throbber
1
`
`2
`3
`
`4
`
`5
`
`6
`7
`8
`
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`
`25
`
`Page 1
`IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
` BEFORE THE PATENT TRIAL AND APPEAL BOARD
`________________________________
`TAIWAN SEMICONDUCTOR
`MANUFACTURING COMPANY, LTD.
`AND TSMC NORTH AMERICA CORP., Case Nos.
` IPR2014-00800
` Petitioners, IPR2014-00802
` IPR2014-00805
`-vs-
`ZOND, LLC,
` Patent Owner.
`________________________________
`
` VIDEOTAPED DEPOSITION of DR. UWE KORTSHAGEN
` Minneapolis, Minnesota
` December 23rd, 2014
`
`Reported by:
`Amy L. Larson, RPR
`Job No. 88563
`
`TSG Reporting - Worldwide
`(877) 702-9580
`
`TSMC et. at. v. Zond, IPR2014-00805
`Page 1 Exhibit 2017
`
`

`

`Page 2
`
`Page 3
`
`APPEARANCES: (CONT'D.)
` WHITE & CASE
` 701 Thirteenth Street NW
` Washington, D.C. 20005
` By: David Tennant, Esq.
` For: Global Foundries
`
` WHITE & CASE
` 3000 El Camino Real
` 5 Palo Alto Square
` Palo Alto, California 94306
` By: Brett Rismiller, Esq.
` For: Global Foundries
`
` BAKER BOTTS
` One Shell Plaza
` 910 Louisiana Street
` Houston, Texas 77002
` By: Robinson Vu, Esq. (via telephone)
` For: Toshiba
`
` ALSO PRESENT: Adam Wallin, Videographer
`
`Page 5
`
` DR. UWE KORTSHAGEN
`THE VIDEOTAPED DEPOSITION OF DR. UWE KORTSHAGEN,
`taken on this 23rd day of December, 2014, at The
`Commons Hotel, 615 Washington Avenue, S.E.,
`Minneapolis, Minnesota, commencing at
`approximately 8:02 a.m.
` P R O C E E D I N G S
` THE VIDEOGRAPHER: We are on the
` record. This is the videotaped deposition of
` Dr. Uwe Kortshagen in the matter of Taiwan
` Semiconductor Manufacturing Company Limited,
` et al., vs. Zond, LLC, in the United States
` Patent and Trademark Office before the
` Patent Trial and Appeal Board, IPR2014-00800,
` IPR2014-00802, IPR 2014-00805.
` This deposition is being held at The
` Commons Hotel in Minneapolis, Minnesota.
` Today's date is December 23rd, 2014. The
` time is approximately 8:04 a.m.
` My name is Adam Wallin, I'm the legal
` video specialist from TSG Reporting,
` Incorporated, headquartered at 747 Third
` Avenue, New York, New York. The court
` reporter is Amy Larson in association with
` TSG Reporting.
`
`1
`2
`
`3
`
`4
`
`56
`
`7
`
`8
`
`9
`10
`
`11
`
`12
`
`13
`14
`15
`
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`APPEARANCES:
` RADULESCU
` 350 Fifth Avenue
` New York, NY 10118
` By: Maria Granovsky, Ph.D., Esq.
` For: Zond, LLC
`
` CHAO HADIDI STARK & BARKER
` 176 East Main Street
` Westborough, MA 01581
` By: Bruce Barker, Esq.
` For: Zond, LLC
`
` DUANE MORRIS
` 100 High Street
` Boston, MA 02110
` By: Anthony Fitzpatrick, Esq.
` For: Taiwan Semiconductor Manufacturing
` Company Limited and
` TSMC North America
`
` HAYNES AND BOONE
` 2323 Victory Avenue
` Dallas, Texas 75219
` By: David McCombs, Esq.
` For: Taiwan Semiconductor Manufacturing
` Company Limited and
` TSMC North America
`
` HAYNES AND BOONE
` 2505 North Plano Road
` Richardson, Texas 75082
` By: Gregory Huh, Esq.
` For: Taiwan Semiconductor Manufacturing
` Company Limited and
` TSMC North America
`
`Page 4
`
`INDEX:
`EXAMINATION BY: PAGE
`Ms. Granovsky...............................8
`EXHIBITS MARKED FOR IDENTIFICATION:
`Exhibit 1...................................9
`U.S. Patent 7,811,421 B2
`
`1
`2
`
`3
`
`4
`
`56
`
`7
`
`8
`9
`
`10
`
`11
`
`12
`
`13
`14
`
`15
`
`16
`
`17
`
`18
`19
`
`20
`
`21
`
`22
`
`23
`24
`25
`
`1
`2
`3
`4
`5
`
`6789
`
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`TSG Reporting - Worldwide
`(877) 702-9580
`
`2
`
`TSMC et. at. v. Zond, IPR2014-00805
`Page 2 Exhibit 2017
`
`

