throbber
trials@uspto.gov
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`571-272-7822
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`RECORD OF ORAL HEARING
`
`IPR2014-00828, Paper No. 50
`IPR2014-00829, Paper No. 47
`IPR2014-00917, Paper No. 48
`IPR2014-01073, Paper No. 39
` IPR2014-01076, Paper No. 39
`July 14, 2015
`
`UNITED STATES PATENT AND TRADEMARK OFFICE
`
`____________
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`____________
`
`FUJITSU SEMICONDUCTOR LIMITED, FUJITSU SEMICONDUCTOR
`AMERICA, INC., ADVANCED MICRO DEVICES, INC., RENESAS
`ELECTRONICS CORPORATION, RENESAS ELECTRONICS
`AMERICA, INC., GLOBAL FOUNDRIES U.S., INC.,
`GLOBALFOUNDRIES DRESDEN MODULE ONE LLC & CO. KG,
`GLOBALFOUNDRIES DRESDEN MODULE TWO LLC & CO. KG,
`TOSHIBA AMERICA ELECTRONIC COMPONENTS, INC., TOSHIBA
`AMERICA INC., TOSHIBA AMERICA INFORMATION SYSTEMS,
`INC., TOSHIBA CORPORATION, and THE GILLETTE COMPANY,,
`Petitioners,
`
`v.
`
`ZOND, LLC,
`
`Patent Owner.
`
`____________
`
`Case Nos. IPR2014-00828, IPR2014-00829,
`
`IPR2014-00917, IPR2014-01073, IPR2014-01076
`
`Patent Number 6,805,779
`
`Oral Hearing Held on Monday, June 15, 2015
`
`
`
`Before: KEVIN F. TURNER, DEBRA K. STEPHENS, JONI Y. CHANG,
`SUSAN L.C. MITCHELL, and JENNIFER MEYER CHAGNON,
`Administrative Patent Judges.
`
`
`

`
`
`
`The above-entitled matter came on for hearing on Monday, June 15,
`
`2015, at 9:00 a.m., in Hearing Room A, taken at the U.S. Patent and
`
`Trademark Office, 600 Dulany Street, Alexandria, Virginia.
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`2
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`APPEARANCES:
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`ON BEHALF OF PETITIONER GLOBAL FOUNDRIES:
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`DAVID M. TENNANT, ESQ.
`White & Case LLP
`701 13th Street, N.W.
`Washington, D.C. 20005
`202-626-3684
`
`NATHAN ZHANG, ESQ.
`White & Case LLP
`3000 El Camino Real
`5 Palo Alto Square, 9th Floor
`Palo Alto, California 94306
`650-213-0332
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`ON BEHALF OF PETITIONER FUJITSU:
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`
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`GREGORY P. HUH, ESQ.
`Haynes and Boone, LLP
`2505 N. Plano Road, Suite 4000
`Richardson, Texas 75082
`972-739-6939
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`3
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`

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`trials@uspto.gov
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`
`
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`571-272-7822
`APPEARANCES:
`
`
`
`
`
`
`
`
`IPR2014-00828, Paper No. 50
`IPR2014-00829, Paper No. 47
`IPR2014-00917, Paper No. 48
`IPR2014-01073, Paper No. 39
` IPR2014-01076, Paper No. 39
`July 14, 2015
`
`ON BEHALF OF ADVANCED MICRO DEVICES:
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`
`XIN-YI (Vincent) ZHOU, ESQ.
`O'Melveny & Myers LLP
`400 South Hope Street
`Los Angeles, California 90071
`213-430-6000
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`ON BEHALF OF PETITIONER RENESAS ENTITIES:
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`JOHN J. FELDHAUS, ESQ.
`Foley & Lardner LLP
`Washington Harbour
`3000 K Street, N.W., Suite 600
`Washington, D.C. 20007
`202-672-5300
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`ON BEHALF OF THE PATENT OWNER:
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`GREGORY J. GONSALVES, Ph.D, J.D.
`The Gonsalves Law Firm
`2216 Beacon Lane
`Falls Church, Virginia 22043
`571-419-7252
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`

