`Filed on behalf of Intel Corporation
`By: Michael A. Diener, Reg. No. 37,122
`Yung-Hoon Ha, Reg. No. 56,368
`Wilmer Cutler Pickering Hale and Dorr LLP
`60 State Street, Boston, MA 02109
`Tel: (617) 526-6000
`Email: Michael.Diener@wilmerhale.com
` Yung-Hoon.Ha@wilmerhale.com
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`UNITED STATES PATENT AND TRADEMARK OFFICE
`____________________________________________
`
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`____________________________________________
`
`
`INTEL CORPORATION
`Petitioner
`
`v.
`
`ZOND INC.
`Patent Owner
`
`Case No. IPR2014-00820
`
`
`PETITION FOR INTER PARTES REVIEW OF
`U.S. PATENT NO. 6,805,779
`CHALLENGING CLAIMS 16, 28, 41, 42, 45 AND 46
`UNDER 35 U.S.C. § 312 AND 37 C.F.R. § 42.104
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`
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`TABLE OF CONTENTS
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`
`I.
`
`Mandatory Notices ...................................................................................... - 1 -
`A.
`Real Party-in-Interest ....................................................................... - 1 -
`B.
`Related Matters ................................................................................. - 1 -
`C.
`Counsel ............................................................................................. - 1 -
`D.
`Service Information .......................................................................... - 1 -
`Certification of Grounds for Standing ........................................................ - 2 -
`II.
`III. Overview of Challenge and Relief Requested ............................................ - 2 -
`A.
`Prior Art Patents and Printed Publications ....................................... - 2 -
`B.
`Grounds for Challenge ..................................................................... - 3 -
`IV. Brief Description of Technology ................................................................ - 4 -
`A.
`Plasma............................................................................................... - 4 -
`B.
`Ions, excited atoms, and metastable atoms ...................................... - 4 -
`V. Overview of the ‘779 Patent ....................................................................... - 6 -
`A.
`Summary of Alleged Invention of the ‘779 Patent .......................... - 6 -
`B.
`Prosecution History ........................................................................ - 10 -
`VI. Overview of the Primary Prior Art References ........................................ - 12 -
`A.
`Summary of the Prior Art ............................................................... - 12 -
`B.
`Overview of Mozgrin ..................................................................... - 12 -
`C.
`Overview of Kudryavtsev .............................................................. - 13 -
`D. Overview of Iwamura ..................................................................... - 14 -
`E.
`Overview of Pinsley and Angelbeck .............................................. - 14 -
`VII. Claim Construction ................................................................................... - 15 -
`A.
`“multi-step ionization” (claims 16, 28, 41, 42, 45 and 46) ............ - 16 -
`“means for generating a magnetic field proximate to a volume of
`B.
`ground state atoms to substantially trap electrons proximate to the
`volume of ground state atoms” (claims 41 and 42) ...................... - 17 -
`“means for generating a volume of metastable atoms from the volume
`of ground state atoms” (claims 41 and 42) .................................... - 17 -
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`C.
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`i
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`D.
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`E.
`
`B.
`
`C.
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`“means for raising an energy of the metastable atoms so that at least a
`portion of the volume of metastable atoms is ionized” (claims 41 and
`42) ................................................................................................... - 18 -
`“means for trapping electrons and ions in the volume of metastable
`atoms” (claim 42) ........................................................................... - 18 -
`VIII. Specific Grounds for Petition ................................................................... - 19 -
`A. Ground I: Claim 41 would have been obvious in view of Mozgrin,
`Kudryavtsev, and Pinsley ............................................................... - 19 -
`1.
`Independent claim 41 ........................................................... - 19 -
`Ground II: Claims 16, 28, 42, 45 and 46 would have been obvious in
`view of Mozgrin, Kudryavtsev, Pinsley and Iwamura ................... - 31 -
`1.
`Dependent claim 42 ............................................................. - 31 -
`2.
`Independent claims 1 and 45 ................................................ - 33 -
`3.
