e Jud ge s Tu rn er and St eph ens .
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`At this ti me we wou ld li ke coun sel to int rodu c e
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`yo u rs el ves and you r coll e agu es , be ginn ing wi th Peti tion er .
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`M R . TENNANT: Goo d a ft e rnoon , You r Ho nor s ,
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`my n a me i s David Tenn ant . I a m c ouns el fo r th e
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`Gl oba lFo und ri es e nti ti es . To my r ig ht is B re tt Ris mi lle r , also
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`c ouns el fo r th e Glo ba lFo und ri es ent iti es .
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`We h a ve Davi d Mc Co mb s fo r th e Fu jitsu ent iti es ,
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`Vi nc ent Zhou for Adv an c ed M ic ro De vi ce s , an d John F eldh aus
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`f o r th e R en es as ent iti es . Th ank yo u .
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`J UDGE M I TC HELL: Gr e at . Th ank yo u . And no w
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`f o r P at ent Owne r?
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`M R . F AHMI : Good a ft ern oon , You r Hono rs ,
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`Te r ek F ah mi on be ha lf of the P at ent Owne r , Zon d .
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`M R . B AR KER : B r uc e B a rk er o f C ha o Ha didi
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`S t ark & Ba rk e r , als o f or t he P at ent Own e r , Zond .
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`M R . GONS ALVES : Gre gor y Go nsa lv es , al so fo r
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`Zon d .
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`J UDGE M I TC HELL: Tha nk you . And wel co me .
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`

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`Cases IPR2014-00861, IPR2014-01088, and IPR2014-01089
`Patent 6,806,652 B1
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`We h a ve this af ter noon our fi nal he a rin g in th r ee
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`c as es , I PR 2014 -008 61 , I P R2014 -010 88 , a nd I P R2014 -010 89
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`in volvi ng U. S . pat ent 6 ,806 ,65 2 .
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`I woul d lik e t o say t h e tr ans c ript wi ll b e en te r ed in
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`e a ch o f th e p ro cee ding s a s we d id b ef or e and i t will b e us abl e
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`f o r al l th re e ca ses . An d we set fo rth our pr oc edu re s f o r
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`to da y' s he a ring in ou r t ri al o rd e r , but just to re mi nd yo u of a
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`c oupl e o f th ings , e a ch p a rt y wi ll ha ve 90 mi nut es o f to ta l ti me
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`to pr es en t a rgu me nt s f or all th re e ca se s .
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`You c an ce rt ainl y a llo c at e you r ti me to ea ch ca se
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`a s you se e fit , but if the r e is s o me thi ng th at go es to a
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`p ar ti cul ar c as e , pl e ase ma k e su re you ide nti f y i t in th e r e co rd ,
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`wh ich c ase yo u are t alkin g ab out .
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`P l eas e k e ep i n mi nd tha t wh ate ve r is pr o je ct ed on
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`th e s c re en won ' t b e vi e wabl e b y Judg es Turn e r an d S t eph ens ,
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`so when yo u re f er to an exh ibit o n th e s c re en , p le as e st at e fo r
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`th e re co rd t he exhi bit and p ag e numb e r f o r o r de mo ns tr at ive s ,
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`th e s lid e nu mb e r to whi ch you a re r e f er rin g .
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`Th is is c er tai nl y a lso i mp ort an t for c la rit y i n t he
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`t r ans cr ipt .
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`And I kn o w you al l ha ve d one this in th e pa st , but
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`ju st don ' t st ra y f r o m t h e mi c rop hon e , so t ha t th e cou rt re por te r
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`c an he a r you well, a nd th e Ju dge s .
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`Cases IPR2014-00861, IPR2014-01088, and IPR2014-01089
`Patent 6,806,652 B1
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`Th e p ar ti es mu st a t all t i me s ma k e c l ea r whi ch
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`c as e yo u a r e dis cus sing , s o th at we ha ve a cle a r t rans c ript , if
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`th e re is di stin cti ons bet we en th e cas es .
