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`Docket No: 0110198.00197USl
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`(PATENT)
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`Inventor:
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`Roman Chistyakov
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`Inter Partes Review of Patent No: 6,806,652
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`Filed:
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`Title:
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`May 12, 2003
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`0
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`Issued: October 19, 2004
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`HIGHDENSITY PLASMA SOURCE USING EXCITED ATOMS
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`Mail Stop PATENT BOARD
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`Dear Sir/Madam:
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`POWER OF ATTORNEY
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`above captioned Inter Partes Review and transact all business in the US Patent and Trademark
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`All practitioners at Customer Number 23483
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`Address all communications to:
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`WILMER CUTLER PTCKERTNG HALE AND DORR LLP
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`Address all e—mails and telephone calls to lead and back-up counsel (each associated with the
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`Patent No: 6,8063652
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`Docket No.2 01 10198.00197USI
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`Michael A. Diener (Lead Counsel} PTO Reg. No. 37,122)
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`Michael.Dieneifigwilmerhale.com
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`Larissa Bifano Park (Back-up Counsel, PTO Reg. No. 592051)
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`WILMER CUTLER PICIGERING HALE AND DORR LLP
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`Dated: dL/W, gf 285
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`i W %%)M
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`Title: Senior Counsel
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