`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`§ Petition for Inter Partes Review
`§
`§ Attorney DocketNo.: 34789.98
`§
`53 Customer No.:
`§
`§ Real Party in Interest:
`Fujitsu
`Semiconductor Limited and Fujitsu
`Semiconductor America, inc.
`
`27683
`
`§ §
`
`in re patent of: Chistyakov
`
`US, Patent No. 7,604,716
`
`issued: October 20, 2009
`
`Title: Methods and Apparatus for
`Generating High-Density Plasma
`
`PETITIONER POWER OF ATTORNEY PURSUANT TO 37 CFR 42.10(b)
`FOR PETITION FOR INTER PARTES REVIEW
`
`Petitioners Fujitsu Semiconductor Limited and Fujitsu Semiconductor America, Inc.
`
`hereby appoints the Practitioner(s) associated with Customer Number 27683, as its attorney(s)
`
`to prosecute and to transact all business in the Patent Trial & Appeal Board of the United States
`
`Patent and Trademark Office connected with Inter Fortes Review of the above-identified patent.
`
`Please direct all communication regarding this Petition to Customer Number 27683:
`
`David M. O’Dell
`
`HAYNES AND BOONE, LLP
`2323 Victory Ave. Suite 700
`Dallas, TX 75219
`
`David L. McCombs
`
`HAYNES AND BOONE, LLP
`2323 Victory Ave. Suite 700
`Dallas, TX 75219
`
`(972) 739-8635
`Phone:
`Fax: (214) 200-0853
`david.odell.ipr@haynesboone.com
`
`(214) 651-5533
`Fax: (214) 200-0853
`davidmccombs@haynesboonecom
`
`USPTO Customer No. 27683
`
`USPTO Customer No. 27683
`
`USPTO Reg. No. 42,044
`
`USPTO Reg. No. 32,271
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`The undersigned is authorized to Sign this Power of Attorney on behalf of the Petitioners.
`
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`cmiconductor Anicrjicu, Inc.
`
`Fujitsu Wuctor Lim‘ted
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`‘ iAA A Mortme7
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`Director, 11’ Licensing Department
`Intellectual Property Unit
`
`General Counsel & Corporate Secretary
`
`