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`And P eti tion e r bea r s th e bu rde n o f p roo f th at the
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`c l ai ms a t issu e are unp at ent abl e . S o , th e re fo re , th e P e titi one r
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`wi ll p ro ce ed fi rst to pr es ent its ca se as to th e cha ll eng ed
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`c l ai ms , an d P et ition e r ma y r e s e rv e r eb utt al t i me .
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`Th e re a fte r , P ate nt Owne r wi ll r es pon d to th e
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`P e titi one r 's ca se . At this p oint I wa s goi ng to ask do yo u h ave
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`d e mo nst r ativ es t ha t you would lik e to han d u p? C e rt ain l y yo u
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`c an do th at .
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`M R . TENNANT: Th ank yo u .
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`M R . F AHMI : Yes .
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`J UDGE M I TC HELL: I wo uld just l ike to a sk , do
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`yo u ha ve an y qu est ions o r con ce rns at t his t i me? We ha ve
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`b ee n th rough this a f e w t i me s b e for e .
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`M R . TENNANT: No , Your Hono r .
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`J UDGE M I TC HELL: M r . F ah mi ?
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`M R . F AHMI : I t is n ot a con c er n , You r Ho nor . I
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`wa nt ed to adv is e th e p an el th at M r. B a rk er and I p ropo se t o
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`sp lit u p th e 90 mi nu tes al loc at ed t o th e Pa te nt Own er. I wil l
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`b egin , and the n M r . B ark e r wil l add r ess i te ms s pe ci fi c to the
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`10 89 c as e , me a ns - plu s - fun cti on c lai ms .
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`Cases IPR2014-00861, IPR2014-01088, and IPR2014-01089
`Patent 6,806,652 B1
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`J UDGE M I TC HELL: Tha nk you . We wi ll beg in
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`wi th P et itio ne r . Do yo u h ave r ebut tal ti me yo u would lik e to
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`r e se rv e?
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`M R . TENNANT: Ye s , ma ' a m. I w ou ld li ke t o
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`r e se rv e t en mi nute s .
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`J UDGE M I TC HELL: So yo u h av e 8 0 mi n ute s .
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`M R . TENNANT: Th ank yo u .
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`Goo d a ft e rnoon . Ag ain , my n a me is Davi d
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`Te nn ant , coun sel f o r Glob al Foun dri es , and I wil l b e a rg uing
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`on beh al f o f th e P e titi one rs tod a y.
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`And we h av e p rovi ded a s lid e de ck , and I wil l do
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`my b e st t o r e fe r to t he s lid e nu mb e r s for th e be ne fit o f th e
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`Ju dge s th at ar e join ing b y v id eo c on fe r en ce .
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`And as we all k no w, we 'r e go ing to d isc uss t he
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`' 652 pat en t tod a y. And fo r Pe titi one r s , as we do be ar th e
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`bu rd en o f p roo f , ou r di sc ussio n wil l be so me wh at mo re
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`d et ail ed . We wi ll fo cus o n th e ' 652 p at ent , of cou rse , an d we
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`wi ll p rovi de an ov er vi e w o f th e ' 652 pat en t , fo llo we d b y
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`di scu ssio n of the g roun ds ins titu ted .
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`And with r esp ect to thos e g round s th at we re
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`in stit ut ed , we will s plit up th e di scus sion i nto t he i nd ep end ent
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`c l ai ms , f ollo wed b y t he dep end ent c l ai ms .
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`And I a m o n sli de 2 n o w. And s lide 2 is just an
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`i llust r ati on o f th e ' 652 pat en t . It wa s fil ed on Ma y 1 2t h of
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`20 03 a nd iss ued on Oct obe r 19 th o f 200 4 .
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`Cases IPR2014-00861, IPR2014-01088, and IPR2014-01089
`Patent 6,806,652 B1
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`I t is en titl ed h igh - de nsit y p l as ma sou r ce u sing
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`e xc it ed a to ms . Th e '652 p at ent is a co ntin uat ion -in- pa rt of
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`a noth e r p ate nt tha t is not at is sue in an y o f the pro ce ed ings
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`in volvi ng a t l ea st th e Pe tit ione r p ar ti es .
