UNITED STATES PATENT AND TRADEMARK OFFICE
`
`____________________________________________
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`____________________________________________
`
`GLOBALFOUNDRIES U.S., INC., GLOBALFOUNDRIES DRESDEN
`MODULE ONE LLC & CO. KG, GLOBALFOUNDRIES DRESDEN
`MODULE TWO LLC & CO. KG, and
`THE GILLETTE COMPANY,
`Petitioners,
`
`
`
`v.
`
`Zond, LLC.
`Patent Owner of U.S. Patent No. 6,805,779
`Trial No. IPR2014-010731
`
`
`
`PETITIONER’S DEMONSTRATIVE EXHIBITS FOR ORAL ARGUMENT
`
`
`1 Case IPR2014-01017 has been joined with the instant proceeding.
`
`

`

`UNITED STATES PATENT AND TRADEMARK OFFICE
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`The ’779 Patent:
`GlobalFoundries U.S. Inc., GlobalFoundries Dresden Module One LLC & Co. KG,
`GlobalFoundries Dresden Module Two LLC & Co. KG, The Gillette Company, Fujitsu
`Semiconductor Limited, Fujitsu Semiconductor America, Inc., Advanced Micro Devices, Inc.,
`Renesas Electronics Corporation, Renesas Electronics America, Inc., Toshiba America Electronic
`Components, Inc., Toshiba America Inc., Toshiba America Information Systems, Inc., and
`Toshiba Corporation
`
`v. Zond, LLC
`IPR2014-00828, IPR2014-00829, and IPR2014-00917
`
`GlobalFoundries U.S. Inc., GlobalFoundries Dresden Module One LLC & Co. KG,
`GlobalFoundries Dresden Module Two LLC & Co. KG, and The Gillette Company
`v. Zond, LLC
`
`IPR2014-01073 and IPR2014-01076
`
`June 15, 2015
`
`0
`
`

`

`Overview
`
`• Overview of ’779 Patent
`
`• Grounds Instituted
`
`• Overview of Prior Art
`
`• Summary of Disputes and Responses Related to Independent Claims
`
`• Summary of Disputes and Responses Related to Dependent Claims
`
`1
`
`

`

`The ’779 Patent
`The ’779 Patent
`
`
`
`
`(In) Pate-ll NIL: US 6,805,779 32
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`
`(10) Patent N0.:
`
`US 6,805,779 B2
`(45) Date of Patent:
`Oct. 19, 2004
`
`
`(54
`
`PLASMA GENERATION USING MULTI~STEP
`IONIZATION
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`US Patent 6,805,779
`US Patent 6,805,779
`
`
`
`2
`
`

`

`’779 Patent and Admitted Prior Art
`
`Plasma Chamber
`
`Anode
`
`Cathode Assembly
`
`Power Supply
`
`Metastable Atom
`Source
`
`Plasma
`
`Substrate
`
`’779 Patent, Fig. 1
`
`Feed Gas Source
`
`Bias Power Supply
`
`’779 Patent, Fig. 2
`
`3
`
`

`

`’779 Patent’s Metastable Atom Source
`
`Feed Gas Source (206)
`
`First and Second Electrodes (440 and 442)
`
`Power Supply (404)
`
`Discharge Region (444)
`
`’779 Patent, Fig. 4
`
`’779 Patent, Fig. 2
`
`4
`
`

`

`Independent Claims
`Claims 1 & 18
`
`Claim 1
`
`Claim 18
`
`‘779 Patent, Claim 1
`
`‘779 Patent, Claim 18
`
`5
`
`

`

`Independent Claims
`Claims 30 & 40
`
`Claim 30
`
`Claim 40
`
`‘779 Patent, Claim 30
`
`‘779 Patent, Claim 40
`
`6
`
`

`

`Independent Claims
`Claim 41
`
`Claim 41
`
`‘779 Patent, Claim 41
`
`7
`
`

`

`Independent Claims
`Claims 43 & 44
`
`Claim 43
`
`Claim 44
`
`‘779 Patent, Claim 43
`
`‘779 Patent, Claim 44
`
`8
`
`

`

`Independent Claims
`Claims 45 & 46
`
`Claim 45
`
`Claim 46
`
`‘779 Patent, Claim 45
`
`‘779 Patent, Claim 46
`
`9
`
`

