UNITED STATES PATENT AND TRADEMARK OFFICE
`
`____________________________________________
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`____________________________________________
`
`GLOBALFOUNDRIES U.S., INC., GLOBALFOUNDRIES DRESDEN
`MODULE ONE LLC & CO. KG, GLOBALFOUNDRIES DRESDEN
`MODULE TWO LLC & CO. KG, and
`THE GILLETTE COMPANY,
`Petitioners,
`
`
`
`v.
`
`Zond, LLC.
`Patent Owner of U.S. Patent No. 6,806,652
`Trial No. IPR2014-010881
`
`
`
`PETITIONER’S DEMONSTRATIVE EXHIBITS FOR ORAL ARGUMENT
`
`
`1 Case IPR2014-01000 has been joined with the instant proceeding.
`
`
`
`____________________________________________
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`____________________________________________
`
`GLOBALFOUNDRIES U.S., INC., GLOBALFOUNDRIES DRESDEN
`MODULE ONE LLC & CO. KG, GLOBALFOUNDRIES DRESDEN
`MODULE TWO LLC & CO. KG, and
`THE GILLETTE COMPANY,
`Petitioners,
`
`
`
`v.
`
`Zond, LLC.
`Patent Owner of U.S. Patent No. 6,806,652
`Trial No. IPR2014-010881
`
`
`
`PETITIONER’S DEMONSTRATIVE EXHIBITS FOR ORAL ARGUMENT
`
`
`1 Case IPR2014-01000 has been joined with the instant proceeding.
`
`
`
`UNITED STATES PATENT AND TRADEMARK OFFICE
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`The ’652 Patent:
`GlobalFoundries U.S. Inc., GlobalFoundries Dresden Module One LLC & Co. KG,
`GlobalFoundries Dresden Module Two LLC & Co. KG, The Gillette Company,
`Fujitsu Semiconductor Limited, Fujitsu Semiconductor America, Inc.,
`Advanced Micro Devices, Inc., Renesas Electronics Corporation, Renesas Electronics America, Inc.,
`Toshiba America Electronic Components, Inc., Toshiba America Inc.,
`Toshiba America Information Systems, Inc., and Toshiba Corporation
`v.
`Zond LLC
`IPR2014-00861
`
`GlobalFoundries U.S. Inc., GlobalFoundries Dresden Module One LLC & Co. KG,
`GlobalFoundries Dresden Module Two LLC & Co. KG, and The Gillette Company
`v.
`Zond LLC
`IPR2014-01088 and IPR2014-01089
`
`Zond IPR Hearing_’652 Patent_v06
`
`August 13, 2015
`
`
`
`Overview
`
`• Overview of the ’652 Patent
`
`• Grounds Instituted
`
`• Overview of Prior Art
`
`• Summary of Disputes with Respect to Independent Claims
`
`• Summary of Disputes with Respect to Dependent Claims
`
`Zond IPR Hearing_’652 Patent_v06
`
`1
`
`
`
`The ’652 Patent
`
`US Patent 6,806,652 (Ex. 1101)
`
`Zond IPR Hearing_’652 Patent_v06
`
`2
`
`
`
`Independent Claims
`Claim 1
`
`Claim 1
`“Excited Atom Source”
`
`’652 Patent, Claim 1 (Ex. 1101)
`
`Zond IPR Hearing_’652 Patent_v06
`
`3
`
`
`
`Independent Claims
`Claims 18 and 35
`
`Claim 18
`“Transporting the Initial Plasma
`and Excited Atoms”
`
`Claim 35
`“Transporting the Initial Plasma and
`Excited Atoms”
`
`’652 Patent, Claim 18 (Ex. 1101)
`
`’652 Patent, Claim 35 (Ex. 1101)
`
`Zond IPR Hearing_’652 Patent_v06
`
`4
`
`
`
`The ’652 Patent
`
`Feed Gas Source (238 and 240)
`
`Anode (210 and 226)
`
`Segmented Cathode (202)
`
`Power Supply (206 and 222)
`
`Initial Plasma Region (214)
`
`High Density Plasma Region (252)
`
`’652 Patent, Fig. 2A (Ex. 1101)
`
`Zond IPR Hearing_’652 Patent_v06
`
`5
`
`
`
`’652 Patent and Admitted Prior Art
`
`Feed Gas
`Source
`
`Anode
`
`Cathode
`
`Power
`Supply
`
`Initial Plasma
`Region
`
`High Density
`Plasma Region
`
`’652 Patent, FIG. 1 (Ex. 1101)
`
`Zond IPR Hearing_’652 Patent_v06
`
`6
`
`’652 Patent, Fig. 2A (Ex. 1101)
`
`
`
`’652 Patent’s Excited Atom Source
`
`Excited Atom Source (732b)
`
`Feed Gas Source (740)
`
`Needle electrode (741)
`
`Power Supply (731)
`
`Skimmer (736)
`