`Independent claim 18 ........................................................... - 39 -
`4.
`Dependent claims 16 and 28 ................................................ - 40 -
`5.
`Independent claim 46 ........................................................... - 41 -
`Ground III: Claims 16, 28, 41, 42, and 45 would have been obvious
`over Iwamura and Angelbeck ........................................................ - 42 -
`1.
`Independent claim 41 ........................................................... - 42 -
`2.
`Independent claims 1 and 45 ................................................ - 53 -
`3.
`Independent claim 18 ........................................................... - 57 -
`4.
`Dependent claims 16, 28 and 42 .......................................... - 58 -
`D. Ground IV: Claims 46 is anticipated by Iwamura ........................ - 59 -
`1.
`Independent claim 46 ........................................................... - 59 -
`IX. Conclusion ................................................................................................ - 60 -
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`FEDERAL STATUTES
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`TABLE OF AUTHORITIES
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`Page(s)
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`35 U.S.C. § 312 ......................................................................................... Cover Page
`
`REGULATIONS
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`37 C.F.R. § 42.22 ....................................................................................................... 2
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`37 C.F.R. § 42.100 ................................................................................................... 16
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`37 C.F.R. § 42.104 .......................................................................... Cover Page, 2, 19
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`CASE LAW
`
`In re ICON Health & Fitness, Inc., 496 F.3d 1374, 1379 (Fed. Cir. 2007) ............ 16
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`iii
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`I. MANDATORY NOTICES
`A. Real Party-in-Interest
`Intel Corporation (“Petitioner”) is the real party-in-interest.
`
`B. Related Matters
`Zond has asserted U.S. Patent No. 6,805,779 (“‘779 Patent”) (Ex. 1301)
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`against numerous parties in the District of Massachusetts, 1:13-cv-11570-RGS
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`(Zond v. Intel); 1:13-cv-11577-DPW (Zond v. AMD, Inc., et al); 1:13-cv-11581-
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`DJC (Zond v. Toshiba Am. Elec. Comp. Inc.); 1:13-cv-11591-RGS (Zond v. SK
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`Hynix, Inc.); 1:13-cv-11625-NMG (Zond v. Renesas Elec. Corp.) ; 1:13-cv-11634-
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`WGY (Zond v. Fujitsu, et al.); and 1:13-cv-11567-DJC (Zond v. Gillette, Co.).
`
`Petitioner has filed Petition Nos. IPR2014-00598, IPR2014-00686, and IPR2014-
`
`00765 for other claims of the 779 Patent; and is also filing additional Petitions for
`
`Inter Partes review in this and several patents with the same named inventor as
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`the ‘779 Patent.
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`C. Counsel
`Lead Counsel: Michael A. Diener (Registration No. 37,122)
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`Backup Counsel: Yung-Hoon Ha (Registration No. 56,368)
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`Service Information
`
`D.
`E-mail: Michael.Diener@wilmerhale.com
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`Yung-Hoon.Ha@wilmerhale.com
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`Post and hand delivery: Wilmer, Cutler, Pickering, Hale and Dorr, LLP
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`60 State Street, Boston, MA 02109
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`Telephone: 617-526-6000
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`Fax: 617-526-5000
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`II. CERTIFICATION OF GROUNDS FOR STANDING
`Petitioner certifies pursuant to Rule 42.104(a) that the patent for which
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`review is sought is available for inter partes review and that Petitioner is not
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`barred or estopped from requesting an inter partes review challenging the patent
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`claims on the grounds identified in this Petition.
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`III. OVERVIEW OF CHALLENGE AND RELIEF REQUESTED
`Pursuant to Rules 42.22(a)(1) and 42.104(b)(1)-(2), Petitioner challenges
`
`Claims 16, 28, 41, 42, 45 and 46 of the ‘779 Patent.
`
`Prior Art Patents and Printed Publications
`
`A.
`The following references, and others listed in the Table of Exhibits, are
`
`pertinent to the grounds of unpatentability explained below, and are each prior art
`
`under 102(b): 1
`
`1.