`
`Case Nos. IPR2014-00828, IPR2014-00829, IPR2014-00917,
`IPR2014-01073, IPR2014-01076
`Patent Number 6,805,779
`
`
`P R O C E E D I N G S
`
`( 9:00 a . m. )
`
`J UDGE C HANG: Go o d mo rn ing . P l eas e b e
`
`s ea te d . Would coun sel pl eas e in tr odu c e you rs el f an d a n y o f
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`yo u r col le agu es .
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`M R . TENNANT: Da vid Tenn an t wi th Whit e &
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`C a se fo r Glob al Fou ndr ie s . I ' m h e re with my c o l le agu e ,
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`Na th an Zh ang . And ev er yb od y e lse c an i ntr odu ce th e ms e lve s .
`
`M R . HUH: Gr ego r y Huh on b eha lf o f Fu jits u .
`
`J UDGE C HANG: Goo d mo rn ing .
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`M R . ZHOU: Xin - Yi Zh ou on b eh al f o f Adv an ced
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`M ic ro Devi c es , In c .
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`M R . F ELDHAUS: Jo hn F el dha us on b eh al f o f
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`R en es as Ele ct ronic s Cor por at ion .
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`J UDGE C HANG: Th ank yo u .
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`DR . GONS ALVES : Dr . Grego r y Gon sal ve s
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`r ep r es enti ng Zond .
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`J UDGE C HANG: Ok a y. Goo d mo rni ng . Th ank
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`yo u ve r y mu c h .
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`Th is is the or al he a rin g fo r ca ses IP R 2014 -0082 8 ,
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`82 9 , 917 , 10 73 and 1076 , in volv ing P ate nt 6 ,80 5 ,799 .
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`Th e t r ans cr ipt o f th is conso lid at ed o ra l h ea rin g
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`wi ll b e e nte r ed in e a ch o f th e fiv e p ro ce edi ngs and wi ll b e
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`us ed ac ro ss a ll fiv e c as es .
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`Case Nos. IPR2014-00828, IPR2014-00829, IPR2014-00917,
`IPR2014-01073, IPR2014-01076
`Patent Number 6,805,779
`
`
`C onsi st ent wi th ou r p re vious ord e r, e a ch p a rt y h as
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`t wo hou rs to pr ese nt i ts a rg u me nt . P e titi one r b e ars th e bu rd en
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`o f p roo f th at t he c l ai ms a t issu e are unp at ent abl e . Th e re fo re ,
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`P e titi one r wi ll p ro ce ed fi rst to p res ent its ca se , and P e titi one r
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`ma y r e s e rv e re butt al t i me . Th e re a ft e r , P at ent Owne r wi ll
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`r e spond to th e P et ition e r 's c as e .
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`We wi ll hav e 15 mi n ut es be fo re the P at ent Owne r 's
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`p re se nta tion b e caus e I r e cogni z e i t is a l ong h ea ri ng a nd mo st
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`o f us will p rob ably n e e d a br e ak .
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`S o pl e ase st ar t any t i me yo u lik e . And do you
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`h av e de mo n st rat iv es?
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`M R . TENNANT: Ye s .
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`J UDGE C HANG: Ok a y. Gr e at .
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`M R . TENNANT: M a y I a pp ro ach?
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`J UDGE C HANG: Ye s , pl e as e .
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`M R . TENNANT: Goo d mo rn ing .
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`J UDGE C HANG: Goo d mo rn ing .
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`M R . TENNANT: Ag ain , my n a me is Dav id
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`Te nn ant . I ' m o n b eh al f of Glob al F ound ri es . I ma y h av e
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`f o rgot t en to me ntio n th at . I wil l be a rgu ing for P etit ion ers
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`to da y a nd I wo uld l ik e to re se rv e 20 mi n ute s f or r ebu tt al .
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`And I do n' t i ma g in e th at I wil l t ake a n hou r and 40
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`mi n ut es to p re sent my a r g u me nt s , bu t to t he ext ent I do , we
`
`h av e th e ti me .
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`
`6
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`

`
`Case Nos. IPR2014-00828, IPR2014-00829, IPR2014-00917,
`IPR2014-01073, IPR2014-01076
`Patent Number 6,805,779
`
`
`J UDGE C HANG: We l l , we ma y g i v e you a lo t o f
`
`qu est ions .
`
`M R . TENNANT: Ok a y. Th ank yo u . Th at 's fi ne .
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`S o I a m g oi ng to p re se nt tod a y o n th e '779 pa ten t . S i mi l ar to
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`so me o f th e oth e r p re se nta tion s th at we 'v e ma d e , we a r e go ing
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`to giv e a ve r y b rie f o ve rvi e w o f the gr ounds inst itute d ,
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`ov e rvi e w o f th e pr io r a rt , and the n we wil l su mma r i ze th e
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`di sput es i n ou r r esp ons es wit h r es pe c t to th e i ndep end ent
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`c l ai ms f ir st a nd th en we 'll foll o w up with t he d ep end ent
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`c l ai ms .
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`No w, h e re is a pic tu re of the '7 79 p at ent . I ' m o n
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`sl id e 2 . Th e tit le o f th e '779 p at ent is " Pl as ma Ge n er a tion
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`Us ing M ulti - St ep I oni z ation . " Al l o f th e cla i ms of t h e '779
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`p at ent re ci te eit he r a pl as ma g en e ra to r o r a me t hod f o r
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`g en er ati ng pl as ma .
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`B ut , as I wil l ex pl ain in l at er slid es , t he d is clos ed
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`e mb o di me n ts o f th e '779 p at ent a re di r ec ted to a sput te ring
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`a pp ar atu s but t he c l ai ms mo r e b roadl y r e c it e jus t pl as ma
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`g en er ati on .
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`And no w I' m o n sl ide 3 . S lid e 3 sho ws a
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`si de -b y- s ide co mp ar ison of Fig ur e 1 o f th e '779 pa te nt wh ich
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`is th e ad mi t te d prio r ar t , a nd F igu re 2 o f th e '779 p at ent whi ch
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`i llust r at es th e alle ge d inv ent ion . Th e on l y di f fe r enc e b et we en
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`th e t wo is t he addi tion o f wh at t he ' 779 pat en t c all s a n e xc ite d
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`