`Nozzle (734)
`
`’652 Patent, Fig. 12 (Ex. 1101)
`
`Zond IPR Hearing_’652 Patent_v06
`
`7
`
`
`
`Grounds Instituted
`
`Ground
`
`Claims
`
`Prior Art
`
`1088 Petition (IPR2014-01000 is joined)
`
`5
`
`6
`
`7
`
`8
`
`1-14, 16, and 17
`
`Mozgrin, Kudryavtsev, Fahey, and Iwamura
`
`5
`
`8-10
`
`15
`
`Mozgrin, Kudryavtsev, Fahey, Vratny, and
`Iwamura
`Mozgrin, Kudryavtsev, Fahey, Lantsman, and
`Iwamura
`Mozgrin, Kudryavtsev, Fahey, Wang, and
`Iwamura
`
`Zond IPR Hearing_’652 Patent_v06
`
`8
`
`
`
`Grounds Instituted
`
`Ground
`
`Claims
`
`Prior Art
`
`861 Petition (IPR 2014-00864, IPR2014-01003, and IPR2014-01066 are joined)
`
`3
`
`4
`
`5
`
`6
`
`7
`
`18-30, 33, 34
`
`Mozgrin, Kudryavtsev, Fahey, and Iwamura
`
`31 and 32
`
`Mozgrin, Kudryavtsev, Fahey, Campbell, and
`Iwamura
`
`18-30
`
`Mozgrin and Iwamura
`
`31 and 32
`
`33 and 34
`
`Mozgrin, Iwamura, and Campbell
`
`Mozgrin, Iwamura, and Fahey
`
`1089 Petition (IPR2014-01004 is joined)
`
`2
`
`4
`
`35
`
`35
`
`Mozgrin, Kudryavtsev, Fahey, and Iwamura
`
`Mozgrin, Iwamura, and Fahey
`
`Zond IPR Hearing_’652 Patent_v06
`
`9
`
`
`
`Grounds Instituted for Independent Claims
`
`Claim 1
`
`1. A high-density plasma source comprising:
`a) a cathode assembly;
`b) an anode that is positioned adjacent to the cathode
`assembly;
`c) an excited atom source that generates an initial
`plasma and excited atoms from a volume of feed gas,
`the initial plasma and excited atoms being proximate
`to the cathode assembly; and
`d) a power supply that generates an electric field
`between the cathode assembly and the anode, the
`electric field super-ionizing the initial plasma so as to
`generate a high-density plasma.
`
`’652 Patent, Claim 1 (Ex. 1101)
`
`Fahey – discloses a beam source that
`generates plasma containing charged
`species such as electrons and ions
`
`Mozgrin – discloses ionization fractions
`and power pulse parameters that result
`in ionization of at least 75% of the
`neutral atoms in the initial plasma
`
`A person of ordinary skill would understand that providing additional excited atoms
`
`(Fahey) to a plasma (Mozgrin) would produce a higher plasma density because excited
`
`atoms require less energy to ionize
`
`IPR2014-01088 Kortshagen Decl. at ¶ 79 (Ex. 1002)
`‒ Kudryavtsev – which is cited by Mozgrin – further shows a person of ordinary skill in the art
`that plasma density increases when excited atoms accumulate
`IPR2014-01088 Kortshagen Decl. at ¶ 62 (Ex. 1002)
`‒ Iwamura further teaches the desirability of first providing an initial plasma with excited
`atoms – such as Fahey’s – prior to a second energizing step
`IPR2014-01088 Kortshagen Decl. at ¶ 146 (Ex. 1002)
`
`Zond IPR Hearing_’652 Patent_v06
`
`10
`
`
`
`Grounds Instituted for Independent Claims
`
`Claim 18
`
`Claim 35
`
`18. A method of generating a high-density plasma, the
`method comprising:
`a) generating an initial plasma and excited atoms from
`a volume of feed gas;
`b) transporting the initial plasma and excited atoms
`proximate to a cathode assembly; and
`c) super-ionizing the initial plasma proximate to the
`cathode assembly, thereby generating a high-density
`plasma.
`
`35. A high-density plasma source comprising:
`a) means for generating an initial plasma and excited
`atoms from a volume of feed gas;
`b) means for transporting the initial plasma and excited
`atoms proximate to a cathode assembly; and
`c) means for super-ionizing the initial plasma proximate
`to the cathode assembly, thereby generating a high-
`density plasma.