`
`D.V. Mozgrin, et al, High-Current Low-Pressure Quasi-Stationary
`
`Discharge in a Magnetic Field: Experimental Research, Plasma Physics Reports,
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`Vol. 21, No. 5, pp. 400-409, 1995 (“Mozgrin” (Ex. 1303)).
`
`
`1 The ’779 Patent issued prior to the America Invents Act (the “AIA”).
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`Accordingly, Petitioner has used the pre-AIA statutory framework to refer to the
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`prior art.
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`2.
`
`A. A. Kudryavtsev, et al, Ionization relaxation in a plasma produced
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`by a pulsed inert-gas discharge, Sov. Phys. Tech. Phys. 28(1), January 1983
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`(“Kudryavtsev” (Ex. 1304)).
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`3. U.S. Patent No. 3,761,836 (“Pinsley” (Ex. 1305)).
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`4.
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`5.
`
`U.S. Patent No. 3,514,714 (“Angelbeck” (Ex. 1306)).
`
`U.S. Patent No. 5,753,886 (“Iwamura” (Ex. 1307)).
`
`Of these, only Mozgrin was of record during prosecution.
`
`B. Grounds for Challenge
`Petitioner requests cancellation of 16, 28, 41, 42, 45 and 46 (hereinafter
`
`“challenged claims”) of the ‘779 Patent as unpatentable under 35 U.S.C. §§ 102
`
`and 103. 2 This Petition, supported by the declaration of Uwe Kortshagen, Ph.D.
`
`(“Kortshagen Decl.” (Ex. 1302)) filed herewith, demonstrates that there is a
`
`reasonable likelihood that Petitioner will prevail with respect to at least one
`
`challenged claim and that each challenged claim is not patentable. See 35 U.S.C. §
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`314(a).
`
`2 The terms “challenged claims” as used herein refers to Claims 16, 28, 41, 42, 45
`
`and 46 of the ‘779 Patent. Petitioner seeks to invalidate remaining claims of the
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`‘779 Patent in separate petitions. Moreover, independent claims 1 and 18 are
`
`addressed herein to demonstrate the invalidity of claims that depend from claims 1
`
`and 18. They are addressed in in a separate petition IPR2014-00598.
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`IV. BRIEF DESCRIPTION OF TECHNOLOGY
`A.
`Plasma
`A plasma is a collection of ions, free electrons, and neutral atoms.
`
`Kortshagen Decl. ¶ 22 (Ex. 1302). The negatively charged free electrons and
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`positively charged ions are present in roughly equal numbers such that the plasma
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`as a whole has no overall electrical charge. Id. (Ex. 1302). The “density” of a
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`plasma refers to the number of ions or electrons that are present in a unit volume.
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`Id. (Ex. 1302).3
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`Plasmas had been used in research and industrial applications for decades
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`before the ‘779 Patent was filed. Id. at ¶ 23 (Ex. 1302). For example, sputtering is
`
`an industrial process that uses plasmas to deposit a thin film of a target material
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`onto a surface called a substrate (e.g., silicon wafer during a semiconductor
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`manufacturing operation). Id. (Ex. 1302). Ions in the plasma strike a target
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`surface causing ejection of a small amount of target material. Id. (Ex. 1302). The
`
`ejected target material then forms a film on the substrate. Id. (Ex. 1302).
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`Ions, excited atoms, and metastable atoms
`
`B.
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`3 The terms “plasma density” and “electron density” are often used interchangeably
`
`because the negatively charged free electrons and positively charged ions are
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`present in roughly equal numbers in plasmas that do not contain negatively
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`charged ions or clusters. Kortshagen Decl. ¶ 22, FN1 (Ex. 1302).
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`Atoms have equal numbers of protons and electrons. Id. at ¶ 24 (Ex. 1302).
`
`Each electron has an associated energy state. Id. (Ex. 1302). If all of an atom’s
`
`electrons are at their lowest possible energy state, the atom is said to be in the
`
`“ground state.” Id. (Ex. 1302).