`

`Grounds Instituted
`
`’779 Patent
`
`Ground
`
`Claims
`
`Prior Art
`
`828 Petition (IPR 2014-00856, IPR2014-01022, and IPR2014-01070 are joined with the 828)
`
`4
`
`5
`
`6
`
`30-33, 35, 37, and 40
`
`Iwamura + Angelbeck + Pinsley
`
`34 and 39
`
`Iwamura + Angelbeck + Pinsley + Wells
`
`36
`
`Iwamura + Angelbeck + Pinsley + Lovelock
`
`829 Petition (IPR2014-00859, IPR2014-01020, and IPR2014-01072 are joined with the 829)
`
`3
`
`4
`
`16, 28, 41, 42, and 45
`
`Iwamura + Angelbeck + Pinsley
`
`46
`
`Iwamura
`
`10
`
`

`

`Grounds Instituted
`
`’779 Patent
`
`Ground
`
`Claims
`
`Prior Art
`
`917 Petition (IPR2014-00918, IPR2014-01025, and IPR2014-01074 are joined with the 917)
`
`3
`
`4
`
`6
`
`9, 21, and 44
`
`Iwamura + Angelbeck + Pinsley + Gruber
`
`7 and 20
`
`Iwamura + Angelbeck + Wells
`
`38
`
`Iwamura + Angelbeck + Pinsley
`
`1073 Petition (IPR 2014-01017 is joined with the 1073)
`
`2
`
`1-4, 10-15, 17, 18, 24-27
`and 29
`
`Iwamura + Angelbeck + Pinsley
`
`1076 Petition (IPR2014-01019 is joined with the 1076)
`
`2
`
`3
`
`43
`
`Iwamura
`
`5, 6, 8, 19, 22, and 23
`
`Iwamura + Angelbeck + Pinsley
`
`11
`
`

`

`Asserted Prior Art: Iwamura
`
`Treatment Chamber (10)
`
`Preexcitation Unit (24)
`
`First Plasma Generation Unit
`(26a, 26b, and 28)
`
`Second Plasma Generation Unit
`(30a, 30b, and 34)
`
`Semiconductor Wafer (1)
`
`Gas Supply (20)
`
`Iwamura, FIG. 1, Ex. 1007;
`All citations are to IPR2014-01073 unless otherwise noted.
`
`12
`
`

`

`Asserted Prior Art: Pinsley
`
`Pinsley at Abstract
`
`Pinsley, Figure (Ex. 1005)
`
`13
`
`

`

`Asserted Prior Art: Angelbeck
`
`Angelbeck at Abstract
`
`Angelbeck, Fig. 1 (Ex. 1006)
`
`14
`
`

`

`Disputes with Respect to Independent Claims
`
`All independent claims
`• Whether Iwamura discloses:
`‒ “generating [excited/metastable] atoms from the ground state atoms”
`‒ “a plasma chamber coupled to the [excited/metastable]
`atom source” (claims 1, 18, 43-45)
`‒ “generating a plasma with a multi-step ionization process”
`
`Independent claims 1, 18, 30, 40, and 41
`• Whether Iwamura in combination with Pinsley and Angelbeck discloses
`“substantially trapping electrons.”
`• Whether a person of ordinary skill would have combined Iwamura with the
`teachings of Pinsley and Angelbeck.
`
`Independent claims 43-46
`• Whether Iwamura discloses “a pressure differential” (claim 43)
`• Whether Gruber discloses “an inductively coupled discharge source” (claim 44)
`• Whether Iwamura discloses “trapping electrons and ions” (claims 45 and 46)
`
`15
`
`

`

`Claim Constructions
`
`Claim terms construed by the Board:
`
`• “excited atoms”
`
`• “metastable atoms”
`
`• “multi-step ionization process”
`
`• “means for generating a magnetic field proximate to a volume of ground state
`atoms to substantially trap electrons proximate to the volume of ground state
`atoms”
`
`• “means for generating a volume of metastable atoms from the volume of ground
`state atoms”
`
`• “means for raising an energy of the metastable atoms so that at least a portion
`of the volume of metastable atoms is ionized, thereby generating a plasma with a
`multi-step ionization process”
`
`• “means for trapping electrons and ions in the volume of metastable atoms”
`
`16
`
`