`

`Page 6
`
` DR. UWE KORTSHAGEN
` Will counsel please identify themselves
`for the record.
` MS. GRANOVSKY: Maria Granovsky
`from Radulescu, LLP, for patent owner
`Zond, LLC.
` MR. FITZPATRICK: Anthony
`Fitzpatrick from Duane, Morris, LLP on behalf
`of Taiwan Semiconductor Manufacturing Company
`Limited and TSMC North America.
` MR. TENNANT: David Tennant from
`White & Case for Global Foundries Dresden
`Module One LLC & and Co. KG, Global Foundries
`Dresden Module Two LLC & Co. KG, and Global
`Foundries U.S., Inc.
` MR. MCCOMBS: David McCombs with
`Haynes & Boone for TSMC, TSMC North America
`and Fujitsu.
` MR. HUH: Gregory Huh with
`Haynes & Boone for TSMC, TSMC North America
`and Fujitsu.
` MR. RISMILLER: Brett Rismiller
`with White & Case, LLP, for Global Foundries.
` THE VIDEOGRAPHER: Will the court
`reporter please swear in the witness.
`
`Page 8
`
` DR. UWE KORTSHAGEN
` on the record.
` EXAMINATION
`BY MS. GRANOVSKY:
`Q. Good morning, Dr. Kortshagen.
`A. Good morning, Dr. Granovsky.
`Q. You understand that you have just taken an
` oath to testify truthfully?
`A. I do.
`Q. And is there any reason why you cannot
` testify truthfully?
`A. There is no reason.
`Q. Is there any medication that you're taking
` that will prevent you from testifying
` truthfully?
`A. No.
`Q. Okay. I handed you a document previously
` marked as TSMC 1002, and I'll represent to
` you that this is from IPR Number 2014-00800.
` Do you recognize this document?
`A. I do.
`Q. What is it?
`A. It is my declaration regarding claims 1, 2,
` 8, 10 through 13, 15 through 17, 22 through
` 25, 27 through 30, 33, 34, 38, 39, 42, 43
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`Page 7
`
` DR. UWE KORTSHAGEN
` MR. FITZPATRICK: Do we have
`anybody on the phone?
` MR. BARKER: Before we start, as
`we took the role call -- this is Bruce
`Barker -- the only one I could really hear
`well was Dave McCombs, so I don't know where
`the microphone is placed, but if you could --
`so that I don't interrupt, before we start if
`you could place it closer to the witness,
`that would be helpful.
` MR. VU: Also, this is Robinson Vu
`with Baker, Botts for Toshiba.
`
` DR. UWE KORTSHAGEN,
` a witness in the above-entitled action,
` after having been first duly sworn, was
` deposed and says as follows:
` MR. FITZPATRICK: Before we begin,
`I just want to state on the record that
`objections made to questions apply to all
`petitioners so that we avoid duplicate
`objections. We've been doing that throughout
`the depositions, and I believe it's
`understood, but I just wanted to confirm it.
`
`Page 9
`
` DR. UWE KORTSHAGEN
` and 46 through 48 of Patent 7,811,421.
`Q. Okay.
` (Whereupon, Exhibit 1 was
` marked for identification.)
`BY MS. GRANOVSKY:
`Q. And the court reporter just handed you a
` document marked Exhibit 1. Do you recognize
` this document?
`A. I do.
`Q. What is it?
`A. It is the Patent 7,811,421.
`Q. Okay. And you have reviewed this document
` before?
`A. I have reviewed this document, yes.
`Q. Okay. And before we begin, actually, what
` have you done to prepare for this deposition?
`A. For this deposition I prepared over the
` weekend, and I -- I think I spent maybe half
` an hour to an hour yesterday evening looking
` at some documents again. That is pretty much
` what I've done.
`Q. Did you speak to counsel yesterday as well or
` did you just look at the documents?
`A. We did have -- got together for breakfast
`
`TSG Reporting - Worldwide
`(877) 702-9580
`
`3
`
`TSMC et. at. v. Zond, IPR2014-00805
`Page 3 Exhibit 2017
`
`

