`
`Inventor: Roman CHISTYAKOV
`
`Inter Partes Review ofU.S. Patent No. 7,604,716
`
`Filed:
`
`Title:
`
`Ju1y22, 2004
`
`Issued:
`
`October 20, 2009
`
`METHODS AND Al’PARAT‘US FOR GENERATING HIGH-DENSITY
`PLASMA
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`RO. Box 1450
`
`Alexandria, VA 22313-3450
`
`Dear Sir/Madam}
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the US. Patent and Trademark
`
`Office connected herewith: David M. Tennant (Reg. No. 48362), and all practitioners at
`
`Customer Number 06224.
`
`For petitioners GLOBALFOUNDRIES U.S., 1110., GLOBALFOUNDRIES Dresden Module One
`LLC & Co. KG, and GLOBALFOUNDRIES Drestlen Moduie Two LLC & Co. KG.
`
`MWWQMMW
`Name: Alexandra F; Lee
`Title: Executive Vice President & General Counsel
`
`Date: m: 3‘4
`
`
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Partes Review of US. Patent No. 7,604,716
`
`Filed:
`
`Title:
`
`July 22, 2004
`
`Issued:
`
`Oct. 20, 2009
`
`METHODS AND APPARATUS FOR GENERATING HIGH—DENSITY
`PLASMA
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`PO. Box 1450
`
`Alexandria, VA 22313-1450
`
`Dear Sir/Madam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the US. Patent and Trademark
`
`Office connected herewith: Brian M. Berliner (Reg. No. 34549), Ryan K. Yagura (Reg. No,
`
`47191), Xin-Yi Zhou (Reg. No. 63366), and all practitioners at Customer Number 23879.
`
`For petitioner Advanced Micro Devices, Inc.
`
`ithfimmfimw W—
`Name: Karon Macdaniel
`
`Title: Senior Corporate Counsel
`
`Date: Wkwfi81/15 ”\ffiwww
`
`.
`
`
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Partes Review of US Patent No. 7,604,716
`
`Filed:
`
`Title:
`
`July 22, 2004
`
`Issued:
`
`Oct. 20, 2009
`
`METHODS AND APPARATUS FOR GENERATING HIGH-DENSITY
`PLASMA
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`PO. Box 1450
`
`Alexandria, VA 22313-1450
`
`Dear Sir/Madam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the US. Patent and Trademark
`
`Office connected herewith: Robinson Vu (Reg. No. 60,211).
`
`For petitioners Toshiba America Electronic Components, Inc., Toshiba America Inc., Toshiba
`America Information Systems, Inc, and Toshiba Corporation.
`
`
`
`ggflcmflfi a; Date: 7W 25a, w/gz
`
`Name: Hideo Kumagai
`Title: General Manager,
`intellectual Property Office,
`Technology & Innovation Division,
`Toshiba Corporation
`
`
`
`DOCuSign Envelope ID: DEC5A96E-14AE—4820—8289-A427229877DA
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Partes Review of US. Patent No. 7,604,716
`
`Filed:
`
`Title:
`
`July 22, 2004
`
`Issued:
`
`Oct. 20, 2009
`
`METHODS AND APPARATUS FOR GENERATING HIGH-DENSITY
`PLASMA
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`PO. Box 1450
`
`Alexandria, VA 22313—1450
`
`Dear Sir/Madam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the US. Patent and Trademark
`
`Office connected herewith: all practitioners at Foley & Lardner LLP, Customer Number 23879,
`
`including John Feldhaus (Reg. No. 28,822), Pavan Agarwal (Reg. No. 40,888), and Mike
`
`Houston (Reg. No. 58,486).
`
`For petitioner Renesas Electronics America Inc.
`
`Docusigned by:
`
`l gf'fli: “
`833A659CE804431
`.
`Name‘Harry Turner
`Title: Chief Administrative Officer & General Counsel
`
`Date:
`
`MP§
`
`
`
`6 20 2014
`
`/
`
`/
`
`
`
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Partes Review of US. Patent No. 7,604,716
`
`Filed:
`
`Title:
`
`July 22, 2004
`
`Issued:
`
`Oct. 20, 2009
`
`METHODS AND APPARATUS FOR GENERATING HIGH-DENSITY
`PLASMA
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`P.O. Box 1450
`
`Alexandria, VA 22313-1450
`
`Dear Sir/Madam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the US Patent and Trademark
`
`Office connected herewith: all practitioners at Foley & Lardner LLP, Customer Number 23879,
`
`including John Feldhaus (Reg. No. 28,822), Pavan Agarwal (Reg. No. 40,888), and Mike
`
`Houston (Reg. No. 58,486).
`
`For petitioner Renesas Electronics Corporation
`
`
`
`
`
`Name: KAORM FOLK/423A
`T1tle: Sfratcg/y 96W+M6af Manager
`fwd/e cfua/ Pfapefly D/‘l/fsz‘an
`
`1
`
`Date:
`
`June 25‘1 20/%
`
`
`
`ée
`
`igE
`
`
`
`