`
`Case Nos. IPR2014-00828, IPR2014-00829, IPR2014-00917,
`IPR2014-01073, IPR2014-01076
`Patent Number 6,805,779
`
`o r me t as tab le atom s ou rc e , and t hat is l abe le d as 204 and also
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`sh o wn in p urp le in Figu r e 2 o f th e i llust r ati on .
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`Th e exc it ed o r me t ast abl e a to m s ou rc e ex cit es th e
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`f e ed g as p rio r t o in je ct ion in to th e c ha mb e r so th at wh en t he
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`f e ed g as i s in je cte d in to th e c ha mb e r p la s ma c an b e g en er at ed
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`wi thin t he ch a mb e r in a mo r e e f fici ent ma n n er .
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`No w, the r e ma in ing el e me n ts in Figu r e 1 a nd
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`F igu r e 2 a r e a ll pr io r a rt st ruc tu res, n a me l y, t h e an od es in
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`ye l l o w, th e c ath od e in g r ee n - - catho de ass e mb l y, r ath e r , in
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`g re en , the po we r su ppl y t ha t en e rgi z es bot h th e an od e a nd
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`c a thod e , th e sub st r ate th at re ce iv es t he ma t e ri al that is
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`in je ct ed fr o m t he t a rge t th at i s a p ar t o f th e cat hod e a ss e mb l y,
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`o f c ou rse the pl asma t h a t is g en er ate d b et ween the anod e and
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`c a thod e , a ll o f the se el e me n ts ar e p rio r ar t .
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`Ag ain , the onl y a l leg ed i nve ntion o f th e '779
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`p at ent i s th e a ddit ion o f a me t a st abl e o r exc it ed a tom s ou rc e .
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`No w I ' m o n sl ide 4 . Sli de 4 dep ic ts o ne
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`e mb o di me n t o f the ex ci ted or me t ast ab le ato m s ou r ce an d th at
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`we h ave sho wn i n F igu r e 4 , n ext t o F igu r e 2 , a nd just - - th er e
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`is ma yb e a sligh t in a cc ur ac y o n ou r sl id e . On Figu re 2 t he r ed
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`bo x shou ld h ave e xt end ed all o f the wa y d o wn t o cov er th e ga s
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`so ur c e as wel l bec au se in F igu re 4 yo u se e th e g as sou r ce 2 06
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`i llust r at ed .
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`No w, r ef e rr ing to F igu r e 4 on s lid e 4 , g rou nd st at e
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`a to ms 208 a re f ed f r o m t he g as s our c e 206 , and th ese gr ound
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`

`
`Case Nos. IPR2014-00828, IPR2014-00829, IPR2014-00917,
`IPR2014-01073, IPR2014-01076
`Patent Number 6,805,779
`
`st at e ato ms t r ave l t o th e dis ch arg e r eg ion t hat is colo re d in
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`r ed . The dis ch arg e r eg ion is fo r me d b et ween fi rs t and se cond
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`e l ect rod es . The fi rst and se cond ele c tro des a re col or ed
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`pu rpl e .
`
`Th e po we r supp l y, th at is a lso color ed in bl ue , i s
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`c oupl ed to th es e fi rst and se cond ele c tro des and the y e ne rg iz e
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`th e el ec tro des , whi ch as I ' m s ur e you kno w cau se an e l ect ri c
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`f i eld to fo r m b e twe e n th e e le ct rode s . And this ex cit es t he
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`g roun d st at e at o ms t ha t a r e pr es ent in th e dis ch arg e re gion .
`
`At the outpu t o f th e e xc ite d an d me t ast abl e a to m
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`so ur c e , you s e e me t ast abl e a to ms 218 but th e re a re als o oth e r
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`sp e ci es p re sen t su ch as ion s 424 , e l ect ron s 426 , g rou nd st at e
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`a to ms 208 and ions 424 .
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`No w, the r e a r e nin e ind ep end ent cla i ms in t his
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`p at ent . An d I want yo u to fo cus on all of t he cl ai m s ,
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`e sp ec ial l y th ei r pr e a mb l e , be c aus e th e p r ea mb l e eithe r r ec ite s
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`a n a ppa r atus , whic h th e re a re fiv e c l ai ms ; a me tho d , wh ich a re
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`th r ee cl ai ms ; o r a me a ns -pl us - fu nctio n , whi ch ar e one c lai m.
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`Al l of th e cl ai ms r e cit e eith e r a pl as ma g en e ra to r ,
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`wh ich is v er y g ene r ic , o r a me th od - - I ' m o n sl ide 6 no w - - o r
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`a me t ho d f or g ene r ati ng a pl as ma wi th mu lti -s tep ion iz ati on ,
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`a lso v e r y g en er ic .
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`I t is not sp e ci fi c to an y t yp e o f appl ic at ion o f a
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`pl as ma , s u ch a s in a spu tt er ing a pp ar at us o r in a g as l as e r . I t
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`is just di re ct ed to pl as ma g e ne ra tion .
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`

