`BEFORE THE PATENT TRIAL AND APPEAL BOARD
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`In re patent of: Chistyakov
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`U.S. Patent No. 6,806,652
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`Issued: October 19, 2004
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`Title: High-Density Plasma Source
`Using Excited Atoms
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`€0'><03<4O'>¢0'i|50‘w5O'==<7>70=<0>
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`Petition for Inter Partes Review
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`Attorney Docket No.: 34789.98
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`Customer No.:
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`27683
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`Fujitsu
`Real Party in Interest:
`Semiconductor Limited and Fujitsu
`Semiconductor America, Inc.
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`PETITIONER POWER OF ATTORNEY PURSUANT TO 37 CFR 42.10(b)
`FOR PETITION FOR INTER PARTES REVIEW
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`Petitioners Fujitsu Semiconductor Limited and Fujitsu Semiconductor America, Inc.
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`hereby appoints the Practitioner(s) associated with Customer Number 27683, as its attomey(s)
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`to prosecute and to transact all business in the Patent Trial & Appeal Board of the United States
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`Patent and Trademark Office connected with Inter Partes Review of the above-identified patent.
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`Please direct all communication regarding this Petition to Customer Number 27683:
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`David M. O’Dell
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`HAYNES AND BOONE, LLP
`2323 Victory Ave. Suite 700
`Dallas, TX 75219
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`David L. McCombs
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`HAYNES AND BOONE, LLP
`2323 Victory Ave. Suite 700
`Dallas, TX 75219
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`Phone: (972) 739-8635
`Fax: (214)200-0853
`david.odel1.ipr@haynesboone.com
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`(214) 651-5533
`Fax: (214)200-0853
`david.inccombs@l1aynesboone.co1n
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`USPTO Customer No. 27683
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`USPTO Customer No. 27683
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`USPTO Reg. No. 42,044
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`USPTO Reg. No. 32,271
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`The undersigned is authorized to sign this Power of Attorney on behalf of the Petitioners.
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`Fujitsu Semiconductor Limited
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`By:_? ~
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`Takashi Kikuma
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`Director, IP Licensing Department
`Intellectual Property Unit
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`
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`General Counsel & Corporate Secretary