`

`The ’779 Patent’s Disclosed Technique For
`“Generating [Excited/Metastable] Atoms”
`Claims 1, 18, 30, 40, 41, and 43‒46
`
`’779 Patent at 13:66-14:1
`
`’779 Patent, Fig. 4
`
`’779 Patent at 14:3-8
`
`’779 Patent at 13:34-37
`
`’779 Patent at 14:8-23
`
`17
`
`

`

`Iwamura Discloses “Generating
`[Excited/Metastable] Atoms”
`Claims 1, 18, 30, 40, 41, and 43‒46
`1. Inert feed gas is supplied
`
`Iwamura at 7:47-50; see also Kortshagen Dec. at ¶ 113 (Ex. 1002)
`
`2. Preexcitation unit excites the gas
`
`Iwamura at 7:55-60; see also Kortshagen Dec. at ¶ 114 (Ex. 1002)
`
`3. First plasma generation unit generates a plasma
`
`Iwamura, FIG. 1, Ex. 1007
`
`Iwamura at 7:61-65; see also Kortshagen Dec. at ¶ 115 (Ex. 1002)
`
`18
`
`

`

`Iwamura Discloses “Generating [Excited/Metastable]
`Atoms” in the Same Manner as the ’779 Patent
`Claims 1, 18, 30, 40, 41, and 43‒46
`
`Supp. Kortshagen Dec. at ¶ 24 (Ex. 1015)
`
`19
`
`

`

`A Plasma Does Not Contain Only Ions
`Claims 1, 18, 30, 40, 41, and 43‒46
`
`• The entirety of Zond’s arguments directed to Iwamura hinge on the incorrect
`interpretation that a plasma contains only ions.
`
`See Patent Owner’s Response at p 29-33, 41-44;
`see also Supp. Kortshagen Dec. at ¶¶ 20-24 (Ex. 1015)
`
`• The Experts agree a plasma contains ground state, excited and metastable atoms:
`
`Petitioner’s Expert
`Dr. Kortshagen
`
`Zond’s Expert
`Dr. Hartsough
`
`“As I stated in my prior declarations, a
`plasma is a collection of ions, free
`electrons, and neutral atoms
`(including various excited states).”
`
`Supp. Kortshagen Dec. at ¶ 23 (Ex. 1015);
`see also Kortshagen Dec. at ¶ 21 (Ex. 1002)
`
`Q: So in a given volume of space,
`where you have a collection of ions,
`electrons, and ground state atoms
`and excited atoms, it would be fair
`to characterize that as a plasma?
`
`A: That’s been the common usage in
`this case.
`
`04/17/2015 Hartsough Dep. at 42:9-15 (Ex. 1017)
`(interposing objection omitted)
`
`20
`
`

`

`A Metastable Atom Is A Type Of Excited Atom
`Claims 1, 18, 30, 40, 41, and 43‒46
`
`• It is undisputed that a metastable atom is a type of excited atom
`
`Petitioner’s Expert
`Dr. Kortshagen
`
`Zond’s Expert
`Dr. Hartsough
`
`“Iwamura refers to the volume that flows
`into the chamber as a plasma or a
`“preactivated” gas. As stated above, the
`plasma or preactivated gas, as one of
`ordinary skill in the art would understand,
`contains ions and electrons as well as
`electrically neutral atom species, including
`ground state atoms and excited atoms
`(including metastable atoms which is a
`type of an excited atom)”
`
`Supp. Kortshagen Dec. at ¶ 25 (Ex. 1015);
`See also Kortshagen Dec. at ¶ 21 (Ex. 1002)
`
`Q. A metastable atom is an excited
`atom; correct?
`
`A. It has a higher energy state, yes.
`
`04/17/2015 Hartsough Dep. at 28:6-8 (Ex. 1017)
`
`21
`
`21
`
`