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`Case Nos. IPR2014-00828, IPR2014-00829, IPR2014-00917,
`IPR2014-01073, IPR2014-01076
`Patent Number 6,805,779
`
`
`And on sl ide s 5 th roug h 7 , we 'v e col or ed t he
`
`l angu ag e th at i s in d isput e , bu t a lso I wil l e xpl ain in t he n ex t
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`f e w slid es , t he r e is r ea ll y o nl y p rima r i l y t wo i ssu es th at ne ed
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`to be add r ess ed th at ar e di spos itive fo r mo st of the is su es o f
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`a ll o f th e cl ai ms , a nd I wil l ex pla in th at in a se cond .
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`As fo r th e g rounds i nsti tut ed , as we c an s e e on
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`sl id e 10 , th e p ri ma r y r e f e re nc e th at is us ed to re je ct a ll o f th e
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`c l ai ms is t he I wamu r a r e f er en c e . Th e s ec ond ar y r e f e r enc es
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`in cl ude Ang e lbe ck , Pin sle y, We l ls , Lov el ock and Grub e r .
`
`B ut wh at is i mp or t ant to not e is t ha t , as I will
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`e xpl ain in th e n ext f e w sl ide s , a ll o f th es e r e fe r en ce s e xpl ain
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`ho w to g ene r at e pl as ma , wh i ch is th e s a me s cop e a s , o r th e
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`s a me f i eld , ra th er, a s th e cla i ms of th e '779 pa ten t .
`
`No w I ' m o n sl ide 15 . P ar don me , I th ink I pul led
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`up an o ld v ers ion o f ou r p re sen ta tion but th at 's oka y. No w I ' m
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`on slid e 15 . Sl ide 15 i llust r at es the disp ut es wit h r esp e ct to
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`th e i nde pend en t cl ai ms . As I s aid e a rli e r , th e re a re p ri ma r i l y
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`t wo disp ute s th at a r e di sposi tiv e f or mo s t o f th e in dep end ent
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`c l ai ms , an d mo st o f th e d ep end ent c l ai ms .
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`Th e fi rst d isput e c on ce rns al l of the ind ep end ent
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`c l ai ms sho wn he re . I t is wh eth e r or not I wa mu r a g en er at es a
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`pl as ma t h at cont ain s ex ci ted and m e t ast abl e a to ms . I f yo u can
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`r e solv e th at qu es tio n , th e oth e r dis tin ct ions t ha t Zond h as
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`ma d e wi th res pe ct to wh eth er or not th e pl as ma c h amb e r i s
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`c oupl ed to th e e xc it ed ato m s ou r ce, wh eth e r o r not th er e i s
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`

