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`Docket No.: 0107131-00271
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`(PATENT)
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`Inventors: Roman CHISTYAKOV
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`Inter Partes Review of Patent No.:
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`6,853,142
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`Filed:
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`Title:
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`November 4, 2002
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`Issued: February 8, 2005
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`METHODS AND APPARATUS FOR GENERATING HIGH—DENSITY
`PLASMA
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`Mail Stop PATENT BOARD
`Patent Trial and Appeal Board
`Commissioner for Patents
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`PO. Box 1450
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`Alexandria, VA 22313—1450
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`Dear Sir/Madam:
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`POWER OF ATTORNEY
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`The undersigned hereby appoints the following attorneys and/or agents to prosecute the
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`above captioned Inter Partes Review and transact all business in the US Patent and Trademark
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`Office connected herewith:
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`All practitioners at Customer Number 23483.
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`Address all communications to:
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`WILMER CUTLER PICKERING HALE AND DORR LLP
`60 State Street
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`Boston, Massachusetts 02109
`617-526-6000
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`Address all e-mails and telephone calls to lead and back-up counsel (each associated with the
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`above Customer Number), listed below:
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`124549726v.1
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`
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`Patent N0.: 6,853,142
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`Docket N0.: 0107131-00271
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`Richard A. Goldenberg (Lead Counsel, PTO Reg. No. 38,895)
`RichardGoldenber wilmerhalecom
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`Direct: 617-526-6548
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`David L. Cavanaugh (Back—up Counsel, PTO Reg. No. 36,476)
`David.Cavanaugh@wilmerhale.com
`Direct: 202-663-6025
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`WILMER CUTLER PICKERING HALE AND DORR LLP
`60 State Street
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`Boston, Massachusetts 02109
`617-526-6000
`
`For:
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`Intel Corporation
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`{gig E E
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`Name: Kimberly A. Schmitt, Reg. No. 47065
`Title: Senior Litigation Attorney
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`Dated:
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`1’ lfif/L"
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`124549726V.1
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