`

`“a plasma chamber coupled to the [excited/metastable]
`atom source”
`Claims 1, 18, 43‒45
`
`• Both Iwamura’s preexcitation unit and first plasma generation unit are coupled to the
`
`plasma chamber.
`
`First Plasma Generation Unit
`
`• Zond concedes the first plasma generation unit is coupled to the plasma chamber:
`
`‒ “[T]he plasma chamber in Iwamura is not coupled to its pre-excitation unit. Rather, the
`plasma chamber in Iwamura is coupled to a plasma source.”
`
`See Patent Owner’s Response at p. 40
`
`Preexcitation Unit
`
`• Zond’s Expert concedes the preexcitation unit is coupled to the plasma chamber:
`
`Q: You would agree with me that the term “coupling” includes an indirect connection, as is used in
`the context of the ’779 patent; correct?
`
`A: That’s the way it’s used.
`
`Q: So isn’t the preexcitation unit of Iwamura at least indirectly coupled to the plasma chamber 10?
`
`A: Indirectly, yeah.
`
`04/17/2015 Hartsough Dep. at 109:15-22 (Ex. 1017)
`
`22
`
`

`

`Iwamura Discloses “Generating a Plasma with a Multi-
`Step Ionization Process”
`Claims 1, 18, 30, 40, 41, and 43‒46
`
`Supp. Kortshagen Dec. at ¶ 89 (Ex. 1015);
`see also Kortshagen Dec. at ¶¶ 117-119 (Ex. 1002)
`
`23
`
`

`

`The ’779 Patent’s Disclosed Technique For
`“Substantially Trapping Electrons”
`Claims 1, 18, 30, 40, and 41
`
`’779 Patent at 16:12-20
`
`’779 Patent at 15:46-48
`
`Supp. Kortshagen Dec. at ¶ 36 (Ex. 1015)
`
`24
`
`

`

`Pinsley Magnetic Field Configuration
`Claims 1, 18, 30, 40, and 41
`
`Pinsley at 2:43-47;
`see also Kortshagen Dec. at ¶¶ 74-76 (Ex. 1002)
`
`Pinsley, Figure (Ex. 1005)
`
`25
`
`

`

`Angelbeck’s Magnetic Field Configuration
`Claims 1, 18, 30, 40, and 41
`
`Angelbeck at 1:36-40;
`see also Kortshagen Dec. at ¶¶ 127-128 (Ex. 1002)
`
`Angelbeck, Fig. 1 (Ex. 1006)
`
`26
`
`

`

`Zond’s Experts Proposed Construction For
`“substantially trapping electrons”
`Claims 1, 18, 30, 40, and 41
`
`Q. So referring to Figure 7 and 7A, what
`about the entire configuration causes the
`electrons to be trapped? …
`
`A. … you can get electron trapping because
`of the configuration that’s shown in
`Figure 7A, where the field lines converge
`at -- near both electrodes. They’re
`converging; they’re getting close
`together, and so you get electron trapping
`due to the reflection of the electrons …
`It’s the magnetic -- the convergence of
`the magnetic field lines that can cause
`the electrons to be basically oscillating
`back and forth inside that trap.
`
`’779 Patent, Fig. 7A
`
`04/17/2015 Hartsough Dep. at 122:13-123:13 (Ex. 1017);
`see also Supp. Kortshagen Dec. at ¶ 46 (Ex. 1015)
`
`27
`
`

`

`Pinsley and Angelbeck “Substantially Traps Electrons”
`in the Same Manner as Construed by Zond’s Expert
`Claims 1, 18, 30, 40, and 41
`
`Pinsley
`
`Angelbeck
`
`Kortshagen, Figure 1 (Ex. 1015)
`
`Angelbeck, Fig. 2
`
`“[I]t was well-known by those skilled in the art that the
`converging magnetic field lines of the embodiments
`depicted by figures 7A and 12B of the ’779 Patent,
`as well as figure 1 of Pinsley, all form ‘magnetic
`mirrors’ which reflect electrons as they approach the
`magnets due to the increasing density of magnetic
`field lines. … Barring any collisions which may
`disrupts the electron’s motion, the electrons will be
`trapped between the ‘magnetic mirrors’…”
`
`Supp. Kortshagen Dec. at ¶¶ 41-46 (Ex. 1015)
`
`“Angelbeck’s magnetic filed lines B will converge
`as they approach the pole pieces 24 and 26,
`and hence, form magnetic mirrors. Electrons
`flowing from the cathode 20 through the tube
`10 will encounter the non-uniform magnetic field
`lines B generated by the pole pieces 24 and 26,
`and will perform a motion that will impede the
`electrons’ movement toward the anode 18.”
`
`Supp. Kortshagen Dec. at ¶¶ 50-56 (Ex. 1015)
`
`28
`
`

