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`Docket No.: 01 10198.00202USl
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`(PATENT)
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`Inventor: Roman Chistyakov
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`Inter Partes Review of Patent No.:
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`7,81 l,42l
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`Filed:
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`Title:
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`July l8, 2005
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`Issued: October 12, 2010
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`HIGH DEPOSITION RATE SPUTTERING
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`AetiveUS 1294103G}’v'.i
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`Patent No.: 7,811,421
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`Docket No.: 0110198.00202US1
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`Michael A. Diener (Lead Counsel, PTO Reg. No. 37,122)
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`A<:ti*v'eUS §294i{}3G7v,i