`BEFORE THE PATENT TRIAL AND APPEAL BOARD
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`§ §
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`In re patent of: Chistyakov
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`US. Patent No. 6,853,142
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`Issued: February 8, 2005
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`Title: Methods and Apparatus for
`Generating High-Density Plasma
`
`§
`§
`§ Attorney Docket No.: 34789.98
`§
`§ Customer No.:
`§
`§ Real Party in Interest:
`Fujitsu
`Semiconductor Limited and Fujitsu
`Semiconductor America, Inc.
`
`Petition for InterPartes Review
`
`27683
`
`PETITIONER POWER OF ATTORNEY PURSUANT TO 37 CFR 42.10(b)
`FOR PETITION FOR INTER PARTES REVIEW
`
`Petitioriers Fujitsu Semiconductor Limited and Fujitsu Semiconductor America, Inc.
`
`hereby appoints the .Practitioner(s) associated with Customer Number 27683, as its nttomey(s)
`
`to prosecute and to transact all business in the Patent Trial & Appeal Board of the United States
`
`Patent and Trademark Office connected with Inter Partes Review of the above-identified patent.
`
`Please direct all communication regarding this Petition to Customer Number 27683:
`
`David M. O’Dell
`
`HAYNES AND BOONE, LLP
`2323 Victory Ave. Suite 700
`Dallas, TX 75219
`
`David L. McCombs
`
`HAYNES AND BOONE, LLP
`2323 Victory Ave. Suite 700
`Dallas, TX 75219
`
`Phone: (972) 739-8635
`Fax: (214) 200-0853
`davidodell.ipr@haynesboone.com
`
`(214) 651-5533
`Fax: (214) 200-0853
`david.mccombs@hayuesboone.com
`
`USPTO Customer No. 27683
`
`USPTO Customer No. 27683
`
`USPTO Reg. No, 42,044
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`USPTO Reg. No. 32,271
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`The undersigned is authorized to sign this Power of Attorney on behalf of the Petitioners.
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`Fujitsu S€!I1l (lli£l(lt‘ Limited
`By;7.,,
`
`
`/7
`
`Takashi Kikuma
`
`Director, TP Licensing Department
`Intellectual Property Unit
`
`Fujitsu .%8Il]iCl}I1iltiCi0r America, lug.
`By:
`
`I
`
`Jest s Martinez
`
`General Counsel & Corporate Secretary