References cited herein:
`
`EXHIBIT B.06
`U.S. Patent No. 7,604,716
`
` U.S. Patent No. 7,604,716 (“‘716 Patent”)
`
` D.V. Mozgrin, et al, High-Current Low-Pressure Quasi-Stationary Discharge in a
`Magnetic Field: Experimental Research, Plasma Physics Reports, Vol. 21, No. 5, 1995
`(“Mozgrin”)
`
` D.V. Mozgrin, High-Current Low-Pressure Quasi-Stationary Discharge in a Magnetic
`Field: Experimental Research, Thesis at Moscow Engineering Physics Institute, 1994
`(“Mozgrin Thesis”)
`
` Dennis M. Manos & Daniel L. Flamm, Plasma Etching: An Introduction, Academic Press
`1989 (“Manos”)
`
` Yu. P. Raizer, Gas Discharge Physics, Springer, 1991 (“Raizer”)
`
`
`
`Claims 6 and 7
`
`1. An apparatus for
`generating a
`strongly-ionized
`plasma, the
`apparatus
`comprising:
`
`a. an ionization
`source that
`generates a
`weakly-ionized
`plasma from a feed
`
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`Mozgrin and Mozgrin Thesis
`
`Mozgrin discloses an apparatus for generating a strongly-ionized plasma.
`
`‘716 Patent at claim 24 (“wherein the peak plasma density of the
`strongly-ionized plasma is greater than about 1012 cm˗3”)
`
`Mozgrin at Fig 1
`
`Mozgrin at 400, right col, ¶ 4 (“To study the high-current forms of the
`discharge, we used two types of devices: a planar magnetron and a
`system with specifically shaped hollow electrodes.”)
`
`Mozgrin at 401, right col, ¶2 (“For pre-ionization … the initial plasma
`density in the 109 – 1011 cm-3 range.”)
`
`Mozgrin at 409, left col, ¶ 4 (“The implementation of the high-current
`magnetron discharge (regime 2) in sputtering … plasma density
`(exceeding 2x1013 cm-3).”)
`
`Mozgrin at 409, left col, ¶5 (“The high-current diffuse discharge (regime
`3) is useful for producing large-volume uniform dense plasmas ni 
`1.5x1015cm-3…”).
`
`Mozgrin discloses an ionization source that generates a weakly-ionized
`plasma from a feed gas contained in a chamber.
`
`‘716 Patent at 5:14-15 (“The weakly-ionized plasma 232 is also
`referred to as a pre-ionized plasma.”)
`
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`INTEL 1021
`
`

`
`
`
`Claims 6 and 7
`
`EXHIBIT B.06
`U.S. Patent No. 7,604,716
`
`Mozgrin and Mozgrin Thesis
`
`gas contained in a
`chamber,
`
`‘716 Patent at claim 23 (“wherein the peak plasma density of the
`weakly-ionized plasma is less than about 1012 cm˗3”)
`
`Mozgrin at Figs. 1, 2, 3, 6, 7
`
`Mozgrin at 401, left col, ¶ 1 (“The [plasma] discharge had an
`annular shape and was adjacent to the cathode.”)
`
`Mozgrin at 401, left col, ¶ 4 (“[A]pplying a square voltage pulse
`to the discharge gap which was filled up with either neutral or
`pre-ionized gas.”)
`
`Mozgrin at 402, right col, ¶2 (“Figure 3 shows typical voltage
`and current oscillograms.… Part I in the voltage oscillogram
`represents the voltage of the stationary discharge (pre-ionization
`stage).”)
`
`Mozgrin at 401, right col, ¶2 (“[f]or pre-ionization, we used a
`stationary magnetron discharge; … provided the initial plasma
`density in the 109 – 1011 cm˗3 range.”)
`
`Mozgrin at 400, right col, ¶ 3 (“We investigated the discharge
`regimes in various gas mixtures at 10-3 – 10 torr…”)
`
`Mozgrin at 402, ¶ spanning left and right cols (“We studied the
`high-current discharge in wide ranges of discharge current…and
`operating pressure…using various gases (Ar, N2, SF6, and H2) or
`their mixtures of various composition…”)
`
`the weakly-ionized
`plasma
`substantially
`eliminating the
`probability of
`developing an
`electrical
`breakdown
`condition in the
`chamber; and
`
`Mozgrin discloses the weakly-ionized plasma substantially eliminating
`the probability of developing an electrical breakdown condition in the
`chamber.
`
`Mozgrin at 406, right col, ¶3 (“pre-ionization was not necessary;
`however, in this case, the probability of discharge transferring to arc
`mode increased.”).
`
`Mozgrin at Figs. 4 and 7.