`

`Page 10
` DR. UWE KORTSHAGEN
` this morning. We did have some discussions
` about the deposition today.
`Q. Okay. So if you turn in your declaration to
` page 11.
`A. Yes.
`Q. To the section that says, quote, "Overview of
` the '421 patent."
`A. Yes.
`Q. It says that, "The claims of the '421 patent
` are directed to using a single voltage pulse
` to generate a so-called weakly ionized plasma
` and then a strongly ionized plasma in a
` manner that avoids arcing"; is that correct?
`A. That is correct.
`Q. What is your understanding of a single
` voltage pulse?
`A. My understanding of a single voltage pulse is
` a pulse that can have a certain waveform, for
` instance, going from a lower voltage to a
` higher voltage and then decreasing to a lower
` level again.
`Q. And is it your understanding that that single
` voltage pulse has to generate both a weakly
` ionized plasma and then a strongly ionized
`
`Page 12
` DR. UWE KORTSHAGEN
` form.
` THE WITNESS: Yeah. I mean, if
` I -- I consider a pulse to be a pulse which
` goes from a low -- let's say a low level of
` voltage to a high level of voltage, and this
` pulse maintains a weakly ionized plasma at
` the low level of voltage and then creates a
` strongly ionized plasma at the high level of
` voltage, I would say this is the same pulse
` doing this.
`BY MS. GRANOVSKY:
`Q. What is your interpretation of creating a
` weakly ionized plasma?
` MR. FITZPATRICK: Object to the
` form.
` THE WITNESS: Creating a weakly
` ionized plasma? So if we talk about the
` creation of a plasma, I would assume that we
` talk about the mechanism, which is typically
` referred to as ignition of the plasma where
` you go from a state where you do not have a
` plasma present to a state where you now have
` a plasma present.
` MS. GRANOVSKY: Okay.
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`Page 11
` DR. UWE KORTSHAGEN
` plasma from the weakly ionized plasma,
` according to this invention?
` MR. FITZPATRICK: Object to the
` form of the question.
` THE WITNESS: So this is in
` paragraph 29, a summary statement which was
` made. I'm not sure that this statement is
` applicable to each of the individual claims
` that I expect we will be discussing. So from
` that point of view, I would not overinterpret
` this summary statement, but would prefer, if
` we want to discuss the action of the voltage
` pulse creating weakly and strongly ionized
` plasma, and whether this is a single pulse,
` if we discuss that with respect to particular
` claims.
`Q. And we will do that, but --
`A. Yeah.
`Q. -- my question is, in general, if -- if a
` statement says a single pulse to generate a
` weakly ionized plasma and then a strongly
` ionized plasma, do you expect the same pulse
` to have to do both?
` MR. FITZPATRICK: Object to the
`
`Page 13
`
` DR. UWE KORTSHAGEN
`BY MS. GRANOVSKY:
`Q. Let's turn to claim 1 of the '421 patent.
`A. Yes.
`Q. Subpart B of the claim --
`A. Yes.
`Q. -- reads, "A power supply that generates a
` voltage pulse between the anode and the
` cathode assembly that creates a weakly
` ionized plasma and then a strongly ionized
` plasma from the weakly ionized plasma without
` an occurrence of arcing between the anode and
` the cathode assembly, an amplitude, a
` duration and a rise time of the voltage pulse
` being chosen to increase a density of ions in
` the strongly ionized plasma"; is that
` correct?
`A. That is correct, yes.
`Q. Is it your understanding that this claim
` limitation requires the same voltage pulse to
` create both a weakly ionized plasma and then
` a strongly ionized plasma from the weakly
` ionized plasma?
`A. Yeah, it is my understanding that this claim
` limitation talks about a voltage pulse which
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`TSG Reporting - Worldwide
`(877) 702-9580
`
`4
`
`TSMC et. at. v. Zond, IPR2014-00805
`Page 4 Exhibit 2017
`
`

