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`Inventor: Roman CHISTYAKOV
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`Inter Panes Review of US. Patent No. 7,808,184
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`Filed:
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`Title:
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`August 18, 2006
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`Issued:
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`October 5, 2010
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`METHODS AND APPARATUS FOR GENERATING STRONGLY-IONIZED
`PLASMAS WITH IONIZATIONAL INSTABILITIES
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`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`PO. Box 1450
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`Alexandria, VA 22313-1450
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`Dear SirMadam,
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`POWER OF ATTORNEY
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`The undersigned hereby appoints the following attorneys andfor agents to prosecute the
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`above captioned Inter Par-res Review and transact all business in the US. Patent and Trademark
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`Office connected herewith: David M. Tennant (Reg. No. 48,362), and all practitioners at
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`Customer Number 106224.
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`For petitioners GLOBALFOUNDRIES U.S., Inc., GLOBALFOUNDRIES Dresden Module One
`LLC & Co. KG, and GLOBALFOUNDRIES Dresden Module Two LLC & Co. KG.
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`flit/we Ll. Lg; {an
`Name: Alexandra H. Lee
`Title: Executive Vice President & General Counsel
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`Date:
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`6’23” -i‘€
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