`
`Mozgrin at 400, left col, ¶ 3 (“Some experiments on magnetron systems
`of various geometry showed that discharge regimes which do not transit
`to arcs can be obtained even at high currents.”) (emphasis added).
`
`Mozgrin at 400, right col, ¶ 1 (“A further increase in the discharge
`currents caused the discharges to transit to the arc regimes…”).
`
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`
`
`Claims 6 and 7
`
`EXHIBIT B.06
`U.S. Patent No. 7,604,716
`
`Mozgrin and Mozgrin Thesis
`
`Mozgrin at 404, left col, ¶ 4 (“The parameters of the shaped-electrode
`discharge transit to regime 3, as well as the condition of its transit to arc
`regime 4, could be well determined for every given set of the discharge
`parameters.”).
`
`Mozgrin at 403, left col, ¶ 2. (“Then, we studied regimes 2 and 3
`separately to determine the boundary parameters of their occurrence,
`such as current, voltage….”).
`
`Mozgrin at 400, right col, ¶ 1 (“A further increase in the discharge
`currents caused the discharges to transit to the arc regimes….”).
`
`Mozgrin 404, left col, ¶ 4 (“If the current was raised above 1.8 kA or the
`pulse duration was increase to 2 – 10 ms, an instability development and
`discharge contraction was observed.”).
`
`Background:
`Manos at 231 (“We shall … [include] information on unipolar arcs.
`These are a problem…”)
`
`Manos at 237 (“When such an arc occurs, the metal object is melted at
`the arc spot. The metal is explosively released…. How does one prevent
`such an arc? There are several methods…”)
`
`Mozgrin discloses a power supply that supplies power to the weakly-
`ionized plasma though an electrical pulse that is applied across the
`weakly-ionized plasma, the electrical pulse having at least one of a
`magnitude and a rise-time that is sufficient to transform the weakly-
`ionized plasma to a strongly-ionized plasma without developing an
`electrical breakdown condition in the chamber.
`
`‘716 Patent at claim 23 (“wherein the peak plasma density of the
`weakly-ionized plasma is less than about 1012 cm˗3”)
`
`‘716 Patent at claim 24 (“wherein the peak plasma density of the
`strongly-ionized plasma is greater than about 1012 cm˗3”)
`
`Mozgrin at Fig. 1
`
`- 3 -
`
`b. a power supply
`that supplies
`power to the
`weakly-ionized
`plasma though an
`electrical pulse
`that is applied
`across the weakly-
`ionized plasma,
`the electrical pulse
`having at least one
`of a magnitude and
`a rise-time that is
`sufficient to
`transform the
`weakly-ionized
`plasma to a
`strongly-ionized
`plasma without
`developing an
`electrical
`
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`

`
`EXHIBIT B.06
`U.S. Patent No. 7,604,716
`
`Mozgrin and Mozgrin Thesis
`
`
`
`Claims 6 and 7
`
`breakdown
`condition in the
`chamber.
`
`
`
`
`
`
`
`
`
`Mozgrin at Fig. 2
`
`Mozgrin at Fig. 3
`
`
`Mozgrin at 402, right col, ¶ 2 (“Part 1 in the voltage oscillogram
`represents the voltage of the stationary discharge (pre-ionization stage).”)
`
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`
`
`
`Claims 6 and 7
`
`EXHIBIT B.06
`U.S. Patent No. 7,604,716
`
`Mozgrin and Mozgrin Thesis
`
`Mozgrin at 401, right col, ¶ 1 (“Thus, the supply unit was made
`providing square voltage and current pulses with [rise] times (leading
`edge) of 5 – 60 µs…”).
`Mozgrin 403, right col, ¶4 (“Regime 2 was characterized by intense
`cathode sputtering…”) (emphasis added).
`Mozgrin at 409, left col, ¶ 4 (“The implementation of the high-current
`magnetron discharge (regime 2) in sputtering … plasma density
`(exceeding 2x1013 cm-3).”).
`Mozgrin at 409, left col, ¶5 (“The high-current diffuse discharge (regime
`3) is useful for producing large-volume uniform dense plasmas ni 
`1.5x1015cm-3…”)
`Mozgrin at 401, ¶ spanning left and right columns (“Designing the
`[pulsed supply] unit, we took into account the dependences which had
`been obtained in [Kudryavtsev] of ionization relaxation on pre-ionization
`parameters, pressure, and pulse voltage amplitude.”)
`Mozgrin at 400, left col, ¶ 3 (“Some experiments on magnetron systems
`of various geometry showed that discharge regimes which do not transit
`to arcs can be obtained even at high currents.”)
`Mozgrin at 400, right col, ¶ 1 (“A further increase in the discharge
`currents caused the discharges to transit to the arc regimes…”).