`
`’652 Patent, Claim 18 (Ex. 1101)
`
`’652 Patent, Claim 35 (Ex. 1101)
`
`Fahey – discloses a beam source generating plasma and excited atoms that are
`transported out of its skimmer by admission of additional feed gas
`
`Mozgrin – discloses “super-ionizing” ion fractions and power pulse parameters
`
`A person of ordinary skill would understand that transporting additional excited atoms
`(Fahey) to a plasma (Mozgrin) would produce a higher plasma density because excited
`atoms require less energy to ionize
`
`IPR2014-00861 Kortshagen Decl. at ¶ 66 (Ex. 1102)
`
`– Kudryavtsev and Iwamura further disclose the benefits of such a combination
`IPR2014-00861 Kortshagen Decl. at ¶ 69,129 (Ex. 1102)
`
`Zond IPR Hearing_’652 Patent_v06
`
`11
`
`
`
`Disputes with Respect to Independent Claims
`
`• All independent claims
`
`‒ Whether Mozgrin discloses “super-ionizing the initial plasma so as to
`generate a high-density plasma”
`
`‒ Whether Fahey discloses “generating an initial plasma and excited atoms
`from a volume of feed gas”
`
`‒ Whether it would have been obvious to a person of ordinary skill in the art
`to combine Mozgrin and Fahey
`
`• Kudryavtsev’s teachings suggest the combination of Mozgrin and Fahey
`
`• Iwamura further teaches the desirability of a two-step ionization process
`
`• Independent claims 18 and 35
`
`‒ Whether Fahey discloses “transporting the initial plasma and excited atoms.”
`
`Zond IPR Hearing_’652 Patent_v06
`
`12
`
`
`
`Claim Constructions
`
`• Claim terms construed by the Board:
`
`‒ “super-ionizing the initial plasma” - converting at least
`75% of the neutral atoms in the initial plasma into ions near
`the cathode assembly
`
`IPR2014-01088 Institution Decision at 11 (Paper No. 16);
`IPR2014-00861 Institution Decision at 12 (Paper No. 12)
`
`‒ “means for generating an initial plasma and excited atoms
`from a volume of feed gas”
`
`IPR2014-01089 Institution Decision at 11-13 (Paper No. 13)
`
`‒ “means for transporting the initial plasma and excited
`atoms proximate to a cathode assembly”
`IPR2014-01089 Institution Decision at 14-16 (Paper No. 13)
`
`‒ “means for super-ionizing the initial plasma proximate to
`the cathode assembly”
`
`IPR2014-01089 Institution Decision at 16-18 (Paper No. 13)
`
`Zond IPR Hearing_’652 Patent_v06
`
`13
`
`
`
`Disputes with Respect to Independent Claims
`
`• All independent claims
`
`‒ Whether Mozgrin discloses “super-ionizing the initial plasma so as to
`generate a high-density plasma”
`
`‒ Whether Fahey discloses “generating an initial plasma and excited atoms
`from a volume of feed gas”
`
`‒ Whether it would have been obvious to a person of ordinary skill in the art
`to combine Mozgrin and Fahey
`
`• Kudryavtsev’s teachings suggest the combination of Mozgrin and Fahey
`
`• Iwamura further teaches the desirability of a two-step ionization process
`
`• Independent claims 18 and 35
`
`‒ Whether Fahey discloses “transporting the initial plasma and excited atoms.”
`
`Zond IPR Hearing_’652 Patent_v06
`
`14
`
`
`
`Asserted Prior Art: Mozgrin
`
`Planar Magnetron
`
`Shaped Electrode
`
`Mozgrin, Fig. 1 (Ex. 1103)
`
`15
`
`Mozgrin (Ex. 1103)
`
`Zond IPR Hearing_’652 Patent_v06
`
`
`
`Asserted Prior Art: Mozgrin
`
`Mozgrin at Abstract (Ex. 1103); All citations are to IPR2014-00861 unless otherwise noted.
