Plasma Etching
`
`A n Introduction
`
`Edited by
`
`Dennis M. Manos
`Plasma Physics Laboratory
`Princeton University
`Princeton, New Jersey
`
`Daniel L. Flamm
`A T& T Bell Laboratories
`
`Murray Hill, New Jersey
`
`
`
`Academic Press
`San Diego New York Boston
`London Sydney Tokyo Toronto
`
`£9
`
`GILLETTE 1024
`
`

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` III
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`

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`sum.
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`M
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`M
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`sum.
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`sum.
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`
`
`
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`
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`
`
`
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`
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`
`
`
`
`
`(mm
`lnI((1ng1opar1(I(appr))21((pl))(np1yn'I1))m)I(n)I)1
`I)Ii)i1u1lcMg(1()))1(1()nI(r)1eI)I)((n21)Ie)))rn)I()p1i)I1)1(Ic
`au1()2g)c1cII1sisr).11in)I.I1(I)II(12eaI(()(I1)((((I)s)()e1)I
`(im):I)))d(()()1c1z()ge))ra1)II)(s)1))q()())())))(i()n(1I)((Mg(I
`parIiI):II()r)I(()(I(I((1ng1)p()1cI(?(s)m1I()I((in)II))()I)(
`I22r1)IzI(meI()),))Ii)I1n)gs)1I(s)is
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`I=1;1=(1I+TI,
`)(1ere(i)II(:s)1aI)IIg1l(IXII’1()1)/)1)(i)I))(())s)I1I(a1)(y(I
`p:rIcIe1)1gm],qi(.)m)g(1-1IXII'1"s1a)c(III(((1ng1e(I()(Ir(((I
`)Is(1m'I(|())/)1a))II((n)(11)/(m)11II|i1ga))sI)(e)I)I()()I1)I
`)I)(1i)1u1)):g)1I(I111I))q))2I)I(.IIeno)di)))mr)IImpl)
`(a)(.)oI(I(‘s)qu(('(1(
`
`(XI
`
`gags‘
`
`III=II)IIII(IIII,I1=1
`
`II)):()pIi11(noI)c)rI)anIanII()m())a1r())1(1n(1(i(I)I)11)I)()
`((((((()()(((s((()(()((((()((I(()1))m(()((((p(((()())(
`()ar1':IeyI)sm((g(Io1)(1(I(;1I()(n())(1))rm5)g((1';II(I))))11(
`a)nI))2(;I1ep1(Ii1c)((nIIe(u)In)I)mu1)e1IIi)isIi)sp)((1IIk1I1e
`In)pI3II()(I()(I11I)9JIpI1)))IIIanIIIep1rI11g1In)))I))I1II$I1(1
`spw1anIaIs(a1c)gj)))1)))(()m1))))II)IlreI1I1('IIichI?II((mI11)
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`II))(<Ii)ec1(()gi)u
`
`Ir’
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`
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`————+
`
`1}-——> I)aI)t1)ryI )y,=0
`
`I(2I:tI1)(1(,,10
`
`
`
`(mm
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`(im):I)))d(()()1c1z()ge))ra1)II)(s)1))q()())())))(i()n(1I)((Mg(I
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`I=1;1=(1I+TI,
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`p:rIcIe1)1gm],qi(.)m)g(1-1IXII'1"s1a)c(III(((1ng1e(I()(Ir(((I
`)Is(1m'I(|())/)1a))II((n)(11)/(m)11II|i1ga))sI)(e)I)I()()I1)I
`)I)(1i)1u1)):g)1I(I111I))q))2I)I(.IIeno)di)))mr)IImpl)
`(a)(.)oI(I(‘s)qu(('(1(
`
`(XI
`
`gags‘
`
`(mm
`lnI((1ng1opar1(I(appr))21((pl))(np1yn'I1))m)I(n)I)1
`I)Ii)i1u1lcMg(1()))1(1()nI(r)1eI)I)((n21)Ie)))rn)I()p1i)I1)1(Ic
`au1()2g)c1cII1sisr).11in)I.I1(I)II(12eaI(()(I1)((((I)s)()e1)I
`(im):I)))d(()()1c1z()ge))ra1)II)(s)1))q()())())))(i()n(1I)((Mg(I
`parIiI):II()r)I(()(I(I((1ng1)p()1cI(?(s)m1I()I((in)II))()I)(
`I22r(1IzI(meI()),))Ii)I1n)gs)1I(s)is
`(II
`I=1;1=(1I+TI,
