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`DOCKET NO: 0110198.00202 US1
`‘421 Patent – Claims 1, 2, 8, 10-13, 15-17, 22-25, 27-30,
` 33, 34, 38, 39, 42, 43, and 46-48
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`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
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`PATENT:
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`7,811,421
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`INVENTOR: ROMAN CHISTYAKOV
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`July 18, 2005
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`ISSUED: October 12, 2010
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`HIGH DEPOSITION RATE SPUTTERING
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`FILED:
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`TITLE:
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`FEE AUTHORIZATION
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`The undersigned authorizes the Office to charge $29,200 to Deposit Account
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`No. 080219 for the fee set forth in 37 C.F.R. § 42.15(a) for this Petition for Inter
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`Partes Review. The undersigned further authorizes payment for any additional
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`fees that might be due in connection with this Petition to be charged to the above-
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`referenced Deposit Account associated with Customer Number: 23483.
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`/Larissa B. Park /
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`_________________________
`Michael A. Diener
`Registration No. 37,122
`
`Larissa B. Park
`Registration No. 59,051
`
`
`ActiveUS 129459779v.1
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`
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