`
`On the other hand, if one or more of an atom’s electrons is in a state that is
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`higher than its lowest possible state, then the atom is said to be an “excited atom.”
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`Id. at ¶ 25 (Ex. 1302). A metastable atom is a type of excited atom that is
`
`relatively long-lived, because it cannot transition into the ground state through
`
`dipole radiation, i.e., through the emission of electromagnetic radiation. Id. (Ex.
`
`1302). See also ‘779 Patent at 7:22-25 (“The term ‘metastable atoms’ is defined
`
`herein to mean excited atoms having energy levels from which dipole radiation is
`
`theoretically forbidden. Metastable atoms have relatively long lifetimes compared
`
`with other excited atoms.”) (Ex. 1301). “All noble gases have metastable states.”
`
`Id. at 7:37 (Ex. 1301). When generating excited atoms, multiple levels of excited
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`states are formed. Of these, some of the lowest states are metastable, and would
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`typically be more common than the higher states, where Dr. Kortshagen provides
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`additional support with reference to Ex. 1311 and Ex. 1312. Kortshagen Decl. ¶ 25
`
`(Ex. 1302).
`
`Excited and metastable atoms are electrically neutral – they have equal
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`numbers of electrons and protons. A collision with a low energy free electron (e-)
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`can convert a ground state atom to an excited or metastable atom. Kortshagen
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`Decl. at ¶ 26 (Ex. 1302). For example, the ‘779 Patent uses the following equation
`
`to describe production of an excited argon atom, Ar*, from a ground state argon
`
`atom, Ar. See ‘779 Patent at 8:7 (Ex. 1301).
`
`Ar + e- Ar* + e-
`
`An ion is an atom that has become disassociated from one or more of its
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`electrons. A collision between a free, high energy electron and a ground state,
`
`excited, or metastable atom can create an ion. Kortshagen Decl. ¶ 27 (Ex. 1302).
`
`For example, the ‘779 Patent uses the following equations to describe production
`
`of an argon ion, Ar+, from a ground state argon atom, Ar, or an excited argon atom,
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`Ar*. See ‘779 Patent at 3:40 and 8:9 (Ex. 1301).
`
`Ar + e- Ar+ + 2e-
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`Ar* + e- Ar+ + 2e-
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`The production of excited atoms, metastable atoms, and ions was well
`
`understood long before the ‘779 Patent was filed. Kortshagen Decl. ¶ 28 (Ex.
`
`1302).
`
`V. OVERVIEW OF THE ‘779 PATENT
`A.
`Summary of Alleged Invention of the ‘779 Patent
`The ‘779 Patent relates to generating a plasma using a multi-step ionization
`
`process with an excited/metastable atom source that generates excited atoms or
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`metastable atoms, and then provides the excited/metastable atoms to a plasma
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`chamber where the plasma is formed, thereby generating a plasma with a “multi-
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`step ionization” process. Kortshagen Decl. ¶ 29 (Ex. 1302). For convenience, this
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`section will just use the term “excited atom source.” The ‘779 Patent does not
`
`indicate any particular difference in the operation of an excited atom source when
`
`it is a metastable atom source. The specification repeatedly refers to “an excited
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`atom source such as a metastable atom source,” see, e.g., ‘779 Patent at 2:13-14,
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`17-18, 22-24 (Ex. 1301), and says that “[i]n some embodiments, the metastable
`
`atom source 204 generates some excited atoms that are in excited states other than
`
`a metastable state.” Id. at 5:63-65 (Ex. 1301)
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`Admitted prior art FIG. 1 of the ‘779 Patent shows a
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`plasma chamber consisting of a magnetron sputtering
`
`system, without an excited atom source. Kortshagen Decl. ¶
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`30 (Ex. 1302). It generates plasma through a process that
`
`the patent refers to as a direct ionization process. ‘779
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`Patent at 3:36-47 (“The ionization process in known plasma sputtering apparatus is
`
`generally referred to as direct ionization…. The collision between the neutral
`
`argon atom and the ionizing electron results in an argon ion (Ar+) and two
`
`electrons.”) (Ex. 1301).
