`
`Inventor: Roman CHISTYAKOV
`
`Inter Furies Review of US. Patent No. 6,805,779
`
`Filed:
`
`Title:
`
`March 2], 2003
`
`Issued:
`
`October 195 2004
`
`PLASMA GENERATION USING MULTl—STEP IONIZATION
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`CommiSsioner for Patents
`PO, Box 1450
`
`Alexandria, VA 22313~l450
`
`Dear SirfMadam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned [ne’er Panes Review and transact all business in the US. Patent and Trademark
`
`Office connected herewith: David M. Tennant (Reg. No. 48,362), and all practitioners at
`
`Customer Number 106224.
`
`For petitioners GLOBALFOUNDRIES U.S., Inc.3 GLOBALFOUNDRIES Dresden Module One
`LLC & Co. KG, and GLOBALPOUNDRIES Dresden Module Two LLC & Co. KG.
`
`fife/2% ill {an {ear
`Name: Alexandra H. Lee
`Title: Executive Vice President & Generai Counsel
`
`Date;
`
`5:: " :35: "
`
`“A?
`
`
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Partes Review of US. Patent No. 6,805,779
`
`Filed:
`
`Title:
`
`Mar. 21, 2003
`
`Issued:
`
`Oct. 19, 2004
`
`PLASMA GENERATION USING MULTl-STEP IONIZATION
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`PO. Box 1450
`
`Alexandria, VA 22313-1450
`
`Dear Sir/Madam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the US. Patent and Trademark
`
`Office connected herewith: Brian M. Berliner (Reg. No. 34549), Ryan K. Yagura (Reg. No.
`
`47191), Xin-Yi Zhou (Reg. No. 63366), and all practitioners at Customer Number 23879.
`
`For petitioner Advanced Micro Devices, Inc.
`
`
`w MAW
`Name: Karon Macdaniel
`Title: Senior Corporate Counsel
`
`Date: WMmmmmmWW
`
`
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Partes Review of US. Patent No. 6,805,779
`
`Filed:
`
`Title:
`
`Mar. 21, 2003
`
`Issued:
`
`Oct. 19, 2004
`
`PLASMA GENERATION USING MULTI-STEP IONIZATION
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`PO. Box 1450
`
`Alexandria, VA 22313—1450
`
`Dear Sir/Madam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/0r agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the US. Patent and Trademark
`
`Office connected herewith: Robinson Vu (Reg. No. 60,21 1).
`
`For petitioners Toshiba America Electronic Components, Inc, Toshiba America Inc., Toshiba
`America Information Systems, Inc., and Toshiba Corporation.
`
` %/%QL} %/\a\ W
`
`Name: Hideo Kumagai
`Title: General Manager,
`Intellectual Property Office,
`Technology & Innovation Division,
`Toshiba Corporation
`
`Date;
`
`i/W 194‘ LO/éé
`
`
`
`DocuSign Envelope ID: DEC5A96E-14AE—4BZC-BZBQ-A427229877DA
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Partes Review of US. Patent No. 6,805,779
`
`Filed:
`
`Title:
`
`Mar. 21, 2003
`
`Issued:
`
`Oct. 19, 2004
`
`PLASMA GENERATION USING MULTI—STEP IONIZATION
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`PO. Box 1450
`
`Alexandria, VA 22313-1450
`
`Dear Sir/Madam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the US. Patent and Trademark
`
`Office connected herewith: all practitioners at Foley & Lardner LLP, Customer Number 23879,
`
`including John Feldhaus (Reg. No. 28,822), Pavan Agarwal (Reg. No. 40,888), and Mike
`
`Houston (Reg. No. 58,486).
`
`For petitioner Renesas Electronics America Inc.
`
`DocuSigned by:
`
`
`
`6 20 2014
`
`
`
`C / Date: /
`
`
`
`
`
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`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Partes Review of U.S. Patent No. 6,805,779
`
`Filed:
`
`Title:
`
`Mar. 21, 2003
`
`Issued:
`
`Oct. 19, 2004
`
`PLASMA GENERATION USING MULTI-STEP IONIZATION
`
`' Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`P.O. Box 1450
`
`Alexandria, VA 22313-1450
`
`Dear Sir/Madam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the U.S. Patent and Trademark
`
`Office connected herewith: all practitioners at Foley & Lardner LLP, Customer Number 23879,
`
`including John Feldhaus (Reg. No. 28,822), Pavan Agarwal (Reg. No. 40,888), and Mike
`
`Houston (Reg. No. 58,486).
`
`For petitioner Renesas Electronics Corporation
`
`
`
`Wfibwgéflf-w~
`Name: KAOIQOZZ: FMKADA
`Title Strateg/ Department“ Manager
`Inid/ecfical
`”WWI/17 D/Hvis/or)
`
`Date:
`
`june 25 20/9A
`
`