IN THE UNITED STATES PATENT AND TRADEMARK OFFICE
`
`Inventor: Roman CHISTYAKOV
`
`Inter Partes Review of US. Patent No. 7,81 1,421
`
`Filed:
`
`Title:
`
`July 18, 2005
`
`Issued:
`
`October 12, 2010
`
`HIGH DEPOSITION RATE SPUTTERING
`
`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
`PO. Box 1450
`
`Alexandria, VA 223 l 3-1450
`
`Dear Sin‘Madam,
`
`POWER OF ATTORNEY
`
`The undersigned hereby appoints the following attorneys andi’or agents to prosecute the
`
`above captioned Inter Par-res Review and transact all business in the US. Patent and Trademark
`
`Office connected herewith: Robinson Vu (Reg. No. 60,2] 1).
`
`For petitioners Toshiba America Electronic Components, Inc. ,Toshiba America Inc. ,Toshiba
`America Information Systems, Inc., and Toshiba Corporation.
`
`
`
`Name: Hideo Kuma
`
`0H— Me
`
`Title: General Manager,
`Intellectual Property Office,
`Technology & Innovation Division,
`Toshiba Corporation
`
`Page 2
`Page 2
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