`
`As is generally known, this system has an anode, a cathode assembly 114 for
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`holding a target material to be sputtered, and a magnet 130 that generates a
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`magnetic field 132 proximate to the target to trap and concentrate electrons. Id. at
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`2:46-3:18 (Ex. 1301). See also Kortshagen Decl. ¶ 31 (Ex. 1302).
`
`The alleged invention generally relates to coupling an excited or metastable
`
`atom source to some plasma chamber. ‘779 Patent at 5:27-34 (“The metastable
`
`atom source 204 can be coupled to any type of process chamber, such as the
`
`chamber 104 of FIG. 1. In fact, a plasma generator according to the present
`
`invention can be constructed by coupling a metastable atom source to a
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`commercially available plasma chamber. Thus, commercially available plasma
`
`generators can be modified to generate a plasma using a multi-step ionization
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`process according to the present invention.”) (Ex. 1301). See also Kortshagen
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`Decl. ¶ 32 (Ex. 1302).
`
`FIGS. 2 and 3 of the ‘779 Patent show such
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`plasma generators “according to the present
`
`invention” that are coupled with separate metastable
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`atom sources (annotated in color at right). ‘779 Patent
`
`at 2:3-11; FIGS. 2 and 3 (Ex. 1301). Specifically, FIG.
`
`2 shows metastable atom source 204, and FIG. 3 shows
`
`metastable atom source 304 (annotated in color below).
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`Kortshagen Decl. ¶ 33 (Ex. 1302).
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`The metastable atom sources 204 and 304 “generate[] a volume of
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`metastable atoms 218 from [a] volume of ground state atoms. See, e.g., ‘779
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`Patent at 4:56-58 (Ex. 1301). Metastable atoms 218 are transported from the
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`source where they are generated to the region between the cathode 114/306 and
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`substrate support 136/352, where plasma 202/302 is formed. Kortshagen Decl. ¶
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`34 (Ex. 1302).
`
`Power supply 222 (also annotated in color above) provides power to the
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`metastable atom source. See, e.g., ‘779 Patent at 4:60-62 (Ex. 1301). Another
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`(pulsed) power supply 201 (in FIG. 2) or power supply 316 (in FIG. 3) raises the
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`energy of the metastable atoms to generate a plasma 202. See, e.g., id. at 11:4-14
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`(“A power supply 316 is electrically coupled to the volume of metastable atoms
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`218. The power supply 316 can be any type of power supply, such as a pulsed
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`power supply, a RF power supply, an AC power supply, or a DC power supply. …
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`The power supply 316 generates an electric field 322 between the cathode 306 and
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`the anode 308 that raises the energy of the volume of metastable atoms 218 so that
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`at least a portion of the volume of metastable atoms 218 are ionized, thereby
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`generating the plasma 302.”) (Ex. 1301). See also Kortshagen Decl. ¶ 35 (Ex.
`
`1302).
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`The metastable atom sources shown in FIGS. 2 and 3 can be mounted to the
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`inside wall of the chamber 230 (FIG. 3), or on the outside wall (FIG. 2). See, e.g.,
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`‘779 Patent at 4:31-34 and 9:51-62 (Ex. 1301). Kortshagen Decl. ¶ 36 (Ex. 1302).
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`Consistent with the claim language, FIGS. 2 and 3, and the specification, the
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`“excited atom source” and “metastable atom source” generate the excited atoms in
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`a source that is distinct from, and coupled to, the components that later raise the
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`energy of the excited or metastable atoms to generate a plasma with “multi-step
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`ionization,” a term the ‘779 Patent defines as an ionization process whereby ions
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`are ionized in at least two distinct steps.”4 ‘779 Patent at 6:60-63 (Ex. 1301).
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`Prosecution History
`
`B.