`

`Page 14
` DR. UWE KORTSHAGEN
` creates a weakly ionized plasma and then
` creates -- so following the creation of a
` weakly ionized plasma, then creates a
` strongly ionized plasma from the weakly
` ionized plasma, yes.
`Q. And it is the same pulse that creates both,
` right?
`A. That is what the claim language seems to
` imply, yes.
`Q. Okay. Is it your understanding that this
` claim element requires that both the creation
` of a weakly ionized plasma and then a
` strongly ionized plasma from the weakly
` ionized plasma occurs without arcing?
` MR. FITZPATRICK: I object to the
` form of the question.
` THE WITNESS: Could you repeat the
` question, please?
` MS. GRANOVSKY: Sure.
`BY MS. GRANOVSKY:
`Q. Is it your understanding that this claim
` element requires that both the creation of a
` weakly ionized plasma and then a strongly
` ionized plasma from the weakly ionized
`
`Page 16
` DR. UWE KORTSHAGEN
` plasma and the end?
`A. Is there a comma? No.
`Q. Is there a comma -- strike that.
` Is it possible to interpret the claim as
` referring to both -- as without the --
` without an occurrence of arcing referring to
` both the creation of the weakly ionized
` plasma and then a strongly ionized plasma
` from the weakly ionized plasma?
` MR. FITZPATRICK: Object to form.
` THE WITNESS: Is it possible to
` interpret it like this? I -- I think we're
` getting into the realm of legal
` interpretation, which is not my strength. I
` think I was asked to be here for my technical
` expertise.
` But from my -- my plain reading of the
` claim language and from my understanding,
` when a pulse plasma is the highest
` probability of arcing occurs, namely, during
` the creation of the strongly ionized plasma,
` from my plain reading of the language it
` would be that the -- without occurrence of an
` arc or without occurrence of arcing, applies
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`Page 15
`
` DR. UWE KORTSHAGEN
` plasma occurs without arcing?
`A. Aha.
` MR. FITZPATRICK: Same objection.
` THE WITNESS: So you said that
` both the weakly ionized plasma -- the
` creation of the weakly ionized plasma and the
` strongly ionized plasma from the weakly
` ionized plasma occurs without arcing?
` MS. GRANOVSKY: Yes.
` THE WITNESS: You used the word
` both. I see. So if I read the claim
` language, it seems to imply that the without
` occurrence of arcing refers to the creation
` of the strongly ionized plasma from the
` weakly ionized plasma, because it says -- it
` talks about a voltage pulse that creates a
` weakly ionized plasma, and it says, "And
` then," so following that creation of the
` weakly ionized plasma it creates a strongly
` ionized plasma from the weakly ionized plasma
` without an occurrence of arcing.
` MS. GRANOVSKY: Okay.
`BY MS. GRANOVSKY:
`Q. Is there a comma between weakly ionized
`
`Page 17
` DR. UWE KORTSHAGEN
` to the creation of the strongly ionized
` plasma.
` MS. GRANOVSKY: I was actually
` looking for your plain English
` interpretation, so not the legal definition,
` so that's fine.
` THE WITNESS: Well, I think I gave
` you my plain English interpretation by
` pointing out that the claim talks about the
` creation of a weakly ionized plasma as one
` step, and then as the second step, the
` creation of a strongly ionized plasma from a
` weakly ionized plasma without occurrence of
` arcing. That was my plain English reading of
` what is described here.
`Q. As we discussed before, there is no comma
` between weakly ionized plasma and then a
` strongly ionized plasma; is that correct?
` MR. FITZPATRICK: Objection; asked
` and answered, form.
` THE WITNESS: There is indeed no
` comma, I agree.
` MS. GRANOVSKY: Okay.
`BY MS. GRANOVSKY:
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`TSG Reporting - Worldwide
`(877) 702-9580
`
`5
`
`TSMC et. at. v. Zond, IPR2014-00805
`Page 5 Exhibit 2017
`
`

