`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`§ Petition for Inter Partes Review
`§
`§ Attorney Docket No.: 34789.98
`§
`§ Customer No.:
`§
`Title: Plasma Generation Using Multi— § Real Party in Interest:
`Fujitsu
`Step Ionization
`Semiconductor Limited and Fujitsu
`Semiconductor America, Inc.
`
`§ §
`
`PETITIONER POWER OF ATTORNEY PURSUANT TO 37 CFR 42.10(b)
`FOR PETITION FOR INTER PAR TES REVIEW
`
`Petitioners Fujitsu Semiconductor Limited and Fujitsu Semiconductor America, Inc.
`
`hereby appoints the Practitioner(s) associated with Customer Number 27683, as its attorney(s)
`
`to prosecute and to transact all business in the Patent Trial & Appeal Board of the United States
`
`Patent and Trademark Office connected with Inter Partes Review of the above-identified patent.
`
`Please direct all communication regarding this Petition to Customer Number 27683:
`
`David M. O’Dell
`
`HAYNES AND BOONE, LLP
`2323 Victory Ave. Suite 700
`Dallas, TX 75219
`
`David L. McCombs
`
`HAYNES AND BOONE, LLP
`2323 Victory Ave. Suite 700
`Dallas, TX 75219
`
`Phone: (972) 739-8635
`Fax: (214) 200-0853
`david.odell.ipr@haynesboone.com
`
`(214) 651-5533
`Fax: (214) 200-0853
`david.mc001n'bs@haynesboone.com
`
`USPTO Customer No. 27683
`
`USPTO Customer No. 27683
`
`USPTO Reg. No. 42,044
`
`USPTO Reg. No. 32,271
`
`The undersigned is authorized to sign this Power of Attorney on behalf of the Petitioners.
`
`Fujitsu Se
`
`iconductor Limited
`
`By: :{Eéé‘ m~
`
`Takashi Kikunia
`
`Director, IP Licensing Department
`Intellectual Property Unit
`
`Fujitsu
`
`By:
`
`micmlductor Ameri :1, Inc.
`
`
`Jesu Martinez
`General Counsel & Corporate Secretary
`
`In re patent of: Chistyakov
`
`US. Patent No. 6,805,779
`
`Issued: Oct. 19, 2004
`
`27683
`
`