`

`Zond’s Attempts to Distinguish Pinsley and Angelbeck Fail
`Claims 1, 18, 30, 40, and 41
`
`Pinsley
`
`• Zond incorrectly argues that “the transverse magnetic field of Pinsley does
`not trap the electrons; they can easily still easily [sic] flow to the anode”
`
`See Patent Owner’s Response at p. 36
`
`‒ As conceded by Dr. Hartsough, whether or not the “substantially trapped”
`electrons flow to the anode is immaterial to the teachings of the ’779 Patent:
`
`Q. So at some point, the electron will flow towards the anode –
`or away -- away from the volume that’s illustrated by Figure
`7A?
`
`A. Well, they can flow to the anode. In fact, most of them will…
`
`04/17/2015 Hartsough Dep. at 139:20-24 (Ex. 1017)
`
`29
`
`

`

`Zond’s Attempts to Distinguish Pinsley and Angelbeck Fail
`Claims 1, 18, 30, 40, and 41
`
`Angelbeck
`
`• Zond incorrectly argues that “Angelbeck’s system produces a plasma,
`not excited / metastable atoms as claimed” See Patent Owner’s Response at p. 34
`
`‒ Angelbeck expressly discloses producing excited atoms:
`
`Angelbeck at 2:18-20;
`see also Supp. Kortshagen Dec. at ¶ 80 (Ex. 1015)
`
`• Zond incorrectly argues that “the transverse magnetic field will actually
`result in a force directed across the flow of electrons … to the tube walls,
`where they are removed from the plasma” See Patent Owner’s Response at p. 35-36
`
`‒ Angelbeck discloses the transverse magnetic field enhances the loss of electrons to the
`tube walls, not all of the electrons are lost. If all electrons are lost to the tube walls,
`there would be no plasma and Angelbeck’s laser would not function.
`Supp. Kortshagen Dec. at ¶¶ 52-55 (Ex. 1015)
`
`30
`
`

`

`A Person of Skill Would Have Been Motivated to
`Combine Iwamura with Pinsley and Angelbeck
`Claims 1, 18, 30, 40, and 41
`
`• It was well-known that both gas lasers and plasma generators
`excite gas atoms in a similar manner, and applying a magnetic
`field increases the efficiency of excitation.
`
`Angelbeck at 1:36-40;
`see also Petitioner’s Reply at p. 9;
`Kortshagen Dec. at ¶¶ 129-130 (Ex. 1002)
`
`Supp. Kortshagen Dec. at ¶ 59 (Ex. 1015)
`
`31
`
`

`

`Kudryavtsev Confirms the Effects Observed in Gas
`Lasers are Applicable to Plasma Generators
`Claims 1, 18, 30, 40, and 41
`
`Kudryavtsev at p. 30, left col. at ¶ 1, p. 34, right col. at ¶ 4 (Ex. 1004);
`see also Supp. Kortshagen Dec. at ¶ 61 (Ex. 1015);
`Kortshagen Dec. at ¶ 130 (Ex. 1002);
`Petitioner’s Reply at p. 10
`
`32
`
`

`

`Summary of Zond’s Arguments against Combining
`Iwamura with Pinsley and Angelbeck
`Claims 1, 18, 30, 40, and 41
`
`• Pinsley and Angelbeck’s “high energy atoms are not maintained”
`and “must return to their ground state … to emit light”
`
`• No experimental data or objective evidence to support
`the combination
`
`See Patent Owner’s Response at p. 25-28
`
`33
`
`

`

`Zond’s Arguments Are Without Merit
`Claims 1, 18, 30, 40, and 41
`
`• Applying Pinsley and Angelbeck’s magnetic field teaching for
`improving the efficiency of exciting atoms.
`
`• Using magnets to improve efficiency of exciting atoms in plasma
`generators was well-known in the art
`
`• Magnetic mirror electron-traps have been known in the art for
`half a century
`
`See Supp. Kortshagen Dec. at ¶¶ 63-67 (Ex. 1015)
`
`34
`
`

