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`Docket No: 01 10198.00199U82
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`(PATENT)
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`Inventor: Roman Chistyakov
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`Inter Panes Review of Patent No.:
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`6,853} l42
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`Filed:
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`Title:
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`November 4, 2002
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`issued: February 8, 2005
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`METHODS AND APPARATUS FOR GENERATING HIGH—DENSITY
`PLASMA
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`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`PO. Box 1450
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`Alexandria, VA 223 l 3— 1450
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`Dear Sir/Madam:
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`POWER OF ATTORNEY
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`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
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`above captioned Inter Panes Review and transact all business in the US. Patent and Trademark
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`Office connected herewith:
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`All practitioners at Customer Number 23483.
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`Address all communications to:
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`WILMER CUTLER PiCKERlNG HALE AND DORR LLP
`60 State Street
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`Boston, Massachusetts 02 ii)?
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`(617) 526~6000
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`Address all e—mails and telephone calls to lead and back-up counsel (each associated with the
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`above Customer Number), listed below:
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`
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`Patent No.: 6,853,142
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`Docket No.: 0110198.00199USZ
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`Michael A. Diener (Lead Counsel, PTO Reg. No. 37,122)
`Michael.Dienerfliwilmerhaleeom
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`Direct: 617-526-6454
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`Larissa Bifano Park (Back-up Counsel, PTO Reg. No. 59,051)
`Larissa.Park@wilmerhale.com
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`Direct: 617-526—6081
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`WTLMER CUTLER PICKERING HALE AND DORR LLP
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`Boston, Massachusetts 02109
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`(a a a,
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`Name:
`Title:
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`Joanne Pap as
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