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`Th e n ext s lid e is sl id e 3 . And h e re we sho w
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`in dep end ent cl aim 1 . No w, t he r e is th re e in dep ende nt cl ai ms
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`in this pat en t; inde pe nde nt cla i m 1 , c l ai m 1 8 , a nd c lai m 3 5 .
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`And we h av e highl ight ed on th e slid e t he i ssu es o r
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`th e l ang uag e o f th e c la i m t ha t r e ma ins in dis put e . Le t me ju st
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`r e ad g en er al l y th rou gh c la i m 1 just f o r co nte xt .
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`C l ai m 1 is an appa r atu s c lai m. I t is d ir e ct ed to a
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`hi gh - den sit y p la sma s o ur c e . I t h as a c ath ode ass e mbl y, a n
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`a nod e th at i s posit ion ed a d ja c ent to t he c athod e asse mb l y, a n d
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`mo v in g do wn t o el e me n t D, a p o wer supp l y th at g ene r at es an
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`e l ect ri c fi eld b etwe e n th e c atho de a ss e mb l y a nd th e a nod e .
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`Th es e e le me n ts ar e n ot hi ghlig ht ed b e cau se the y
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`a r e conv enti ona l st ru ctu r e th at we wi ll sho w in th e n ext f e w
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`sl id es . C la i m 1 fu rth e r r equ ir es ele me n t C , an e xc ite d a to m
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`so ur c e th at g ene ra t es a n ini tia l pl as ma a nd ex cit ed ato ms f r o m
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`a volu me o f f ee d g as . And , fu rth e rmo r e , t he p o we r sup pl y o r
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`a t l ea st in el e me nt D, the el e ct ric fi eld sup er -io niz es th at
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`in iti al p las ma , s o a s to g en e ra te a hi gh - den sit y p la sma .
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`Th e foc us o f ou r di scu ssio n tod a y wi ll p ri ma r il y
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`f oc us on the cl aim l a ngu age th at is h ighl ight ed in ye llo w and
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`g re en .
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`Cases IPR2014-00861, IPR2014-01088, and IPR2014-01089
`Patent 6,806,652 B1
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`And tu rning to sl id e 4 , we h ave shown cl ai ms 18
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`a nd 35 . Si mi l a rly h i ghl ight ed in ye llo w and gr e en is l ang uag e
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`th at is si mi l a r to c l ai m 1 . C lai m 1 8 i s a me t hod cl aim. C l ai m
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`35 is a me a n s - plus - fun ction cl ai m.
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`Th e ad dit ion al l ang uag e th at is not s ee n in cl ai m 1
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`is high light ed in bl ue o n c lai ms 1 8 a nd 35 , and tha t is
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`t r anspo rt ing th e ini ti al pl as ma a nd th e ex cit ed ato ms
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`p roxi ma t e to a c ath ode as se mb l y.
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`No w, tur ning to sl ide 5 , we h av e -- we a r e sho wing
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`a n il lust r atio n of f igu r e 2 A o f th e '65 2 pa ten t . And f igu r e 2 A
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`is one of the e mb od i me nt s of the '65 2 pa ten t th at i llu st ra tes a
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`pl as ma g e ne ra to r o r pl as ma g en e ra tin g ap pa r atus .
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`And withi n thi s f igu r e we hav e colo re d th e
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`p er tin ent co mp one nts o f t he app a ratu s; n a me l y, t h e po we r
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`su ppl y. Th e po we r suppl y i s colo re d in r ed . Th at sup pli es
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`po we r to an anode . Th at 's colo re d in ye l lo w. And a
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`s eg me n te d c atho de th at is co lor ed in g r een .
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`Th is po we r supp ly g e n er at es o r caus es an el ec tri c
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`f i eld to fo r m b e twe e n th e an ode and c a thod e , so wh en th e re is
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`a ga s supp li ed to th e ca vit y b et we en t he anod e and ca thod e ,
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`yo u c an exc it e the ga s . And t he '652 pat en t de sc ribe s th at t he
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`g as i s ex ci ted in th e in iti al pl as ma r eg ion , 21 4 , th at is co lor ed
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`pu rpl e .
