UNITED STATES pATENT AND TRADEMARK OFFICE
`
`UNITED STATES DEPARTMENT OF COMMERCE
`United States Patent and Trademark Office
`Adl.lr=: COMMISSIONER FOR PATENTS
`P.O. Box 1450
`Alexandria, Virginia22313-1450
`www .uspto.gov
`
`APPLICATION NO.
`
`FILING DATE
`
`FIRST NAMED INVENTOR
`
`ATTORNEY DOCKET NO.
`
`CONFIRMATION NO.
`
`10/065,629
`
`11/04/2002
`
`Roman Chistyakov
`
`ZON-002
`
`4225
`
`0312912004
`7590
`23701
`RAUSCHENBACH PATENT LAW GROUP, LLC
`P.O. BOX387
`BEDFORD, MA 01730
`
`EXAMINER
`
`LEE, WILSON
`
`ART UNIT
`
`2821
`
`PAPER NUMBER
`
`DATE MAILED: 03/29/2004
`
`Determination of Patent Term Adjustment under 35 U.S.C. 154 (b)
`(application filed on or after May 29, 2000)
`
`The Patent Term Adjustment to date is 0 day(s). If the issue fee is paid on the date that is three months after the
`mailing date of this notice and the patent issues on the Tuesday before the date that is 28 weeks (six and a half
`months) after the mailing date of this notice, the Patent Term Adjustment will be 0 day(s).
`
`If a Continued Prosecution Application (CPA) was filed in the above-identified application, the filing date that
`determines Patent Term Adjustment is the filing date of the most recent CPA.
`
`Applicant will be able to obtain more detailed information by accessing the Patent Application Information Retrieval
`(PAIR) system (http://pair.uspto.gov).
`
`Any questions regarding the Patent Term Extension or Adjustment determination should be directed to the Office of
`Patent Legal Administration at (703) 305-1383. Questions relating to issue and publication fee payments should be
`directed to the Customer Service Center of the Office of Patent Publication at (703) 305-8283.
`
`PTOL-85 (Rev. 11/03) Approved for use through 04/30/2004.
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`Page 3 of3
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`RENESAS 1109
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`