`
`Zond IPR Hearing_’652 Patent_v06
`
`16
`
`Mozgrin, FIG. 2 (Ex. 1103)
`
`Mozgrin, FIG. 3b (Ex. 1103)
`
`
`
`Asserted Prior Art: Mozgrin
`
`Mozgrin, FIG. 4 (Ex. 1103)
`
`Mozgrin, FIG. 7 (Ex. 1103)
`
`Mozgrin at 402, right col., ¶ 3 (Ex. 1103)
`
`Mozgrin at 404, right col., ¶ 4 (Ex. 1103)
`
`Zond IPR Hearing_’652 Patent_v06
`
`17
`
`
`
`Mozgrin Discloses Super-ionization
`Independent Claims 1, 18, and 35
`
`• Mozgrin explicitly discloses that the ionization degree of its
`plasma ranges from 0.7 to 1
`
`Mozgrin at 407-408 (Ex. 1103)
`
`• Mozgrin also discloses that the high-density plasma in regime 3
`was measured to be up to 1.5 x 1015 cm-3
`
`Mozgrin at p. 404, right col. ¶ 2 (Ex. 1103);
`Kortshagen Supp. Decl. at ¶ 32 (Ex. 1119)
`
`Zond IPR Hearing_’652 Patent_v06
`
`18
`
`
`
`Mozgrin Discloses Super-ionization
`Independent Claims 1, 18, and 35
`
`• Dr. Kortshagen explains that α approaches 1 as the number of
`neutral gas atoms approaches 0, resulting in 100% ionization:
`
`Kortshagen Supp. Decl. at ¶ 33 (Ex. 1119)
`
`• Dr. Hartsough likewise testified that this is correct:
`
`Q. Do you have an understanding of what it means when [α] roughly equals
`one, as it’s indicated?
`
`A. Well, my understanding is it would be almost completely ionized.
`
`Q. So 100 percent ionization?
`
`A. That’s what it says.
`
`’652 Hartsough Depo. Tr. at 124:12-23 (Ex. 1120)
`
`Zond IPR Hearing_’652 Patent_v06
`
`19
`
`
`
`Mozgrin Discloses Super-ionization
`Independent claims 1, 18, 35
`
`• Mozgrin discloses super-ionization beyond its explicit explanation
`of its ionization degree:
`
`Disclosure
`
`Summary
`
`Briefing Location
`
`Ionization Power Parameters Mozgrin’s power amplitude,
`duration, and rise-time fall within
`the ranges claimed by the ’652
`for super-ionization
`
`Gas Temperature*
`
`Mozgrin’s power supply is
`capable of creating a gas
`temperature up to 2000K which
`corresponds to a plasma whose
`density exceeds the requisite
`75% ionization
`
`IPR2014-01088 Kortshagen Decl. at ¶
`71 (Ex. 1002); IPR2014-00861
`Kortshagen Decl. at ¶ 76 (Ex. 1102);
`IPR2014-01089 Kortshagen Decl. at ¶
`87 (Ex. 1202); Kortshagen Supp. Decl.
`at ¶¶ 19-29 (Ex. 1119)
`
`IPR2014-01088 Kortshagen Decl. at ¶¶
`73-77 (Ex. 1002); IPR2014-00861
`Kortshagen Decl. at ¶¶ 78-82 (Ex.
`1102); IPR2014-01089 Kortshagen
`Decl. at ¶¶ 89-93 (Ex. 1202)
`Kortshagen Supp. Decl.
`at ¶¶ 47-53 (Ex. 1119)
`
`Kortshagen Supp. Decl. at ¶¶ 17-53 (Ex. 1119)
`
`*Patent Owner criticizes Dr. Kortshagen’s analysis for assuming a constant pressure. Mozgrin super-ionizes its plasma regardless of
`whether the system is flowing (constant pressure) or closed (variable pressure)
`
`Zond IPR Hearing_’652 Patent_v06
`
`Kortshagen Supp. Decl. at ¶¶ 41-53 (Ex. 1119)
`
`20
`
`
`
`Disputes with Respect to Independent Claims
`
`• All independent claims
`
`‒ Whether Mozgrin discloses “super-ionizing the initial plasma so as to
`generate a high-density plasma”
`
`‒ Whether Fahey discloses “generating an initial plasma and excited atoms
`from a volume of feed gas”
`
`‒ Whether it would have been obvious to a person of ordinary skill in the art
`to combine Mozgrin and Fahey
`
`• Kudryavtsev’s teachings suggest the combination of Mozgrin and Fahey
`
`• Iwamura further teaches the desirability of a two-step ionization process
`
`• Independent claims 18 and 35
`
`‒ Whether Fahey discloses “transporting the initial plasma and excited atoms.”
