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`Docket No.: 0110198.00194US1
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`(PATENT)
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`Inventor: Roman Chistyakov
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`Inter Partes Review of Patent No.:
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`6,896,773
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`Filed:
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`Title:
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`November 14, 2002
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`Issued: May 24, 2005
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`HIGH DEPOSITION SPUTTERING RATE
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`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
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`P.O. Box 1450
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`Alexandria, VA 22313-1450
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`Dear Sir/Madam:
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`POWER OF ATTORNEY
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`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
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`above captioned Inter Partes Review and transact all business in the U.S. Patent and Trademark
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`Office connected herewith:
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`All practitioners at Customer Number 23483.
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`Address all communications to:
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`60 State Street
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`Boston, Massachusetts 02109
`(617) 526-6000
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`Address all e—mails and telephone calls to lead and back-up counsel (each associated with the
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`above Customer Number), listed below:
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`122708521v.1
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`
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`Patent No.: 6,896,773
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`Docket No.: 0110198-00194US1
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`Michael A. Diener (Lead Counsel, PTO Reg. No. 37,122)
`Michael.Diener@_wi1merha1e.com
`Direct: 617-526-6454
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`Larissa Bifano Park (Back-up Counsel, PTO Reg. No. 59,051)
`Larissa.Park@wi1merha1e.com
`Direct: 617-526-6081
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`WILMER CUTLER PICKERING HALE AND DORR LLP
`60 State Street
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`Boston, Massachusetts 02109
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`For:
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`. The Gille
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`C_77/Dimwv-<_
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`Company
`7/
`4-«Q
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`Dated: %;\/xii
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`3! Q9{L/
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`Name: Joanne Pap
`Title: Senior Counsel
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`12270852 1 v.1