`
`Case Nos. IPR2014-00828, IPR2014-00829, IPR2014-00917,
`IPR2014-01073, IPR2014-01076
`Patent Number 6,805,779
`
`mu l t i -s te p ioni z atio n , an d a lso wi th re sp ect to c la i m 43 ,
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`wh eth e r o r not t he r e is a p r essu r e di f fe r enti al pr es ent , is
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`r e solv ed , i f you ca n a ns wer the q uest ion wh eth e r o r no t in
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`I wa mu r a a p las ma co nt ains i ons , el e ctr ons , me t as tabl e ato ms ,
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`e xc it ed a to ms .
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`Th e s ec ond di sput e is whe the r o r not it wou ld h ave
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`b ee n obvi ous to us e ma gn et s of Pi nsl e y a nd Ange lbec k in
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`I wa mu r a to su bsta nti al l y t rap el e ctr ons . That is th e s ec ond
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`qu est ion t hat yo u n ee d to ans wer . And we wi ll sh ow t he
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`c or r ec t a ns we rs fo r bot h o f thos e , o f c ou rse .
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`And th en to a l ess e r ex ten t , c la i m s 45 and 46
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`r eq ui re the tr app ing of el ec tr ons and ions . Th at 's th e th ird
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`qu est ion t hat c an b e a ns wer ed . And t he fou rth que stio n is
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`wh eth e r o r not Grub e r dis clo ses an in duc tiv el y - c ouple d
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`di sch a rg e sou rc e , a nd th at 's the fou rth q ue stion yo u n ee d to
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`a ns wer .
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`Tho se fou r qu es tion s will r esol ve al l of the
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`di sput es wi th resp ec t to t he inde pend ent cl ai ms . B ut , ag ain ,
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`th e p ri ma r y d i sput e is whe the r o r not I wa mu r a cont ain s a
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`pl as ma wi th ex cite d a to ms a nd wh eth e r o r not it would hav e
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`b ee n obvi ous to us e ma gn et s in th e I wa mu r a as tau ght b y
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`P ins le y a nd Angelb e ck .
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`No w, I 'v e mo ved on to sl ide 16 . S lid e 16 just
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`i llust r at es th e v a rio us c la i m t e r ms th at hav e b ee n cons tr ued b y
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`th e Bo ard . None o f th es e t er ms , t ha t is the cl ai m
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`Case Nos. IPR2014-00828, IPR2014-00829, IPR2014-00917,
`IPR2014-01073, IPR2014-01076
`Patent Number 6,805,779
`
`c onst ru ct ions o f th es e t er ms , a r e i n di sput e . Rat he r , th e
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`p ar ti es ma y d i sput e ho w the con st ru cti on is appl ie d bu t th e
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`c l ai m c on st ruc tion i ts el f is no t in di sput e .
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`J UDGE C HANG: C an I ask yo u a qu est ion
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`r eg a rdin g you r c la i m c on st ruc tion?
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`M R . TENNANT: S u re .
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`J UDGE C HANG: Al though fo r ma l l y we d idn ' t
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`c onst ru e th e t e r m pl as ma , b ut ca n yo u di re ct u s to wh at a
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`pl as ma i s?
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`M R . TENNANT: Ye s , I c an . An d I be li eve th at 's
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`in one of my s l ide s but I want to poi nt you to Dr .
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`Ko rts hag en 's d e cla r ati on a t p ar ag raph 21 . And h e sta t es a
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`pl as ma i s th e colle c tion o f io ns , fre e el ec tr ons and n eut r al
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`a to ms . And he go es on to e xpl ain th at neu tr al ato ms i nc lud e
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`e xc it ed a to ms , whi ch als o would in clud e me t as ta ble a to ms .
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`S o a pl as ma r e f ers t o th e sp ec ie s of a to ms in a
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`gi ven volu me o f sp a ce , and all of th e exp er ts ar e i n a gr e e me nt
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`a s to the co mmo n us ag e o f th e t erm p l as ma i n thi s c as e .
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`And r ef e rr ing you t o sli de 2 0 of ou r p re sen ta tion ,
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`a t th e v er y b ot tom we h av e t est i mon y f r o m b oth Dr.
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`Ko rts hag en , wh ich i s P et ition e r 's exp e rt , and Pa ten t Own e r' s
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`e xp er t , Dr . Ha rtsou gh .
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`Dr . Ko rtsh ag en t est if ie d - - act ua ll y th is is a
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`r e cit at ion fr o m h is s uppl e me n tal dec l ar ati on , wh er e h e jus t
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`c on fi r ms th at a pla s ma i s a col le ction of i ons , fr e e el e ctr ons ,
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`

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`Case Nos. IPR2014-00828, IPR2014-00829, IPR2014-00917,
`IPR2014-01073, IPR2014-01076
`Patent Number 6,805,779
`
`n eut r al a to ms , whi ch i ncl ude s va riou s ex ci ted sta te s, wh ich
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`wou ld in clu de me t ast abl e s ta tes .
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`Dr . Ha rt sough also h as ag re ed wi th th is co mmo n
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`us ag e o f th e t er m pl as ma wh e r e h e st at es o r t he q uest ion was
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`po sed :
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`" Que stion : S o in a giv en vo lu me of sp ac e , wh e re
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`yo u ha ve a c oll ect ion o f ion s , el e ctr ons and g rou nd st at e
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`a to ms a nd exc it ed at o ms , i t would b e fai r t o ch a ra cte r iz e th at
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`a s a pl as ma ?
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`" Ans wer : Th at ha s b een th e co mm on usa ge i n thi s
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`c as e . " And th e cit ati on f or tha t is f r o m Dr . Ha r tsough 's
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`d epos itio n at page 42 , l ine s 9 th roug h 15 o f Exhi bit 10 17 .
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`J UDGE C HANG: Th at 's the co mmon de fin ition , so
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`on e o f o rdin a r y ski ll in th e a rt ma y u s e t ha t de fin ition , but I
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`gu ess I ' m l ook ing a t th e Sp eci fi c ation of t he p at ent . I thi nk
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`th e re is a de fin ition the r e , too .
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`M R . TENNANT: C ould yo u po int me t o th at
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`po rt ion wh er e you ar e re f er ri ng?
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`J UDGE C HANG: S u re . Colu mn 1 , l ine 7 , st ar t
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`wi th 7: "P la s ma is con sid er ed the f ou rth s ta te o f ma t te r . A
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`pl as ma i s a co ll ect ion o f c ha rg ed pa r tic le s th at mo ve in
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`r an do m d i re cti on ."
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`M R . TENNANT: Ye s , I do s ee th at d e fini tion .
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`And th at r e fe rs to th e i ons th at a re mo v in g in ra ndom
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`di r ec tion s .
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`

