`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`
`§ Petition for Inter Partes Review
`§
`§ Attorney Docket No.: 34789.98
`§
`§ Customer No.:
`§
`§ Real Party in Interest:
`Taiwan
`Semiconductor Manufacturing Company,
`Ltd. and TSMC North America Corp.
`
`27683
`
`§ §
`
`In re patent of: Chistyakov
`
`US. Patent No. 7,808,184
`
`Issued: October 5, 2010
`
`Title: Methods and Apparatus for
`Generating Strongly-Ionized
`Plasmas with Ionizational
`Instabilities
`
`PETITIONER POWER OF ATTORNEY PURSUANT TO 37 CFR 42.10(b)
`FOR PETITION FOR INTER PARTES REVIEW
`
`Petitioners Taiwan Semiconductor Manufacturing Company, Ltd. and TSMC North
`
`America Corp. hereby appoint the Practitioner(s) associated with Customer Number 27683, as
`
`its attorney(s) to prosecute and to transact all business in the Patent Trial & Appeal Board of the
`
`United States Patent and Trademark Office connected with Inter Partes Review of the above—
`
`identified patent.
`
`Please direct all communication regarding this Petition to Customer Number 27683:
`
`David M. O’Dell
`HAYNES AND BOONE, LLP
`2323 Victory Ave. Suite 700
`Dallas, TX 75219
`
`David L. McCombs
`HAYNES AND BOONE, LLP
`2323 Victory Ave. Suite 700
`Dallas, TX 75219
`
`Phone: (972) 739-8635
`Fax: (214) 200-0853
`david.odell.ipr@haynesboone.com
`
`(214) 651-5533
`Fax: (214) 200-0853
`davidmccombs@haynesboone.com
`
`USPTO Customer No. 27683
`USPTO Reg. No. 42,044
`
`USPTO Customer No. 27683
`USPTO Reg. No. 32,271
`
`The undersigned is authorized to Sign this Power of Attorney on behalf of the Petitioners.
`
`Taiwan Semiconductor Manufacturing
`
`TSMC North America Corp.
`
`Company, Ltd
`
`By: 2% (/Z’
`By: @/ %
`Printed NamaglaglflfiLESflEL.
`Printed Name:W
`New Titleilazuztjlm
`
`