`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`In re patent of: Chistyakov
`
`U.S. Patent No. 7,604,716
`
`Issued: October 20, 2009
`
`Title: Methods and Apparatus for
`Generating High-Density Plasma
`
`Petition for Inter Partes Review
`
`§
`§
`§ Attorney Docket No.: 34789.98
`§
`§ Customer No.:
`§
`Taiwan
`§ Real Party in Interest:
`§
`Semiconductor Manufacturing Company,
`§
`Ltd. and TSMC North America Corp.
`
`27683
`
`PETITIONER POWER OF ATTORNEY PURSUANT TO 37 CFR 42.10(b)
`FOR PETITION FOR INTER PARTES REVIEW
`
`Petitioners Taiwan Semiconductor Manufacturing Company, Ltd. and TSMC North
`
`America Corp. hereby appoint the Practitioner(s) associated with Customer Number 27683, as
`
`its attorney(s) to prosecute and to transact all business in the Patent Trial & Appeal Board of the
`
`United States Patent and Trademark Office connected with Inter Parzes Review of the above-
`
`identified patent.
`
`Please direct all communication regarding this Petition to Customer Number 27683:
`
`David M. O’Dell
`
`HAYNES AND BOONE, LLP
`2323 Victory Ave. Suite 700
`Dallas, TX 75219
`
`David L. McCombs
`
`HAYNES AND BOONE, LLP
`2323 Victory Ave. Suite 700
`Dallas, TX 75219
`
`Phone: (972) 739-8635
`Fax: (214) 200-0853
`david.odell.ipr@haynesboone.com
`
`(214) 651-5533
`Fax: (214)200-0853
`david.mccombs@haynesboone.com
`
`USPTO Customer No. 27683
`
`USPTO Customer No. 27683
`
`USPTO Reg. No. 42,044
`
`USPTO Reg. No. 32,271
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`The undersigned is authorized to sign this Power of Attorney on behalf of the Petitioners.
`
`Taiwan Semiconductor Manufacturing
`Company, Ltd
`
`By: Cl
`Printed Name: q~_«l‘tcHaEL. g_‘k§[
`Title:(\, :85] I
`2i£.§£iQl§_?.
`
`TSMC North America Corp.
`
`By: %'
`Printed Name:
`l:l"\&;._‘L L3‘1E»\/
`Titletl
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