`

`Page 18
` DR. UWE KORTSHAGEN
`Q. Is it your understanding that this claim
` limitation requires choosing an amplitude, a
` duration and a rise time of the voltage
` pulse?
` MR. FITZPATRICK: Objection to
` form.
` THE WITNESS: Yes, it does.
` MS. GRANOVSKY: Okay.
`BY MS. GRANOVSKY:
`Q. Can you find the Wang reference, please?
`A. Yes, I have it right here.
`Q. And have you reviewed this reference in
` connection with forming an opinion regarding
` the claims of the '421 patent?
`A. I did, yes.
`Q. Okay. If you turn to paragraph 100 in your
` declaration, that's on page 41.
`A. Yes.
`Q. It analyzes the claim limitation that creates
` a weakly ionized plasma and then a strongly
` ionized plasma from the weakly ionized
` plasma; is that correct?
`A. That is correct, yes.
`Q. And this claim limitation describes the
`
`Page 20
`
` DR. UWE KORTSHAGEN
` discloses such a voltage pulse, as explained
` in paragraphs 100 and 101 of my declaration.
`Q. Okay. Without reading them verbatim, can you
` paraphrase what -- what your opinion is how
` Wang discloses it?
`A. Yes.
` MR. FITZPATRICK: I just note
` objection to the form.
` Go ahead.
` THE WITNESS: Okay. So it's my
` understanding that Wang discloses a voltage
` pulse that creates a weakly ionized plasma by
` applying a background power, P sub B, and
` then a strongly ionized plasma from that
` weakly ionized plasma by applying a power
` P sub P.
` Is this -- is that the answer you were
` looking for?
` MS. GRANOVSKY: It's your answer.
` THE WITNESS: Okay, okay.
` MS. GRANOVSKY: If this is your
` answer, yes.
`BY MS. GRANOVSKY:
`Q. So you say that Wang discloses a voltage
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`Page 19
` DR. UWE KORTSHAGEN
` previous phrase in the claim element, which
` is, "A voltage pulse between the anode and
` the cathode assembly"; is that correct?
` MR. FITZPATRICK: I object to the
` form of the question.
` THE WITNESS: Yes, that is
` correct.
`BY MS. GRANOVSKY:
`Q. So this claim element can be read as a
` voltage pulse that creates a weakly ionized
` plasma and then a strongly ionized plasma
` from the weakly ionized plasma; is that
` correct?
` MR. FITZPATRICK: Object to the
` form of the question.
` THE WITNESS: Yes. I think you're
` correct, yes.
`BY MS. GRANOVSKY:
`Q. Is it your opinion that Wang discloses a
` single voltage pulse that both creates a
` weakly ionized plasma and then a strongly
` ionized plasma from the weakly ionized
` plasma?
`A. Yes, it is my understanding that Wang
`
`Page 21
` DR. UWE KORTSHAGEN
` pulse that creates a weakly ionized plasma
` and then that he applies power P sub P to the
` weakly ionized plasma to create the strongly
` ionized plasma; is that correct?
` MR. FITZPATRICK: Object to form.
`BY MS. GRANOVSKY:
`Q. Shall I repeat --
`A. Could you reread your question, then I can
` tell you whether I agree?
`Q. So if I understand you correctly, you say
` that Wang discloses a voltage pulse that
` creates a weakly ionized plasma, and then
` that he applies power P sub P to the weakly
` ionized plasma to create the strongly ionized
` plasma; is that correct?
` MR. FITZPATRICK: Same objection.
` THE WITNESS: Yes. I think that
` is correct, yes.
`BY MS. GRANOVSKY:
`Q. And in your opinion, the pulse that creates
` the plasma and the application of the power
` P sub P is part of the same pulse?
`A. Excuse me, Dr. Granovsky, I know it's very
` difficult with your computer, could you
`
`TSG Reporting - Worldwide
`(877) 702-9580
`
`6
`
`TSMC et. at. v. Zond, IPR2014-00805
`Page 6 Exhibit 2017
`
`

