`
`Patent 6,806,652
`
`POWER OF ATTORNEY
`
`Dear Sir/Madam,
`
`Pursuant to 37 C.F.R. §42.l0(b), the undersigned hereby updates its power of attorney to
`
`add the following attorney to prosecute the above captioned Inter Partes Review and transact all
`
`business in the U.S. Patent and Trademark Office connected herewith:
`
`John Feldhaus (Reg. No. 28,822)
`Foley & Lardner LLP
`3000 K Street, N.W.
`
`Washington, D.C. 20007
`Phone: 202-672-5403
`
`Email: jfe1dhaus@foley.com
`
`For petitioner Advanced Micro Devices, Inc.
`
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`Name: ‘g¢,.,,§,,. VN/\¢c ggnlsx
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`Title: $¢--'-sv (‘V ?§v-.V\- c°“"“'\
`
`Date:
`
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`
`
`
`Case IPR2014-01066
`
`Patent 6,806,652
`
`Dear Sir/Madam,
`
`POWER OF ATTORNEY
`
`Pursuant to 37 C.F.R. §42.10(b), the undersigned hereby updates its power of attorney to
`
`add the following attorney to prosecute the above captioned Inter Partes Review and transact all
`
`business in the U.S. Patent and Trademark Office connected herewith:
`
`John Feldhaus (Reg. No. 28,822)
`Foley & Lardner LLP
`3000 K Street, N.W.
`
`Washington, D.C. 20007
`Phone: 202-672-5403
`
`Email: jfeldhaus@foley.com
`
`For petitioner Toshiba America Electronic Components, Inc., Toshiba America, Inc. Toshiba
`America Information Systems, Inc., and Toshiba Corporation.
`
`Date,
`
`/$9)/”/$4
`
`Name: Hideo Kumagai
`
`Title: General Manager,
`
`Intellectual Property Office,
`
`Technology & Innovation Division,
`
`Toshiba Corporation
`
`
`
`Case lPR2014-01066
`
`Patent 6,806,652
`
`Filed:
`
`Title:
`
`May 12, 2003
`
`Issued:
`
`Oct. 19, 2004
`
`HIGH-DENSITY PLASMA SOURCE USING EXCITED ATOMS
`
`Dear Sin’Madam,
`
`POWER OF ATTORNEY
`
`Pursuant to 37 CPR. §42. 1 0(1)), the undersigned hereby updates its power of attorney to
`
`add the following attorney to prosecute the above captioned Inter Panes Review and transact all
`
`business in the U.S. Patent and Trademark Office connected herewith:
`
`John Feldhaus (Reg. No. 28,822)
`Foley & Lardner LLP
`3000 K Street, N.W.
`Washington, DC. 20007
`Phone: 202-672-5403
`
`Email: jfeldhaus@foley.com
`
`For petitioner GLOBALFOUNDRIES U.S., lr1c., GLOBALFOUNDRJES Dresden Module One
`LLC & Co. KG, and GLOBALFOUNDRIES Dresden Module Two LLC & Co. KG.
`
`
`
`fllfkifl, L-Lt’.
`Name:
`Title‘ Gcnorafit. Caums-el
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`if C4-YP°"4‘h:
`
`Date:
`
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`“'3 73519