`The first substantive office action for the application that led to the ‘779
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`Patent rejected all independent claims as being anticipated based on prior art that
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`showed a first chamber for generating excited/metastable atoms, and a second
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`chamber for increasing the energy of the excited atoms, and for generating a
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`plasma using multi-step ionization. See 02/11/04 Office Action at 2-3 (Ex. 1308).
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`The applicant did not dispute the rejection, but amended the independent
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`claims at issue here to require that the distinct source further includes “a magnet
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`that generates a magnetic field for substantially trapping electrons proximate to the
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`ground state atoms.” See 05/06/04 Resp. at 2, 4, 6, 8 and 10 (Ex. 1309). The
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`claims were then allowed.
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`Notwithstanding this difference, the ‘779 Patent does not indicate that an
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`4 All bold/italics emphasis is added.
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`excited atom source with magnets has any special significance over other energy
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`sources for generating excited/metastable. For example, the ‘779 Patent
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`specification indicates that there were approximately twelve (12) different ways to
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`generate excited atoms – see ‘779 Patent at 19:1-10 (Ex. 1301) - and shows
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`multiple embodiments – e.g., FIGS. 4, 5, 8, 9 and 11—without the magnets that
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`were required for the claims to be allowed. The “magnet” of the source chamber
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`recited in the claims refers particularly to the embodiments of FIGS. 6, 7 and 10,
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`and specifically to magnets 504a, 504b, 506a and 506b in FIG. 6; magnets 566a-d
`
`and 570a-d in FIG. 7; and magnets 712 and 714 in FIG. 10. ‘779 Patent at FIGS. 6
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`and 7; 14:46-15:4516:12-20 (Ex. 1301).
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`European Counterpart. The applicant had also identified these magnets,
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`located in the separate excited atom source of FIG. 6, as the claimed magnets in
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`counterpart claims in Europe. Those claims read in part “characterised [sic] in that
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`the excited atom source (204) comprises a magnet (504, 506) that is arranged to
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`generate a magnetic field (508) that traps electrons proximate to the ground state
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`atoms.” (24 July 2007 Response in EP 1614136) (Ex. 1310).
`
`However, as explained in detail below, and contrary to the Examiner’s
`
`reasons for allowance, the prior art addressed in this Petition teaches using magnets
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`in this manner, along with the other limitations of the challenged claims.
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`Kortshagen Decl. ¶ 42 (Ex. 1302).
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`VI. OVERVIEW OF THE PRIMARY PRIOR ART REFERENCES
`A.
`Summary of the Prior Art
`As explained in detail below, limitation-by-limitation, there is nothing new
`
`or non-obvious in the challenged claims of the ‘779 Patent. Id. at ¶ 43 (Ex. 1302).
`
`B. Overview of Mozgrin
`Fig. 7 of Mozgrin, copied below, shows the
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`current-voltage characteristic (“CVC”) of a plasma
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`discharge generated by Mozgrin. As shown,
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`Mozgrin divides this CVC into four distinct regions. Id. at ¶ 44 (Ex. 1302).
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`Mozgrin calls region 1 “pre-ionization.” Mozgrin at 402, right col, ¶ 2 (“Part
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`1 in the voltage oscillogram represents the voltage of the stationary discharge (pre-
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`ionization stage).”) (Ex. 1303). See also Kortshagen Decl. ¶ 45 (Ex. 1302).
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`Mozgrin calls region 2 “high current magnetron discharge.” Mozgrin at 409,
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`left col, ¶ 4 (“The implementation of the high-current magnetron discharge
`
`(regime 2)…”) (Ex. 1303). See also Kortshagen Decl. ¶ 46 (Ex. 1302).
`
`Application of a high voltage to the pre-ionized plasma causes the transition from
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`region 1 to 2. Id. (Ex. 1302). Mozgrin teaches that region 2 is useful for
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`sputtering. Mozgrin at 403, right col, ¶ 4 (“Regime 2 was characterized by an
`
`intense cathode sputtering…”) (Ex. 1303). See also Kortshagen Decl. ¶ 46 (Ex.
