`
`POWER OF ATTORNEY
`
`
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Partes Review of US. Patent No. 6,853,142
`
`Filed:
`
`Title:
`
`Nov. 4, 2002
`
`Issued:
`
`Feb. 8, 2005
`
`METHODS AND APPARATUS FOR GENERATING HIGH-DENSITY
`PLASMA
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`PO. Box 1450
`
`Alexandria, VA 22313-1450
`
`Dear Sir/Madam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the US. Patent and Trademark
`
`Office connected herewith: Brian M. Berliner (Reg. No. 34549), Ryan K. Yagura (Reg. No.
`
`47191), Xin-Yi Zhou (Reg. No. 63366), and all practitioners at Customer Number 23879.
`
`For petitioner Advanced Micro Devices, Inc.
`
`M Date: _(9;‘1——$-“\—_
`Name: Karon Macdaniel
`
`Title: Senior Corporate Counsel
`
`1
`
`
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Fortes Review of US. Patent No. 6,853,142
`
`Filed:
`
`Title:
`
`Nov. 4, 2002
`
`Issued:
`
`Feb. 8, 2005
`
`METHODS AND APPARATUS FOR GENERATING HIGH-DENSITY
`PLASMA
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`PO. Box 1450
`
`Alexandria, VA 22313-1450
`
`Dear SirlMadam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys andfor agents to prosecute the
`
`above captioned Inter Fortes Review and transact all business in the US. Patent and Trademark
`
`Office connected herewith: Robinson Vu (Reg. No. 60,2l I).
`
`For petitioners Toshiba America Electronic Components, Inc, Toshiba America Inc., Toshiba
`America Information Systems, Inc., and Toshiba Corporation.
`
`(Momma: s:
`
`Name: Hideo Kumagai
`Title: General Manager,
`Intellectual Property Office,
`Technology & Innovation Division,
`Toshiba Corporation
`
`M, um 254 was
`
`2
`
`
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Panes Review of U.S. Patent No. 6,853,142
`
`Filed:
`
`Title:
`
`November 4, 2002
`
`Issued:
`
`February 8, 2005
`
`METHODS AND APPARATUS FOR GENERATING HIGH-DENSITY
`PLASMA
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`PO. Box 1450
`
`Alexandria, VA 22313-1450
`
`Dear Sin’Madam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys andfor agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the US. Patent and Trademark
`
`Office connected herewith: David M. Tennant (Reg. No. 48,362), and all practitioners at
`
`Customer Number 106224.
`
`For petitioners GLOBALFOUNDRIES US, Inc., GLOBALFOUNDRIES Dresden Module One
`LLC & Co. KG, and GLOBALFOUNDRIES Dresden Module Two LLC & Co. KG.
`
`lg;
`file/71¢ H.
`Name: Alexandra H. Lee
`
`[AN
`
`Title: Executive Vice President & General Counsel
`
`Date:
`
`5 "2‘" "‘1
`
`3
`
`
`
`DocuSign Envelope ID: DEC5A96E-14AE-4B2C-82B9-A427229B77DA
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Partes Review of U.S. Patent No. 6,853,142
`
`Filed:
`
`Title:
`
`
`
`
`
`Nov. 4, 2002
`
`
`
`
`
`Issued:
`
`Feb. 8, 2005
`
`METHODS AND APPARATUS FOR GENERATING HIGH-DENSITY
`PLASMA
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`P.O. Box 1450
`Alexandria, VA 22313-1450
`
`Dear Sir/Madam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the U.S. Patent and Trademark
`
`Office connected herewith: all practitioners at Foley & Lardner LLP, Customer Number 23879,
`
`including John Feldhaus (Reg. No. 28,822), Pavan Agarwal (Reg. No. 40,888), and Mike
`
`Houston (Reg. No. 58,486).
`
`For petitioner Renesas Electronics America Inc.
`
`__________________________________
`Name:
`(cid:12)(cid:15)(cid:26)(cid:26)(cid:31)(cid:1)(cid:14)(cid:29)(cid:26)(cid:24)(cid:18)(cid:26)
`Title:
`
`(cid:10)(cid:20)(cid:21)(cid:18)(cid:19)(cid:1)(cid:9)(cid:17)(cid:23)(cid:21)(cid:24)(cid:21)(cid:27)(cid:28)(cid:26)(cid:15)(cid:28)(cid:21)(cid:30)(cid:18)(cid:1)(cid:13)(cid:19)(cid:19)(cid:21)(cid:16)(cid:18)(cid:26)(cid:1)(cid:2)(cid:1)(cid:11)(cid:18)(cid:24)(cid:18)(cid:26)(cid:15)(cid:22)(cid:1)(cid:10)(cid:25)(cid:29)(cid:24)(cid:27)(cid:18)(cid:22)
`
`
`
`
`
`(cid:8)(cid:3)(cid:6)(cid:4)(cid:3)(cid:6)(cid:4)(cid:5)(cid:7)(cid:1)
`Date: ____________________
`
`4
`
`
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Partes Review of U.S. Patent No. 6,853,142
`
`Filed:
`
`Title:
`
`Nov. 4, 2002
`
`Issued:
`
`Feb. 8, 2005
`
`METHODS AND APPARATUS FOR GENERATING HIGH-DENSITY
`PLASMA
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`PO. Box 1450
`
`Alexandria, VA 22313—1450
`
`Dear Sir/Madam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the U.S. Patent and Trademark
`
`Office connected herewith: all practitioners at Foley & Lardner LLP, Customer Number 23879,
`
`including John Feldhaus (Reg. No. 28,822), Pavan Agarwal (Reg. No. 40,888), and Mike
`
`Houston (Reg. No. 58,486).
`
`For petitioner Renesas Electronics Corporation
`
`
`
`June 25'
`
`20/94
`
`QM“ Q/‘Vé—fi
`
`Date:
`
`Name: KAORM FM KADA
`Title: S+mfe?/ 06/961aner Mal/laier
`[mg/lecflm/ Propel/77 Dl‘w‘gfar;
`
`5
`
`