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`Case Nos. IPR2014-00828, IPR2014-00829, IPR2014-00917,
`IPR2014-01073, IPR2014-01076
`Patent Number 6,805,779
`
`
`J UDGE C HANG: I don 't se e th at de f init ion
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`in cl ude s ne utr al ato ms , s o ho w do we r e con cil e b etwe e n th at
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`d ef init ion s et fo rth i n th e S pe ci fi cat ion and th e d ef ini tion t ha t
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`th e exp er ts h ave a gr e ed upo n?
`
`M R . TENNANT: S u re . I f you , ac tu all y, i f yo u --
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`yo u kno w, go ing th rou gh th e enti re pa te nt o f th e '779 , yo u
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`n ee d to s tud y how t he y a r e u sing pl as ma i n th e cont ext of t he
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`e mb o di me n t a nd ho w it expl ain s wh at a pl as ma i s .
`
`And , fo r exa mp l e, a nd I wil l t r y to f ind yo u so me
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`c it ati ons , bu t , fo r e xa mp l e , i n F igur e 1 of the '7 79 pa t ent:
`
`Wh e n a pl as ma i s g en er at ed wi thin th e p las ma c h a mb er , th er e
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`is with in th e pl asma , i o ns , el ec trons , ex cit ed ato ms .
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`And th e r ea son the r e is ex cit ed atoms i s b e ca us e
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`F igu r e 2 , for ex amp l e , t ells yo u tha t th e re is e xc ited ato ms
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`wi thin t he a re a wh er e t he p la s ma is g en e rat ed .
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`J UDGE C HANG: S o I gu ess Pe tition e r 's pos ition
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`is th at we shou ld di sr eg ar d th at d e fin itio n th at is found in th e
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`S p eci fi c atio n ?
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`M R . TENNANT: I don 't k no w i f th e y sp e ci fi cal l y
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`ma d e th at a rgu me nt or the y s hou ld di sr eg ar d - - oh ,
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`P e titi one r 's . I ' m so r r y. We a r e not d is reg a rdin g th at
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`st at e me n t . R e ally t h a t st at e me nt is r eal l y ju st a n expl an ati on
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`o f on e o f th e sp ec i es th at i s co n ta in ed wi thin t he p la s ma .
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`J UDGE C HANG: I t is not --
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`M R . TENNANT: I t is not ex clusi ve .
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`

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`Case Nos. IPR2014-00828, IPR2014-00829, IPR2014-00917,
`IPR2014-01073, IPR2014-01076
`Patent Number 6,805,779
`
`
`J UDGE C HANG: - - ex clus iv e . Oka y.
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`M R . TENNANT: And th e r ea son we kno w tha t is
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`b ec aus e wh en yo u re ad fu rth e r into t he Sp ec if ic ati on , fo r
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`e xa mp l e , re f er ri ng t o th e '779 p at ent at Fi gur e 2 , yo u s e e th at
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`e xc it ed a to ms a r e in th e r egio n whe r e a pl as ma i s be ing
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`g en er at ed .
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`And al so , in o rd er f or yo u to fu rthe r a ctiv at e th e
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`pl as ma i n th e re gio n , you h av e to h av e non - - sp ecie s oth e r
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`th an ions p r ese nt . S o wh en you a re a ppl yi ng yo ur ele c tri c al
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`f i eld ac ros s th e ano de and t he c athod e , in ord e r to ex cit e th e
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`pl as ma a n d fu rt her ex ci te the pla s ma , so me t hing els e h as to be
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`p re se nt in o rd e r to fu rth er ex cit e i t, su ch as ex cit ed a to ms a nd
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`g roun d st at e at o ms .
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`Do es t hat ans we r yo u r q ues tion?
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`J UDGE C HANG: Ye s .
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`M R . TENNANT: Th ank yo u . No w I ' m o n slid e
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`12 . Sl ide 12 is an i llus tr at ion o f th e p ri ma r y r e f e r en ce th at is
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`us ed fo r a ll o f the - - to r e jec t a ll of th e c la i ms . It is I wa mu r a .
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`And , ag ain , I wa mu ra de s c rib es p las ma g en e ra tion . I n th e
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`e mb o di me n t o f Iwa mu r a , whi ch are th e wa y t h at th e pl as ma i s
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`us ed fo r in I wa mu ra fo r ashi ng a nd et chin g , but t he pl as ma
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`g en er ati on is d esc r ibe d .
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`And I wa mu r a d esc r ibe s a t wo - st age ma n n e r in
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`wh ich to g ene r at e th e p las ma t h a t is ev entu all y u s ed f o r
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`a shin g an d e tch ing . An d on Figu r e 1 2 we h av e an illus tr at ion
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`