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`1302).
`
`Mozgrin calls region 3 “high current diffuse discharge.” Mozgrin at 409, left
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`col, ¶ 5, (“The high-current diffuse discharge (regime 3)…”) (Ex. 1303).
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`Increasing the current applied to the “high-current magnetron discharge” (region 2)
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`causes the plasma to transition to region 3. Kortshagen Decl. ¶ 47 (Ex. 1302).
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`Mozgrin also teaches that region 3 is useful for etching, i.e., removing material
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`from a surface. Mozgrin at 409, left col, ¶ 5 (“The high-current diffuse discharge
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`(regime 3) is useful … Hence, it can enhance the efficiency of ionic etching…”)
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`(Ex. 1303). See also Kortshagen Decl. ¶ 47 (Ex. 1302).
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`C. Overview of Kudryavtsev
`Kudryavtsev is a technical paper that studies the ionization of a plasma with
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`voltage pulses. See, e.g., Kudryavtsev at 30, left col. ¶ 1 (Ex. 1304). In particular,
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`Kudryavtsev describes how ionization of a plasma can occur via different
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`processes. The first process is direct ionization, in which ground state atoms are
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`converted directly to ions. See, e.g., id. at Fig. 6 caption (Ex. 1304). The second
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`process is multi-step ionization, which Kudryavtsev calls stepwise ionization. See,
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`e.g., id. (Ex. 1304). Kudryavtsev notes that under certain conditions multi-step
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`ionization can be the dominant ionization process. See, e.g., id. (Ex. 1304).
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`Mozgrin took into account the teachings of Kudryavtsev when designing his
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`experiments. Mozgrin at 401, ¶ spanning left and right cols. (“Designing the unit,
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`we took into account the dependences which had been obtained in
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`[Kudryavtsev]….”) (Ex. 1303). Kortshagen Decl. ¶ 48 (Ex. 1302).
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`D. Overview of Iwamura
`Iwamura discloses “a plasma treatment apparatus for treating a surface of an
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`object….” Iwamura at 2:51-52 (Ex. 1307). “A first plasma generation unit for
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`preactivating the gas to generate a plasma is positioned upstream along the flow
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`path of the gas in the gas supply; and a second plasma generation unit for
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`activating the gas to generate a plasma downstream along the flow path of the gas
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`in the gas supply is also provided. Thus, the first plasma generation unit
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`preactivates the gas and the second plasma generation unit activates the gas and
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`forms activated gas species. Then, the activated gas species formed by the second
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`plasma generation unit treat the object to be treated.” Iwamura at 2:56-65. (Ex.
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`1307); see also Kortshagen Decl. ¶ 49 (Ex. 1302).
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`
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`Iwamura discloses multiple ways for generating excited/metastable atoms,
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`and discloses the desirability of providing a first excitation step followed by a
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`further energy providing step, and also claims such a system. Iwamura at 2:1-50,
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`claim 1 (Ex. 1307); see also Kortshagen Decl. ¶ 50 (Ex. 1302).
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`E. Overview of Pinsley and Angelbeck
`Pinsley discloses a gas laser having a magnetic field that is oriented
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`transversely with respect to the flow of the gases. Pinsley at Abstract (“A flowing
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`gas laser having an electric discharge plasma with the electric field oriented
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`transversely with respect to the flow of gases therethrough is provided with a
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`magnetic field which is oriented transversely with respect to both the flow and the
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`electric field to overcome the forces of flowing gases thereon.”) (Ex. 1305). The
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`transverse magnetic field traps electrons. Pinsley at 2:43-47 (“As is known, the
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`interaction between the current and the magnetic field will result in an upstream
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`force as indicated by the force vector 32. This force is exerted upon the electrons,
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`and tends to maintain the electrons in an area between the anode and cathode.”)
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`(Ex. 1305); see also Kortshagen Decl. ¶ 51 (Ex. 1302).