`

`Page 22
` DR. UWE KORTSHAGEN
` turn a little bit more towards me, then it
` would be easier for me to understand you.
`Q. I'm sorry.
`A. I know it's very hard to do that for you.
`Q. And in your opinion, the pulse that creates
` the plasma and the application of the power
` P sub P to the weakly ionized plasma is part
` of the same pulse?
`A. Could you -- excuse me, please reread the
` question. In my opinion --
`Q. In your opinion, the pulse that creates the
` plasma and the application of the power
` P sub P to the weakly ionized plasma is part
` of the same pulse?
`A. Just to be sure, can you -- can you specify?
` You say the pulse that creates the plasma, so
` we're talking about which plasma?
`Q. The weakly ionized plasma.
`A. The weakly ionized plasma. So the pulse that
` creates the weakly ionized plasma and then
` applies P sub P to that weakly ionized
` plasma, whether that is the same pulse?
`Q. Yes.
`A. I think this is within the framework of
`
`Page 24
` DR. UWE KORTSHAGEN
` frequency is named Tau P here that is -- I
` don't know how Wang specifically calls it. I
` think it's the pulse period, so meaning the
` time in between pulses.
` And so if we look at Figure 6, if Tau P
` is the period between pulses, then that would
` suggest a definition of the pulse as a wave
` -- part of this waveform, which includes the
` background power, P sub B, and the peak
` power, P sub P.
`BY MS. GRANOVSKY:
`Q. But isn't the pulse width actually defined as
` Tau sub W?
`A. Again, that, I think, depends on how you
` interpret that. We could also call it Tau
` sub -- Tau sub W the pulse width of the peak
` power portion of the overall pulse.
`Q. And is it your understanding -- so your
` understanding is, just so we're clear, that
` this is actually a power pulse, right?
`A. What Figure 6 shows is the power, the
` idealized power of the sequence of electrical
` pulses. So one could now equally draw a
` figure of voltage pulses or current pulses,
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`Page 23
` DR. UWE KORTSHAGEN
` this patent, the definition that we have
` adopted, that there is a pulse which includes
` a low power background power, part P sub B,
` and then a high power, peak power, part P sub
` P, yes.
`Q. What is your basis for characterizing the
` background power as a pulse?
` MR. FITZPATRICK: Object to the
` form.
` THE WITNESS: If we go to Wang's
` patent, Figure 6, so I think we discussed
` this yesterday, and I think I mentioned at
` that time that the definition of what is the
` pulse may be a little bit arbitrary, and in a
` sense, semantics whether one says there is a
` background power to which pulses are applied
` or whether there is a pulse which includes
` both the background power part and the peak
` power part. But if we look at Figure 6, I
` think it is very suggestive of assuming that
` it shows a sequence of pulses and the
` sequence of pulses appears with a certain
` frequency. And if we look at Figure 6, that
` frequency, or better, the in verse of the
`
`Page 25
`
` DR. UWE KORTSHAGEN
` because power, current and voltage are
` connected with each other.
`Q. So a person of skill in the art could draw
` the voltage pulse associated with this power
` pulse?
`A. I think so.
`Q. And a person of skill in the art could derive
` the rise time, the amplitude and the duration
` of the voltage pulse from this diagram?
`A. From Figure 6?
`Q. Yes.
`A. Let me see what we need. (Reviews document.)
` I think a person of skill in the art
` could certainly derive the duration from
` these pulses, because the duration is simply
` given by the pulse period, Tau P, or if we
` wanted to talk about duration as the duration
` of the peak power part of the pulse, it would
` be given by Tau W, Tau sub W.
` Because this is an idealized waveform, I
` believe it would be hard from this idealized
` waveform to read a rise time, so it would be
` difficult to do this from Figure 6.
` And the amplitude, yeah, again, this
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`TSG Reporting - Worldwide
`(877) 702-9580
`
`7
`
`TSMC et. at. v. Zond, IPR2014-00805
`Page 7 Exhibit 2017
`
`