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`Th e exc it ed g as ge ne r at es , wh en the ga s is ex cit ed
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`a n in iti al pl as ma a nd exc it ed a to ms a re fo r me d . And t he
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`Cases IPR2014-00861, IPR2014-01088, and IPR2014-01089
`Patent 6,806,652 B1
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`in iti al p las ma a n d ex cit ed ato ms a r e mo v ed o r flo w to th e blu e
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`r eg ion , wh ich is th e hig h -d ens it y pl as ma r e gion 252 .
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`Th is is whe re th e pl as ma i s so - ca lle d sup e r - ioni z ed
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`a s th e cla i ms r equi r e .
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`No w I a m o n sli de 6 . Slid e 6 i s a si de -b y- s ide
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`c o mp a ris on o f f igu re 2 A th at I jus t di scu ss ed a nd the ad mi t t ed
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`p rio r ar t of th e ' 652 pat en t th at is sho wn in figu r e 1 . And we
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`h av e co lo r co ded th e s i mi la r el e me nt s th at i s fo und in t he
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`p rio r a r t an d al so th at is found i n fig ur e 2 A.
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`And as yo u c an se e b y c o mp a r ison, th e s tru ct ur e is
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`v er y s i mi l a r . The pr i ma r y d i f fe r en ce , ho weve r , i s th e in iti al
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`pl as ma r e gio n th at is in p urp le and a lso , I gu ess , wher e the
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`g as co me s in to th e a ppa r atus betwe e n t h e c atho de a nd anod e .
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`No w, r ec all whe n I put u p th e sl ide o f cla i m 1 , it
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`r eq ui red an ex cite d a to m s ou rc e . Th e exc it ed a to m so ur c e is
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`di sc los ed in mu l tip le e mb odi me n ts o f th e '652 p at ent .
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`On s lid e 7 we h av e il lust r at ed th at on e o f th e
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`e mb o di me n ts o f th e '652 p at ent des c ribin g th e ex ci te d a to m
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`so ur c e . And as you c an s ee the exc it ed ato m s ou r ce h as b ee n
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`l ab el ed wit h th e o ra ng is h co lor ed bo x th at is a round t he
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`e xc it ed a to m s ou rc e 7 32b .
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`And wha t thi s exc it ed ato m s ou r ce do es i s
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`d es cr ibe d b y th e '65 2 pa t en t is wh en yo u h ave a rgon , wh ich is
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`l ab el ed a s th e f e ed g as s our c e th at is co lor ed ma g en ta , co me s
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`Cases IPR2014-00861, IPR2014-01088, and IPR2014-01089
`Patent 6,806,652 B1
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`in to th e cha mb e r o f th e exc it ed a tom s ou rc e , t he g as is
`
`e xc it ed .
`
`And th at g as is ex cit ed b y t h e el e ct ri c fie ld th at is
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`c r e at ed with r espe c t to th e n e edl e e l ect rod e i n gr e en t ha t is
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`e ne rg iz ed b y t he po we r supp l y in re d . Wh en th e g as is ex cit ed
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`yo u fo r m i ni ti al pl as ma a nd ex cit ed a to ms .
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`Th at g as cont inu es t o mo ve . It mo v es th ro ugh th e
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`no z zl e , whi ch is c olo r ed g re en . And the n it re mo v es - - th en it
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`mo v e s , c onti nue s to mo v e th ro ugh th e sk i mme r , wh ic h is
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`c olo r ed blu e . The ski mme r i s 736 .
`
`And as yo u c an se e f ro m f i gur e 12, th e sk i mme r i s
`
`g roun ded . So a po rti on o f th e ion s a nd a po rtio n of th e
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`e l ect ron s wil l be sk i mme d out o f th e g as th at i s f lowi ng , but
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`ou t put f ro m t he ski mme r , t h e '652 p at ent ma k es this c l ea r , is
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`in iti al p las ma a n d ex cit ed ato ms .
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`And this init ia l pl as ma a nd ex cit ed a to ms , ju st li ke
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`on the pr evi ous slid e , s lid e 6 , flo ws i nto t he a re a tha t is
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`l ab el ed blu e . And t his i s - - o r c olo re d blu e , t h at is . And this
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`is whe r e th e ini tia l pl as ma i s io nize d to c re at e hig h -d ensi t y
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`pl as ma .
