UNITED STATES PATENT AND TRADEMARK OFFICE
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TSMC),
`Petitioner
`
`V.
`
`DSS TECHNOLOGY MANAGEMENT, INC.
`Patent Owner
`
`Patent 5,652,084
`
`Title: METHOD FOR REDUCED PITCH LITHOGRAPHY
`
`PETITIONER’S POWER OF ATTORNEY PURSUANT TO 37 CFR 42.10(b)
`
`FOR PETITION FOR INTER PARTES REVIEW
`
`Pursuant to 37 CFR 42.10(b), Petitioner Taiwan Semiconductor Manufacturing Co.
`
`(“TSMC”) hereby appoints the Practitioner(s) associated with Customer Number 42717,
`
`as its attorney(s) to prosecute and to transact all business in the Patent Trial & Appeal
`
`Board of the United States Patent and Trademark Office connected with the above-
`
`identified petition for Inter Partes Review.
`
`The undersigned is authorized to sign this Power of Attorney on behalf of the
`
`Petitioner.
`
`Date:
`
`(2 ‘ 3°! ’ 7/0 l "4
`
`Signature:
`
`4/1 §%,,
`~
`Printed Name: 7‘/\1Q,HAeu_ SH C:-o
`
`Title:
`
`IBLEPM-1
`
`b'I—7c‘.E(.7=s£_
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