`
`Case Nos. IPR2014-00828, IPR2014-00829, IPR2014-00917,
`IPR2014-01073, IPR2014-01076
`Patent Number 6,805,779
`
`o f Figu r e 1 - - I ' m so r r y, on slid e 12 we h av e an illust r ati on o f
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`F igu r e 1 o f I wa mu ra . At th e to p ha l f of th e fi gu re we s ee t he
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`f i rst s tag e wh e re pl as ma i s g en er ate d . And at t he bot to m h a lf
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`o f th e figu r e we se e a s ec ond st ag e wh e re p la s ma is f u rth er
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`g en er at ed .
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`P ins le y i s sh o wn on slid e 13 . Pin sl e y i s al so
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`di r ec ted to pl as ma ge ne r ation . Just lik e I wa mu r a and just l ike
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`th e cl ai ms o f th e ' 779 pat en t , th e y a r e all d ir e cte d to pl as ma
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`g en er ati on .
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`Ho wev er , Pi nsl e y a ppl ies the pl asma t h a t is
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`g en er at ed in th e app li cat ion o f a gas l as e r , wh er e as Iwa mu r a
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`a ppl ies the pl as ma th at is gen e ra ted t o as h an d sput te r . But
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`th e wa y th at p la sma i s g ene r at ed is d o ne in th e s a me ma n n e r .
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`Ang elb e ck is al so di r ec ted to pl asma g e n e rat ion .
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`And onc e a pl as ma is g en er at ed i t is u sed in th e appli c ation of
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`a ga s l ase r l ike Pins le y.
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`No w I ' m o n sl ide 17 . Sl ide 17 o f ou r p re sen ta tion
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`i llust r at es , aga in , F igu r e 4 o f th e '77 9 pa ten t . And th is is one
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`o f th e di sc los ed emb o di me n ts o f t he ex ci ted and me t a st abl e
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`a to m s ou r ce o f t he ' 779 p at ent . And I 'll just ag ain br i ef l y
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`e xpl ain ho w th e '77 9 pa ten t ge ne r at es ex cit ed o r me ta st abl e
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`a to ms .
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`On the le ft -h and si de o f Figu r e 4 you hav e a
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`so ur c e of gro und st at e ato ms , 208 . Th es e g round stat e ato ms
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`f lo w t hr ough a s er i es o f ma ss flo w c ont rol le rs , wh ich I
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`

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`Case Nos. IPR2014-00828, IPR2014-00829, IPR2014-00917,
`IPR2014-01073, IPR2014-01076
`Patent Number 6,805,779
`
`b eli ev e is lab el ed a s 210 . The groun d st at e at o ms th en flo w
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`in to th e di sch a rge r egi on whi ch i s l ab el ed a s r ed , and th e
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`po we r supp l y th at e xc it es th e ele ct rod es t ha t a r e co lor ed in
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`pu rpl e ex cit es th e g as .
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`S o at th e out put of th e e xci te d at om s ou rc e yo u
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`h av e a col le cti on o f ion s , g round s ta t e at o ms , ex cit ed ato ms ,
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`me t a s tab le ato ms , a nd el ect ron s .
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`And this is not new, t h at is , th e g en er at ion o f th e
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`v ar ious spe ci es of , we ll , th e n eut ra l ato ms a nd ion s is not
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`n e w. And this wa s re cogn iz ed b y th e Bo ard in th ei r
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`in stit utio n de cis ion . And thi s h as a lso b e en con fi r me d b y Dr .
`
`Ko rts hag en , fo r ex a mp le , in a suppl e me n tal de cl a rati o n a t
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`p ar ag r aph 26 .
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`And c er ta inl y Dr . Ha r tsoug h , whi ch i s P at ent
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`Own e r' s e xpe rt , ha s c onc ed ed t hat th e g en er at ion o f e xc it ed
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`a to ms , io ns , e le ctr ons , me t a st abl e a to ms a nd also p ass ing
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`th rou gh g round sta t e at o ms is no t ne w.
`
`I n Dr . Ha rt sough 's d epo siti on a t pag e 39 , l in es 33
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`th rou gh p age 40 , l ine 3 , Dr . Ha rtsoug h was que stio ne d:
`
`" Que stion : Th e ge ne r atio n o f me t ast ab le ato ms ,
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`g roun d st at e at o ms , el ec tr ons and ion s was not i nvent ed b y t h e
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`in ven to r of the ' 779 pat en t , co r re ct?
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`" Ans wer : Th at 's c or r ec t ." So re all y wh a t we se e
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`h er e i n F igu re 4 is t he wa y t o ge ner a te the se v a riou s sp e ci es ,
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`

