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`Materials Science
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`of
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`Thin Films
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`Milton Ohring
`Stevens Institute of Technology
`Department of Materials Science and Engineering
`Hoboken, New Jersey
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`ACADEMIC PRESS, INC.
`Harcourt Brace Jovanovich, Publishers
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`Boston San Diego New York
`London Sydney Tokyo Toronto
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`TSMC-1214
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`TSMC v. Zond, Inc.
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`Page 1 of 69 ,
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`TSMC-1214
`TSMC v. Zond, Inc.
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