`)(1ere(i)II(:s)1aI)IIg1l(IXII’1()1)/)1)(i)I))(())s)I1I(a1)(y(I
`p:rIcIe1)1gm],qi(.)m)g(1-1IXII'1"s1a)c(III(((1ng1e(I()(Ir(((I
`)Is(1m'I(|())/)1a))II((n)(11)/(m)11II|i1ga))sI)(e)I)I()()I1)I
`)I)(1i)1u1)):g)1I(I111I))q))2I)I(.IIeno)di)))mr)IImpl)
`(a)(.)oI(I(‘s)qu(('(1(
`
`(XI
`
`III=II)IIII(IIII,I1=1
`
`III=II)IIII(IIII,I1=1
`
`II)):()pIi11(noI)c)rI)anIanII()m())a1r())1(1n(1(i(I)I)11)I)()
`((((((()()(((s((()(()((((()((I(()1))m(()((((p(((()())(
`()ar1':IeyI)sm((g(Io1)(1(I(;1I()(n())(1))rm5)g((1';II(I))))11(
`a)nI))2(;I1ep1(Ii1c)((nIIe(u)In)I)mu1)e1IIi)isIi)sp)((1IIk1I1e
`In)pI3II()(I()(I11I)9JIpI1)))IIIanIIIep1rI11g1In)))I))I1II$I1(1
`spw1anIaIs(a1c)gj)))1)))(()m1))))II)IlreI1I1('IIichI?II((mI11)
`2)2)2(f))2(225I2()I2)2()1)2'22l2)1212)E)2-1II)21)2n12I)(
`II))(<Ii)ec1(()gi)u
`
`Ir’
`(2)
`2(2)=)+))+1-M)
`)(In1ex(m1),,1(eIIIini11)-()n'I()n):)(I)-)1((:I)))II1Ipa(1cI(I
`I1(IIII)IaiI(m(m)mIinI)1rafimp2I1mI,1Im1m
`I)I)))1)ig1IIn(lI11((())keIisp1(a|)(I(IF(g1III()g1I)n)))l
`
`11)i1I|e(Ir':FI(1I
`————+
`
`1}-——> I)aI)t1)ryI )y,=0
`
`I(2I:tI1)(1(,,10
`
`II)):()pIi11(noI)c)rI)anIanII()m())a1r())1(1n(1(i(I)I)11)I)()
`((((((()()(((s((()(()((((()((I(()1))m(()((((p(((()())(
`()ar1':IeyI)sm((g(I(m(1(I(;1I()(n())(1))rm5)g((1';II(I))))11(
`a)nI))2(;I1ep1(Ii1c)((nIIe(u)In)I)mu1)e1IIi)isIi)sp)((1IIk1I1e
`In)pI3II()(I()(I11I)9JIpI1)))IIIanIIIep1rI11g1In)))I))I1II$I1(1
`spw1anIaIs(a1c)gj)))1)))(()m1))))II)IlreI1I1('IIichI?II((mI11)
`2)2)2(f))2(225I2()I2)2()1)2'22l2)1212)E)2-1II)21)2n12I)(
`II))(<Ii)ec1(()gi)u
`
`Ir’
`(2)
`2(2)=)+))+1-M)
`)(In1ex(m1),,1(eIIIini11)-()n'I()n):)(I)-)1((:I)))II1Ipa(1cI(I
`I1(IIII)IaiI(m(m)mIinI)1rafimp2I1mI,1Im1m
`I)I)))1)ig1IIn(lI11((())keIisp1(a|)(I(IF(g1III()g1I)n)))l
`
`11)i1I|e(Ir':FI(1I
`————+
`
`1}-——> I)aI)t1)ryI )y,=0
`
`I(2I:tI1)(1(,,10
`
`
`
`I91
`
`SIIIICIIH
`
`gags‘
`
`(mm
`lnI((1ng1opar1(I(appr))21((pl))(np1yn'I1))m)I(n)I)1
`I)Ii)i1u1lcMg(1()))1(1()nI(r)1eI)I)((n21)Ie)))rn)I()p1i)I1)1(Ic
`au1()2g)c1cII1sisr).11in)I.I1(I)II(12eaI(()(I1)((((I)s)()e1)I
`(im):I)))d(()()1c1z()ge))ra1)II)(s)1))q()())())))(i()n(1I)((Mg(I
`parIiI):II()r)I(()(I(I((1ng1)p()1cI(?(s)m1I()I((in)II))()I)(
`I22r1)IzI(meI()),))Ii)I1n)gs)1I(s)is
`(II
`I=1;1=(1I+TI,
`)(1ere(i)II(:s)1aI)IIg1l(IXII’1()1)/)1)(i)I))(())s)I1I(a1)(y(I
`p1('()((((m(,(((1:1))-((1))-1“((((()(((())(((()(()
`)Is(1m'I(|())/)1a))II((n)(11)/(m)11II|i1ga))sI)(e)I)I()()I1)I
`)I)(1i)1u1)):g)1I(I111I))q))2I)I(.IIeno)di)))mr)IImpl)
`(a)(.)oI(I(‘s)qu(('(1(
`
`(XI
`
`III=II)IIII(IIII,I1=1
`
`II)):()pIi11(noI)c)rI)anIanII()m())a1r())1(1n(1(i(I)I)11)I)()
`((((((()()(((s((()(()((((()((I(()1))m(()((((p(((()())(
`()ar1':IeyI)sm((g(Io1)(1(I(;1I()(n())(1))rm5)g((1';II(I))))11(
`a)nI))2(;I1ep1(Ii1c)((nIIe(u)In)I)mu1)e1IIi)isIi)sp)((1IIk1I1e
`In)pI3II()(I()(I11I)9JIpI1)))IIIanIIIep1rI11g1In)))I))I1II$I1(1
`spw1anIaIs(a1c)gj)))1)))(()m1))))II)IlreI1I1('IIichI?II((mI11)
`2)2)2(f))2(225I2()I2)2()1)2'22l2)1212)E)2-1II)21)2n12I)(
`II))(<Ii)ec1(()gi)u
`
`Ir’
`(2)
`2(2)=)+))+1-M)
`)(In1ex(m1),,1(eIIIini11)-()n'I()n):)(I)-)1((:I)))II1Ipa(1cI(I
`I1(IIII)IaiI(m(m)mIinI)1rafimp2I1mI,1Im1m
`I)I)))1)ig1IIn(lI11((())keIisp1(a|)(I(IF(g1III()g1I)n)))l
`
`11)i1I|e(Ir':FI(1I
`————+
`
`1}-——> I)aI)t1)ryI )y,=0
`
`I(2I:tI1)(1(,,10
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