`

`Iwamura Discloses a “Pressure Differential Exists
`Between the Excited Atom Source and the Plasma
`Chamber” Claim 44
`
`• Zond does not dispute that Iwamura discloses this limitation.
`
`‒ Instead, Zond argues that “Iwamura is generating a plasma instead of
`excited atoms”, and thus, does not satisfy the other elements of the claim.
`See Patent Owner’s Response at p. 51-52
`
`• Zond’s argument is contrary to how one of ordinary skill in the art
`understands what constitutes a “plasma,” as conceded by Zond’s
`own Expert, Dr. Hartsough:
`
`Q. So in a given volume of space, where you have a collection of ions,
`electrons, and ground state atoms and excited atoms, it would be
`fair to characterize that as a plasma?
`
`A. That’s been the common usage in this case.
`
`04/17/2015 Hartsough Dep. at 42:9-15 (Ex. 1017)
`(interposing objection omitted)
`See also Kortshagen Dec. at ¶ 21 (Ex. 1002); Supp. Kortshagen Dec. at ¶ 23 (Ex. 1015)
`
`35
`
`

`

`Gruber Discloses “an Inductively Coupled
`Discharge Source”
`Claim 44
`
`Gruber, FIG. 4 (Ex. 1413)
`
`Gruber at 1:11-22;
`see also Kortshagen Dec. at ¶ 96 (Ex. 1402);
`Supp. Kortshagen Dec. at ¶¶ 100-107 (Ex. 1015)
`
`Gruber at 5:20-22
`
`36
`
`

`

`A Person of Skill Would Have Been Motivated to
`Substitute Iwamura’s Traditional Electrodes with
`Gruber’s Inductively Coupled RF Source
`Claim 44
`• Gruber teaches using an inductively coupled RF source as an
`improved alternative to traditional metal electrodes in contact
`with the gaseous mediums to excite atoms.
`
`‒ Advantages of using an inductively coupled RF energy source include
`“relatively high efficiency because of the ability to use low power RF
`excitation to form a glow discharge or plasma”
`
`See Gruber at 1:11-22; 4:19-21;
`Kortshagen Dec. at ¶ 97 (Ex. 1402)
`see also Supp. Kortshagen Dec. at ¶ 103 (Ex. 1015)
`
`• Mere substitution of one well-known element for another known
`element in the field, to yield predictable results.
`
`Kortshagen Dec. at ¶ 97 (Ex. 1402);
`see also Supp. Kortshagen Dec. at ¶ 103 (Ex. 1015)
`
`37
`
`

`

`Iwamura Discloses “Trapping Electrons and Ions”
`Claims 45 and 46
`
`Supp. Kortshagen Dec. at ¶ 110 (Ex. 1015)
`
`Iwamura at 11:46-55;
`see also Kortshagen Dec. at ¶¶ 99-101 (Ex. 1302)
`
`38
`
`

`

`Iwamura “Traps Electrons and Ions” the Same Manner
`as the ’779 Patent
`Claims 45 and 46
`
`’779 Patent
`
`Iwamura
`
`’779 Patent, FIG. 12A
`
`Iwamura, FIG. 9
`
`’779 Patent at 20:2-8
`
`Iwamura at 11:52-55;
`see also Kortshagen Dec. at ¶¶ 99-101 (Ex. 1302)
`Supp. Kortshagen Dec. at ¶¶ 109-115 (Ex. 1015)
`
`39
`
`

`

`Disputes with Respect to Dependent Claims
`
`• Claims 8 and 23
`
`‒ Whether Iwamura discloses “a pressure differential exists between” the excited / metastable atom source
`and the plasma chamber.
`
`‒ Same as independent claim 43.
`
`• Claims 9 and 21
`
`‒ Whether Iwamura with Gruber discloses “an inductively coupled discharge source.”
`
`‒ Same as independent claim 44.
`
`• Claims 16, 28, 38, and 42
`
`‒ Whether Iwamura discloses “trapping electrons and ions.”
`
`‒ Same as independent claims 45 and 46.
`
`• Claims 4 and 32
`
`‒ Whether Iwamura discloses generating “metastable atoms” from “ground state atoms.”
`
`• Claims 5 and 19
`
`‒ Whether Iwamura discloses a “first and second electrode generating a discharge that excites the ground
`state atoms.”
`
`40
`
`