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`No w, I ju st mo v ed t o sli des 8 an d 9 . Th is is on
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`sl id e 8 . We hav e a t abl e of th e grou nds in stit ute d fo r e a ch o f
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`th e p eti tion s . And as yo u c an s e e a ll cl ai ms h ave be en
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`in stit ut ed . And th er e ar e t wo pr i ma r y r e f e re nc es we a r e go ing
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`to fo cus on - - well , mo r e tha n t wo r e f er en ce s th at we ' r e goi ng
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`
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`11
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`Cases IPR2014-00861, IPR2014-01088, and IPR2014-01089
`Patent 6,806,652 B1
`
`to fo cus on , but th e t wo r ef e ren c es th at P eti tion er s al leg e
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`t e ach al l of the ele me n t s of the inde pe nde nt cla i ms is Mo zgr in
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`a nd Fa he y.
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`And as yo u c an se e , yo u s ee Mo zgr in cit ed as a
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`p ri ma r y r e f e r en c e f o r al l c la i ms , and F ahe y, a s we wil l
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`d es cr ibe in th e n ext f e w sl ide s , is a s ec ond ar y r e f e ren ce with
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`r e spe ct to th e inde pe nde nt cla i ms .
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`Th e ot he r re f er enc es , Kud r ya vts ev a nd I wa mu r a , is
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`ju st fur th er evid en ce of mo t iva tion to co mb in e t hat we wil l
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`di scu ss in subs equ ent s lid es .
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`No w, I mo v ed to sl id e 10 . And slid e 10 p rov ide s a
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`d epi cti on o f c laim 1 . And we h ave co lo r co ded cl aim 1 in
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`g re en to c or r espond to th e ele me n ts t ha t P eti tion e rs o r to
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`c or r espo nd to t he e l e me nts th at th e M oz gri n r es ea r ch p ap er
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`di sc los es .
`
`We h a ve als o co lo r c ode d in b lue th e e le me n t th at
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`th e Fa he y p ap e r dis cl ose s . And as yo u c an s ee f ro m th is sl id e ,
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`th e re a re onl y t wo re f e ren c es th at a r e req ui red to t ea ch al l of
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`th e el e me nt s of ind ep end ent cl ai m 1 .
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`No w, as fo r th e mot iv ation to c o mbin e -- and we
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`wi ll g et to this lat e r in th e ar gu me nt - - Pet itio ne r ha s --
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`P e titi one r 's po sit ion , ex cus e me , i s th at a p er son o f o rdin a r y
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`sk ill i n th e a rt woul d ha ve co mb in ed t he e x cit ed atom s ou rc e
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`o f Fah e y wi th th e pl as ma g e ne ra to r o f M ozg ri n to p rod uc e a
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`hi ghe r d ens it y pla s ma b e cau se i t is v e r y we ll -kno wn i n or de r
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`
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`12
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`

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`Cases IPR2014-00861, IPR2014-01088, and IPR2014-01089
`Patent 6,806,652 B1
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`to ioni z e or c re ate a p la s ma , it is ea si er to do s o i f you ex cit e
`
`e xc it ed a to ms .
`
`I t is mo r e di ff icul t to do so i f y ou e xc it e a to ms
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`th at a re in th ei r ne ut ra l st at e . Thi s is a v e r y we ll -kno wn
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`c on cep t o f pl as ma ph ys ic s . Not with st andin g , if some o n e
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`d esi r es e xp res s mot iv ation , whi ch a s you kno w is not r equi r ed
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`un de r KSR , o ne of o rdin ar y s ki ll in th e ar t co uld l ook t o
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`Kud r ya vt sev and /o r I wa mu r a fo r this exp r ess mo t ivat ion .
`
`And on sl ide 11 we h ave sho wn cla i ms 18 and 35 .
`
`And th e pr i ma r y di f fe r en ce , ag ain , wi th r es pe ct to cl ai ms 18
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`a nd 35 is th e requi r e me nt of tr anspo rt ing th e in iti al pl as ma
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`a nd exc it ed a to ms . F ahe y d is cl o ses t his el e me nt . And we wi ll
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`di scu ss l at er ho w F a he y d is clos es thi s e le me n t .
