IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Par-res Review of U.S. Patent No. 7,147,759
`
`Filed:
`
`Title:
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`September 30, 2002
`
`Issued:
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`December 12, 2006
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`HIGH-POWER PULSED MAGNETRON SPUTTERING
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`P.O. Box 1450
`
`Alexandria, VA 22313-1450
`
`Dear SirfMadam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys andlor agents to prosecute the
`
`above captioned Inter Par-tes Review and transact all business in the U.S. Patent and Trademark
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`Office connected herewith: David M. Tennant (Reg. No. 48,362), and all practitioners at
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`Customer Number 106224.
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`For petitioners GLOBALFOUNDRIES U.S., Inc., GLOBALFOUNDRIES Dresden Module One
`LLC & Co. KG, and GLOBALFOUNDRIES Dresden Module Two LLC & Co. KG.
`
`A'/&?(-'-’-- U. C-21./Nd
`Name: Alexandra H. Lee
`Title: Executive Vice President & General Counsel
`
`Date:
`
`é'2.S'-I"!
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