`
`Zond IPR Hearing_’652 Patent_v06
`
`21
`
`
`
`Asserted Prior Art: Fahey
`
`Fahey (Ex. 1105)
`
`Zond IPR Hearing_’652 Patent_v06
`
`Fahey at 381 (Ex. 1105)
`
`22
`
`
`
`Asserted Prior Art: Fahey
`
`Fahey at 381 (Ex. 1105)
`
`Fahey at 382 (Ex. 1105)
`
`Fahey at Abstract (Ex. 1105)
`
`Nozzle (B)
`
`Skimmer (C)
`
`Needle electrode (D)
`
`Zond IPR Hearing_’652 Patent_v06
`
`23
`
`Fahey, FIG. 1 (Ex. 1108)
`
`
`
`Fahey Generates an Initial Plasma and Excited Atoms
`from Feed Gas
`Independent Claims 1, 18, and 35
`
`• Neither Patent Owner nor Dr. Hartsough contest the similarities
`between the excited atom source of the ’652 Patent and Fahey’s
`high-flux beam source:
`
`Zond IPR Hearing_’652 Patent_v06
`
`24
`
`Kortshagen Supp. Decl. at ¶ 77 (Ex. 1119)
`
`
`
`Fahey Generates an Initial Plasma and Excited Atoms
`from Feed Gas
`Independent Claims 1, 18, and 35
`
`• Fahey is a two-part paper: (1) Source design and operation,
`and (2) Beam diagnostics
`
`• Patent Owner’s sole argument conflates Fahey’s beam source
`and the diagnostic equipment used to study the beam source
`
`Fahey at 382, left col., ¶ 5 (Ex. 1005)
`
`‒ A person of ordinary skill in the art understands that the downstream
`sweep plates are not part of Fahey’s beam source and serve only
`diagnostic purposes
`
`Kortshagen Supp. Decl. at ¶¶ 57-62 (Ex. 1119)
`
`Zond IPR Hearing_’652 Patent_v06
`
`25
`
`
`
`Disputes with Respect to Independent Claims
`
`• All independent claims
`
`‒ Whether Mozgrin discloses “super-ionizing the initial plasma so as to
`generate a high-density plasma”
`
`‒ Whether Fahey discloses “generating an initial plasma and excited atoms
`from a volume of feed gas”
`
`‒ Whether it would have been obvious to a person of ordinary skill in the art
`to combine Mozgrin and Fahey
`
`• Kudryavtsev’s teachings suggest the combination of Mozgrin and Fahey
`
`• Iwamura further teaches the desirability of a two-step ionization process
`
`• Independent claims 18 and 35
`
`‒ Whether Fahey discloses “transporting the initial plasma and excited atoms.”
`
`Zond IPR Hearing_’652 Patent_v06
`
`26
`
`
`
`Fahey Transports the Initial Plasma and Excited Atoms
`Independent Claims 18 and 35
`
`• Patent Owner offers no new argument regarding Fahey’s
`transporting its initial plasma and excited atoms
`
`‒ Similar to the generation of the initial plasma, Patent Owner incorrectly concludes
`that Fahey’s diagnostic sweep plates removes charged species
`
`• A person of ordinary skill would be motivated to use Fahey’s
`beam source to transport its excited atoms and initial plasma to
`Mozgrin’s chamber for further ionization
`
`‒ Mozgrin explicitly cites to Kudryavtsev whose model shows that plasma density
`explosively increases due to accumulation of excited atoms, such as those
`generated by Fahey
`
`‒ Iwamura further confirms the benefits of providing initial plasma and excited
`atoms prior to a second ionizing step which can occur in a downstream location
`
`Kortshagen Supp. Decl at ¶¶ 84-86, 69-76 (Ex. 1119);
`see also IPR2014-00861 Kortshagen Decl. at ¶¶ 69-72; 126-130;
`IPR2014-01089 Kortshagen Decl. at ¶¶ 78-83, 99-106 (Ex. 1202)
`
`Zond IPR Hearing_’652 Patent_v06
`
`27
`
`
`
`Disputes with Respect to Independent Claims
`
`• All independent claims
`
`‒ Whether Mozgrin discloses “super-ionizing the initial plasma so as to
`generate a high-density plasma”
`
`‒ Whether Fahey discloses “generating an initial plasma and excited atoms
`from a volume of feed gas”
`
`‒ Whether it would have been obvious to a person of ordinary skill in the
`to art combine Mozgrin and Fahey
`
`• Kudryavtsev’s teachings suggest the combination of Mozgrin and Fahey
`
`• Iwamura further teaches the desirability of a two-step ionization process
`
`• Independent claims 18 and 35
`
`‒ Whether Fahey discloses “transporting the initial plasma and excited atoms.”