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`Pinsley does not specifically use the words “excited atoms,” but one of
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`ordinary skill would understand that increasing the energy and using a magnetic
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`field to “maintain the electrons in place would allow excited atoms to be generated
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`and pass through. Id. at ¶ 52 (Ex. 1302). The Angelbeck patent (with a lead
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`inventor who is also a co-inventor on the Pinsley patent) makes clear that gas
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`lasers of the type disclosed by Pinsley generate excited atoms as part of their
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`operation. Angelbeck at 1:21-25 (“This invention relates to gas lasers, and
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`particularly to a method and apparatus for increasing and controlling the light
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`output of a gas laser by applying a transverse magnetic field to the laser.”); 2:18-20
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`(“A high gas pressure P is advantageous, however, for creating a high density of
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`excited atoms in the laser.”) (Ex. 1303); see also Kortshagen Decl. ¶ 52 (Ex.
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`1302).
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`VII. CLAIM CONSTRUCTION
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`A claim in inter partes review is given the “broadest reasonable construction
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`in light of the specification.”5 37 C.F.R. § 42.100(b). Any claim term that lacks a
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`definition in the specification is therefore also given a broad interpretation. In re
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`ICON Health & Fitness, Inc., 496 F.3d 1374, 1379 (Fed. Cir. 2007). The
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`following discussion proposes constructions of and support therefore of those
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`terms. Any claim terms not included in the following discussion are to be given
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`their broadest reasonable interpretation in light of the specification as commonly
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`understood by those of ordinary skill in the art.
`
` “multi-step ionization” (claims 16, 28, 41, 42, 45 and 46)
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`A.
`Each of the independent claims in the ‘779 Patent recite the term “multi-step
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`ionization.” The ‘779 Patent defines this term “to mean an ionization process
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`whereby ions are ionized in at least two distinct steps.” ‘779 Patent at 6:60-63
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`(Ex. 1301). This is consistent with the claim language, FIGS. 2 and 3, and the
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`specification, which generate the excited atoms in a source that is distinct from,
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`and coupled to, the components that later raise the energy of the excited or
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`metastable atoms to generate a plasma. Thus, the proposed construction for
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`
`5 Petitioner adopts the “broadest reasonable construction” standard as required by
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`37 C.F.R. § 42.100(b). Petitioner reserves the right to pursue different
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`constructions in a district court, where a different standard is applicable.
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`“multi-step ionization” is “an ionization process whereby ions are ionized in at
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`least two distinct steps.”
`
`B.
`
`“means for generating a magnetic field proximate to a volume of
`ground state atoms to substantially trap electrons proximate to
`the volume of ground state atoms” (claims 41 and 42)
`
`Claim 41 recites “means for generating a magnetic field proximate to a
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`volume of ground state atoms to substantially trap electrons proximate to the
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`volume of ground state atoms.” The claimed function is: “generating a magnetic
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`field in a volume of ground state atoms separate from the plasma chamber to trap
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`electrons.”
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`The ‘779 Patent discloses at least the following corresponding structure for
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`the “means for generating a magnetic field…” limitation of claim 41: magnets
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`(556a-d, 570a-d, 712, 714) that generate a magnetic field as described in the text of
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`‘779 Patent at 16:1-20 and 18:34-41, and as shown in FIGS. 7, 7A and 10. (Ex.
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`1301)
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`C.
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`“means for generating a volume of metastable atoms from the
`volume of ground state atoms” (claims 41 and 42)
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`Claim 41 recites “means for generating a volume of metastable atoms from
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`the volume of ground state atoms.” The claimed function is: “creating a volume of
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`atoms comprising a majority of metastable atoms .”
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`The ‘779 Patent discloses at least the following corresponding structure for
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`the “means for generating a volume of metastable atoms…” limitation of claim 41:
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`Petition for Inter Parties Review of US 6,805,779 Claims 16, 28, 41, 42, 45 and 46
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`Any of the separate metastable atom sources (402, 4