`
`POWER OF ATTORNEY
`
`
`
`
`
`
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Partes Review of U.S. Patent No. 7,811,421
`
`Filed:
`
`Title:
`
`July 18, 2005
`
`Issued:
`
`October 12, 2010
`
`HIGH DEPOSITION RATE SPUTTERING
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`P.O. Box 1450
`
`Alexandria, VA 22313-1450
`
`Dear Sir/Madam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the U.S. Patent and Trademark
`
`Office connected herewith: Brian M. Berliner (Reg. No. 34549), Ryan K. Yagura (Reg. No.
`
`47191), Xin-Yi Zhou (Reg. No. 63366), and all practitioners at Customer Number 23879.
`
`For petitioner Advanced Micro Devices, Inc.
`
`,£g,a=, m%&¢..~._9
`Name: Karon Macdaniel
`
`Title: Senior Corporate Counsel
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`Date:
`
`g.-1.1.—\¢x
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`Page 1
`Page 1
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`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
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`Inventor: Roman CI-[ISTYAKOV
`
`Inter Partes Review of U.S. Patent No. 7,81 1,421
`
`Filed:
`
`Title:
`
`July 18, 2005
`
`Issued:
`
`October 12, 2010
`
`HIGH DEPOSITION RATE SPUTTERING
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`P.O. Box 1450
`
`Alexandria, VA 223 l 3-1450
`
`Dear Sir»‘Madam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys andfor agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the U.S. Patent and Trademark
`
`Office connected herewith: Robinson VL1 (Reg. No. 60,2l 1).
`
`For petitioners Toshiba America Electronic Components, Inc., Toshiba America Inc., Toshiba
`America Information Systems, Inc., and Toshiba Corporation.
`
`Qgfixpéedw \hc\-E%£-“T”?
`
`Name: Hideo Kuma
`
`i
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`Date:
`
`Lyzsé
`
`Title: General Manager,
`Intellectual Property Office,
`Technology & Innovation Division,
`Toshiba Corporation
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`
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`Page 2
`Page 2
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`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Parres Review of U.S. Patent No. 7,81 1,42]
`
`Filed:
`
`Title:
`
`July 18, 2005
`
`Issued:
`
`October 12, 2010
`
`HIGH DEPOSITION RATE SPUTTERING
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`P.0. Box 1450
`
`Alexandria, VA 22313-1450
`
`Dear SirfMadam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys andfor agents to prosecute the
`
`above captioned Inter Par-res Review and transact all business in the US. Patent and Trademark
`
`Office connected herewith: David M. Tennant (Reg. No. 48,362), and all practitioners at
`
`Customer Number l06224.
`
`For petitioners GLOBALFOUNDRJES U.S., lnc., GLOBALFOUNDRIES Dresden Module One
`LLC & Co. KG, and GLOBALFOUNDRIES Dresden Module Two LLC & Co. KG.
`
`24. Lilgjfifg
`Q @131";
`Name: Alexandra H. Lee
`Title: Executive Vice President & General Counsel
`
`Date:
`
`€'2§ ‘ “'1
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`Page 3
`Page 3
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`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Partes Review of U.S. Patent No. 7,811,421
`
`Filed:
`
`Title:
`
`July 18, 2005
`
`Issued:
`
`October 12, 2010
`
`HIGH DEPOSITION RATE SPUTTERING
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`P.O. Box 1450
`
`Alexandria, VA 22313-1450
`
`Dear Sir/Madam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the U.S. Patent and Trademark
`
`Office connected herewith: all practitioners at Foley & Lardner LLP, Customer Number 23879,
`
`including John Feldhaus (Reg. No. 28,822), Pavan Agarwal (Reg. No. 40,888), and Mike
`
`Houston (Reg. No. 58,486).
`
`For petitioner Renesas Electronics Corporation
`
`/’ '
`,
`
`—’“'"""'/z/"‘"“"
`4:‘
`Name5 KAOKM FMKAD/4
`Title:
`,§7"mre?>/ De/9arT’/nan?" Manager
`Im+ellec7‘u.a/ Property /Division
`
`Date:
`
`Sjuflg 25 20/f
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`
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`Page 4
`Page 4
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`DocuSign Envelope ID: DEC5A96E-14AE-4B2C-82B9-A427229B77DA
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Partes Review of U.S. Patent No. 7,811,421
`
`Filed:
`
`Title:
`
`
`
`July 18, 2005
`
`
`
`Issued:
`
`October 12, 2010
`
`HIGH DEPOSITION RATE SPUTTERING
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`P.O. Box 1450
`Alexandria, VA 22313-1450
`
`Dear Sir/Madam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the U.S. Patent and Trademark
`
`Office connected herewith: all practitioners at Foley & Lardner LLP, Customer Number 23879,
`
`including John Feldhaus (Reg. No. 28,822), Pavan Agarwal (Reg. No. 40,888), and Mike
`
`Houston (Reg. No. 58,486).
`
`For petitioner Renesas Electronics America Inc.
`
`__________________________________
`Name:
`(cid:12)(cid:15)(cid:26)(cid:26)(cid:31)(cid:1)(cid:14)(cid:29)(cid:26)(cid:24)(cid:18)(cid:26)
`Title:
`
`(cid:10)(cid:20)(cid:21)(cid:18)(cid:19)(cid:1)(cid:9)(cid:17)(cid:23)(cid:21)(cid:24)(cid:21)(cid:27)(cid:28)(cid:26)(cid:15)(cid:28)(cid:21)(cid:30)(cid:18)(cid:1)(cid:13)(cid:19)(cid:19)(cid:21)(cid:16)(cid:18)(cid:26)(cid:1)(cid:2)(cid:1)(cid:11)(cid:18)(cid:24)(cid:18)(cid:26)(cid:15)(cid:22)(cid:1)(cid:10)(cid:25)(cid:29)(cid:24)(cid:27)(cid:18)(cid:22)
`
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`Date: ____________________
`(cid:8)(cid:3)(cid:6)(cid:4)(cid:3)(cid:6)(cid:4)(cid:5)(cid:7)(cid:1)
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`Page 5