`

`Page 26
` DR. UWE KORTSHAGEN
` is idealized, because it is the specification
` of Wang actually specifies that the
` difference in power is ideally a factor of
` 1,000, which is not really represented here.
` So from Figure 6 it would be difficult to
` find an amplitude.
`Q. But it is your opinion that from the
` disclosure of Wang, it would be possible to
` find the amplitude of the voltage pulse?
`A. Well, Wang discloses a power, not a voltage,
` but so Wang does not specifically disclose a
` value for the amplitude of the voltage.
`Q. Okay.
`A. I think it discloses a voltage pulse. It
` does not specifically disclose the value of
` the voltage.
`Q. Okay. Now, getting back to the issue of what
` those square pegs on Figure 6 represent, if
` you look at column 5, line 42 --
`A. Of Wang?
`Q. Of Wang.
`A. Of Wang?
`Q. Uh-huh. And it says, "The choice of pulse
` width Tau W is dictated by considerations,"
`
`Page 28
` DR. UWE KORTSHAGEN
` from the weakly ionized plasma?
` MR. TENNANT: Objection to form.
` THE WITNESS: Could you repeat the
` question, please?
` MS. GRANOVSKY: Sure.
`BY MS. GRANOVSKY:
`Q. So if we concede that the pulse is actually
` described by the width Tau W, does Figure 6,
` in your opinion, disclose a single voltage
` pulse that both creates a weakly ionized
` plasma and then a strongly ionized plasma
` from the weakly ionized plasma?
` MR. FITZPATRICK: Same objection.
` THE WITNESS: I think if someone
` just hands me Figure 6 and asks me whether
` this figure shows a train of pulses which
` create a weakly ionized plasma and then a
` strongly ionized plasma from a weakly ionized
` plasma, then I would say yes, it does
` disclose that.
`BY MS. GRANOVSKY:
`Q. That's not exactly what I asked. What I
` asked was: Does it describe a single pulse
` that creates both a weakly ionized plasma
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`Page 27
`
` DR. UWE KORTSHAGEN
` et cetera, correct?
`A. Correct.
`Q. So it doesn't describe Tau W as the peak
` power portion of the pulse; is that correct?
`A. Wang does not specifically use these words,
` that is correct.
`Q. In fact, nowhere Wang does he describe Tau W
` as the peak portion of the pulse --
`A. Aha.
`Q. -- is that correct?
`A. Well, if you're asking me that it in where in
` Wang describes this as the peak portion of
` the pulse, then at this point I cannot tell
` you that, because I really had to reread the
` patent to be sure that it nowhere describes
` it as that.
`Q. But as of right now, you can't recall --
`A. As of right now, I cannot recall that it
` would call it, that's right, yeah.
`Q. So if we concede that the pulse is actually
` described by that width Tau W, does Figure 6,
` in your opinion, disclose a single voltage
` pulse that both creates a weakly ionized
` plasma and then a strongly ionized plasma
`
`Page 29
` DR. UWE KORTSHAGEN
` and then a strongly ionized plasma from a
` weakly ionized plasma?
` MR. FITZPATRICK: Object to form,
` asked and answered.
` THE WITNESS: So Figure 6 does not
` disclose a single pulse, it discloses a
` train, a sequence of five pulses.
`BY MS. GRANOVSKY:
`Q. Let me try to get it from a different
` position.
` If the pulse is defined by its width as
` Tau W --
`A. Uh-huh.
`Q. -- does it disclose the creation of a weakly
` ionized plasma?
` MR. FITZPATRICK: Object to form.
` THE WITNESS: So you're asking
` whether if -- if the pulse were only to be
` defined by Tau W, whether in that case the
` pulse would describe the creation of a weakly
` ionized plasma; is that correct?
` MS. GRANOVSKY: Yes.
` THE WITNESS: So I'll be happy to
` answer that question, even though I don't
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`TSG Reporting - Worldwide
`(877) 702-9580
`
`8
`
`TSMC et. at. v. Zond, IPR2014-00805
`Page 8 Exhibit 2017
`
`

