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`EXHIBIT
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`EXHIBIT
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`3/2/2015
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`CNN International | Advertisement Feature | Yasuhiko Arakawa
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`OTHER TECH HEROES
`
`TECHNOLOGIES
`
`Yasuhiko Arakawa
`The University of Tokyo
`Institute for Nano Quantum Information Electronics
`
`Q&A with Yasuhiko Arakawa
`
`Last updated on October 7th, 2014
`
`From computers to home electronics, automobiles to infrastructure management. Have you ever thought about how our lives might be totally
`transformed in the not so distant future?
`
`The potential for such a transformation may lie in an intriguingly named material, the “quantum dot.” With its capacity to emit photons very efficiently,
`it harbors infinite possibilities.
`
`Meet our eighth “Tech Hero,” University of Tokyo Professor Yasuhiko Arakawa, a preeminent figure in the field of quantum dot research.
`
`What is a “quantum dot”?
`Professor Arakawa’s research lab is neat and orderly. It belies the stereotype of the cluttered and chaotic scientist’s lab, and seems more like an
`architect or industrial designer’s workspace. Most striking about the Prof. on first meeting is his logical and quickwitted conversation. He manages to
`explain the somewhat esoteric structure of quantum dots and their huge potential, with concise simplicity.
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`Image of “Quantum Dot”
`
`“A quantum dot is what you get when you take a single freemoving electron, and use cuttingedge nanotechnology to confine it in an immobile
`state (as if it were an artificial atom), in a tiny threedimensional space of only around 10 nanometers (1 nanometer = 1/100,000,000th of a
`meter). The dots are confined in countless boxlike structures which are made by inducing crystal growth in materials such as gallium and
`indium. This causes electrons to behave in a completely atypical way. Put simply, each individual quantum, which is the smallest unit in electrons
`and light, can be controlled as a unit of data. You could compare it to having children who were running around in the playground all compete to
`sit down on a chair placed there. The idea is that once the children are seated, their energy can then be efficiently directed to schoolwork.”
`
`“We first proposed the concept in 1982, but it wasn’t until 1990 that it actually became possible to produce quantum dots, and scientists could
`freely manipulate electrons. By modifying the size and shape of quantum dots, we can now use the energy from a multitude of electrons locked
`up in the dots to emit light simultaneously, and even produce ultrahigh performance and lowpower consumption “semiconductor lasers” with
`minimal temperature sensitivity.”
`
`“We’re hopeful that these semiconductor lasers with quantum dotpowered luminescence can be used in high performance, ultrahigh speed
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`CNN International | Advertisement Feature | Yasuhiko Arakawa
`light sources for broadband, and that quantum mechanics principles can also be applied to develop new devices for telecommunications and
`computers that we can’t even imagine right now. Applications of quantum dot technology should be able to make a major contribution to society.”
`
`A palmsized supercomputer?
`A key project for Professor Arakawa currently is building the technological base for creating a current day supercomputerequivalent that can fit in
`the palm of your hand by 2035. The challenge requires light to be used in wiring between the multiple LSI (largescale integrated circuits) embedded
`in the integrated circuit systems, so then light, not electrons, will transmit signals. The result will be ultrahigh speed data transmission between the
`chips, but it requires everything to be connected seamlessly, which is not possible with today’s wiring technology.
`
`LSI chips generate substantial heat. If light is used instead of electrons for interconnect, the light sources and other photonic devices placed near the
`LSI chips is needed to be tolerant against the heat. Semiconductor lasers using the quantum dots are likely to be needed for the light source
`because of its temperature insensitivity and lowpower consumption.
`
`Working under the Japanese government’s Funding Program for WorldLeading Innovative R&D on Science and Technology (FIRST), Professor
`Arakawa has developed a 5mm x 5mm silicon photonic integrated circuit substrate. With the substrate that uses photons to transmit signals between
`LSI chips, data is still processed inside the LSI with electrons as before, but the processed signal is sent by laser light with the high density photonic
`wires, then returned to its electron state and placed into the neighboring LSI.
`
`In 2013, his team achieved the world–record high transmission bandwidth density of 30 terabits per second per 1cm² on a Silicon photonic
`integrated circuit system, three times their 10 terabit target set for the end of 2014 in the project.
`
`A brave new world offering palmsized supercomputers is coming into view, as Professor Arakawa ably leads the research to make it possible.