`
`Th e mo tiv at ion to c o mb in e th e t wo r e f er en ce s is
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`th e s a me , a nd we wi ll also d isc uss Kud r ya vt sev and I wa mu r a
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`wi th r es pe ct to the co mb i na tion fo r c l ai ms 18 and 35.
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`No w I a m o n sli de 12 . Slid e 12 ide nti fi es fou r
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`di sput es t hat r e ma in i n this pro c eedi ng wit h r esp e ct to th e
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`in dep end ent cl aims . Wi t h r esp e ct to al l of th e ind ep end ent
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`c l ai ms , th er e i s pr i ma r il y t h re e di spu tes . It is wh eth er
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`M oz gri n dis clo ses s upe r -ion iz ati on , i t is wh et he r Fa he y
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`di sc los es a n ex ci te d a to m s ou rc e , and it is whe the r i t wou ld
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`h av e be en o bvious t o co mb i ne those t wo re f er en c es .
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`Cases IPR2014-00861, IPR2014-01088, and IPR2014-01089
`Patent 6,806,652 B1
`
`
`Wi t h r esp e ct to ind ep end ent cl ai ms 1 8 an d 35 , th e
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`is su e is , cont inu es t o be whe the r Fa he y d is clo ses tr ans por ting
`
`th e i niti al p l a s ma a nd th e ex cit ed ato ms .
`
`No w, o n sli de 1 3 we h ave sho wn t he c lai m t e r ms
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`b eing con st rue d by t h e Bo ar d . Th e B oa rd con str ue s th r ee
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`t e r ms . The thr e e me a n s -pl us - fu nctio n t er ms h av e bee n
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`c onst ru ed bu t n atu ra ll y t he ir cons tr uc tion s a r e ve r y lo ng , so
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`we o mi tt ed t he m on this slid e , but we p rovid ed cit atio ns p er
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`e as e o f re f er en ce .
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`Th e on e -- ano ther t er m t h at h as b ee n c onst ru ed is
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`su pe r -ioni zi ng the ini ti al pl as ma . And this te r m i s in all of
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`th e i nde pend en t cl ai ms . And th e Bo ar d co r re ct l y c ons tr ued
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`th is t e r m t o me a n c onv er ting at le ast 75 p er c ent o f th e n eut ra l
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`a to ms in the init ia l pl as ma i nto ions ne a r th e c ath od e
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`a ss e mb l y.
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`Th is c onst ru ctio n is not i n disp ute , so non e of the
`
`c onst ru ct ions ar e in dispu te .
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`No w, o n sli de 1 4 , we ' r e goi ng to - - I a m g o ing t o
`
`in tr odu ce t he fi rst issu e . And I wil l st ar t with the M oz gri n
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`r e f er en ce . And I wi ll sho w yo u how t he Mo zgr in ref e r enc e
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`di sc los es sup e r - ion iz ati on o r sup er - ioni zin g th e ini ti al p las ma
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`to gen e ra te a hi gh -d ensi t y pl as ma .
`
`And no w I a m o n sl id e 15 . And , a ga in , Pe tit ione rs
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`r e l y on t he Mo zgrin r ef e re nc e for its d is closu r e o f
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`su pe r -ioni z atio n . No w, Mo zg rin is a r es ea r ch p ap er th at
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`Cases IPR2014-00861, IPR2014-01088, and IPR2014-01089
`Patent 6,806,652 B1
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`st udi es th e g en era tio n of pla s ma in a v ar iet y o f di ffe r ent
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`c ondi tion s an d use d in a v ar ie t y o f di f fe r ent app a ratus es .
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`I t st udi e s th e g ene r ati on o f pl as ma us ed i n th e
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`sh ap e e le ct rod e . I t st udi es th e g ene r ati on o f pl as ma in th e
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`p re se nc e o f a p lan ar el e ct ron . And t his re se a rch pap er stud ies
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`ho w a p las ma ma y b e g en er at ed in a puls ed el ec tr ic f i eld . So
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`a po wer suppl y p rov ide s puls ed p owe r .