`

`Disputes with Respect to Dependent Claims
`
`• Claims 6, 22, and 33
`
`‒ Whether Iwamura with Pinsley and Angelbeck discloses “the magnetic field that substantially
`traps electrons proximate to the ground state atoms increases at least one of a rate at which
`[excited/metastable] atoms are generated from the ground state atoms and a density of
`excited atoms.”
`
`• Claims 7, 20, 34, and 39
`
`‒ Whether Wells discloses exciting atoms with an “an electron gun directing an electron beam”
`(claims 7, 20, and 34) or an “electron source” (claim 39).
`
`• Claims 10, 11, 24, and 25
`
`‒ Whether Iwamura discloses “ the [excited/metastable] atom source is positioned inside the
`plasma chamber” (claims 10 and 24) and “the [excited/metastable] atom source is
`positioned outside the plasma chamber” (claims 11 and 25).
`
`• Claims 13-15, 27, 35, and 37
`
`‒ Whether Iwamura discloses various energy sources for ionizing excited and metastable
`atoms in the plasma chamber.
`
`41
`
`

`

`(1) Generating “metastable atoms” Claims 4 and 32 and;
`(2) “First and Second Electrode Generating a Discharge”
`Claims 5 and 19
`
`Supp. Kortshagen Dec. at ¶¶ 24, 117-122 (Ex. 1015);
`see also Kortshagen Dec. at ¶¶ 155-156(Ex. 1002)
`
`42
`
`

`

`Magnetic Field Increasing Excitation Rate or Density of
`Excited/Metastable Atoms
`Claims 6, 22, and 33
`
`• Zond does not deny it was well known to those with skill that
`trapping electrons would increase the excitation rate and density
`of excited atoms, as admitted by the ’779 Patent:
`
`’779 Patent at 3:13-18
`• Zond merely reiterates it’s incorrect argument that Pinsley and
`Angelbeck do not disclose “substantially trapping” electrons.
`
`See Patent Owner’s Response at p. 45-46 (IPR2014-01076);
`Supp. Kortshagen Dec. at ¶¶ 123-129
`
`43
`
`

`

`“Electron Beam” and “Electron Source”
`Claims 7, 20, 34, and 39
`
`Wells at 13:16-23;
`see also Kortshagen Dec. at ¶¶ 104-105 (Ex. 1402);
`Supp. Kortshagen Dec. at ¶¶ 130-133 (Ex. 1015)
`
`Wells, FIG. 7 (Ex. 1414)
`
`44
`
`

`

`A Person of Skill Would Have Been Motivated to
`Substitute Iwamura’s UV Lamp or Electrodes with
`Wells’ Electron Gun
`
`Wells discloses alternative means, including:
`
`Wells at 13:30-32
`
`Mere substitution of one well-known
`element for another known element in
`the field, to yield predictable results.
`
`Kortshagen Dec. at ¶ 105 (Ex. 1402);
`see also Supp. Kortshagen Dec. at ¶¶ 130-135 (Ex. 1015)
`
`Iwamura, FIG. 1
`
`45
`
`

`

`Excited/Metastable Atom Source Inside/Outside the
`Plasma Chamber
`Claims 10, 11, 24 and 25
`
`Supp. Kortshagen Dec. at ¶¶ 136-139 (Ex. 1015);
`see also Kortshagen Dec. at ¶¶ 149, 151 (Ex. 1002)
`
`46
`
`

`

`Energy Source for Ionizing Excited/Metastable Atoms
`Claims 13-15, 27, 35, and 37
`
`• Zond does not dispute that Iwamura discloses the various energy
`sources recited in these claims.
`
`‒ Instead, Zond argues that Iwamura does not ionize excited atoms or metastable
`atoms in the plasma chamber because “the first pair of electrodes 26 generates a
`plasma in Iwamura and that plasma – and not the excited or metastable atoms –
`enters the chamber 10.”
`
`See Patent Owner’s Response at p. 47-49
`
`• Again, Zond’s argument is contrary to how one of ordinary skill in the
`art understands what constitutes a “plasma,” as conceded by Zond’s
`own Expert, Dr. Hartsough:
`
`Q. So in a given volume of space, where you have a collection of ions, electrons,
`and ground state atoms and excited atoms, it would be fair to characterize
`that as a plasma?
`
`A. That’s been the common usage in this case.
`
`04/17/2015 Hartsough Dep. at 42:9-15 (Ex. 1017)
`(interposing objection omitted)
`See also Kortshagen Dec. at ¶ 21 (Ex. 1002); Supp. Kortshagen Dec. at ¶ 23 (Ex. 1015)
`
`47
`
`