`
`Zond IPR Hearing_’652 Patent_v06
`
`28
`
`
`
`Asserted Prior Art: Kudryavtsev
`
`Kudryavtsev at 30 (Ex. 1106)
`
`Zond IPR Hearing_’652 Patent_v06
`
`29
`
`
`
`Kudryavtsev Confirms Mozgrin’s and Fahey’s Applied
`Voltage Pulse Increases the Plasma Density
`Independent Claims 1, 18, and 35
`
`“In the first part, Kudravtsev describes a multi-step
`ionization model, which as Kudravtsev teaches, should
`be applied whenever one faces a situation where a
`plasma is being exposed to a pulsed electric field.”
`
`Kortshagen Supp. Dec. at ¶ 63 (Ex. 1119)
`
`Kudryavtsev at Abstract (Ex. 1106)
`
`Zond IPR Hearing_’652 Patent_v06
`
`30
`
`
`
`Kudryavtsev Suggests the Combination of Mozgrin
`and Fahey
`Independent Claims 1, 18, and 35
`
`• Zond focuses on differences between Kudryavtsev and the purported invention of
`
`the ’652 Patent:
`
`‒ Physical differences in chamber geometry
`
`‒ The presence of an initial plasma prior to pulsing
`
`‒ Differences in gas pressure
`
`Patent Owner Response at pp. 16-20 (Paper No. 33)
`
`• Patent Owner’s arguments improperly focus on the physical apparatus used
`
`by Kudryavtsev to experimentally verify his model.
`
`‒ A person of ordinary skill in the art would understand that Kudryavtsev’s model
`confirms that the accumulation of excited atoms from Fahey’s beam source would
`result in an explosive increase in Mozgrin’s plasma density
`
`Kudryavtsev at Abstract (Ex. 1106);
`Kortshagen Dec. at ¶¶ 68-69 (Ex. 1102);
`Kortshagen Supp. Dec. at ¶ 66 (Ex. 1119)
`
`Zond IPR Hearing_’652 Patent_v06
`
`31
`
`
`
`Disputes with Respect to Independent Claims
`
`• All independent claims
`
`‒ Whether Mozgrin discloses “super-ionizing the initial plasma so as to
`generate a high-density plasma”
`
`‒ Whether Fahey discloses “generating an initial plasma and excited atoms
`from a volume of feed gas”
`
`‒ Whether it would have been obvious to a person of ordinary skill in the
`to art combine Mozgrin and Fahey
`
`• Kudryavtsev’s teachings suggest the combination of Mozgrin and Fahey
`
`• Iwamura further teaches the desirability of a two-step ionization process
`
`• Independent claims 18 and 35
`
`‒ Whether Fahey discloses “transporting the initial plasma and excited atoms.”
`
`Zond IPR Hearing_’652 Patent_v06
`
`32
`
`
`
`Asserted Prior Art: Iwamura
`
`Treatment Chamber (10)
`
`Preexcitation Unit (24)
`
`First Plasma Generation Unit
`
`(26a, 26b, and 28)
`
`Second Plasma Generation Unit
`
`(30a, 30b, and 34)
`
`Semiconductor Wafer (1)
`
`Gas Supply (20)
`
`Zond IPR Hearing_’652 Patent_v06
`
`Iwamura, FIG. 1 (Ex. 1108)
`
`33
`
`
`
`Iwamura Teaches the Benefits of a Two-stage Plasma
`Ionization Process
`Independent Claims 1, 18, and 35
`
`• Iwamura employs two plasma generation units in series prior to
`its treatment chamber
`
`• Iwamura states that this downstream addition of energy provides
`a number of benefits:
`
`Iwamura at 2:34-38 (Ex. 1108)
`
`Iwamura at 2:39-41 (Ex. 1108)
`
`Zond IPR Hearing_’652 Patent_v06
`
`Iwamura at 2:42-46 (Ex. 1108)
`
`34
`
`
`
`Iwamura Teaches the Benefits of a Two-stage Plasma
`Ionization Process
`Independent Claims 1, 18, and 35
`
`• Patent Owner mischaracterizes Petitioner’s argument by stating
`that Iwamura does not disclose super-ionization
`
`• Patent Owner relies on an alternative embodiment of Iwamura
`when concluding that Iwamura teaches a preference for removing
`charged species
`
`‒ Patent Owner acknowledges this in its Response:
`
`Zond IPR Hearing_’652 Patent_v06
`
`35
`
`Patent Owner Response at 25 (Paper No. 33); see also Kortshagen Dep. Tr. at 70:18 - 72:6
`(Ex. 2003) (discussing Iwamura’s “number of teachings”)
`
`
`
`Iwamura Teaches the Benefits of a Two-stage Plasma
`Ionization Process
`Independent Claims 1, 18, and 35
`
`• Iwamura’s teaching is not affected by the fact that Iwamura’s
`second plasma generation unit operates at a lower power level
`than the first plasma generation unit
`
`• A person of ordinary skill in the art understands that the plasma
`density will still increase at the second plasma generation unit due
`to the excited state of the gas
`
`‒ Patent Owner’s declarant confirms that excited atoms require less energy to ionize.