`
`No w, tur ning to sl ide 16 we se e a d epi cti on o f t wo
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`f igu r es fro m t h e M oz gri n r e fe r ence . F igu re 2 is sho wn on th e
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`l e ft -ha nd sid e . And fig ur e 2 i llus tra t es th e di scl ose d po we r
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`su ppl y o f Moz gr in . It i s a t wo - st ep o r t wo -s ta ge p owe r suppl y
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`th at gen e ra tes a lo w v olt ag e an d a hi gh vol tag e fo r
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`su pe r -ioni zi ng pla s ma .
`
`And when it g en er a tes a l o w volt age , thi s is
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`c olo r ed blu e -- on t he rig ht -han d sid e , b y t h e wa y, i s a
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`d epi cti on o f th e vol ta ge t ha t is appl ied a cro ss th e cha mb e r .
`
`As yo u c an s e e col or ed b lue and th e ti me s p an o f on e ,
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`M oz gri n dis clo ses t ha t th e lo w v olt ag e p re -io niz es th e g as .
`
`P r e -ion iz ati on me a ns an in iti al pl asma i s g ene r at ed .
`
`S o th e re a re s o me io ns th at a re g ene r at ed , bu t a s
`
`th e pu ls e co ntinue s , as Mo zg rin des c rib es fro m t i me s 2 a to 2b
`
`to 3 , you p rog r essi ve l y in c re as e the de nsit y o f yo u r pl as ma .
`
`And to do t ha t , Mo zg rin appl ies a hig he r vo lta ge
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`b y t he po we r s uppl y. An d on the rig ht -ha nd sid e o f th e
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`f igu r e , you ca n se e the pe ak vo lt ag e th at i s ap pli ed to th e ga s .
`
`
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`Cases IPR2014-00861, IPR2014-01088, and IPR2014-01089
`Patent 6,806,652 B1
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`Th is c aus es the pl a s ma t o go f ro m a n in iti al pl as ma to a
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`hi ghe r -d ensi t y pla s ma .
`
`And ulti ma t e l y wh en yo u ge t to t ime 3 , yo u h av e a
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`v er y h igh den se pl as ma . An d M ozg rin d is clos es a de nsi t y o f
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`1 .5 ti me s 10 to t he 15th pe r cen ti me t er cub ed . Th at 's a v er y,
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`v er y d e ns e pl as ma .
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`And just fo r th e re co rd , Mo zg rin sta r ts wit h an
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`in iti al d ens it y o f 10 to th e 7th to 10 t o th e 9th in the blu e
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`a r e a . So Mo zg rin in c re as es t he d ensi t y f ro m a n in itia l pl as ma
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`d ensi t y to 6 to 8 o rd er s of ma g ni tud e wh en it gen e rat es t he
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`hi gh d ensi t y pl asma .
`
`And on sl ide 17 , we h ave sho wn two cu rr en t
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`vo lt age ch ar a ct eris ti c cu rv es . On f igu r e 4 o f Mo zg rin sho ws
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`th e ac tua l me a su re me n t s th at M ozgr in t ook du rin g the
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`a ppl ic ati on o f th e po we r th at I showe d on the p r evious slid e .
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`And Mo zg rin re f er s to e ach of the s e a r eas in figu r e
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`4 as re gi me s . In r eg i me 1 , t his i s wh e re yo ur init ial p la s ma is
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`f o r me d . And as you inc r ea se the de nsi t y o f you r pl as ma , yo u
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`g et t o r egi me 2 .
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`M oz gri n dis clo ses t ha t thi s r egi me 2 i s us ef ul for
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`d epos itio n - - spu tt e ring d epo siti on a nd ot he r us es . Wh e n you
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`c ont inu e to in c rea se th e po wer such as -- or as t i me go es
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`a long , suc h as sho wn in th e p re vious slid e , you ge t to r egi me
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`3 .
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`Cases IPR2014-00861, IPR2014-01088, and IPR2014-01089
`Patent 6,806,652 B1
`
`
`And in reg i me 3 , th is is when yo u r pl as ma h a s
`
`a tt ain ed a high enou gh d ensit y t h at i t is v e r y good fo r e tc hing .