`
`Silicon photonic integrated circuit (~5mm x 5mm) which is a part
`of photonic and electronic convergent systems.
`
`Other devices that can be operated using photonics are also needed to complete the supercomputer project, and research on these is also in
`progress.
`
`“My aim to bring about convergence of photonics and electronics in LSI is underway.”
`
`In 2014, Professor Arakawa has developed a photonic integrated circuit substrate that can operate even at high temperatures, using quantum dot
`laser light sources instead of the traditional semiconductor lasers. The aim was to create the photonic integrated circuit that can handle an entire
`currentday high performance server on the one chip. He has also already produced a silicon photonic integrated circuit substrate, which integrates
`various devices in a silicon substrate form and uses a quantum dot laser light source.
`
`Professor Arakawa is forging the way forward with his development of new generation photonicselectronics devices that meet the needs of our
`everchanging postindustrial society.
`
`A logical child
`Professor Arakawa says he first thought of academia as a career when he read Galileo’s life story as a small kid. But he wasn’t so much a fan of
`science experiments.
`
`“Science class experiments at elementary and junior high schools were tinny, and didn’t interest me so much. Plants and insects did nothing for
`me either. Kids into electronics usually liked vacuum tube radios, but I wasn’t so much into them. I suppose I like theory. I’m not interested in
`doing experiments for their own sake. I liked coming up with a hypothesis, and doing an experiment to prove it. So I didn’t really come to actually
`like doing experiments until physics class in high school. Even when I read about famous scientists in history, I was less interested in what they
`did, compared what they thought and how they lived.”
`
`He was a boy with a bent for logic. It seems the makings of the sharp academic were there from an early age.
`
`Do it tough sometimes
`But the Professor Arakawa is more than just a sharpminded scholar.
`
`“Our work is like climbing a mountain in the darkness. You sometimes hit deadends. And then you stray from the path. But if you fall over, you
`can’t let it be for nothing. You need to learn something from your failures. ‘Collect a flower when you fall.’ That kind of strong fighting spirits a
`valuable asset. Also, sometimes when you climb one mountain, another one can come into view. You can’t hesitate then. Even if you’ve just
`finished one climb, you need to press right on with the next.”
`
`To make worldfirst discoveries calls for immense effort. A sharp intellect alone isn’t enough. Professor Arakawa’s credo calls for getting down into
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`the rough at times, too.
`
`“Intuition can be important, too. Sometimes I let myself be guided by my intuition.”
`
`Arakawa spends his days off reading fiction, watching movies, and sometimes going to the training gym. He says he leaves work at the lab, and tries
`to relax as much as possible. Logic is not the beall and endall. Arakawa’s logical mind no doubt helped him realize that.
`
`Captivated by the elegance of logic
`Why is he so focused on logical thinking?
`
`“I like to remove ambiguity as well as to look at the bird'seye view of things. I believe a good science accompanies an elegance in logic,” he
`says.
`
`So Professor Arakawa sees beauty in the elegance of the science. He says he was hooked on Japanesestyle archery when he was in high school. It
`is a martial art with a simple, spare aesthetic.
`
`“Even when I proposed the concept of quantum dots for semiconductor lasers, I was happier that I had found a logic that no other researcher
`had discovered than at the thought of what impact it might have on the world.”
`
`An as yet undiscovered logic to Professor Arakawa is like finding a new kind of beauty unknown to the world. He is fascinated by the beauty of logic.
`It is intriguing that the motivation for Professor Arakawa’s pursuit of logic is beauty, a sense that cannot be explained by logic.
`
`Quantum dot applications the future
`“Quantum dots have infinite potential.”
`
`Solar cells with exceptional conversion efficiency, maximum security quantum cryptography systems that house data on a single photon, quantum
`telecommunications, and key devices for quantum computers that can complete massive calculations and simulations within quantum dots. The
`possibilities are endless.
`
`With the spread of quantum dot use in multiple fields, our lives too will change. Starting from driverless cars, high performance robots, and airplanes
`flying on autopilot that can respond to emergencies using instantaneous simulation, we face a future where our science fictionbased dreams could
`actually become reality.
`
`It may seem farfetched. But with an eminently logical mind pursuing the most efficient route, Professor Arakawa’s work could deliver this future to us
`sooner than we think. With the limitless potential of quantum dots, just imagine what kind of future that might be.