`

`Conclusion
`
`• All disputed claims of the ’779 Patent are invalid.
`
`Ground
`
`Claims
`
`Prior Art
`
`828 Petition (IPR 2014-00856, IPR2014-01022, and IPR2014-01070 are joined with the 828)
`
`4
`
`5
`
`6
`
`30-33, 35, 37, and 40
`
`Iwamura + Angelbeck + Pinsley
`
`34 and 39
`
`Iwamura + Angelbeck + Pinsley + Wells
`
`36
`
`Iwamura + Angelbeck + Pinsley + Lovelock
`
`829 Petition (IPR2014-00859, IPR2014-01020, and IPR2014-01072 are joined with the 829)
`
`3
`
`4
`
`16, 28, 41, 42, and 45
`
`Iwamura + Angelbeck + Pinsley
`
`46
`
`Iwamura
`
`48
`
`

`

`Conclusion
`
`• All disputed claims of the ’779 Patent are invalid.
`
`Ground
`
`Claims
`
`Prior Art
`
`917 Petition (IPR2014-00918, IPR2014-01025, and IPR2014-01074 are joined with the 917)
`
`3
`
`4
`
`6
`
`9, 21, and 44
`
`Iwamura + Angelbeck + Pinsley + Gruber
`
`7 and 20
`
`Iwamura + Angelbeck + Wells
`
`38
`
`Iwamura + Angelbeck + Pinsley
`
`1073 Petition (IPR 2014-01017 is joined with the 1073)
`
`2
`
`1-4, 10-15, 17, 18, 24-27
`and 29
`
`Iwamura + Angelbeck + Pinsley
`
`1076 Petition (IPR2014-01019 is joined with the 1076)
`
`2
`
`3
`
`43
`
`Iwamura
`
`5, 6, 8, 19, 22, and 23
`
`Iwamura + Angelbeck + Pinsley
`
`49
`
`

`

`Trial No. IPR2014-01073
`Petitioner’s Demonstrative Exhibits for Oral Argument
`
`
`
`
`Dated: June 10, 2015
`
`Respectfully Submitted,
`
`
`
`
`
`
`
`
`
`
`
`/s/ David M. Tennant
`David M. Tennant
`Lead Counsel for Petitioner
`GlobalFoundries
`Registration No. 48,362
`
`
`
`
`
`

`

`Trial No. IPR2014-01073
`Petitioner’s Demonstrative Exhibits for Oral Argument
`
`
`CERTIFICATE OF SERVICE
`
`
`
`
`Pursuant to 37 C.F.R. § 42.6(e), this is to certify that I caused to be served a
`
`true and correct copy of the foregoing “PETITIONER’S DEMONSTRATIVE
`
`EXHIBITS FOR ORAL ARGUMENT” as detailed below:
`
`Date of service June 10, 2015
`
`Manner of service Email: gonsalves@gonsalveslawfirm.com;
`bbarker@chsblaw.com; tarek.fahmi@ascendalaw.com;
`kurt@rauschenbach.com
`
`Documents served PETITIONER’S DEMONSTRATIVE EXHIBITS FOR
`ORAL ARGUMENT
`
`Persons Served Dr. Gregory J. Gonsalves
`2216 Beacon Lane
`Falls Church, Virginia 22043
`
`Bruce Barker
`Chao Hadidi Stark & Barker LLP
`176 East Mail Street, Suite 6
`Westborough, MA 01581
`
`Tarek Fahmi
`333 W. San Carlos Street, Suite 200
`San Jose, CA 95110
`
`
`
`
`
`/s/ Anna Goodall
`Anna Goodall
`White & Case LLP
`3000 El Camino Real
`Five Palo Alto Square, 9th Floor
`Palo Alto, CA 94306
`Tel: (650) 213-0367
`Email: agoodall@whitecase.com
`
`
`
`