`Mozgrin at 401, right col, ¶2 (“For pre-ionization … the initial plasma
`density in the 109 – 1011 cm-3 range.”)
`Mozgrin at 404, left col, ¶ 3 (“The parameters of the shaped-electrode
`discharge…transit to arc regime 4, could be well determined… The point
`of the planar-magnetron discharge transit to the arc regime was
`determined by discharge voltage and structure changes...”).
`Mozgrin at 404, left col, ¶ 4 (“If the current was raised above 1.8 kA or
`the pulse duration was increase to 2 – 10 ms, an instability development
`and discharge contraction was observed.”).
`Mozgrin at Fig. 4
`
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`
`
`Claims 6 and 7
`
`EXHIBIT B.06
`U.S. Patent No. 7,604,716
`
`Mozgrin and Mozgrin Thesis
`
`Mozgrin at Fig. 7
`
`
`
`6. The apparatus of
`claim 1 wherein
`the power supply
`supplies power to
`the weakly ionized
`plasma at a time
`that is between
`about fifty
`microsecond and
`five second after
`the ionization
`source generates
`the weakly-ionized
`plasma.
`
`
`The combination of Mozgrin with the Mozgrin Thesis discloses the
`power supply supplies power to the weakly ionized plasma at a time that
`is between about fifty microsecond and five second after the ionization
`source generates the weakly-ionized plasma.
`
`See evidence cited for claim 1.
`
`Mozgrin, at 402, Fig. 3 caption, (“Fig. 3. Oscillograms of …(50 µs per
`div., …”).
`
`Mozgrin at Fig. 3.
`
`Mozgrin Thesis at Fig. 3.2.
`
`As shown in Fig. 3.2 of the Mozgrin Thesis, the non-zero voltage applied
`prior to the pulse (i.e., pre-ionization region 1) extends for slightly less
`
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`
`
`
`Claims 6 and 7
`
`EXHIBIT B.06
`U.S. Patent No. 7,604,716
`
`Mozgrin and Mozgrin Thesis
`
`than two divisions, i.e., it is approximately 80 microseconds long.
`Therefore, Mozgrin’s pulse in region 2 begins approximately 80
`microseconds after generation of the weakly-ionized plasma.
`
`It would have been obvious for one of ordinary skill to combine Mozgrin
`with the Mozgrin Thesis. Both Mozgrin and Mozgrin Thesis are written
`by the same author, address similar subject matter, and describe the same
`research. The Mozgrin Thesis merely provides additional detail for the
`material already disclosed in Mozgrin. Thus, a person of ordinary skill
`reading Mozgrin would have looked to the Mozgrin Thesis to determine
`additional details not present in Mozgrin such as the division lines shown
`in Fig. 3.2.
`The combination of Mozgrin with the Mozgrin Thesis discloses the
`power supply supplies power to the weakly ionized plasma for a duration
`that is sufficient to generate a quasi-static electric field across the
`weakly-ionized plasma.
`
`See evidence cited for claim 1.
`
`’716 Patent, 7:9-12 (“By quasi-static electric field we mean an electric
`field that has a characteristic time of electric field variation that is much
`greater than the collision time for electrons with neutral gas particles.”).
`
`Mozgrin at pp. 407-8, Tables 1 and 2
`
`7. The apparatus of
`claim 1 wherein
`the power supply
`supplies power to
`the weakly ionized
`plasma for a
`duration that is
`sufficient to
`generate a quasi-
`static electric field
`across the weakly-
`ionized plasma.
`
`
`
`
`Mozgrin, at 402, Fig. 3 caption, (“Fig. 3. Oscillograms of …(50 µs per
`
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`
`
`Claims 6 and 7
`
`EXHIBIT B.06
`U.S. Patent No. 7,604,716
`
`Mozgrin and Mozgrin Thesis
`
`div., …”)).
`Mozgrin Thesis at Fig. 3.2
`
`
`It would have been obvious for one of ordinary skill to combine Mozgrin
`with the Mozgrin Thesis. Both Mozgrin and Mozgrin Thesis are written
`by the same author, address similar subject matter, and describe the same
`research. The Mozgrin Thesis merely provides additional detail for the
`material already disclosed in Mozgrin. Thus, a person of ordinary skill
`reading Mozgrin would have looked to the Mozgrin Thesis to determine
`additional details not present in Mozgrin such as the division lines shown
`in Fig. 3.2.
`Background:
`Raizer at 11, §2.1.4 (“The collision frequency m is proportional
`to…pressure p.”).
`Raizer at Table 2.1 (“m/p = 5.3 x 109 s-1 Torr-1”)
`
`
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