`
`’652 Hartsough Depo. Tr. at 69:22-25 (Ex. 1120)
`
`‒ The ’652 expressly states that the plasma formation rate “is increased
`because only a relatively small amount of energy is required to ionize the
`metastable atoms as described herein.”
`
`’652 Patent at 27:58-60 (Ex. 1101) (emphasis added)”
`
`Zond IPR Hearing_’652 Patent_v06
`
`36
`
`
`
`A Person of Ordinary Skill in the Art Would Have
`Found it Obvious to Combine Mozgrin and Fahey
`Independent Claims 1, 18, and 35
`
`• A person of ordinary skill would understand that providing additional excited
`atoms (Fahey) to a plasma (Mozgrin) would produce a higher plasma density
`because excited atoms require less energy to ionize
`IPR2014-01088 Kortshagen Decl. at ¶ 79 (Ex. 1002)
`
`‒ Kudryavtsev – which is cited by Mozgrin – further shows a person of ordinary skill
`in the art that plasma density increases when excited atoms accumulate
`IPR2014-01088 Kortshagen Decl. at ¶ 62 (Ex. 1002)
`
`‒ Iwamura further teaches the desirability of first providing an initial plasma with
`excited atoms – such as Fahey’s – prior to a second energizing step
`IPR2014-01088 Kortshagen Decl. at ¶ 146 (Ex. 1002)
`
`• A person of ordinary skill would understand that transporting additional
`excited atoms (Fahey) to a plasma (Mozgrin) would produce a higher plasma
`density because excited atoms require less energy to ionize
`IPR2014-00861 Kortshagen Decl. at ¶ 66 (Ex. 1102)
`
`‒ Kudryavtsev and Iwamura further disclose the benefits of such a combination
`IPR2014-00861 Kortshagen Decl. at ¶ 69,129 (Ex. 1102)
`
`Zond IPR Hearing_’652 Patent_v06
`
`37
`
`
`
`Disputes with Respect to Dependent Claims
`
`• Claim 5:
`
`‒ Whether Mozgrin in combination with Vratny discloses a “power supply
`compris[ing] a RF power supply that generates an alternating electric field.”
`
`• Claims 2-4, 6-17, 19-34
`
`‒ Patent Owner offers no arguments aside from those put forth for the
`independent claims such that the dependent claims rise and fall with their
`respective independent claims
`
`‒ Board found a reasonable likelihood that claims are unpatentable over the
`prior art combinations presented in the ’652 Petitions
`
`IPR2014-01088 Institution Decision at 32 (Paper No. 16);
`IPR2014-00861 Institution Decision at 24 (Paper No. 12);
`IPR2014-01089 Institution Decision at 33 (Paper No. 13)
`
`Zond IPR Hearing_’652 Patent_v06
`
`38
`
`
`
`Asserted Prior Art: Vratny
`
`Vratny (Ex. 1008)
`
`Vratny, Fig. 1 (Ex. 1008)
`
`• Cathode
`
`• Anode
`
`• DC Power Supply
`
`• RF Power Supply
`
`Zond IPR Hearing_’652 Patent_v06
`
`39
`
`
`
`A Person of Ordinary Skill in the Art would be Motivated
`to Combine Vratny’s RF Bias with Mozgrin’s Cathode
`Dependent Claim 5
`
`Vratny achieves enhanced deposition via a third electrode which
`biases the cathode with both DC and RF potential
`
`IPR2014-01088 Kortshagen Decl. at ¶ 127 (Ex. 1002); Supp. Kortshagen Decl. at ¶ 92 (Ex. 1119)
`
`Vratny at 1:41-44 (Ex. 1008)
`
`Vratny at 1:14-18 (Ex. 1008)
`
`• Patent Owner incorrectly concludes that “Mozgrin suggests the
`use of an RF discharge for pre-ionization and not the use of an
`RF power supply for superionizing . . .”
`
`Zond IPR Hearing_’652 Patent_v06
`
`40
`
`IPR2014-01088 Patent Owner Response at 33 (Paper No. 28)
`
`
`
`A Person of Ordinary Skill in the Art would be motivated
`to Combine Vratny’s RF bias with Mozgrin’s Cathode
`Dependent Claim 5
`
`• Patent Owner wholly ignores Vratny’s teaching that simultaneous
`application of DC and RF excitation increases the density of the
`existing plasma.