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`Nikon supporting the digital
`society
`
`Digital devices – from tablets to smartphones and portable music players – constantly become more convenient and easy to use. And then there are
`the major infrastructure systems such as super computers and cloud computing systems. The brains that control their functions are semiconductors.
`Advances in semiconductor are making people’s lives more convenient and comfortable and supporting the infrastructure of the information society.
`
`Semiconductors are composed of more than ten layers of individual ultrafine circuits patterns(just nanometers order) printed onto wafers of
`semiconductor material that are a few hundred millimeters in diameter. To make these semiconductors, we use semiconductor lithography systems,
`which are regarded as the most precise machines ever developed.
`
`A semiconductor lithography system works using the same process as printing a photograph – light is shone onto a chemical coating to cause a
`chemical reaction. Complex semiconductor circuit patterns are printed on a mask, and special lenses focus and reduce these patterns to print them
`onto the wafer.
`
`The finer the lines the semiconductor lithography system is able to be printed, the more can be fitted on the same surface area of wafer and the
`greater the circuit density that can be achieved. It’s no exaggeration to say that advances in digital device performance and the progress of
`information technology itself is determined by how thin we can make these lines.
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`The method of semiconductor lithography system
`
`Ever since Nikon made Japan’s first domestically manufactured semiconductor lithography system in 1980, the company has used its three core
`technologies of optics, precision engineering and control systems to achieve ever thinner circuit line widths, producing advanced equipment that
`continues to lead the world.
`
`A semiconductor lithography system uses a high performance projection lens, over one meter tall and comprising more than 20 lenses. The most
`important thing is the resolution of projection lens. The higher the resolution is, the finer the patterns that can be printed. Nikon ensures the high
`performance of these lenses by strict quality control at every stage from raw material to manufacture.
`
`It is also extremely important to maintain perfect alignment between mask and wafer, since circuit patterns are repeatedly printed onto more than
`ten overlapping layers. Nikon uses multiple sensors to ensure precise positioning. Nanometer level of very slight shift in the speed of the light occurs
`between mask and wafer, and these shifts are compensated for by adjusting the stage on which the wafer is mounted.
`
`During mass production of semiconductors, the important productivity metric is “throughput” – the number of wafers that can be printed in an hour.
`Because Nikon systems can etch hundreds of patterns on each wafer, and stop and start the stages at high speed, they can achieve very high
`throughput. For example, in the stages ordered by M2.0 to make semiconductors for use in supersonic airliner, the tracking shift had to be less than
`an astonishing ±0.5 μm in order to both move at ultra high speed and maintain position with extreme high precision.
`
`To give an idea of how incredibly difficult this procedure is, imagine a single wafer blown up to an area three km in diameter. Now take a propelling
`pencil and draw fine lines covering the entire area. In just ten seconds. That’s how fast and precisely these systems are able to fabricate
`semiconductors.
`
`With this semiconductor lithography system, Nikon has produced what may be the most precise machines ever manufactured, a distillation of the
`company’s leading edge technology in many areas, from high performance lenses to precise movements and highly accurate control systems.
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`Ray diagram of NSRS630D
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`Semiconductor miniaturization continues, with no signs of slowing, and in response Nikon has developed several new technologies. In high precision
`immersion lithography, the space between projection lens and wafer is filled with highly purified water, and this water itself acts as a lens. In the
`technique known as multiple patterning, the system performs several separate exposures to form one highdensity circuit, each exposure being of a
`lower resolution that only includes some of the pattern. The system then combines these exposures to achieve extremely high density. The very
`high performance and accuracy of Nikon’s latest systems allows them to achieve the nanometerorder overlay precision required for this method.
`
`The newest Nikon systems are able to mass produce semiconductors with line widths of less than 10 nanometers. What does this mean? A human
`hair is about 80 micrometers thick. So the system could write about 8,000 lines on a single hair. And each of those lines is just 1/12 to 1/8 as wide as
`an influenza virus.
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`Exposure in progress (CG image)
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`Today’s lifestyles and society’s infrastructure depend on the use of semiconductors. And this dependence will only increase in future. Nikon
`semiconductor lithography systems use ultra precise process technology to support the manufacture of semiconductors. Nikon supports the
`foundation of our future society with semiconductor lithography systems using innovative leading edge technology.
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`For more information: nikon.com/products/precision/technology/ic/
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