`
`And Mo zg rin go es t o de sc rib e re gime 4 . M o zg rin sa ys in
`
`r eg i me 4 , yo u h av e th e pos sibi lit y o f an a r c . And he de sc rib es
`
`a n a r c th at i s not p re f e rr ed .
`
`And so in the Moz gr in p ap er , it is p re f e rab le t o
`
`st a y wi thi n r egi me s 2 o r reg i me 3 , d ep endin g on your
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`a ppl ic ati on o f th e pl as ma a p pa ra tus.
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`Gi ven tha t I pro vid ed s o me b ac kgrou nd , th e
`
`qu est ion re ma i ns ho w doe s Mo zg rin d isc los e sup e r - ion iz ati on?
`
`And Mo zg rin -- and no w I a m o n sl ide 18 .
`
`M oz gri n dis clo ses s upe r -ion iz ati on o f th e i niti al
`
`pl as ma i n mu lt iple w a ys . Th e f ir st wa y t h at - - or not the fi rst
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`wa y - - b ut on e wa y t h at Mo zgr in dis cl ose s sup e r -i oni z atio n is
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`th e i ntr odu ctio n o f th e alph a p ar ame t e r . S ho wn on sl id e 18 is
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`a n e xc e rpt fr o m th e M ozg rin pap e r, a nd we p rovid ed th e
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`c it ati on h er e .
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`M oz gri n de sc ri b es t ha t th e ion iz ation deg r ee o f t he
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`in iti al p las ma r a ng ed fr o m . 7 to 1 . No w, what doe s th at
`
`me a n ? .7 is abo ut 7 0 pe r ce nt ion iza tio n de gr ee . 1 is
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`10 0 pe r cen t ion iza tio n .
`
`And at the bottom o f th e slid e -- a nd I me nt ion ed
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`th is b ef or e -- Moz gr in me a su r e d the high -d ens it y pla s ma i n
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`r eg i me 3 at 1 .5 time s 1 0 to the 15th . Th is is mu c h g re at e r
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`Cases IPR2014-00861, IPR2014-01088, and IPR2014-01089
`Patent 6,806,652 B1
`
`th an the so - c all ed hi gh - den sit y p las ma t h at is d es c rib ed in th e
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`' 652 pat en t .
`
`J UDGE M I TC HELL: M r . Tenn ant, c an I ask yo u a
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`qu est ion? You are sa yi ng what is hi ghlig h t ed sho ws me wh a t
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`th e d eg re e o f io niz a tion o f th e i nitia l o r o f th e - - ye a h , o f th e
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`in iti al p las ma , i s th at wha t you ar e s a yin g?
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`M R . TENNANT: Ye s . And le t me go to th e n ext
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`sl id e . I p ut th e -- we put the equ atio n in , I gu ess , an
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`e as ie r -to - re ad fo rm.
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`J UDGE M I TC HELL: Oka y.
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`M R . TENNANT: And th e equ at ion - - no w I a m o n
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`sl id e 19 -- and the eq ua tion s a ys alph a equ als N s ub e , whi ch
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`is th e de nsit y o f e l ect ron s , ov er the su mma t i on o f N su b g ,
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`wh ich is th e d ensi t y o f th e ne ut ra l a to ms , pl us N sub i , whic h
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`is th e de nsit y o f th e ion s .
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`S o in o rd e r to achi ev e 100 pe r cen t io ni zat ion yo u
`
`h av e to i oni ze all o f th e n eut r al a to ms th at exi st in th e vo lu me
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`o f fe ed g as . And M oz gri n dis clo ses with hi s pl as ma
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`g en er ati on a ppa r atu s , you ca n a chie ve up to , mo r e lik e
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`p ro xi ma l l y 1 00 pe r c ent io ni zat ion .
`
`And at 100 p er c ent ioni z ation , yo u h av e ve r y f e w
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`n eut r al a to ms l ef t to ioni z e . And Dr . Ko rtsh ag en pr ovid ed
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`t est i mo n y o f th e a lph a p ar a me t e r and he was n ev er
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`c ro ss -ex a mi n ed on t his alph a p ar ame t e r .
`
`1
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`2