J. Phys. D‘. Appl. Phys. 22 (1989) 632-643. Printed in the UK
`
`II = Aipplircationtrtor low-pressure
`
`applicablettto argcndischarges over at
`wide range9ofglicondittoinrsr. 1
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`
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`cathodeareandrow-pressuregrow9 V
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`
`
`
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`
`
`3
`
`J Vléekt and V Pelikéni.
`T Department of Physics, Institute of Mechanical and Electrical Engineering.
`30614 Plzen. Nejedlého sady 14. Czechoslovakia
`3; Department of Automatic Control Systems. Skoda National Corporation, 31600
`Plzen, Czechoslovakia
`
`Received 12 July 1988, in final form 28 November 1988
`
`Abstract. The extensive collisional—radiative model for an argon atom plasma is
`applied to a low-pressure, hollow—cathode arc discharge and to the positive column
`of a low-pressure glow discharge in order to clarify the mechanisms by which the
`excited levels in these discharges are populated, the results being compared with
`experimental investigations in the literature. Computations are carried out for
`various sets of input parameters. such as the electron kinetic temperature T5, the
`atom temperature T3. the ion temperature T, the electron number density ne, the
`ground state atom population n-_ the plasma column radius R and the escape
`factors Am and
`characterising the non-equilibrium plasmas under
`consideration. The predictions of our model. i.e. the populations in the excited
`levels as a function of the electron number density, the effective principal quantum
`number and the discharge current, are compared with the experimental results and
`in two cases also with the theoretical results of other authors. it is shown that all
`calculated dependences are fairly close to the corresponding experimental curves
`referring to both discharges. The results presented confirm the applicability of the
`so—called ‘analytical top model’ of van der Mullen er al and Walsh's formula for AV
`interpreted according to Mills and Hieftje.
`
`1. introduction
`
`In the preceding paper (Vléek 1989). a collisional-
`radiative (CR) model applicable over a wider range of
`conditions than those described in the literature (Gian-
`naris and Incropera 1973. Katsonis 1976. Gomés 1983.
`van der Sijde er al 19842. I-Iasegawa and Haraguchi
`1985) was established for an argon atom plasma.
`Atorn—atom inelastic collisions and diffusion losses
`of the metastable states.
`together with the electron—
`atom inelastic collisions and radiative processes usually
`included. are considered in this model.
`taking into
`account 65 effective levels.
`
`Analytical expressions used for the corresponding
`cross sections are in good agreement with currently
`available experimental and theoretical data for argon.
`In particular. the measurements of Chutjian and Cart-
`
`O022-3727x89/O50682 -*-
`
`‘:2 $02.50
`
`1989 lOP Publishing Ltd
`
`wright (1981) and the computations of Kimura er al
`(1985) have been used extensively.
`With the help of the previously established numeri-
`cal method (Vléek 1989). we can calculate the popu-
`lation coefficients determining the populations in all
`excited effective levels. This enables us to study the
`mechanisms by which these levels are populated under
`various conditions in a non-equilibrium argon plasma
`characterised (even in the case of a non-Maxwellian
`electron energy distribution function) (EEDF) by the set
`of parameters TC. Tu. Ti.
`/23. 111. R. A,_,,,, and A,,,.
`The main aim of the present paper is to check
`the reliability of our extensive CR model under the
`conditions in the low—pressure hollow cathode arc.
`studied experimentally by van der Mullen et a[ (1978.
`1980) and by van der Sijde er (2! (l9S4a. b). and in the
`positive column of the low-pressure glow discharge.
`
`INTEL 1012
`Intel 1412
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