`

`Notice of Allowability
`
`Application No.
`
`Applicant(s)
`
`10/065,629
`Examiner
`
`Wilson Lee
`
`CHISTYAKOV, ROMAN
`Art Unit
`
`2821
`
`-- The MAILING DATE of this communication appears on the cover sheet with the correspondence address-(cid:173)
`All claims being allowable, PROSECUTION ON THE MERITS IS (OR REMAINS) CLOSED in this application. If not included
`herewith (or previously mailed), a Notice of Allowance (PTOL-85) or other appropriate communication will be mailed in due course. THIS
`NOTICE OF ALLOW ABILITY IS NOT A GRANT OF PATENT RIGHTS. This application is subject to withdrawal from issue at the initiative
`of the Office or upon petition by the applicant. See 37 CFR 1.313 and MPEP 1308.
`
`1. ~ This communication is responsive to 3/8/04.
`
`2. ~The allowed claim(s) is/are 1-20.22-27.29-41 and 43-46.
`
`3. ~ The drawings filed on 04 November 2002 are accepted by the Examiner.
`4. 0 Acknowledgment is made of a claim for foreign priority under 35 U.S. C.§ 119(a)-(d) or (f).
`a) 0 All
`b) 0 Some* c) 0 None of the:
`1. 0 Certified copies of the priority documents have been received.
`2. 0 Certified copies of the priority documents have been received in Application No. __ .
`3. 0 Copies of the certified copies of the priority documents have been received in this national stage application from the
`International Bureau (PCT Rule 17.2(a)).
`* Certified copies not received: __ .
`
`Applicant has THREE MONTHS FROM THE "MAILING DATE" of this communication to file a reply complying with the requirements
`noted below. Failure to timely comply will result in ABANDONMENT of this application.
`THIS THREE-MONTH PERIOD IS NOT EXTENDABLE.
`5. 0 A SUBSTITUTE OATH OR DECLARATION must be submitted. Note the attached EXAMINER'S AMENDMENT or NOTICE OF
`INFORMAL PATENT APPLICATION (PT0-152) which gives reason(s) why the oath or declaration is deficient.
`6. 0 CORRECTED DRAWINGS (as "replacement sheets") must be submitted.
`including changes required by the Notice of Draftsperson's Patent Drawing Review ( PT0-948) attached
`(a) 0
`to Paper No./Mail Date __ .
`1) 0 hereto or 2) 0
`including changes required by the attached Examiner's Amendment I Comment or in the Office action of
`Paper No./Mail Date __ .
`Identifying indicia such as the application number (see 37 CFR 1.84(c)) should be written on the drawings in the front (not the back) of
`each sheet. Replacement sheet(s) should be labeled as such in the header according to 37 CFR 1.121(d).
`7. 0 DEPOSIT OF and/or INFORMATION about the deposit of BIOLOGICAL MATERIAL must be submitted. Note the
`attached Examiner's comment regarding REQUIREMENT FOR THE DEPOSIT OF BIOLOGICAL MATERIAL.
`
`(b) 0
`
`Attachment(s)
`1. 0 Notice of References Cited (PT0-892)
`2. 0 Notice of Draftperson's Patent Drawing Review (PT0-948)
`
`3. ~ Information Disclosure Statements (PT0-1449 or PTO/SB/08),
`Paper No./Mail Date __
`4. 0 Examiner's Comment Regarding Requirement for Deposit
`of Biological Material
`
`5. 0 Notice of Informal Patent Application (PT0-152)
`6. 0
`Interview Summary (PT0-413),
`Paper No./Mail Date __ .
`7. 0 Examiner's Amendment/Comment
`
`8. ~ Examiner's Statement of Reasons for Allowance
`9.00ther_. -~~
`
`Wilson Lee
`Primary Examiner
`Art Unit: 2821
`
`U.S. Patent and TrademaJ!( Office
`PTOL-37 (Rev. 1-04)
`
`Notice of Allowability
`
`Part of Paper No./Mail Date
`
`

`

`Application/Control Number: 1 0/065,629
`Art Unit: 2821
`
`Page 2
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`Allowable subject matter
`
`Claims 1-20,22-27,29-41,43-46 are allowed.
`
`The following is an examiner's statement of reasons for allowance:
`
`The prior art neither discloses nor suggests an ionization source or a means that
`
`generates a weakly-ionized plasma from a feed gas, the weakly-ionized plasma
`
`reducing the probability of developing an electrical breakdown condition in the chamber
`
`such as required by claims 1, 22, 43, 44; a step of a method of ionizing a feed gas to
`
`form a weakly-ionized plasma that reduces the probability of developing an electrical
`
`breakdown condition in the chamber such as required by claims 10 and 33.
`
`Any comments considered necessary by applicant must be submitted no later
`
`than the payment of the issue fee and, to avoid processing delays, should preferably
`
`accompany the issue fee. Such submissions should be clearly labeled "Comments on
`
`Statement of Reasons for Allowance."
`
`Correspondence
`
`Any inquiry concerning this communication or earlier communications from the
`
`examiner should be directed to Examiner Wilson Lee whose telephone number is (571)
`
`272-1824.
`
`Any inquiry of a general nature or relating to the status of this application should
`
`be directed to the Technology Center receptionist whose telephone number is (703)
`
`308-0956.
`
`Papers related to Technology Center 2800 applications may be submitted to
`
`Technology Center 2800 by facsimile transmission. Any transmission not to be
`
`

`

`Application/Control Number: 10/065,629
`Art Unit: 2821
`
`Page 3
`
`considered an official response must be clearly marked "DRAFT". The official fax
`
`number is (703) 872-9306.
`
`3/22/04
`
`Wilson Lee
`Primary Examiner
`U.S. Patent & Trademark Office
`
`