`
`Case Nos. IPR2014-00828, IPR2014-00829, IPR2014-00917,
`IPR2014-01073, IPR2014-01076
`Patent Number 6,805,779
`
`th is is not n e w. And be c aus e it i s no t ne w we s e e a lo t o f
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`si mi l a rit ie s , i f not the ide nti ca l disc losu r e , in the prio r a rt .
`
`J UDGE C HANG: I h ave a qu est ion. I t hi nk th at
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`th e ou tput o f all o f th es e g ase s is wh at co rr el at es to a vol u me
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`o f e xc ite d a to ms , r igh t , in th e cl aim i ts el f?
`
`M R . TENNANT: Wh i ch cl ai m a r e yo u r e fe r ring
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`to?
`
`J UDGE C HANG: C l ai m 1 , look ing a t cla i m 1 ,
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`th e re is a te r m c a l led a vo lu me o f e xc it e d a to ms g en er at ed b y
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`th e ex cit ed ato m so ur c e .
`
`M R . TENNANT: R igh t .
`
`J UDGE C HANG: S o I gu ess I would lik e to k no w
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`wh at i s a v olu me o f e xc ite d a to ms th at it is r ef e rr ing t o in t he
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`c l ai ms?
`
`M R . TENNANT: R igh t , so th e vo lu me o f ex cit ed
`
`a to ms in the cl aims r e f e rs to th e out put o f th e exc ite d a to m
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`so ur c e , an d th e vol u me , I gu ess , wi th r esp e ct to Fi gu re 4
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`wou ld b e th e volu me t ha t is at t he ou tput tha t co ntain s a t le as t
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`e xc it ed a to ms .
`
`J UDGE C HANG: Th en ca n you d ist ingui sh , wh at
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`is th e di ff e re nc e b et wee n a p la s ma a nd a volu me o f e xc it ed
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`a to ms th en , b e caus e it looks lik e the y a r e a ll th e s a me kind of
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`sp e ci es?
`
`M R . TENNANT: R igh t , th e y do all h av e th e s a me
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`t yp e o f s pe ci es , th at 's co rr e ct .
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`

`
`Case Nos. IPR2014-00828, IPR2014-00829, IPR2014-00917,
`IPR2014-01073, IPR2014-01076
`Patent Number 6,805,779
`
`
`J UDGE C HANG: Th en wh at is th e di f fe r en ce , I
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`me a n , wh y d on 't we jus t c all it pl as ma i n th ose pla ce s?
`
`M R . TENNANT: I t is an int er est ing que stion . It
`
`is a v e r y good que sti on . Th e '779 p at ent d oes n' t t ell u s ho w to
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`di stin guish bet wee n th e t wo , in fa ct .
`
`Vo lu me o f a - - a pl as ma v olu me i s go ing to
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`in cl ude ex cit ed ato ms a nd me t as tabl e ato ms . Thi s is no t in
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`di sput e . And also as cl ai me d a volu me o f ex ci ted ato ms
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`do esn 't ex clu de th e p re sen c e or pre c lud e th e pr es enc e o f an y
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`ot he r sp e ci es su ch as io ns .
`
`J UDGE C HANG: S o wh at i s th e Pe tit ion er 's
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`po siti on , th at a pla s ma c a n r e ad on bo th c la i m t e r ms th en?
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`M R . TENNANT: Wi t hin t he o rd ina r y u s age of t he
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`t e r m p la s ma it is un de rst ood th at a pl as ma i n clud es io ns a nd
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`ot he r sp e ci es a s we ll s o , ye s , it c an i nc lud e , and yo u ca n a lso
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`us e th e m s yn o n ymo u sl y. A v olu me of ex cit ed ato ms wo uld
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`n ec es sa ril y i n clud e so me i ons .
`
`J UDGE C HANG: I gu ess g en er al l y th e wa y we
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`c onst ru

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