`
`Docket No.: 011019800197USZ
`
`(PATENT)
`
`Inventor:
`
`Roman Chistyakov
`
`Inter Partes Review of Patent No: 6306,652
`
`Filed:
`
`Title:
`
`May l2, 2003
`
`Issued: October 19, 2004
`
`HIGH-DENSITY PLASMA SOURCE USING EXCITED ATOMS
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`
`PO. Box 1450
`
`Alexandria, VA 223 l 3- 1450
`
`Dear Sir/Madam:
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
`
`above captioned Inter Partes Review and transact all business in the US. Patent and Trademark
`
`Office connected herewith:
`
`All practitioners at Customer Number 23483.
`
`Address all communications to:
`
`WTLMER CUTLER PICKERING HALE AND DORR LLP
`60 State Street
`
`Boston; MA 02109
`6115266000
`
`Address all e-mails and telephone calls t0 lead and backmp counsel (each associated with the
`
`above Customer Number), listed below:
`
`l2933§352v~l
`
`
`
`Patent No: 6306,652
`
`Docket No.: Ol 10198.00197U82
`
`Michael A. Diener (Lead Counsel, PTO Reg. No. 37,122)
`
`Michael.Diener@wilmerhale.com
`Direct: 6176266454
`
`Larissa Bifano Park (Back-up Counsel, PTO Reg. No. 59,051)
`Larissa.Park@wilmerhale.eom
`Direct: 617—526—6081
`
`WILMER CUTLER PICKERTNG HALE AND DORR LLP
`60 State Street
`
`Boston, MA 02109
`617—526—6000
`
`For:
`
`The Gillette Company
`
`
`5
`
`Dated: dbl
`
`lg 29l
`
`f,“ Mfim «1%6" 2M
`
`Name:
`Title:
`
`Joanne Pappas
`Senior Counsel
`
`1293339352V23
`
`