`BEFORE THE PATENT TRIAL AND APPEAL BOARD
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`§ Petition for Inter Partes Review
`§
`§ Attomey Docket No.2 34789.98
`§
`§ Customer No.2
`§
`§ Real Party in Interest:
`Fujitsu
`Semiconductor Limited and Fujitsu
`Semiconductor America, Inc. '
`
`27683
`
`§ §
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`In re patent of: Chistyakov
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`US. Patent No. 7,811,421
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`Issued: October 12, 2010
`
`Title: High Deposition Rate Sputtering
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`PETITIONER POWER OF ATTORNEY PURSUANT TO 37 CFR 42.10(b)
`FOR PETITION FOR INTER PARTES REVIEW
`
`Petitioners Fujitsu Semiconductor Limited and Fujitsu Semiconductor America, Inc.
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`hereby appoints the Practitioner(s) associated with Customer Number 27683, as its attorney(s)
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`to prosecute and to transact all business in the Patent Trial & Appeal Board of the United States
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`Patent and Trademark Office connected with Inter Partes Review of the above—identified patent.
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`Please direct all communication regarding this Petition to Customer Number 27683:
`
`David M. O’Dell
`HAYNES AND BOONE, LLP
`2323 Victory Ave. Suite 700
`Dallas, TX 75219
`
`David L. McCombs
`HAYNES AND BOO‘NE, LLP
`2323 Victory Ave. Suite 700
`Dallas, TX 75219
`
`Phone: (972) 739-8635
`Fax: (214)200-0853
`david.odell.ipr@haynesboone.com
`
`(214) 651-5533
`Fax: (214) 200-0853
`davidmccombs@haynesboone.com
`
`USPTO Customer No. 27683
`USPTO Reg. No. 42,044
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`USPTO Customer No. 27683
`USPTO Reg. No. 32,271
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`The undersigned is authorized to sign this Power of Attorney on behalf of the Petitioner.
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`Fujitsu Semiconductor Limited
`
`BYIW%L__ _
`
`Tukashj Kikuma
`Director, IP Licensing Department
`Intellectual Property Unit
`
`Fujitsu ‘emicouductor America, I
`/
`.
`
`By:
`
`0»- 1:. Wjiu-d‘
`
`.
`
`Jcs 15 Martinez
`General Counsel & Corporate Secretary
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`