`
`Vratny at 2:63-66 (Ex. 1008)
`
`Vratny at 3:6-9 (Ex. 1008)
`
`• Mozgrin explicitly states that an RF discharge is one of many
`possible sources for its pre-ionization
`
`Zond IPR Hearing_’652 Patent_v06
`
`41
`
`Mozgrin at 401, left col., ¶ 4 (Ex. 1103)
`
`
`
`The Power Supplies of Claims 1 and 5
`Dependent Claim 5
`
`• The RF power supply of claim 5 is not the only power supply
`that “super-ioniz[es] the initial plasma” as recited in claim 1
`
`Claim 1
`
`Claim 5
`
`’652 Patent, Claim 5 (Ex. 1101)
`
`’652 Patent, Claim 1 (Ex. 1101)
`
`• Claim 5 requires only that the power supply in claim 1 used to super-
`ionize the plasma “comprise,” i.e. include, a RF power supply
`
`• Claim 5 also requires that the RF power supply generate “an electric field”
`‒ This element does not derive antecedent basis from the “electric field” generated
`by the power supply recited in element D of claim 1
`
`Zond IPR Hearing_’652 Patent_v06
`
`42
`
`
`
`Conclusion
`
`• All disputed claims of the ’652 Patent are invalid.
`
`Ground
`
`Claims
`
`Prior Art
`
`1088 Petition (IPR2014-01000 is joined)
`
`5
`
`6
`
`7
`
`8
`
`1-14, 16, and 17
`
`Mozgrin, Kudryavtsev, Fahey, and Iwamura
`
`5
`
`8-10
`
`15
`
`Mozgrin, Kudryavtsev, Fahey, Vratny, and
`Iwamura
`Mozgrin, Kudryavtsev, Fahey, Lantsman, and
`Iwamura
`Mozgrin, Kudryavtsev, Fahey, Wang, and
`Iwamura
`
`Zond IPR Hearing_’652 Patent_v06
`
`43
`
`
`
`Conclusion
`
`• All disputed claims of the ’652 Patent are invalid.
`
`Ground
`
`Claims
`
`Prior Art
`
`861 Petition (IPR 2014-00864, IPR2014-01003, and IPR2014-01066 are joined)
`
`3
`
`4
`
`5
`
`6
`
`7
`
`18-30, 33, 34
`
`Mozgrin, Kudryavtsev, Fahey, and Iwamura
`
`31 and 32
`
`Mozgrin, Kudryavtsev, Fahey, Campbell, and
`Iwamura
`
`18-30
`
`Mozgrin and Iwamura
`
`31 and 32
`
`33 and 34
`
`Mozgrin, Iwamura, and Campbell
`
`Mozgrin, Iwamura, and Fahey
`
`1089 Petition (IPR2014-01004 is joined)
`
`2
`
`4
`
`35
`
`35
`
`Mozgrin, Kudryavtsev, Fahey, and Iwamura
`
`Mozgrin, Iwamura, and Fahey
`
`Zond IPR Hearing_’652 Patent_v06
`
`44
`
`
`
`Trial No. IPR2014-01088
`Petitioner’s Demonstrative Exhibits for Oral Argument
`
`
`Respectfully Submitted,
`
`
`
` /s/ David M. Tennant
`David M. Tennant
`Registration No. 48,362
`Lead Counsel for Petitioner
`GlobalFoundries
`
`
`
`
`Dated: August 10, 2015
`
`
`
`
`
`
`
`
`
`
`
`
`
`CERTIFICATE OF SERVICE
`
`
`The undersigned certifies, in accordance with 37 C.F.R. § 42.6(e), that
`
`service was made on the Patent Owner as detailed below:
`
`
`
`
`
`Date of service August 10, 2015
`
`Manner of service Email: tarek.fahmi@ascendalaw.com;
`gonsalves@gonsalveslawfirm.com
`
`Documents served PETITIONER’S DEMONSTRATIVE EXHIBITS FOR
`ORAL ARGUMENT
`
`Persons Served Tarek Fahmi
`333 W. San Carlos Street, Suite 200
`San Jose, California 95110
`
`Dr. Gregory J. Gonsalves
`2216 Beacon Lane
`Falls Church, Virginia 22043
`
`
`
`
`
`/s/ Anna Goodall
`Anna Goodall
`White & Case LLP
`3000 El Camino Real
`Five Palo Alto Square, 9th Floor
`Palo Alto, CA 94306
`Tel: (650) 213-0367
`Email: agoodall@whitecase.com
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