`

`Page 30
` DR. UWE KORTSHAGEN
` share the opinion that the pulse should
` necessarily be defined as consisting only of
` the piece that is labeled with the width
` Tau W here.
` But I think one of ordinary skill would
` understand that even if we were to adopt this
` definition, which I do not share, at the
` beginning of this pulse, there would be a
` weakly ionized plasma.
`BY MS. GRANOVSKY:
`Q. Does it --
` THE WITNESS: Which then
` transitions to a strongly ionized plasma.
` MS. GRANOVSKY: Okay. That's not
` quite what I asked, and I apologize that I
` will have to ask it again.
`BY MS. GRANOVSKY:
`Q. If the pulse is defined by its width as
` Tau W, does -- does this pulse include in it
` the creation of a weakly ionized plasma?
`A. Ah.
` MR. FITZPATRICK: Object to the
` form.
` THE WITNESS: Yeah, and again,
`
`Page 32
` DR. UWE KORTSHAGEN
` THE WITNESS: That is correct,
` yes.
`BY MS. GRANOVSKY:
`Q. So Figure 6 does not depict the event that
` creates the plasma; is that correct?
` MR. FITZPATRICK: Objection to the
` form.
` THE WITNESS: Actually, Figure 6,
` I think -- Figure 6 does not explicitly
` disclose the creation of the plasma. I think
` we added that in the annotated version of
` Figure 6, which in the declaration before me
` can be found on page 16.
` MS. GRANOVSKY: Okay.
`BY MS. GRANOVSKY:
`Q. But as Figure 6 is depicted in Wang without
` your annotation, it does not depict a single
` pulse that both creates a weakly ionized
` plasma and then a strongly ionized plasma
` from the weakly ionized plasma; is that
` correct?
` MR. FITZPATRICK: Object to form.
` THE WITNESS: So I think this --
` the creation of the plasma is disclosed in
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`1
`2
`3
`4
`5
`6
`7
`8
`9
`10
`11
`12
`13
`14
`15
`16
`17
`18
`19
`20
`21
`22
`23
`24
`25
`
`Page 31
`
` DR. UWE KORTSHAGEN
` don't share your opinion of what constitutes
` the pulse, but if we were only to look at the
` part which is the peak power part with the
` width Tau W, that would not include the
` creation of the weakly ionized plasma.
`BY MS. GRANOVSKY:
`Q. Can you identify all the evidence in Wang on
` which you rely to conclude that any portion
` of P sub B is part of the pulse?
`A. So right now as I sit here, I find that the
` most suggestive piece of that definition is
` actually Figure 6 --
`Q. Okay.
`A. -- which does show a sequence of pulses. And
` in my interpretation, these pulses include a
` part of low power P sub B, as described in my
` declaration, which is then followed by a part
` of peak

This document is available on Docket Alarm but you must sign up to view it.


Or .

Accessing this document will incur an additional charge of $.

After purchase, you can access this document again without charge.

Accept $ Charge
throbber

Still Working On It

This document is taking longer than usual to download. This can happen if we need to contact the court directly to obtain the document and their servers are running slowly.

Give it another minute or two to complete, and then try the refresh button.

throbber

A few More Minutes ... Still Working

It can take up to 5 minutes for us to download a document if the court servers are running slowly.

Thank you for your continued patience.

This document could not be displayed.

We could not find this document within its docket. Please go back to the docket page and check the link. If that does not work, go back to the docket and refresh it to pull the newest information.

Your account does not support viewing this document.

You need a Paid Account to view this document. Click here to change your account type.

Your account does not support viewing this document.

Set your membership status to view this document.

With a Docket Alarm membership, you'll get a whole lot more, including:

  • Up-to-date information for this case.
  • Email alerts whenever there is an update.
  • Full text search for other cases.
  • Get email alerts whenever a new case matches your search.

Become a Member

One Moment Please

The filing “” is large (MB) and is being downloaded.

Please refresh this page in a few minutes to see if the filing has been downloaded. The filing will also be emailed to you when the download completes.

Your document is on its way!

If you do not receive the document in five minutes, contact support at support@docketalarm.com.

Sealed Document

We are unable to display this document, it may be under a court ordered seal.

If you have proper credentials to access the file, you may proceed directly to the court's system using your government issued username and password.


Access Government Site

We are redirecting you
to a mobile optimized page.





Document Unreadable or Corrupt

Refresh this Document
Go to the Docket

We are unable to display this document.

Refresh this Document
Go to the Docket